Screen stretching equipment of mask plate

Abstract

The utility model relates to the technical field of OLED (Organic Light Emitting Diode) panel display, in particular to mask plate net stretching equipment which comprises a mask plate strip, a mask plate frame, a welding device, a grabbing clamp, an electrostatic chuck, a first driving assembly for driving the grabbing clamp to move, a second driving assembly for driving the welding device to move and a third driving assembly for driving the electrostatic chuck to move, and the electrostatic chuck is used for pressing down and adsorbing the mask batten, so that the mask batten is adsorbed to be flat. By means of the screen stretching device, the problem of wrinkles of the mask plate strip can be effectively solved, and the problem of pixel hole position deviation in the mask plate strip in the welding process can be solved.

Description

TECHNICAL FIELD

[0001] The utility model relates to OLED panel display technical field, especially a kind of mask plate's net equipment. BACKGROUND

[0002] In OLED panel display industry, mask plate netting precision plays a decisive role to the production yield of entire panel, in netting process, the shift of pixel point is the main reason for the display panel to appear color mixing defect.Meanwhile, the netting precision of mask plate is the decisive condition for producing high-definition display panel with high pixel point.

[0003] OLED organic light emitting material is evaporated to the specified pixel point position of glass by heating source, in order to not make material evaporation to other position, industry adopts metal mask plate to shield, mask plate is mainly composed of mask plate frame and mask plate strip two parts.Mask plate frame main part is metal frame, material is generally low-expansion coefficient invar alloy, metal frame has transverse and vertical intersecting metal strip welded in the middle, and the middle area formed by transverse and vertical intersection defines the size of display screen (such as mobile phone screen size).Mask plate strip is extremely thin invar alloy, thickness is about 50um, adopts double-sided etching process to form specific arrangement matrix hole in metal film, the size of hole is about 10um-20um, contact position when mask plate strip moves is reserved at the edge of mask plate strip, and there is vertical distribution area for subsequent process welding in the middle of mask plate strip.

[0004] In mask plate manufacturing process, metal mask plate strip needs to be welded to mask plate frame in sequence, this process is called netting process.Mask plate frame is placed on equipment table, mechanical movement grab clamp moves mask plate strip to mask plate frame, then exerts a certain size of force to mask plate strip to pull and support, then drops to the height of metal strip on mask plate frame surface, and welding machine moves to the position of welding point, and mask plate strip is fixed to the metal strip on the surface of mask plate frame by laser welding.Cycle this process until the surface of entire mask plate frame is covered.

[0005] At present, the mask plate netting all adopts the above process flow, but in this process, due to the mask plate strip is particularly thin, about 50um, in the process of clamping and tensioning the mask plate strip, the mask plate strip will inevitably be wrinkled in the direction of the tensioning force, and the abnormal stretching wrinkle will cause the position of the matrix hole on the mask plate strip after the netting to be offset, in particular, in order to make the offset not cause product color deviation or mixed color defects in the evaporation process, sufficient spare position must be left for pixel definition of the circuit layer to offset the hole position offset of the mask plate netting, but such method will reduce the number of pixel points in unit area, which cannot meet the increasing requirement for high pixel of the display screen. Meanwhile, the existing netting process requires that the force applied to the mask plate strip by the clamp is extremely high, and needs to be accurate to 0.01N, such accuracy makes the yield of the netting process lower, which causes great waste of manpower, material resources and materials, and great cost.

[0006] Meanwhile, with the development of OLED panel to a larger size, the size requirement of the mask plate is also increasing, however, the larger the size is, the more the existing netting process cannot meet the existing requirement. And with the increase of the size of the panel, the size of the corresponding mask plate strip also needs to be larger, however, the etching equipment used in the manufacturing process of the mask plate strip also has a certain size limit, with the increase of the size, the cost and the defect rate of the mask plate strip will also greatly increase, when the size of the mask plate strip is larger than the size of the etching equipment, it will be impossible to manufacture. SUMMARY

[0007] To solve the above technical problems, the utility model provides a mask plate netting equipment, can effectively solve the problem of mask plate strip wrinkle, can solve the problem of pixel hole position offset of the mask plate strip in the welding process.

[0008] The utility model is through adopting the following technical scheme realizes:

[0009] A mask plate netting equipment, including mask plate strip, mask plate frame, welding device, clamp, electrostatic chuck, first drive assembly that drives clamp moves, second drive assembly that drives welding device moves and third drive assembly that drives electrostatic chuck moves, the electrostatic chuck is used for pressing down and adsorbing mask plate strip, and the mask plate strip is adsorbed flat.

[0010] The through hole is provided on the electrostatic chuck, and the through hole penetrates the thickness direction of the electrostatic chuck.

[0011] The through hole corresponds to the position of the metal strip on the mask plate frame.

[0012] The through hole is strip-shaped, and the planar size of the through hole matches the size of the welding area.

[0013] The welding device comprises a laser welding head and a welding rack, and the second driving assembly is connected with the welding rack.

[0014] The welding rack is further provided with a microscopic measuring head.

[0015] The first driving assembly, the second driving assembly and the third driving assembly are all three-dimensional motion driving assemblies.

[0016] Compared with the prior art, the welding device has the beneficial effects that:

[0017] 1. In the welding device, the third driving assembly drives the electrostatic chuck to press down, and the electrostatic chuck can adsorb the mask plate flat after being electrified, so that the problem of wrinkles of the mask plate strip during the mask plate strip tensioning process can be solved. Through the structure, the size of the mask plate strip can be only the size of a single display screen, so that the problem of the mask plate strip being too large to be manufactured with the development of large-size panels is solved, and the problem of low yield caused by the mask plate strip being too large is also avoided.

[0018] 2. In the welding device, the through hole is arranged to reserve space for the laser welding head of the welding device, so that the laser emitted by the laser welding head can pass through the through hole to fix the mask plate strip on the metal strip of the mask plate frame. During the welding process, the electrostatic chuck can continuously adsorb the mask plate strip, so that the precision of welding is improved.

[0019] 3. The through hole corresponds to the position of the metal strip on the mask plate frame, so that the positioning is more accurate, and the precision of welding is further improved.

[0020] 4. The through hole is in strip shape, the planar length of the through hole matches the size of the welding area, the welding operation process is more convenient and smooth through the constraint effect of the size of the through hole, and the size precision and position accuracy performance of the welding position after welding are significantly improved, so that the purpose of optimizing the welding quality and process control is achieved.

[0021] 5. The welding rack is further provided with a microscopic measuring head, so that the pixel hole offset of the mask plate strip can be measured after welding, and the quality after welding can be detected.

[0022] 6. The first driving assembly, the second driving assembly and the third driving assembly are all three-dimensional motion driving assemblies, so that accurate control and motion in three dimensions can be realized, the operation is more flexible, various complex task requirements can be coped with, and the work efficiency and operation accuracy are further improved. BRIEF DESCRIPTION OF DRAWINGS

[0023] The utility model will be further explained in detail in combination with the description and specific embodiment of the drawings, in which:

[0024] Figure 1 Structure diagram of the present application Figure One ;

[0025] Figure 2 Structure diagram of the present application Figure Two ;

[0026] Figure 3 Structure diagram of the present application

[0027] Markings in the figure:

[0028] 1, mask plate strip, 2, mask plate frame, 3, bearing platform, 4, microscopic measuring head, 5, first drive assembly, 6, second drive assembly, 7, electrostatic chuck, 8, third drive assembly, 9, through hole, 10, laser welding head, 11, welding rack, 12, grab. DETAILED DESCRIPTION

[0029] Example 1

[0030] As a basic embodiment of the present application, the present application comprises a mask plate netting device, comprising a mask plate strip 1, a mask plate frame 2, a welding device, a grab 12, an electrostatic chuck 7, a first drive assembly 5 for moving the grab 12, a second drive assembly 6 for moving the welding device, and a third drive assembly 8 for moving the electrostatic chuck 7. Among them, the structure, position arrangement and connection relationship of the mask plate strip 1, the mask plate frame 2, the welding device, the grab 12, the first drive assembly 5 and the second drive assembly 6 can adopt the conventional technical means in the field, and this embodiment does not improve it.

[0031] Among them, the structure of the electrostatic chuck 7 and the third drive assembly 8 can also adopt the conventional technical means in the field, as long as the third drive assembly 8 can drive the electrostatic chuck 7 to move up and down, and can drive the electrostatic chuck 7 to exit or enter the working area. Among them, driving the electrostatic chuck 7 to exit or enter the working area can be driving the electrostatic chuck 7 to move left and right or / and front and back.

[0032] When working, the grab 12 holds the mask plate strip 1, and under the drive of the first drive assembly 5, the mask plate strip 1 is placed on the surface of the mask plate frame 2, and the left and right forces are applied to tension the mask plate strip 1. The electrostatic chuck 7 is pressed down, and after the electrostatic chuck 7 is electrified, the mask plate strip 1 is adsorbed flat. After adsorbing flat, the electrostatic chuck 7 is de-energized and desorbed, and exits the working area. The welding device is driven by the second drive assembly 6 to move to the position of the welding point, and the mask plate strip 1 is fixed to the metal strip on the surface of the mask plate frame 2 by laser welding. Cycle this process until the surface of the entire mask plate frame 2 is covered.

[0033] Example 2

[0034] As a preferred embodiment of the utility model, the utility model discloses a kind of screen stretching equipment of mask plate, including mask plate strip 1, mask plate frame 2, welding device, grab 12, electrostatic chuck 7, first drive assembly 5 for driving grab 12 to move, second drive assembly 6 for driving welding device to move and third drive assembly 8 for driving electrostatic chuck 7 to move.The welding device includes laser welding head 10 and welding rack 11.

[0035] The first drive assembly 5, the second drive assembly 6 and the third drive assembly 8 are three-dimensional motion drive assemblies respectively.The three-dimensional motion drive assemblies can adopt conventional technical means in the art, for example, including Y-direction motion mechanism, X-direction motion mechanism and Z-direction motion mechanism.The X-direction motion mechanism is installed on the Y-direction motion mechanism, and the X-direction motion mechanism moves along the Y-axis direction under the drive of the Y-direction motion mechanism.The Z-direction motion mechanism is installed on the X-direction motion mechanism, and the Z-direction motion mechanism moves along the X-axis direction under the drive of the X-direction motion mechanism.The Z-direction motion mechanism is connected with the corresponding grab 12, welding rack 11 and electrostatic chuck 7 respectively, and drives the corresponding grab 12, welding rack 11 and electrostatic chuck 7 to move along the Z-axis direction.

[0036] In order to improve the welding effect, the electrostatic chuck 7 is provided with a through hole 9, the through hole 9 penetrates the thickness direction of the electrostatic chuck 7, and can be rectangular or circular.The through hole 9 corresponds to the position of the metal strip on the mask plate frame 2, and can achieve good positioning effect.The laser emitted by the laser welding head 10 passes through the through hole 9 and is fixed to the metal strip on the surface of the mask plate frame 2, and in this process, the electrostatic chuck 7 continuously adsorbs the mask plate strip 1, which can improve the accuracy of welding.After welding is completed, it is desorbed again.

[0037] Example 3

[0038] As another preferred embodiment of the utility model, refer to the description attached Figure 2 The utility model discloses a kind of screen stretching equipment of mask plate, including bearing platform 3, mask plate strip 1, mask plate frame 2, welding device, grab 12, electrostatic chuck 7, first drive assembly 5 for driving grab 12 to move, second drive assembly 6 for driving welding device to move and third drive assembly 8 for driving electrostatic chuck 7 to move, and wherein the first drive assembly 5 can be two-dimensional motion drive assembly, second drive assembly 6 is three-dimensional motion drive assembly, and third drive assembly 8 is two-dimensional motion drive assembly. Alternatively, the first drive assembly 5, the second drive assembly 6 and the third drive assembly 8 are three-dimensional motion drive assemblies respectively.

[0039] Further, in order to solve the problem that the pixel hole position on the mask plate strip 1 is easy to deviate in the welding process, a through hole 9 is arranged on the electrostatic chuck 7, the through hole 9 penetrates the thickness direction of the electrostatic chuck 7, and the through hole 9 corresponds to the position of the metal strip on the mask plate frame 2. Further, the electrostatic chuck 7 can adsorb a single display screen size mask plate strip 1.

[0040] Through the above net stretching equipment, the process of stretching the mask plate can be:

[0041] Step 1: the grab 12 pulls the single display screen size mask plate strip 1 on the loading table;

[0042] Step 2: the electrostatic chuck 7 moves above the stretched mask plate strip 1, after being lowered to the surface of the mask plate strip 1, the electrostatic chuck 7 adsorbs the mask plate strip 1, and then the force of the grab 12 is released.

[0043] Step 3: the electrostatic chuck 7 moves the mask plate strip 1 to the mask plate frame 2, after being lowered to a specific height, the welding head moves to the reserved welding groove position, that is, the corresponding through hole 9 position, and then welding is performed.

[0044] Step 4: the above process is cycled, and the entire mask plate frame 2 is welded in a single display screen manner to gradually cover the entire mask plate frame 2, and the entire mask plate stretching process is completed.

[0045] Through the above net stretching equipment, the size of the mask plate strip 1 can be only a single display screen, which solves the problem that the size of the mask plate strip 1 is too large to be manufactured with the development of large-size panels, and also avoids the problem that the size of the mask plate strip 1 is too large to cause low yield.

[0046] Embodiment 4

[0047] As the best embodiment of the present application, referring to the drawings in the specification Figure 1 The utility model discloses a kind of mask plate's net stretching equipment, including bearing platform 3, mask plate strip 1, mask plate frame 2, welding device, grab 12, electrostatic chuck 7, first drive assembly 5, second drive assembly 6 and third drive assembly 8.The bearing platform 3 can be made of marble, for fixed and bearing mask plate frame 2.The first drive assembly 5 is the moving platform of X, Y, Z direction connected with grab 12, its effect is to use the way of grab 12 clamping to move mask plate strip 1 from loading platform to mask plate frame 2 on top for welding process.

[0048] The welding apparatus includes a laser welding head 10 and a welding frame 11. The laser welding head 10 is used to weld the mask strip 1 to the metal strip of the mask frame 2. Furthermore, the welding frame 11 is also equipped with a microscopic measuring head 4, used to measure the pixel hole offset on the mask strip 1 after welding. The second driving assembly 6 drives the laser welding head 10 and the microscopic measuring head 4 to move in three dimensions.

[0049] The electrostatic chuck 7 can be constructed using conventional techniques in the field, such as by providing a dielectric adsorption layer within it and power supply electrodes within that layer, enabling electrostatic adsorption through the application or deactivation of power. Furthermore, the electrostatic chuck 7 has through holes 9, which correspond to the positions of the metal strips on the mask frame 2. Even further, the through holes 9 are strip-shaped, and their planar dimensions match the dimensions of the welding area. The planar dimensions refer to the length and width projected onto the plane of the mask frame 2. This through hole 9 provides space for the laser welding head 10, facilitating more precise welding. The third drive assembly 8 is a three-dimensional moving platform connected to the electrostatic chuck 7, capable of moving the electrostatic chuck 7 in the X, Y, and Z directions.

[0050] More specifically, the first drive component 5, the second drive component 6, and the third drive component 8 are all three-dimensional motion drive components. These three-dimensional motion drive components can employ conventional techniques in the art, such as a gantry structure, including a Y-axis mechanism, a Z-axis mechanism, an X-axis mechanism, and a controller. The Y-axis mechanism is mounted on the ground, its drive end connected to the Z-axis mechanism, and moves the Z-axis mechanism back and forth in the Y-axis direction. The Z-axis mechanism is mounted on the Y-axis mechanism and uses a gantry structure design. The X-axis mechanism is mounted on the drive end of the Z-axis mechanism, and moves the X-axis mechanism up and down. The gripper 12, welding frame 11, and electrostatic chuck 7 are respectively mounted on the drive ends of the X-axis mechanisms of their respective three-dimensional motion drive components, and the X-axis mechanisms drive the gripper 12, welding frame 11, and electrostatic chuck 7 to move back and forth in the X-axis direction. The controller is connected to the Y-axis mechanism, Z-axis mechanism, and X-axis mechanism, respectively.

[0051] Refer to the instruction manual appendix Figure 3 The following netting process can be achieved using the aforementioned netting equipment:

[0052] Step 1: After clamping the mask strip 1 with the gripper 12, place it on the surface of the mask frame 2 and apply left and right forces to pull the mask strip 1 tight;

[0053] Step 2: Press down the electrostatic chuck 7. After the electrostatic chuck 7 is powered on, it will adsorb and flatten the mask strip 1.

[0054] Step 3: the pulling force of the clamping 12 is loosened, and the laser welding head 10 is moved to a specific position and then welded;

[0055] Step 4: after the welding is completed, the micro measurement head 4 is moved to a specific position to measure the pixel hole offset on the mask plate strip 1. At the same time, the electrostatic chuck 7 is desorbed, the clamping 12 is withdrawn, and the next material taking preparation is entered.

[0056] The above process is repeated until the entire mask plate strip 1 fills the entire mask plate frame 2, and the entire mask plate screen process is completed.

[0057] In summary, after reading the utility model file, according to the technical scheme and technical concept of the utility model, other various corresponding transformation schemes made by ordinary skilled in the art without creative mental labor belong to the range protected by the utility model.

Claims

1. A mask stretching device, comprising a mask strip (1), a mask frame (2), a welding device, a gripper (12), a first driving assembly (5) for moving the gripper (12), and a second driving assembly (6) for moving the welding device; characterized in that: The electrostatic chuck (7) is used for pressing and adsorbing the mask strip (1) and adsorbing the mask strip (1) to be flat.

2. The mask lapping apparatus of claim 1, wherein: The through hole (9) is arranged on the electrostatic chuck (7) and penetrates the thickness direction of the electrostatic chuck (7).

3. The reticle tensioning apparatus of claim 2, wherein: The through hole (9) corresponds to the position of the metal strip on the mask frame (2).

4. The reticle tensioning apparatus of claim 3, wherein: The through hole (9) is in strip shape, and the planar size of the through hole (9) is matched with the size of the welding area.

5. The mask lamination apparatus according to any one of claims 1 to 4, wherein: The welding device comprises a laser welding head (10) and a welding rack (11), and the second driving assembly (6) is connected with the welding rack (11).

6. The screen tensioning apparatus of claim 5, wherein: The welding rack (11) is further provided with a microscopic measuring head (4).

7. The screen tensioning apparatus of claim 2, wherein: The first driving assembly (5), the second driving assembly (6) and the third driving assembly (8) are all three-dimensional motion driving assemblies.

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