Auxiliary device for disassembling and assembling ceramic sleeve of clamping point of graphite boat and disassembling and assembling equipment

Abstract

The utility model relates to the technical field of graphite boats, in particular to an auxiliary device for disassembling and assembling a ceramic sleeve through a clamping point of a graphite boat and disassembling and assembling equipment, and aims to solve the problems that the graphite boat needs to be completely disassembled when the ceramic sleeve is disassembled and assembled through the clamping point of the graphite boat, and much manpower and time are needed. In order to achieve the purpose, the auxiliary device comprises a telescopic driving mechanism, and the telescopic driving mechanism comprises a machine body and an output end arranged on the machine body; the supporting piece extends in the vertical direction, and the lower portion of the supporting piece is connected with the output end; the bearing part extends in the horizontal direction, and the bearing part is connected with the supporting part and can be switched between a bearing position and a non-bearing position, so that the bearing part bears the graphite boat piece at the bearing position, and the graphite boat piece is lifted along with the fact that the telescopic driving mechanism drives the supporting part to move up and down. By means of the auxiliary device, the ceramic sleeve can be rapidly and conveniently disassembled and assembled without completely disassembling the graphite boat, manpower and time are saved, and the disassembling and assembling efficiency of the ceramic sleeve is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to graphite boat technical field, specifically provide a kind of for the auxiliary device and dismounting equipment of ceramic sleeve of graphite boat's clamping point dismounting. BACKGROUND

[0002] In the silicon wafer coating process of solar cell, graphite boat is used to carry silicon wafer at high temperature, and silicon wafer is fixed to graphite boat through clamping point on graphite boat. In order to ensure that silicon wafer and graphite boat can be conducted to maintain the same potential change when normal process is carried out, clamping point needs to be protected when graphite boat is saturated. Specifically, ceramic sleeve is sleeved on the clamping point of graphite boat before graphite boat is saturated, and ceramic sleeve on clamping point is removed after graphite boat is saturated, so as to avoid deposition of silicon nitride on clamping point when graphite boat is saturated.

[0003] At present, graphite boat is cleaned by whole boat cleaning. Therefore, in order to sleeve ceramic sleeve on clamping point before graphite boat is saturated, graphite boat needs to be completely disassembled first, and then graphite boat sheet and ceramic sleeve of each layer are installed in sequence. After graphite boat is saturated, graphite boat needs to be completely disassembled, and ceramic sleeve on clamping point needs to be removed. It needs relatively more manpower, and it needs to spend more time.

[0004] Therefore, a new technical solution is needed in the art to solve the above problems. UTILITY MODEL CONTENT

[0005] The utility model aims at solving the above technical problems, i.e. solving the problem that graphite boat needs to be completely disassembled when clamping point of graphite boat dismounts ceramic sleeve, which needs more manpower and time.

[0006] In the first aspect, the utility model provides an auxiliary device for dismounting ceramic sleeve of clamping point of graphite boat, which comprises: a telescopic driving mechanism, the telescopic driving mechanism comprises a machine body and an output end arranged on the machine body; a support, the support extends vertically, and the lower part of the support is connected with the output end; a supporting piece, the supporting piece extends horizontally, and the supporting piece is connected with the support and can be switched between supporting position and non-supporting position, so that the supporting piece supports graphite boat sheet in the supporting position, and the graphite boat sheet is lifted along with the support moving up and down driven by the telescopic driving mechanism.

[0007] In the preferred technical solution of the above auxiliary device for dismounting ceramic sleeve of clamping point of graphite boat, the number of the supporting pieces is multiple, the multiple supporting pieces are distributed vertically in sequence, and the multiple supporting pieces are respectively used for supporting graphite boat sheet of corresponding height.

[0008] In the preferred technical scheme of the auxiliary device for disassembling and assembling the ceramic sleeve of the graphite boat, the support member is a support rod.

[0009] In the preferred technical scheme of the auxiliary device for disassembling and assembling the ceramic sleeve of the graphite boat, one end of the supporting member is horizontally rotatably connected with the support rod, so that the supporting member is switched between the supporting position and the non-supporting position in a rotating manner around the support rod.

[0010] In the preferred technical scheme of the auxiliary device for disassembling and assembling the ceramic sleeve of the graphite boat, the supporting member is horizontally slidably connected with the support rod, so that the supporting member is switched between the supporting position and the non-supporting position in a horizontal moving manner relative to the support rod.

[0011] In the preferred technical scheme of the auxiliary device for disassembling and assembling the ceramic sleeve of the graphite boat, a locking mechanism is arranged between the support rod and the supporting member, and the locking mechanism is used to realize the fixation and release of the support rod and the supporting member.

[0012] In the preferred technical scheme of the auxiliary device for disassembling and assembling the ceramic sleeve of the graphite boat, the number of the support rods is plural, and the same number of the supporting members is connected with each of the support rods, and the supporting members at the same height position of the plural support rods are used to jointly support the same graphite boat piece.

[0013] In the preferred technical scheme of the auxiliary device for disassembling and assembling the ceramic sleeve of the graphite boat, the supporting member is a supporting plate or a supporting rod.

[0014] In the preferred technical scheme of the auxiliary device for disassembling and assembling the ceramic sleeve of the graphite boat, the telescopic driving mechanism is a pneumatic cylinder, a hydraulic cylinder or a linear motor.

[0015] In the above technical scheme, the auxiliary device comprises: a telescopic driving mechanism, the telescopic driving mechanism comprising a machine body and an output end arranged on the machine body; a support member, the support member extending in a vertical direction, and a lower part of the support member being connected with the output end; and a supporting member, the supporting member extending in a horizontal direction, and the supporting member being connected with the support member and being switchable between a supporting position and a non-supporting position, so that the supporting member supports the graphite boat piece in the supporting position, and the supporting member lifts and lowers the graphite boat piece along with the telescopic driving mechanism driving the support member to move up and down.

[0016] When the ceramic sleeve needs to be installed, the graphite boat is laid on one side, the nuts on the top of the graphite boat are loosened, the supporting pieces of the auxiliary device are switched to the supporting position, the supporting pieces are in contact with the lower surfaces of the graphite boat pieces, the telescopic driving mechanism drives the supporting pieces to move upward by a set distance, so that the graphite boat piece and the graphite boat piece above it (if any) are lifted by a corresponding height, the distance between the graphite boat piece and the graphite boat piece below it which is not lifted increases, which meets the installation space requirement of the ceramic sleeve, at this time the ceramic sleeve on the clamping point between the two is installed, after the ceramic sleeve is installed, the telescopic driving mechanism drives the supporting pieces to move downward by a set distance, and the graphite boat piece and the graphite boat piece above it (if any) are reset. According to the operation, the graphite boat pieces above the graphite boat pieces on the lowermost layer are lifted in turn, the ceramic sleeves on the corresponding clamping points are installed, and the corresponding graphite boat pieces are reset after the ceramic sleeves are installed. After the ceramic sleeves on all clamping points are installed, the nuts on the top are tightened.

[0017] When the ceramic sleeve needs to be installed, the graphite boat is laid on one side, the nuts on the top of the graphite boat are loosened, the supporting pieces of the auxiliary device are switched to the supporting position, the supporting pieces are in contact with the lower surfaces of the graphite boat pieces, the telescopic driving mechanism drives the supporting pieces to move upward by a set distance, so that the graphite boat piece and the graphite boat piece above it (if any) are lifted by a corresponding height, the distance between the graphite boat piece and the graphite boat piece below it which is not lifted increases, which meets the installation space requirement of the ceramic sleeve, at this time the ceramic sleeve on the clamping point between the two is installed, after the ceramic sleeve is installed, the telescopic driving mechanism drives the supporting pieces to move downward by a set distance, and the graphite boat piece and the graphite boat piece above it (if any) are reset. According to the operation, the graphite boat pieces above the graphite boat pieces on the lowermost layer are lifted in turn, the ceramic sleeves on the corresponding clamping points are installed, and the corresponding graphite boat pieces are reset after the ceramic sleeves are installed. After the ceramic sleeves on all clamping points are installed, the nuts on the top are tightened.

[0018] By means of the auxiliary device for disassembling and assembling the ceramic sleeve of the clamping point of the graphite boat, the ceramic sleeve can be quickly and conveniently disassembled and assembled without completely disassembling the graphite boat, manpower and time are saved, and the disassembling and assembling efficiency of the ceramic sleeve on the clamping point of the graphite boat is improved.

[0019] Preferably, the number of supporting pieces is multiple, and the multiple supporting pieces are distributed in sequence along the vertical direction, and the multiple supporting pieces are respectively used for supporting the graphite boat pieces at corresponding heights.

[0020] When lifting a graphite boat piece, the bearing member corresponding to the height is switched from the non-supporting position to the supporting position, and other bearing members remain in the non-supporting position, and the telescopic driving mechanism drives the support to move upward by a set distance. Through such a setting, when lifting graphite boat pieces located at different positions, the telescopic driving mechanism drives the support to move upward by the same distance, compared with "only setting one supporting member, and driving the support to move upward by different distances when lifting different graphite boat pieces through the supporting member", the telescopic stroke of the telescopic driving mechanism is shortened, the operation of the telescopic driving mechanism is simplified, and the volume of the telescopic driving mechanism is reduced to a certain extent.

[0021] Preferably, the support is a support rod.

[0022] Through such a setting, the structure of the auxiliary device is simpler.

[0023] Preferably, the number of support rods is multiple, and the same number of supporting members are connected to each support rod, and the supporting members at the same height position on the multiple support rods are used to jointly support the same graphite boat piece.

[0024] Through such a setting, when supporting the graphite boat piece through the supporting member, the stability and reliability are better.

[0025] In a second aspect, the utility model also provides a dismounting equipment, the dismounting equipment includes the auxiliary device for the ceramic sleeve of the clamping point of graphite boat of any prior art and the mechanical hand for holding the ceramic sleeve.

[0026] It should be noted that the dismounting equipment has all the technical effects of the auxiliary device of any prior art, which will not be repeated here. In addition, by using the dismounting equipment to dismount the ceramic sleeve of the clamping point of the graphite boat, compared with manually dismounting the ceramic sleeve with the help of the auxiliary device, the efficiency of dismounting the ceramic sleeve is further improved. BRIEF DESCRIPTION OF DRAWINGS

[0027] The preferred embodiments of the utility model will be described below with reference to the drawings, in which:

[0028] Figure 1 is the structure diagram of the auxiliary device for the ceramic sleeve of the clamping point of graphite boat of the first embodiment of the utility model Figure 1 ;

[0029] Figure 2 is Figure 1 the enlarged view of partial A in figure 1;

[0030] Figure 3 is the structure diagram of the auxiliary device for the ceramic sleeve of the clamping point of graphite boat of the first embodiment of the utility model Figure 2 ;

[0031] Figure 4 is the structure diagram of the auxiliary device for disassembling and assembling the ceramic sleeve of the graphite boat of the second embodiment of the utility model Figure 1 ;

[0032] Figure 5 is the structure diagram of the auxiliary device for disassembling and assembling the ceramic sleeve of the graphite boat of the second embodiment of the utility model Figure 2 .

[0033] LIST OF REFERENCE NUMERALS:

[0034] 1, cylinder; 11, cylinder body; 111, first air hole; 112, second air hole; 12, telescopic rod; 2, support rod; 31, first supporting plate; 311, first sliding groove; 32, second supporting plate; 321, second sliding groove; 33, third supporting plate; 331, third sliding groove; 34, fourth supporting plate; 341, fourth sliding groove; 4, jackscrew; 5, bottom plate. DETAILED DESCRIPTION

[0035] First, those skilled in the art should understand that the embodiments described below are only used to explain the technical principles of the utility model, and are not intended to limit the protection scope of the utility model.

[0036] It should be noted that in the description of the utility model, the terms "first", "second", "third", "fourth" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0037] In addition, it should also be noted that in the description of the utility model, unless otherwise explicitly specified and limited, the term "connection" should be understood broadly, for example, it can be fixed connection, or detachable connection, or integral connection, it can be direct connection, or indirect connection. For those skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0038] Based on the problem that the graphite boat needs to be completely disassembled when disassembling and assembling the ceramic sleeve of the graphite boat mentioned in the background art, and more manpower and time are needed, the utility model provides an auxiliary device for disassembling and assembling the ceramic sleeve of the graphite boat, which comprises: a telescopic driving mechanism, the telescopic driving mechanism comprises a machine body and an output end arranged on the machine body; a support piece, the support piece extends vertically, and the lower part of the support piece is connected with the output end; a supporting piece, the supporting piece extends horizontally, and the supporting piece is connected with the support piece and can be switched between the supporting position and the non-supporting position, so that the supporting piece supports the graphite boat piece in the supporting position, and lifts the graphite boat piece with the telescopic driving mechanism driving the support piece to move up and down.

[0039] With the help of the auxiliary device for disassembling and assembling ceramic sleeves at the locking points of the graphite boat, the ceramic sleeves can be quickly and conveniently disassembled and assembled without completely disassembling the graphite boat, saving manpower and time and improving the efficiency of disassembling and assembling ceramic sleeves at the locking points of the graphite boat.

[0040] The following reference Figures 1 to 5 This utility model provides a detailed description of the auxiliary device for assembling and disassembling ceramic sleeves at key points in a graphite boat. Among other things, Figure 1 This is a schematic diagram of the structure of the auxiliary device for assembling and disassembling ceramic sleeves for graphite boats according to the first embodiment of this utility model. Figure 1 ; Figure 2 yes Figure 1 A magnified view of part A in the middle; Figure 3 This is a schematic diagram of the structure of the auxiliary device for assembling and disassembling ceramic sleeves for graphite boats according to the first embodiment of this utility model. Figure 2 ; Figure 4 This is a schematic diagram of the structure of the auxiliary device for assembling and disassembling ceramic sleeves for graphite boats according to the second embodiment of this utility model. Figure 1 ; Figure 5 This is a schematic diagram of the structure of the auxiliary device for assembling and disassembling ceramic sleeves for graphite boats according to the second embodiment of this utility model. Figure 2 .

[0041] In the first embodiment of this utility model, such as Figures 1 to 3 As shown, the auxiliary device for disassembling and assembling the ceramic sleeve at the locking point of the graphite boat includes three cylinders 1 as telescopic drive mechanisms, three support rods 2 as support members, and a first support plate 31, a second support plate 32, a third support plate 33, and a fourth support plate 34 as support members.

[0042] Each cylinder 1 includes a cylinder body 11 as the main body and a telescopic rod 12 as the output end. A piston (not shown) is slidably connected to the inner wall of the cylinder body 11, sealing it. The piston divides the internal cavity of the cylinder body 11 into a first sub-cavity (not shown) below the piston and a second sub-cavity (not shown) above the piston. A first vent hole 111 and a second vent hole 112, respectively communicating with the first and second sub-cavities, are provided on the side wall of the cylinder body 11. The first vent hole 111 and the second vent hole 112 are connected to the exhaust port of an air pump via pipes. A switching valve (not shown) is provided on the air pipes to selectively connect the exhaust port of the air pump to either the first vent hole 111 or the second vent hole 112. The lower end of the telescopic rod 12 is connected to the piston inside the cylinder body 11. The auxiliary device also includes a base plate 5. The three cylinders 1 are disposed on the same side of the base plate 5, and the cylinder body 11 of each cylinder 1 is fixedly connected to the side of the base plate 5.

[0043] The support rods 2 extend in the vertical direction, and the lower ends of the three support rods 2 are fixedly connected to the upper ends of the telescopic rods 12 of the three cylinders 1 respectively.

[0044] Each support rod 2 has four support plates arranged in sequence along the vertical direction. The support plates extend horizontally and are connected to the support rod 2. They can switch between the support position and the non-support position so that the support plate supports the graphite boat in the support position and the graphite boat is raised and lowered as the cylinder 1 drives the support rod 2 to move up and down. Specifically, each support rod 2 is provided with a first support plate 31, a second support plate 32, a third support plate 33, and a fourth support plate 34 from bottom to top. The three first support plates 31 are located at the same height on the support rod 2, the three second support plates 32 are located at the same height on the support rod 2, the three third support plates 33 are located at the same height on the support rod 2, and the three fourth support plates 34 are located at the same height on the support rod 2. The first support plates 31, the second support plates 32, the third support plates 33, and the fourth support plates 34 are used to support graphite boat sheets of corresponding heights, the three first support plates 31 are used to support the same graphite boat sheet, the three second support plates 32 are used to support the same graphite boat sheet, the three third support plates 33 are used to support the same graphite boat sheet, and the three fourth support plates 34 are used to support the same graphite boat sheet. The first support plate 31, the second support plate 32, the third support plate 33, and the fourth support plate 34 have mounting holes (not shown in the figure) near one end. These mounting holes allow them to be fitted onto the support rod 2, enabling them to be horizontally rotatably connected to the support rod 2. This allows the first support plate 31, the second support plate 32, the third support plate 33, and the fourth support plate 34 to rotate around the support rod 2 in both the supporting and non-supporting positions (see reference). Figure 3 The support positions of the first support plate 31, the second support plate 32, the third support plate 33, and the fourth support plate 34 are switched between these positions. Figure 1 The positions of the first support plate 31, the second support plate 32, the third support plate 33, and the fourth support plate 34 are as follows: the non-supporting position of the first support plate 31 is... Figure 3 The location of the first support plate 31, that is, from Figure 1 The position of the second support plate 32, the third support plate 33, and the fourth support plate 34 after rotating 90° counterclockwise (viewed from top to bottom) is the position after rotating 90° counterclockwise. The non-supporting positions of the second support plate 32, the third support plate 33, and the fourth support plate 34 are respectively from... Figure 1 The position in the middle (viewed from above) after rotating 90°.

[0045] The support rod 2 and the support plate are further provided with a locking mechanism, which is used to realize the fixing and unfixing of the support rod 2 and the support plate. Specifically, one locking mechanism is arranged between each first support plate 31 and the corresponding support rod 2, one locking mechanism is arranged between each second support plate 32 and the corresponding support rod 2, one locking mechanism is arranged between each third support plate 33 and the corresponding support rod 2, and one locking mechanism is arranged between each fourth support plate 34 and the corresponding support rod 2. The locking mechanism comprises a threaded hole (not shown in the figure) formed at a position opposite to the support rod 2 on the side edge of the support plate and a jack screw 4 screwed in the threaded hole. When the jack screw 4 is tightened, one end of the jack screw 4 is tightly pressed against the support rod 2, thereby realizing the fixing of the support plate and the support rod 2; when the jack screw 4 is loosened, one end of the jack screw 4 is loosened from the support rod 2, thereby realizing the unfixing of the support plate and the support rod 2.

[0046] For the graphite boat with five pieces of stacked graphite boat pieces, when the ceramic sleeve needs to be installed on the clamping point of the graphite boat, the graphite boat is placed on the bottom plate 5 with the bottom surface of the graphite boat piece of the first layer (the layer number counted from bottom to top, and the second layer, the third layer, the fourth layer and the fifth layer are also counted from bottom to top) of the graphite boat abutting against the bottom plate 5, and the nuts at the top of the graphite boat are loosened. The first supporting plate 31, the second supporting plate 32, the third supporting plate 33 and the fourth supporting plate 34 are switched to the supporting position respectively, and the corresponding top screws 4 are tightened to fix the first supporting plate 31, the second supporting plate 32, the third supporting plate 33 and the fourth supporting plate 34 with the supporting rods 2, the first supporting plate 31 abutting against the bottom surface of the graphite boat piece of the second layer, the second supporting plate 32 abutting against the bottom surface of the graphite boat piece of the third layer, the third supporting plate 33 abutting against the bottom surface of the graphite boat piece of the fourth layer, and the fourth supporting plate 34 abutting against the bottom surface of the graphite boat piece of the fifth layer. At this time, the air pump is controlled to introduce a certain amount of compressed air into the first sub-cavity of the three cylinders 1, the air in the second sub-cavity is discharged from the second air hole 112 to the atmosphere, the telescopic rod 12 moves upward by a preset distance along with the piston in the cylinder body 11, the three supporting rods 2 move upward by the same preset distance along with the telescopic rod 12, the three first supporting plates 31 support the graphite boat pieces of the second layer to move upward by the same preset distance, the three second supporting plates 32 support the graphite boat pieces of the third layer to move upward by the same preset distance, the three third supporting plates 33 support the graphite boat pieces of the fourth layer to move upward by the same preset distance, and the three fourth supporting plates 34 support the graphite boat pieces of the fifth layer to move upward by the same preset distance, the distance between the graphite boat piece of the second layer and the graphite boat piece of the first layer increases, meeting the installation space requirement of the ceramic sleeve, and at this time, the installer installs the ceramic sleeve on the clamping point between the two. After the ceramic sleeve is installed, the air pump is controlled to introduce a certain amount of compressed air into the second sub-cavity of the three cylinders 1, the air in the first sub-cavity is discharged from the first air hole 111 to the atmosphere, the telescopic rod 12 moves downward by a preset distance along with the piston in the cylinder body 11, the three supporting rods 2 move downward by the same preset distance along with the telescopic rod 12, and the first supporting plate 31, the second supporting plate 32, the third supporting plate 33 and the fourth supporting plate 34 move downward by the same preset distance along with the supporting rods 2, so that the lifted graphite boat pieces are reset. Next, the top screws 4 between the first supporting plate 31 and the supporting rods 2 are loosened, the fixation of the first supporting plate 31 and the supporting rods 2 is released, the three first supporting plates 31 are rotated to the non-supporting position, and the supporting rods 2 are moved upward by a preset distance according to the foregoing control steps of the cylinder 1, the graphite boat pieces of the third layer, the fourth layer and the fifth layer are lifted upward by a preset distance, the distance between the graphite boat piece of the third layer and the graphite boat piece of the second layer increases, meeting the installation space requirement of the ceramic sleeve, and at this time, the installer installs the ceramic sleeve on the clamping point between the two. After the ceramic sleeve is installed, the cylinder 1 is controlled to reset the graphite boat pieces of the third layer, the fourth layer and the fifth layer.Referring to the similar operation as aforementioned, the fourth layer and above graphite boat pieces are lifted in sequence, the fifth layer graphite boat piece is lifted and the ceramic sleeve is installed on the corresponding clamping point. After the ceramic sleeve is installed on all clamping points, the top nut is fastened.

[0047] When the ceramic sleeve needs to be disassembled, the operation of the auxiliary device is basically the same as that when the ceramic sleeve is installed, and will not be repeated here.

[0048] By means of the auxiliary device for disassembling and assembling the ceramic sleeve of the clamping point of the graphite boat, the ceramic sleeve can be quickly and conveniently disassembled and assembled without completely disassembling the graphite boat, manpower and time are saved, and the disassembly and assembly efficiency of the ceramic sleeve of the clamping point of the graphite boat is improved.

[0049] Four supporting plates are arranged on each supporting rod 2 in sequence in the up-down direction (i.e. vertical direction), when lifting different graphite boat pieces, the distance that the supporting rod 2 is driven to move upward by the cylinder 1 is the same, compared with "only one supporting plate is arranged, and the different graphite boat pieces are lifted through the supporting plate, and the cylinder 1 needs to drive the supporting plate to move upward by different distances", the telescopic stroke of the cylinder 1 is shortened, the operation of the cylinder 1 is simplified, and the volume of the cylinder 1 is reduced to a certain extent.

[0050] The auxiliary device includes three supporting rods 2 as supporting members, the same number of supporting members are connected to each supporting rod 2, and the supporting plates at the same height position on the plurality of supporting rods 2 are used to jointly support the same graphite boat piece, so that when the graphite boat piece is supported by the supporting plates, the stability and reliability are better.

[0051] In the second embodiment of the utility model, as shown in Figure 4 and Figure 5 different from the first embodiment, the first supporting plate 31, the second supporting plate 32, the third supporting plate 33 and the fourth supporting plate 34 are connected with the supporting rod 2 in a horizontally slidable manner, so that the first supporting plate 31, the second supporting plate 32, the third supporting plate 33 and the fourth supporting plate 34 are switched between the supporting position and the non-supporting position in a manner of moving horizontally relative to the supporting rod 2. Specifically, the first supporting plate 31, the second supporting plate 32, the third supporting plate 33 and the fourth supporting plate 34 are respectively formed with first sliding grooves 311, second sliding grooves 321, third sliding grooves 331 and fourth sliding grooves 341 penetrating through the thickness thereof, and the length direction of the first sliding grooves 311, the second sliding grooves 321, the third sliding grooves 331 and the fourth sliding grooves 341 is parallel to the length direction of the first supporting plate 31, the second supporting plate 32, the third supporting plate 33 and the fourth supporting plate 34. When the supporting rod 2 is located at one end of the first sliding groove 311, the second sliding groove 321, the third sliding groove 331 and the fourth sliding groove 341, the first supporting plate 31, the second supporting plate 32, the third supporting plate 33 and the fourth supporting plate 34 are located at the supporting position (as shown in Figure 4The first supporting plate 31, the second supporting plate 32, the third supporting plate 33 and the fourth supporting plate 34 are located at the supporting position when the supporting rod 2 is located at one end of the first sliding groove 311, the second sliding groove 321, the third sliding groove 331 and the fourth sliding groove 341, and are located at the non-supporting position when the supporting rod 2 is located at the other end of the first sliding groove 311, the second sliding groove 321, the third sliding groove 331 and the fourth sliding groove 341. Among them, Figure 5 The first supporting plate 31 is located at the non-supporting position of the first supporting plate 31.

[0052] It should be noted that the number of the supporting rod 2 is three, which is only a specific setting mode, and in actual application, it can be adjusted, such as one, two, four or more. When the number of the supporting rod 2 is multiple, the number of the cylinder 1 of the auxiliary device can be the same as that of the supporting rod 2, so that the cylinder 1 corresponds to the supporting rod 2 one by one and is used to drive the supporting rod 2 to move up and down, or the number of the cylinder 1 of the auxiliary device can be one, and the lower ends of multiple supporting rods 2 are connected through a connecting piece, and the telescopic rod 12 of the cylinder 1 is connected with the connecting piece, so that the multiple supporting rods 2 are driven to move up and down by one cylinder 1. In addition, the supporting rod 2 is a supporting piece, which is also a specific setting mode, and in actual application, it can be adjusted, such as in a feasible embodiment, the supporting piece is set as a supporting plate extending from bottom to top, and one end of the supporting plate is connected with one side of the supporting plate in a horizontal rotating manner. In addition, the number of the supporting plate on each supporting rod 2 in the vertical direction is four, which is only a specific setting mode, and in actual application, it can be adjusted, such as the number of the supporting plate on each supporting rod 2 in the vertical direction can be two, three, five or more; of course, only one supporting plate can be arranged on each supporting rod 2, but the telescopic rod 12 of the cylinder 1 needs to rise by different distances when lifting different graphite boat pieces.

[0053] Through such a setting, compared with the first embodiment, even in the case that the distance between the connecting rods connecting the graphite boat pieces on the graphite boat is small, the supporting plate can be conveniently switched between the supporting position and the non-supporting position, and the situation that the supporting plate is interfered by the connecting rod when the supporting plate is switched between the supporting position and the non-supporting position in a rotatable manner in the case that the distance between the connecting rods connecting the graphite boat pieces on the graphite boat is small is avoided.

[0054] It should be noted that the support member is a support plate, which is a specific arrangement, and in actual application, it can be adjusted, for example, the support member can also be a support rod extending in the horizontal direction. In addition, the locking mechanism includes a threaded hole (not shown in the figure) formed at a position opposite to the support rod 2 on the side edge of the support plate and a jack screw 4 screwed in the threaded hole, which is a specific arrangement, and in actual application, it can be adjusted, for example, the locking mechanism includes a pin shaft, a first pin hole formed at a position opposite to the support rod 2 on the side edge of the support plate, and a second pin hole formed on the support rod 2, when the support plate is horizontally rotated to the supporting position, the first pin hole is aligned with the second pin hole, at this time, the pin shaft is inserted into the first pin hole and the second pin hole, thereby realizing the fixation of the support plate and the support rod 2; the locking mechanism can also be arranged as other locking mechanisms capable of realizing the fixation and unlocking of the support plate and the support rod 2, such as a buckle mechanism. In addition, the air cylinder 1 is a telescopic driving mechanism, which is a specific arrangement, and in actual application, it can be adjusted, for example, the telescopic driving mechanism can also be arranged as a hydraulic cylinder or a linear motor.

[0055] In addition, the utility model still provides a kind of dismounting equipment (not shown in the figure), which includes the auxiliary device for the ceramic sleeve of graphite boat of any one embodiment described above and the manipulator for holding ceramic sleeve.

[0056] It should be noted that the manipulator capable of holding parts and installing is relatively mature prior art, and the structure of the manipulator of the dismounting equipment of the utility model is basically the same as that of the existing manipulator, which will not be described here. In addition, the dismounting equipment has all the technical effects of the auxiliary device of any one embodiment described above, which will not be described here. In addition, the ceramic sleeve of the graphite boat is disassembled by the dismounting equipment, and compared with manually disassembling the ceramic sleeve by means of the auxiliary device, the efficiency of disassembling the ceramic sleeve is further improved.

[0057] So far, the technical scheme of the utility model has been described in combination with the preferred embodiments shown in the drawings, but those skilled in the art can easily understand that the protection scope of the utility model is obviously not limited to these specific embodiments. Without deviating from the principles of the utility model, those skilled in the art can make equivalent changes or replacements to related technical features, and the technical scheme after these changes or replacements will fall within the protection scope of the utility model.

Claims

1. An auxiliary device for disassembling the ceramic sleeve of a graphite boat by a clamping point, characterized in that, The auxiliary device comprises: a telescopic driving mechanism comprising a body and an output end arranged on the body; a support member extending in a vertical direction, a lower part of the support member being connected to the output end; and a supporting member extending in a horizontal direction, the supporting member being connected to the support member and being switchable between a supporting position and a non-supporting position, so that the supporting member supports a graphite wafer in the supporting position and lifts the graphite wafer as the telescopic driving mechanism drives the support member to move up and down.

2. The auxiliary device for disassembling the ceramic sleeve of the graphite boat by the jacking point according to claim 1, characterized in that, The number of the supporting members is plural, and the plural supporting members are arranged in sequence in a vertical direction, and each of the plural supporting members is used for supporting a graphite wafer of a corresponding height.

3. The auxiliary device for disassembling the ceramic sleeve of the graphite boat by the jacking point according to claim 1, characterized in that, The support member is a support rod.

4. The auxiliary device for disassembling the ceramic sleeve of the graphite boat by the jacking point according to claim 3, characterized in that, One end of the supporting member is connected to the support rod in a horizontal rotatable manner, so that the supporting member is switched between the supporting position and the non-supporting position in a rotating manner around the support rod.

5. The auxiliary device for disassembling the ceramic sleeve of the graphite boat by the jacking point according to claim 3, characterized in that, The supporting member is connected to the support rod in a horizontal slidable manner, so that the supporting member is switched between the supporting position and the non-supporting position in a horizontal moving manner relative to the support rod.

6. The auxiliary device for disassembling the ceramic sleeve of the graphite boat according to claim 4 or 5, characterized in that, A locking mechanism is arranged between the support rod and the supporting member, and the locking mechanism is used for fixing and unfixing the support rod and the supporting member.

7. The auxiliary device for disassembling the ceramic sleeve of the graphite boat according to any one of claims 3 to 5, characterized in that, The number of the support rods is plural, and the same number of the supporting members is connected to each of the support rods, and the supporting members at the same height position on the plural support rods are used for jointly supporting the same graphite wafer.

8. The auxiliary device for disassembling the ceramic sleeve of the graphite boat according to any one of claims 1 to 5, characterized in that, The supporting member is a supporting plate or a supporting rod.

9. The auxiliary device for disassembling the ceramic sleeve of the graphite boat according to any one of claims 1 to 5, characterized in that, The telescopic driving mechanism is a pneumatic cylinder, a hydraulic cylinder or a linear motor.

10. A dismounting apparatus, characterized in that The dismounting device comprises the auxiliary device for dismounting the ceramic sleeve of the clamping point of the graphite wafer according to any one of claims 1 to 9 and a mechanical hand for holding the ceramic sleeve.

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