Hydrostatic bearing suitable for large double-sided grinding and polishing equipment
By adopting a hydrostatic bearing structure and hydraulic oil system in a large double-sided grinding and polishing equipment, the problem of vibration of the spindle bearing under heavy load conditions was solved, and stable rotation and high-precision machining of the workpiece were achieved.
Patent Information
- Application Number
- CN202423107755.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-16
- Publication Date
- 2025-12-19
- Estimated Expiration
- 2034-12-16
AI Technical Summary
The spindle bearings of existing large-scale grinding and polishing machines are prone to vibration under heavy loads, which leads to reduced processing accuracy of semiconductor products and instability issues in large-scale heavy-duty grinding and polishing equipment.
The structure adopts a hydrostatic bearing, including a hydrostatic bearing housing and a hydraulic oil system. Hydraulic oil is injected into the hydraulic oil groove through the hydraulic oil inlet to form an oil film to separate the journal and bearing surface, reduce frictional resistance and vibration, and utilize the vibration reduction and anti-vibration characteristics of the oil film to achieve stable rotation of the workpiece.
It improves the stability and processing accuracy of large double-sided grinding and polishing equipment, reduces starting resistance, makes the workpiece run more reliably in a suspended state, and enhances the dynamic balance of the equipment.
Smart Images
Figure CN223685133U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to static pressure bearing technical field, concretely relates to a static pressure bearing suitable for large -scale double -sided lapping and polishing equipment. BACKGROUND
[0002] With the rapid development of semiconductor industry, the stability and precision of the whole machine are required higher and higher. Originated from the strict requirement of precision machining field to workpiece thickness control, surface quality and machining precision. In the process of plane lapping and polishing, the workpiece needs to keep constant and accurate pressure contact with the lapping disc to ensure stable material removal rate and ideal surface roughness. With the progress of science and technology and the upgrading of market demand, the spindle bearing structure of lapping and polishing machine is also constantly innovated and improved to meet the demand of modern industry for high-precision and high-efficiency lapping and polishing technology. At present, the spindle bearing of the polishing machine mostly uses cross roller bearing, which is stable in medium load, but there are still hidden dangers in large heavy-duty lapping and polishing machine. It may vibrate during work, or the movement track of the lower disc forms a wave shape, which reduces the machining precision of semiconductor products and causes technical defects in production. Therefore, the utility model provides a static pressure bearing suitable for large -scale double -sided lapping and polishing equipment. SUMMARY
[0003] The utility model provides a static pressure bearing suitable for large -scale double -sided lapping and polishing equipment.
[0004] To solve the above technical problems, the utility model aims at realizing as follows:
[0005] A static pressure bearing for large -scale double -sided lapping and polishing equipment, comprising: a static pressure bearing seat, the static pressure bearing seat is in the form of a circular ring and comprises a first side wall, a first groove, a convex wall, a second groove, a convex table, a third groove and a second side wall arranged outward from the center of the circle in sequence;
[0006] The top surface of the convex table is concave to form a hydraulic oil groove, and a hydraulic oil inlet is formed in the hydraulic oil groove; the number of hydraulic oil inlets is several, and they penetrate through the static pressure bearing seat;
[0007] A static pressure bearing is arranged above the convex table; a plurality of hydraulic oil outlets are formed in the bottom of the first groove.
[0008] On the basis of the above scheme and as a preferred scheme of the above scheme, the hydraulic oil groove is in the shape of a cross.
[0009] On the basis of the above scheme and as a preferred scheme of the above scheme, the hydraulic oil inlet is located at the center position of the hydraulic oil groove.
[0010] On the basis of the above scheme and as a preferred scheme of the above scheme, the number of the hydraulic oil oil grooves is several, and the hydraulic oil oil grooves are uniformly distributed along the circumference of the static pressure bearing seat.
[0011] On the basis of the above scheme and as a preferred scheme of the above scheme, each of the hydraulic oil oil grooves corresponds to one of the hydraulic oil inlets.
[0012] On the basis of the above scheme and as a preferred scheme of the above scheme, a flow separation channel is arranged between each of the hydraulic oil oil grooves.
[0013] On the basis of the above scheme and as a preferred scheme of the above scheme, the hydraulic oil outlets are uniformly distributed along the circumference of the static pressure bearing seat.
[0014] The beneficial effects of the utility model are: the utility model works, hydraulic oil is injected into the hydraulic oil oil groove through the hydraulic oil inlet, and a large-scale disc surface with a weight of 30T can be lifted, the oil film formed separates the shaft neck and the bearing surface, the oil film has the characteristics of reducing friction resistance and damping vibration resistance, the workpiece carried thereon runs more stably and reliably when rotating, and the hydraulic oil overflowed is discharged from the hydraulic oil outlet, and a dynamic balance can be maintained through an external oil supply device. The utility model makes the lower disc of the grinding and polishing machine in a suspended state when not rotating, greatly reduces the starting resistance, and the damping vibration resistance of the oil film improves the stability during work. BRIEF DESCRIPTION OF DRAWINGS
[0015] Figure 1 It is a sectional view of the utility model.
[0016] Figure 2 It is Figure 1 A partial enlarged view.
[0017] Figure 3 It is a top view of the utility model after hiding the static pressure bearing.
[0018] Figure 4 It is Figure 3 A partial enlarged view.
[0019] In the drawing: 1, static pressure bearing seat; 11, first edge wall; 12, first groove; 13, convex wall; 14, second groove; 15, convex wall; 16, second groove; 17, second edge wall; 18, hydraulic oil oil groove; 19, hydraulic oil inlet; 110, hydraulic oil outlet; 111, flow separation channel; 2, static pressure bearing. DETAILED DESCRIPTION
[0020] With reference to the drawings of the embodiments of the present application, the technical solutions in the embodiments of the present application will be clearly and completely described; obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application, and all other embodiments obtained by those skilled in the art without creative efforts on the basis of the embodiments of the present application belong to the scope of protection of the present application.
[0021] In the description of the present application, it should be noted that the terms "upper", "lower", "inner", "outer", "top / bottom end" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second" are only for descriptive purposes and cannot be understood as indicating or implying relative importance.
[0022] As shown in Figure 1 and Figure 2 , a kind of static pressure bearing for large-scale double-sided lapping and polishing equipment, comprising: static pressure bearing seat 1, static pressure bearing seat 1 is annular structure, including by the first edge wall 11, first recess 12, convex wall 13, second recess 14, boss 15, third recess 16 and second edge wall 17 arranged outward in order from the center of circle.
[0023] Boss 15 top surface is concave and forms hydraulic oil tank 18, and boss 15 is provided with hydraulic oil inlet 19 in hydraulic oil tank 18, the number of hydraulic oil inlet 19 is several, and penetrates static pressure bearing seat 1.
[0024] Boss 15 is provided with static pressure bearing 2 above, and a plurality of hydraulic oil outlets 110 are formed in the bottom of first recess 12. Static pressure bearing 2 is annular structure, and is adaptively placed on the top surface of boss 15, and acts on boss 15 to close hydraulic oil tank 18.
[0025] As shown in Figure 3 and Figure 4 , hydraulic oil tank 18 is in the shape of a cross, and hydraulic oil inlet 19 is located at the center of cross-shaped hydraulic oil tank 18. At the same time, the number of hydraulic oil tank 18 is several, and is evenly distributed along the circumference of static pressure bearing seat 1, and each hydraulic oil tank 18 corresponds to one hydraulic oil inlet 19, so that the hydraulic oil inlet 19 is also evenly distributed along the circumference of static pressure bearing seat 1.
[0026] A partition flow channel 111 is arranged between each hydraulic oil tank 18 to facilitate the flow of hydraulic oil from the partition flow channel 111 into the recesses on both sides, so as to improve the flowability of the hydraulic oil.
[0027] Hydraulic oil outlets 110 are evenly distributed along the circumference of static pressure bearing seat 1.
[0028] Working process: when working normally, hydraulic oil enters the hydraulic oil tank 18 through the hydraulic oil inlet 19, and the heavy 30T disc surface on the static pressure bearing 2 is lifted in the sealed fitting environment formed by the static pressure bearing 2 and the static pressure bearing seat 1. Since the oil film separates the shaft neck and the bushing surface, the oil film has the characteristics of reducing friction resistance and damping vibration, so that the workpiece carried thereon rotates more stably when rotating, and the overflowed hydraulic oil is discharged from the hydraulic oil channel and the hydraulic oil outlet 110, and the dynamic balance of the hydraulic oil is maintained through the external oil supply device.
[0029] Hydraulic oil flow: injected by the hydraulic oil inlet 19, after entering the hydraulic oil tank 18, the static pressure bearing 2 is lifted, the gap between the static pressure bearing 2 and the top surface of the boss 15 is overflowed to the second groove 14 and the third groove 16, then the convex wall 13 is overflowed into the first groove 12, and finally discharged through the hydraulic oil outlet 10.
[0030] The above describes the preferred embodiments of the present application in detail. It should be understood that those skilled in the art can make many modifications and changes without creative labor according to the concept of the present application. Therefore, any technical solution obtained by logical analysis, reasoning or limited experiment on the basis of the prior art according to the concept of the present application shall be within the protection scope determined by the claims.
Claims
1. A hydrostatic bearing for a large scale double-sided lapping and polishing apparatus, characterized by, Include: The static pressure bearing seat (1); The static pressure bearing seat (1) is in the form of a circular ring, comprising a first side wall (11), a first groove (12), a convex wall (13), a second groove (14), a boss (15), a third groove (16) and a second side wall (17) arranged outward from the center of the circle in turn; The top surface of the boss (15) is concave to form a hydraulic oil groove (18), and the boss (15) is provided with a hydraulic oil inlet (19) in the hydraulic oil groove (18); The number of hydraulic oil inlets (19) is several, which penetrates the static pressure bearing seat (1); The static pressure bearing (2) is arranged above the boss (15); A plurality of hydraulic oil outlets (110) are formed in the bottom of the first groove (12).
2. The hydrostatic bearing for a large two-sided lapping and polishing apparatus according to claim 1, wherein The hydraulic oil groove (18) is in the shape of a cross.
3. The hydrostatic bearing for a large two-sided lapping and polishing apparatus according to claim 1, wherein The hydraulic oil inlet (19) is located at the center of the hydraulic oil groove (18).
4. The hydrostatic bearing for a large two-sided lapping and polishing apparatus according to claim 1, wherein The number of hydraulic oil grooves (18) is several, which are evenly distributed along the circumference of the static pressure bearing seat (1).
5. A hydrostatic bearing for a large scale double-sided lapping and polishing apparatus according to claim 4, wherein Each hydraulic oil groove (18) corresponds to one hydraulic oil inlet (19).
6. The hydrostatic bearing for a large two-sided lapping and polishing apparatus according to claim 4, wherein Each hydraulic oil groove (18) is provided with a partition flow channel (111).
7. The hydrostatic bearing for a large two-sided lapping and polishing apparatus according to claim 1, wherein The hydraulic oil outlets (110) are evenly distributed along the circumference of the static pressure bearing seat (1).