Vacuum adsorption rotating platform

Abstract

The utility model relates to the technical field of vacuum adsorption platforms, in particular to a vacuum adsorption rotating platform which comprises a base, a rotating table, a vacuum cavity and a vacuum adsorption assembly. The top end of the base is rotationally connected with a rotating seat through a driving mechanism; the turntable is mounted at the top end of the rotating seat; the multiple sets of vacuum cavities are evenly distributed in the rotary table, multiple sets of suction holes are evenly formed in the positions, located on the rotary table, of the top ends of the vacuum cavities, and the input end of the vacuum adsorption assembly is adjustably connected with the multiple sets of vacuum cavities. Through the arrangement of the vacuum cavity, the suction hole and the vacuum adsorption assembly, an adsorption area can be conveniently adjusted according to the size of a workpiece to be adsorbed, the vacuum adsorption force is prevented from being interfered, the adsorption strength is improved, and adjustment is convenient and fast; and through the arrangement of the blocking mechanism, the suction hole in the top end of the unused vacuum cavity can be conveniently blocked, and the situation that the vacuum cavity is polluted or blocked by chippings generated during workpiece machining is avoided.

Description

TECHNICAL FIELD

[0001] The utility model relates to vacuum adsorption platform technical field, specifically is a kind of vacuum adsorption rotary platform. BACKGROUND

[0002] Mechanical production process often uses adsorption platform to adsorb positioning workpiece to assist processing, the common vacuum adsorption platform on market, in the process of using, product is fixed by vacuum adsorption, subsequent by motor driving speed reducer, speed reducer drives platform rotation.

[0003] But the existing vacuum adsorption rotary platform when using, part of vacuum adsorption rotary platform cannot adjust adsorption area according to the size of workpiece, so that vacuum adsorption force is affected, still part of hollow adsorption rotary platform needs to use special tool to adjust suction hole one by one, adsorption area area adjustment is not enough convenient and fast, affect processing efficiency. INVENTION CONTENTS

[0004] The utility model aims at the problems in the background art, proposes a kind of vacuum adsorption rotary platform.

[0005] The technical scheme of the utility model: a kind of vacuum adsorption rotary platform, including base, its top end is driven rotationally connected with rotating seat by driving mechanism;Rotary table, it is installed at rotating seat top end;Vacuum cavity, it is provided with multiple groups, multiple groups of vacuum cavities are evenly distributed in rotary table interior, and multiple groups of suction holes are evenly opened in the top end of vacuum cavity and on rotary table;And vacuum adsorption assembly, its input end is adjustably connected with multiple groups of vacuum cavities, vacuum adsorption assembly is set in rotating seat interior, and the output end of vacuum adsorption assembly extends to base and is connected with external vacuum pump.

[0006] Preferably, the top end of the rotary table is evenly provided with a plurality of clamping grooves, and a rubber ring is clamped in the clamping groove.

[0007] Preferably, the vacuum adsorption assembly comprises a plurality of connection cavities, the plurality of connection cavities are arranged in the rotary table and are in communication with the bottom ends of the corresponding vacuum cavities;A first connecting pipe is connected to the output end of the connection cavity, and an electromagnetic valve is arranged on the first connecting pipe;A second connecting pipe is arranged through the bottom end of the rotating seat and extends into the inner cavity of the base, the second connecting pipe is rotatably connected to the base, a third connecting pipe is rotatably connected to the output end of the second connecting pipe, the output end of the third connecting pipe extends to the outside of the base along the inner cavity, and the other ends of the plurality of first connecting pipes are connected to the input end of the second connecting pipe.

[0008] Preferably, the second connecting pipe is composed of a T-shaped main pipe and a plurality of branch pipes, the main pipe is T-shaped, and the plurality of branch pipes are evenly arranged on the top end of the main pipe, and the first connecting pipe is connected to the input end of the branch pipe.

[0009] Preferably, the rotary table is provided with a plugging mechanism, the plugging mechanism comprises a support, which is installed at the bottom end of the rotary table; a plurality of lifting rods, which are adjustably installed on the support, are slidably connected to the rotary table and the top end of the lifting rod extends into the vacuum cavity to be installed with an annular seat, the inner wall of the annular seat is slidably connected to the inner side wall of the vacuum cavity, and a gap is arranged between the outer side wall of the annular seat and the outer side wall of the vacuum cavity; and a plurality of plugging columns, which are uniformly installed at the top end of the annular seat, are slidably inserted into the suction holes.

[0010] Preferably, the lifting rod is composed of a square tube and a screw rod connected in the square tube, the screw rod is rotatably connected to the support, the square tube is slidably connected to the rotary table, and a sealing gasket is arranged at the connection between the square tube and the vacuum cavity.

[0011] Compared with the prior art, the above technical scheme of the utility model has the following beneficial technical effects: through the arrangement of the vacuum cavity, the suction hole and the vacuum adsorption assembly, the adsorption area can be adjusted according to the size of the workpiece to be adsorbed, the vacuum adsorption force is prevented from being disturbed, the adsorption force is improved, and the adjustment is convenient and fast; through the arrangement of the plugging mechanism, the suction holes at the top end of the vacuum cavity that are not used can be plugged, and the debris generated during workpiece machining is prevented from polluting or blocking the vacuum cavity. BRIEF DESCRIPTION OF DRAWINGS

[0012] Figure 1 It is a whole structure schematic view of the utility model;

[0013] Figure 2 It is a rotary table sectional view of the utility model;

[0014] Figure 3 It is a plugging mechanism and rotary table connection mode schematic view of the utility model;

[0015] Figure 4 It is a plugging column and annular seat connection mode schematic view of the utility model.

[0016] Reference signs: 1, base; 2, rotary table; 201, rotating seat; 202, installation cavity; 203, clamping groove; 204, rubber ring; 205, driving mechanism; 3, vacuum cavity; 301, suction hole; 302, connecting cavity; 303, first connecting pipe; 304, electromagnetic valve; 305, second connecting pipe; 306, third connecting pipe; 4, support; 401, square tube; 402, screw rod; 403, annular seat; 404, plugging column. DETAILED DESCRIPTION

[0017] Example one

[0018] As Figures 1 to 3The utility model provides a kind of vacuum adsorption rotary platform, including base 1, rotary table 2, vacuum cavity 3 and vacuum adsorption assembly;Base 1 top end is rotatably connected by driving mechanism 205 drive rotating seat 201, driving mechanism 205 is by worm wheel and worm engaged connection of being installed on rotating seat 201, worm is transmission connection with motor output end;Rotary table 2 is installed at rotating seat 201 top end, and rotary table 2 bottom end is provided with installation cavity 202, and installation cavity 202 is communicated with rotating seat 201;Vacuum cavity 3 is provided with multiple groups, and multiple groups of vacuum cavity 3 are evenly distributed in rotary table 2 inside, and multiple groups of suction holes 301 are evenly provided at the top of vacuum cavity 3 and on rotary table 2, and the input end of vacuum adsorption assembly is adjustably connected with multiple groups of vacuum cavity 3, and vacuum adsorption assembly is arranged in rotating seat 201, and the output end of vacuum adsorption assembly extends to base 1 and is connected with external vacuum pump.

[0019] Further, rotary table 2 top end is evenly provided with multiple groups of clamping grooves 203, and rubber ring 204 is clamped in the inside of clamping groove 203, and the top end surface of rubber ring 204 protrudes from the top surface of rotary table 2, and when the workpiece is placed on the top of rotary table 2 and is adsorbed by vacuum, rubber ring 204 is compressed, and the sealing performance is improved by the arrangement of rubber ring 204.

[0020] Vacuum adsorption assembly includes connecting cavity 302, first connecting pipe 303 and second connecting pipe 305;Connecting cavity 302 is provided with multiple groups, and multiple groups of connecting cavity 302 are arranged in rotary table 2 inside and communicated with the bottom end of corresponding vacuum cavity 3, and the output end of multiple groups of connecting cavity 302 is communicated with installation cavity 202;First connecting pipe 303 is connected with the output end of connecting cavity 302 and is distributed in installation cavity 202, and electromagnetic valve 304 is arranged on first connecting pipe 303;Second connecting pipe 305 is arranged through the bottom end of rotating seat 201 and extends into the inner cavity of base 1, and second connecting pipe 305 is rotatably connected with base 1, and third connecting pipe 306 is rotatably connected with the output end of second connecting pipe 305, and the output end of third connecting pipe 306 extends to the outside of base 1 along the inner cavity, and the other end of multiple groups of first connecting pipe 303 is connected with the input end of second connecting pipe 305.

[0021] Further, second connecting pipe 305 is composed of T main pipe and multiple groups of branch pipes, and the main pipe is T-shaped, and the main pipe is installed at the bottom end of rotating seat 201, and the main pipe is rotatably connected with base 1, and the input end of third connecting pipe 306 is rotatably connected with the output end of main pipe, and multiple groups of branch pipes are evenly installed at the top end of main pipe, and first connecting pipe 303 is connected with the input end of branch pipe.

[0022] In this embodiment, according to the size adjustment of the workpiece to be processed, the valve port of the electromagnetic valve 304 corresponding to the required area of the vacuum cavity 3 is opened, and the valve port of the electromagnetic valve 304 corresponding to the other unused vacuum cavity 3 is kept closed. The external vacuum pump is connected with the third connecting pipe 306, the external vacuum pump is started through the controller, the air in the vacuum cavity 3 is extracted along the corresponding connecting cavity 302, the electromagnetic valve 304, the first connecting pipe 303, the second connecting pipe 305 and the third connecting pipe 306, the workpiece is placed on the top of the rotary table 2, the negative pressure is formed in the vacuum cavity 3 through the continuous air extraction of the vacuum pump, and then the workpiece is stably adsorbed on the top of the rotary table 2. Then the driving mechanism 205 is started by the controller to drive the rotating seat 201 to rotate along the base 1, so that the workpiece rotating on the top of the rotary table 2 can be processed. When the rotating seat 201 rotates along the base 1, the main pipe in the second connecting pipe 305 rotates along the base 1, and the third connecting pipe 306 is rotatably connected with the main pipe in the second connecting pipe 305, so that the third connecting pipe 306 is not interfered, and the vacuum cavity 3 can be smoothly evacuated.

[0023] Embodiment two

[0024] As Figure 3 and Figure 4 shown, a vacuum adsorption rotary platform is provided, compared with embodiment one, the rotary table 2 is provided with a plugging mechanism, the plugging mechanism comprises a support 4, a lifting rod and a plugging column 404; the support 4 is installed at the bottom end of the rotary table 2; the lifting rod is provided with a plurality of groups, the plurality of groups of lifting rods are adjustably installed on the support 4, the lifting rod is slidingly connected with the rotary table 2 and the lifting rod top end extends to the inside of the vacuum cavity 3 and is installed with an annular seat 403, the inner wall of the annular seat 403 is slidingly connected with the inner side wall of the vacuum cavity 3, and a gap is arranged between the outer side wall of the annular seat 403 and the outer side wall of the vacuum cavity 3; the plugging column 404 is provided with a plurality of groups, the plurality of groups of plugging columns 404 are uniformly installed at the top end of the annular seat 403, and the plugging column 404 is slidingly inserted with the suction hole 301.

[0025] Further, the lifting rod is composed of a square tube 401 and a screw rod 402 threaded in the square tube 401, the screw rod 402 is rotatably connected with the support 4, the square tube 401 is slidingly connected with the rotary table 2, and a sealing pad is arranged at the connection between the square tube 401 and the vacuum cavity 3 to avoid air leakage.

[0026] In the embodiment, after the plurality of groups of vacuum cavities 3 on the rotary table 2 are adjusted according to the size of the workpiece to be adsorbed, the screw rod 402 corresponding to the non-operational vacuum cavity 3 is rotated, so that the square tube 401 slides along the screw rod 402 and the rotary table 2 into the vacuum cavity 3, thereby driving the annular seat 403 to slide upward along the inner wall of the vacuum cavity 3 until the plurality of blocking columns 404 block the suction holes 301 at the top end of the vacuum cavity 3, thereby avoiding the debris generated during the machining of the workpiece at the top end of the rotary table 2 from entering the vacuum cavity 3 through the unblocked suction holes 301 to cause pollution or blockage, and the debris at the top end of the rotary table 2 can be cleaned after the machining is completed.

[0027] The embodiments of the utility model are described in detail above in combination with the drawings, but the utility model is not limited to this, various changes can be made within the knowledge range possessed by the technical personnel in the technical field without departing from the purpose of the utility model.

Claims

1. A vacuum suction rotary platform, characterized by, The utility model relates to a rotary vacuum adsorption device for semiconductor wafer cleaning Base (1), its top end is driven rotationally connected with rotary seat (201) through drive mechanism (205); Rotary table (2), it is installed at rotary seat (201) top end; Vacuum cavity (3) is provided with multiple groups, multiple groups of vacuum cavity (3) are evenly distributed in rotary table (2) inside, and multiple groups of suction holes (301) are evenly opened at the top of vacuum cavity (3) and on rotary table (2); And vacuum adsorption assembly, its input end is adjustably connected with multiple groups of vacuum cavity (3), vacuum adsorption assembly is arranged in rotary seat (201) inside, and the output end of vacuum adsorption assembly extends to base (1) and is connected with external vacuum pump.

2. The vacuum suction rotary platform according to claim 1, wherein, Rotary table (2) top end evenly opens multiple groups of clamping grooves (203), and rubber ring (204) is clamped in clamping groove (203) inside.

3. The vacuum suction rotary platform according to claim 1, wherein, Vacuum adsorption assembly includes Connecting cavity (302) is provided with multiple groups, and multiple groups of connecting cavities (302) are arranged in rotary table (2) inside and are communicated with the bottom end of corresponding vacuum cavity (3); First connecting pipe (303) is connected with the output end of connecting cavity (302), and electromagnetic valve (304) is arranged on first connecting pipe (303); And second connecting pipe (305) is arranged through the bottom end of rotary seat (201) and extends to the inner chamber of base (1), and second connecting pipe (305) is rotationally connected with base (1), and third connecting pipe (306) is rotationally connected with the output end of second connecting pipe (305), and the output end of third connecting pipe (306) extends to the outside of base (1) along the inner chamber, and the other end of multiple groups of first connecting pipes (303) is connected with the input end of second connecting pipe (305).

4. The vacuum suction rotary platform according to claim 3, wherein, Second connecting pipe (305) is composed of T main pipe and multiple groups of branch pipes, the main pipe is provided with T shape, and multiple groups of branch pipes are evenly installed on the top of the main pipe, and first connecting pipe (303) is connected with the input end of the branch pipe.

5. The vacuum suction rotary platform according to claim 1, wherein, Rotary table (2) is provided with a plugging mechanism, and the plugging mechanism includes Support (4) is installed at the bottom end of rotary table (2); Multiple groups of lifting rods are adjustably installed on support (4), and the lifting rods are slidingly connected with rotary table (2) and have annular seat (403) installed at the top end extending into vacuum cavity (3), the inner side wall of annular seat (403) is slidingly connected with the inner side wall of vacuum cavity (3), and a gap is arranged between the outer side wall of annular seat (403) and the outer side wall of vacuum cavity (3); And multiple groups of plugging columns (404) are evenly installed on the top end of annular seat (403), and plugging column (404) is slidingly inserted with suction hole (301).

6. A vacuum suction rotary platform according to claim 5, wherein, The lifting rod is composed of square tube (401) and screw rod (402) screwing in the square tube (401), screw rod (402) is rotationally connected with support (4), square tube (401) is slidingly connected with rotary table (2), and sealing pad is arranged at the connection between square tube (401) and vacuum cavity (3).

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