Protective device for circular packaging of silicon wafers

Abstract

The utility model discloses a silicon wafer circulation packaging protection device which comprises a silicon wafer protection box and a box cover used for sealing an opening in the top of the silicon wafer protection box, a storage rack is fixedly connected in the silicon wafer protection box, a plurality of silicon wafer containing cavities are formed in the storage rack, retention protection structures are installed in the silicon wafer containing cavities, and the silicon wafer containing cavities are connected with the box cover. According to the silicon wafer storage rack, silicon wafers are placed in the silicon wafer containing cavity of the storage rack in the silicon wafer protection box through the retention protection structure, the silicon wafers are connected with the inflation and deflation valve through the inflation tool, the inflation tool works to inflate air into the inflation bags from the communicating pipe and the air pipe, the silicon wafers are stored in the silicon wafer storage rack, and the silicon wafer storage rack is convenient to use. When the silicon wafers are transported, the inflatable bag is expanded, and the expanded inflatable bag seals the gap between the silicon wafer containing cavity and the silicon wafers, so that the silicon wafers are limited and fixed in the silicon wafer containing cavity, the silicon wafers are prevented from being bumped, shaken and collided during transportation, and the inflatable bag can play a better role in protecting the silicon wafers.

Description

TECHNICAL FIELD

[0001] The utility model relates to silicon wafer packaging protection technical field, concretely is a kind of silicon wafer circulation packaging protection device. BACKGROUND

[0002] Silicon wafer is a kind of thin and flat circular silicon matrix material, also known as wafer, is important raw material for manufacturing chip and various semiconductor devices, when silicon wafer product is transferred, packaging protection device is needed to store and protect silicon wafer for transfer.

[0003] Through the retrieval, China patent publication No. CN213503678U discloses a packaging protection device for polycrystalline silicon wafer transfer, which comprises a box body and universal wheels, a first support frame is welded on the inner wall right side of the box body from top to bottom at equal intervals, and a first limiting groove is formed in one of the first support frames, a limiting hole is formed in the left side of the box body, and a screw rod is transversely inserted into the limiting hole, a rotating handle is welded to the left end of the screw rod, a support plate is sleeved on the screw rod, and a second support frame is welded to the right side of the support plate at equal intervals.

[0004] In the above technical solution, the silicon wafer is placed between the first support frame and the second support frame, and then the distance between the second support frame and the first support frame is adjusted to clamp and limit the silicon wafer, but the distance control of the first support frame and the second support frame needs to be grasped with high precision, when the distance between the first support frame and the second support frame is large, the fixing effect of the silicon wafer is poor, and the silicon wafer may be damaged by collision during transportation, when the distance between the first support frame and the second support frame is small, the silicon wafer may be damaged by excessive extrusion, therefore, it is urgent to design a silicon wafer circulation packaging protection device to solve the above problems. UTILITY MODEL CONTENTS

[0005] In view of the deficiencies of the prior art, the utility model aims to provide a silicon wafer circulation packaging protection device, which aims to solve the problems that the silicon wafer packaging protection device in the prior art is prone to poor fixing effect of silicon wafer, and the silicon wafer may be damaged by collision during transportation, or the silicon wafer may be damaged by excessive extrusion.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical scheme:

[0007] A silicon wafer circulation packaging protection device, comprising a silicon wafer protection box and a box cover for closing the top opening of the silicon wafer protection box, a storage rack is fixedly connected inside the silicon wafer protection box, a plurality of silicon wafer storage cavities are formed inside the storage rack, a retention protection structure is installed in the silicon wafer storage cavity, and a locking structure is arranged between the two ends of the box cover and the silicon wafer protection box;

[0008] The retaining protection structure comprises air bags fixedly connected to the two sides inside the silicon wafer storage cavity, one side of the air bag close to the inner wall of the silicon wafer protection box is fixedly connected with an air pipe, the air pipes on all the air bags are connected through a communication pipe, and one end of the communication pipe extends to the outside of the silicon wafer protection box and is fixedly connected with a gas charging and discharging valve.

[0009] Preferably, the top of the storage rack is provided with a clearance slot on both sides of the silicon wafer storage cavity.

[0010] Preferably, the locking structure comprises a movable clamping block, the bottom of the box cover is provided with a mounting groove, the movable clamping block is slidingly installed in the mounting groove, an elastic member is fixedly connected between one end of the movable clamping block and the inner wall of the mounting groove, the locking structure further comprises a fixed clamping block fixedly connected to the top of the silicon wafer protection box and corresponding to the movable clamping block, a clamping groove is formed in the movable clamping block for clamping the fixed clamping block, and the contact surfaces of the movable clamping block and the fixed clamping block are inclined surfaces for cooperation sliding.

[0011] Preferably, the bottom of the box cover is provided with an avoiding groove in communication with the mounting groove, the avoiding groove is used for accommodating the fixed clamping block, the top of the box cover is provided with a recess corresponding to the movable clamping block, a waist-shaped through groove is formed between the recess and the mounting groove, a pushing rod is fixedly connected to the top of the movable clamping block and passes through the waist-shaped through groove, the pushing rod is in L-shaped structure, one end of the pushing rod extends to the outside of the box cover, and the pushing rod is not higher than the upper surface of the box cover.

[0012] Preferably, the top of the box cover is provided with a plurality of positioning recesses, and the bottom of the silicon wafer protection box is fixedly connected with positioning protrusions which are inserted into the positioning recesses.

[0013] Preferably, the top of the box cover is provided with a plurality of positioning recesses, and the bottom of the silicon wafer protection box is fixedly connected with positioning protrusions which are inserted into the positioning recesses.

[0014] Preferably, the bottom of the box cover is provided with a plurality of positioning recesses, and the bottom of the silicon wafer protection box is fixedly connected with positioning protrusions which are inserted into the positioning recesses.

[0015] Compared with the prior art, the utility model has the advantages that:

[0016] 1、The utility model discloses a retaining protection structure, which is used for placing silicon wafers in the silicon wafer storage cavity of the storage rack in the silicon wafer protection box, connecting the inflation tool with the gas charging and discharging valve, inflating the air bags in the silicon wafer storage cavity through the inflation tool, and inflating the air bags to fix the silicon wafers in the silicon wafer storage cavity, so that the silicon wafers are prevented from being shaken, collided and damaged during transportation.

[0017] 2. The utility model discloses a locking structure is set up, and the box cover is fixed with the silicon wafer protection box automatic locking through the locking structure, prevents in the transportation process, and the box cover opens through the jolt of shaking, improves the protection effect of silicon wafer transportation.

[0018] 3. The utility model discloses a positioning groove and positioning boss are set up, in the transportation process, the positioning boss of upper protection device is clamped into the positioning groove of lower protection device, is used for the stacking of multiple protection devices, prevents multiple protection devices stacking when misplacement collapse. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 It is whole structure schematic diagram for silicon wafer circulation packaging protection device Figure One ;

[0020] Figure 2 It is whole structure schematic diagram for silicon wafer circulation packaging protection device Figure Two ;

[0021] Figure 3 It is internal structure diagram for silicon wafer protection box;

[0022] Figure 4 It is structure schematic diagram for retaining protection structure;

[0023] Figure 5 It is structure schematic diagram for locking structure;

[0024] Figure 6 It is structure schematic diagram for the upper part locking structure of box cover Figure One ;

[0025] Figure 7 It is structure schematic diagram for the upper part locking structure of box cover Figure Two .

[0026] In the drawing: 1, silicon wafer protection box;11, positioning boss;12, positioning hole;2, box cover;21, positioning groove;22, positioning column;23, installation slot;24, avoid slot;25, recess;26, waist type through slot;3, storage rack;31, silicon wafer storage cavity;4, retaining protection structure;41, inflation bag;42, air pipe;43, communication pipe;44, inflation and deflation valve;5, locking structure;51, moving clamping block;511, clamping groove;52, elastic part;53, push rod;54, fixed clamping block. DETAILED DESCRIPTION

[0027] Clearly, the described embodiments are merely a part of the embodiments of the present application, rather than all the embodiments, and based on the embodiments of the present application, all the other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the present application.

[0028] Embodiment:

[0029] Please refer to Figures 1-7 , the embodiment provides a kind of silicon wafer circulation packaging protection device, including silicon wafer protection box 1 and the box cover 2 for closing the top opening of silicon wafer protection box 1, it is characterized by: the inside fixed connection of silicon wafer protection box 1 has storage rack 3, multiple silicon wafer storage cavities 31 are formed in storage rack 3, silicon wafer storage cavity 31 is installed with retaining protection structure 4, locking structure 5 is arranged between the both ends of box cover 2 and silicon wafer protection box 1, when using, box cover 2 is opened, then silicon wafer is placed in the silicon wafer storage cavity 31 of storage rack 3, the gap between silicon wafer storage cavity 31 and silicon wafer is filled by retaining protection structure 4, the position of silicon wafer is fixed, prevent silicon wafer from shaking in silicon wafer storage cavity 31, then box cover 2 is capped at the top opening of silicon wafer protection box 1, and box cover 2 and silicon wafer protection box 1 are automatically locked and fixed by locking structure 5, prevent box cover 2 from opening by jolt shaking in the process of transportation, improve the protection effect of silicon wafer transportation.

[0030] In the embodiment, as shown in Figure 3 And Figure 4 , retaining protection structure 4 includes inflatable bag 41 fixedly connected to both sides of the inside of silicon wafer storage cavity 31, inflatable bag 41 is fixedly connected with air pipe 42 on the side close to the inner wall of silicon wafer protection box 1, air pipe 42 on all inflatable bags 41 is connected through communication pipe 43, one end of communication pipe 43 extends to the outside of silicon wafer protection box 1 and is fixedly connected with inflation valve 44, inflation tool is connected with inflation valve 44, inflation tool works to fill gas into each inflatable bag 41 from communication pipe 43 and air pipe 42, so that inflatable bag 41 expands, inflatable bag 41 expands to close the gap between silicon wafer storage cavity 31 and silicon wafer, so as to limit and fix silicon wafer in silicon wafer storage cavity 31, avoid jolt shaking and collision in transportation, and inflatable bag 41 can play a good protection role on silicon wafer, when taking out silicon wafer in silicon wafer protection box 1, inflation tool is connected with inflation valve 44, and the gas in inflatable bag 41 is extracted, in the embodiment, accommodating groove is arranged at the outside of silicon wafer protection box 1 at inflation valve 44, for accommodating inflation valve 44, can avoid inflation valve 44 from protruding outside silicon wafer protection box 1.

[0031] In the embodiment, the top of the storage rack 3 is provided with a clearance groove on both sides of the silicon wafer storage cavity 31, and the clearance groove facilitates the workers to take the silicon wafer placed in the silicon wafer storage cavity 31.

[0032] In the embodiment, as shown in Figure 1 , Figure 5 , Figure 6 and Figure 7 , the locking structure 5 comprises a movable clamping block 51, the bottom of the box cover 2 is provided with a mounting groove 23, the movable clamping block 51 is slidingly installed in the mounting groove 23, the movable clamping block 51 is fixedly connected with the inner wall of the mounting groove 23 at one end, and an elastic element 52 is fixedly connected between the movable clamping block 51 and the inner wall of the mounting groove 23, the elastic element 52 is preferably a spring, the locking structure 5 further comprises a fixed clamping block 54 fixedly connected to the top of the silicon wafer protection box 1 and corresponding to the position of the movable clamping block 51, the movable clamping block 51 is provided with a clamping groove 511 for clamping the fixed clamping block 54, and the contact surface of the movable clamping block 51 and the fixed clamping block 54 is a slope surface for cooperation sliding, the bottom of the box cover 2 is provided with an avoiding groove 24 communicating with the mounting groove 23, and the avoiding groove 24 is used for accommodating the fixed clamping block 54, when the box cover 2 is covered at the top opening of the silicon wafer protection box 1, the movable clamping block 51 is in contact with the fixed clamping block 54, the movable clamping block 51 and the fixed clamping block 54 have a slope surface for cooperation sliding, so as to push the movable clamping block 51 to move in the mounting groove 23 to the direction of the elastic element 52, the movable clamping block 51 and the fixed clamping block 54 are dislocated, until the clamping part of the fixed clamping block 54 is located at the clamping groove 511 of the movable clamping block 51, the movable clamping block 51 is reset under the action of the elastic element 52, so that the clamping part of the fixed clamping block 54 is automatically clamped into the clamping groove 511, the fixed clamping block 54 and the movable clamping block 51 are locked, and the locking and fixing of the box cover 2 and the silicon wafer protection box 1 are realized.

[0033] In the embodiment, as shown in Figure 5 and Figure 6 , the top of the box cover 2 is provided with a groove 25 corresponding to the movable clamping block 51, a waist-shaped through groove 26 is provided between the groove 25 and the mounting groove 23, the waist-shaped through groove 26 is arranged along the moving direction of the movable clamping block 51, a pushing rod 53 is fixedly connected to the top of the movable clamping block 51 and passes through the waist-shaped through groove 26, the pushing rod 53 is an L-shaped structure, one end of the pushing rod 53 extends to the outside of the box cover 2, and the pushing rod 53 is not higher than the upper surface of the box cover 2, when the box cover 2 is disassembled, the pushing rods 53 on both sides are moved along the waist-shaped through groove 26, the pushing rod 53 drives the movable clamping block 51 to move synchronously in the mounting groove 23, so that the movable clamping block 51 is separated from the fixed clamping block 54, thereby releasing the locking effect of the box cover 2, and the box cover 2 is quickly opened.

[0034] In the embodiment, as shown in Figure 3 and Figure 7As shown, the four corners of the top of the silicon wafer protection box 1 are provided with positioning holes 12, and the bottom of the box cover 2 is fixedly connected with positioning columns 22 inserted into the positioning holes 12. When the box cover 2 is capped at the top opening of the silicon wafer protection box 1, the positioning columns 22 are first inserted into the positioning holes 12, which limits and guides the closing of the box cover 2, so that the fixed clamping block 54 and the movable clamping block 51 can be aligned, and the locking of the fixed clamping block 54 and the movable clamping block 51 is ensured.

[0035] In this embodiment, as shown in Figure 1 and Figure 2 The top of the box cover 2 is provided with a plurality of positioning grooves 21, and the bottom of the silicon wafer protection box 1 is fixedly connected with positioning protrusions 11 inserted into the positioning grooves 21. In transportation, the positioning protrusions 11 of the upper protection device are inserted into the positioning grooves 21 of the lower protection device, which is used for stacking multiple protection devices to prevent dislocation and collapse of multiple protection devices when stacked.

[0036] Working principle: when in use, the silicon wafer is placed in the silicon wafer storage cavity 31 of the storage rack 3, and the inflation tool is connected with the inflation and deflation valve 44. The inflation tool works to inflate the inflation bag 41 through the communication pipe 43 and the air pipe 42, so that the inflation bag 41 expands and closes the gap between the silicon wafer storage cavity 31 and the silicon wafer, thereby limiting and fixing the silicon wafer in the silicon wafer storage cavity 31, avoiding shaking and collision during transportation, and the inflation bag 41 can provide good protection for the silicon wafer. Then, the box cover 2 is capped at the top opening of the silicon wafer protection box 1, and the positioning columns 22 on the box cover 2 are inserted into the positioning holes 12 on the silicon wafer protection box 1, which limits and guides the closing of the box cover 2, so that the movable clamping block 51 contacts the fixed clamping block 54. The movable clamping block 51 and the fixed clamping block 54 have a matching sliding slope, so that the movable clamping block 51 moves in the installation groove 23 towards the elastic member 52, so that the movable clamping block 51 and the fixed clamping block 54 are misaligned, and the clamping part of the fixed clamping block 54 is positioned in the clamping groove 511 of the movable clamping block 51. Under the action of the elastic member 52, the movable clamping block 51 is reset, so that the clamping part of the fixed clamping block 54 is automatically clamped into the clamping groove 511, which is used to lock the fixed clamping block 54 and the movable clamping block 51, thereby realizing the locking and fixing of the box cover 2 and the silicon wafer protection box 1, preventing the box cover 2 from opening due to shaking during transportation, and improving the protection effect of silicon wafer transportation. Then, the positioning protrusions 11 of the upper protection device are inserted into the positioning grooves 21 of the lower protection device, which is used for stacking multiple protection devices to prevent dislocation and collapse of multiple protection devices when stacked.

[0037] The above embodiment is a preferred implementation scheme of the present application, in addition to this, the present application can be implemented in other ways, and any obvious replacement without departing from the technical scheme concept is within the protection scope of the present application.

Claims

1. A protective device for cyclic packaging of silicon wafers, comprising a silicon wafer protection box (1) and a box cover (2) for closing the top opening of the silicon wafer protection box (1), characterized in that: The inside of the silicon wafer protection box (1) is fixedly connected with a storage rack (3), a plurality of silicon wafer storage cavities (31) are formed in the storage rack (3), a retention protection structure (4) is installed in the silicon wafer storage cavity (31), and a locking structure (5) is arranged between the two ends of the box cover (2) and the silicon wafer protection box (1). The retention protection structure (4) comprises inflatable bags (41) fixedly connected to the two sides of the inside of the silicon wafer storage cavity (31), one side of the inflatable bag (41) close to the inner wall of the silicon wafer protection box (1) is fixedly connected with an air pipe (42), the air pipes (42) on all the inflatable bags (41) are connected through a communication pipe (43), and one end of the communication pipe (43) extends to the outside of the silicon wafer protection box (1) and is fixedly connected with a gas charging and discharging valve (44).

2. The wafer handling apparatus of claim 1 wherein: The top of the storage rack (3) is provided with a clearance groove on both sides of the silicon wafer storage cavity (31).

3. The protective device for silicon wafer circulation package according to claim 1, wherein: The locking structure (5) comprises a movable clamping block (51), the bottom of the box cover (2) is provided with a mounting groove (23), the movable clamping block (51) is slidingly installed in the mounting groove (23), an elastic member (52) is fixedly connected between one end of the movable clamping block (51) and the inner wall of the mounting groove (23), the locking structure (5) further comprises a fixed clamping block (54) fixedly connected to the top of the silicon wafer protection box (1) and corresponding to the position of the movable clamping block (51), a clamping groove (511) is formed in the movable clamping block (51) for clamping the fixed clamping block (54), and the contact surfaces of the movable clamping block (51) and the fixed clamping block (54) are inclined surfaces for cooperation sliding.

4. The wafer handling apparatus of claim 3 wherein: The bottom of the box cover (2) is provided with an avoiding groove (24) communicating with the mounting groove (23), the avoiding groove (24) is used for accommodating the fixed clamping block (54), the top of the box cover (2) is provided with a recess (25) corresponding to the movable clamping block (51), a waist-shaped through groove (26) is formed between the mounting groove (23) and the recess (25), a pushing rod (53) is fixedly connected to the top of the movable clamping block (51) and passes through the waist-shaped through groove (26), the pushing rod (53) is in L-shaped structure, one end of the pushing rod (53) extends to the outside of the box cover (2), and the pushing rod (53) is not higher than the upper surface of the box cover (2).

5. The protective device for silicon wafer circulating package according to claim 1, wherein: The top of the silicon wafer protection box (1) is provided with a positioning hole (12) at each of the four corners, and the bottom of the box cover (2) is fixedly connected with a positioning column (22) inserted into the positioning hole (12).

6. The wafer handling apparatus of claim 1 wherein: The top of the box cover (2) is provided with a plurality of positioning recesses (21), and the bottom of the silicon wafer protection box (1) is fixedly connected with a positioning protrusion (11) clamped into the positioning recess (21).

7. The wafer handling apparatus of claim 1 wherein: The bottom of the silicon wafer protection box (1) is provided with a buckle groove on both sides.

Images