Target material production device with rapid cooling structure

Abstract

The utility model provides a target material production device with a rapid cooling structure, which comprises a tank body and a cooling component, a cover plate is arranged at the upper end of the tank body, a crucible is arranged in the tank body, the cooling component is arranged on the left side of the tank body, a heat dissipation component is arranged in the cooling component, and the heat dissipation component is arranged in the tank body. A mounting plate is fixedly connected to the surface of the left side of the tank body, and a water pump is fixedly mounted on the mounting plate. Compared with the prior art, the cooling device has the following beneficial effects that by arranging the cooling part, cooling liquid forms circulation in the liquid storage tank and the side wall of the crucible, so that the crucible and a target material in the crucible are cooled; and in addition, by arranging a heat dissipation component, the cooling liquid is raised through a stirring rod, the contact area of the cooling liquid and air is increased, then the heat exchange efficiency of the cooling liquid and the air is improved, and the situation that the cooling performance is greatly reduced due to overheating of the cooling liquid is avoided.

Description

TECHNICAL FIELD

[0001] The utility model belongs to target material production device technical field, especially related to a target material production device with quick cooling structure. BACKGROUND

[0002] Target material smelting furnace is a kind of industrial equipment for material smelting and preparation target material, it is widely used in semiconductor, photovoltaic, coating and material engineering etc., target material is usually used in physical vapor deposition, chemical vapor deposition etc., to deposit thin film on substrate, form the physical performance and chemical characteristics required, in the use process of smelting furnace, the smelting furnace without cooling target material exists significant shortcomings, because in the continuous high temperature environment, the phase change behavior and chemical reaction of target material can become more complex, continuous high temperature can cause the oxidation of material, and then cover its surface and form oxide layer, reduce its conductivity and reactivity, and then affect the microstructure and macroscopic performance of target material, therefore, we hope to design a kind of target material production device with quick cooling structure, to solve this problem. SUMMARY

[0003] In view of the deficiencies in the prior art, the utility model aims at providing a target material production device with quick cooling structure to solve the problems in the background art.

[0004] The utility model discloses a target material production device with quick cooling structure, including: tank body and cooling component, the upper end of tank body is provided with cover plate, the inside of tank body is provided with crucible, the left side of tank body is provided with cooling component, the inside of cooling component is provided with heat dissipation component, the left side surface of tank body is fixedly connected with mounting plate, water pump is fixedly installed on the mounting plate;

[0005] Cooling component includes connecting plate, and the connecting plate is fixedly connected to the left side of tank body, the inner side of connecting plate is fixedly connected with liquid storage tank, the front side of liquid storage tank is provided with heat dissipation fan, the rear side of liquid storage tank is fixedly connected with air outlet pipe, the inner side of air outlet pipe is fixedly connected with baffle, and the inside of air outlet pipe is fixedly connected with baffle ring.

[0006] The lower end of liquid storage tank is fixedly connected with liquid outlet pipe, the upper end right side of liquid storage tank is fixedly connected with liquid inlet pipe, and the liquid inlet pipe and liquid outlet pipe are fixedly penetrated in the inside of tank body, cooling component is arranged, target material in the inside of crucible is cooled, to improve the cooling speed of target material.

[0007] As a preferred embodiment, the inner side of the pot wall of the crucible is a hollow structure for the entry of cooling liquid, and the liquid inlet pipe and the liquid outlet pipe are connected to the inner side wall of the crucible.

[0008] As a preferred implementation, the liquid outlet pipe is provided with a control valve for controlling the flow of cooling liquid.

[0009] As a preferred implementation, the input end and the output end of the water pump are fixedly connected with a liquid inlet pipe for extracting cooling liquid.

[0010] As a preferred implementation, the heat dissipation component includes a speed reducer, which is fixedly installed at the upper end of the liquid storage tank, and an output shaft of the speed reducer is connected with a connecting shaft through a shaft sleeve, an outer side of the connecting shaft is sleeved with a connecting sleeve, and an outer side of the connecting sleeve is fixedly connected with a stirring rod. By setting the heat dissipation component, the cooling liquid is cooled to avoid performance degradation.

[0011] As a preferred implementation, the upper end of the liquid storage tank is fixedly installed with a cylinder, and an outer side of the connecting sleeve is sleeved with a connecting disc through a bearing, and the connecting disc is fixedly connected with an extension end of the cylinder. By setting the cylinder to drive the connecting disc and the connecting sleeve to move up and down, the cooling liquid is lifted to increase the contact area of the cooling liquid and the air, thereby improving the heat exchange efficiency of the cooling liquid and the air.

[0012] After the above technical scheme is adopted, the beneficial effects of the present application are as follows: by setting the cooling component, the cooling liquid forms a circulation inside the sidewall of the liquid storage tank and the crucible to cool the crucible and the target material inside, thereby improving the cooling speed of the target material. In addition, by setting the heat dissipation component, the stirring rod is used to lift the cooling liquid to increase the contact area of the cooling liquid and the air, thereby improving the heat exchange efficiency of the cooling liquid and the air, and avoiding the cooling performance from being greatly reduced due to overheating of the cooling liquid. BRIEF DESCRIPTION OF DRAWINGS

[0013] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or prior art description. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without creative labor.

[0014] Figure 1 It is a front right oblique view of the overall structure of the target material production device with a rapid cooling structure.

[0015] Figure 2 It is a front left side sectional view of the overall structure of the target material production device with a rapid cooling structure.

[0016] Figure 3 It is a sectional view of the cooling component of the target material production device with a rapid cooling structure.

[0017] Figure 4 It is a local structure perspective view of the cooling component of the target material production device with the quick cooling structure.

[0018] Figure 5 It is a rear side oblique view of the cooling component of the target material production device with the quick cooling structure.

[0019] In the figure, 1 is a tank body, 2 is a cover plate, 3 is a crucible, 4 is a cooling component, 5 is a heat dissipation component, 6 is a mounting plate, and 7 is a water pump.

[0020] 41 is a connecting plate, 42 is a liquid storage tank, 43 is a heat dissipation fan, 44 is an air outlet pipe, 45 is a baffle, 46 is a baffle ring, 47 is a liquid outlet pipe, and 48 is a liquid inlet pipe.

[0021] 51 is a speed reducer, 52 is a connecting shaft, 53 is a connecting sleeve, 54 is a stirring rod, 55 is a cylinder, and 56 is a connecting disc. DETAILED DESCRIPTION

[0022] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0023] Please refer to Figures 1 to 5 The present application provides a technical solution: a target material production device with a quick cooling structure, comprising: a tank body 1 and a cooling component 4, the upper end of the tank body 1 is provided with a cover plate 2, the inside of the tank body 1 is provided with a crucible 3, the left side of the tank body 1 is provided with the cooling component 4, the inside of the cooling component 4 is provided with a heat dissipation component 5, the left surface of the tank body 1 is fixedly connected with a mounting plate 6, and the mounting plate 6 is fixedly installed with a water pump 7.

[0024] The cooling component 4 comprises a connecting plate 41, the connecting plate 41 is fixedly connected to the left side of the tank body 1, the inner side of the connecting plate 41 is fixedly connected with a liquid storage tank 42, the front side of the liquid storage tank 42 is provided with a heat dissipation fan 43, the rear side of the liquid storage tank 42 is fixedly connected with an air outlet pipe 44, the inner side of the air outlet pipe 44 is fixedly connected with a baffle 45, and the inside of the air outlet pipe 44 is fixedly connected with a baffle ring 46.

[0025] The lower end of the liquid storage tank 42 is fixedly connected with a liquid outlet pipe 47, the upper end right side of the liquid storage tank 42 is fixedly connected with a liquid inlet pipe 48, and the liquid inlet pipe 48 and the liquid outlet pipe 47 are both fixedly penetrated into the inside of the tank body 1. By setting the cooling component 4, the target material inside the crucible 3 is cooled to improve the cooling speed of the target material.

[0026] The inner side of the pot wall of the crucible 3 is a hollow structure for the cooling liquid to enter, and the liquid inlet pipe 48 and the liquid outlet pipe 47 are connected with the inner side of the side wall of the crucible 3.

[0027] The liquid outlet pipe 47 is provided with a control valve for controlling the flow of the cooling liquid.

[0028] The input end and the output end of the water pump 7 are fixedly connected with the liquid inlet pipe 48 for extracting the cooling liquid.

[0029] The heat dissipation component 5 comprises a speed reducer 51 fixedly installed at the upper end of the liquid storage tank 42, the output shaft of the speed reducer 51 is connected with a connecting shaft 52 through a shaft sleeve, the outer side of the connecting shaft 52 is slidingly sleeved with a connecting sleeve 53, the outer side of the connecting sleeve 53 is fixedly connected with a stirring rod 54, and the cooling liquid is heat-dissipated through the heat dissipation component 5, so that the performance of the cooling liquid is prevented from being reduced.

[0030] The upper end of the liquid storage tank 42 is fixedly installed with a pneumatic cylinder 55, the outer side of the connecting sleeve 53 is sleeved with a connecting disc 56 through a bearing, and the connecting disc 56 is fixedly connected with the telescopic end of the pneumatic cylinder 55, so that the connecting disc 56 and the connecting sleeve 53 are driven to displace up and down by the pneumatic cylinder 55, the cooling liquid is lifted, the contact area of the cooling liquid and the air is increased, and the heat exchange efficiency of the cooling liquid and the air is improved.

[0031] Please refer to Figures 2 to 5 , as the first embodiment of the utility model: when the target material needs to be cooled, first, the control valve is opened, the cooling liquid in the liquid storage tank 42 flows into the inner side of the side wall of the crucible 3 under the action of gravity, then the water pump 7 is started, the cooling liquid that has absorbed heat is extracted into the inner side of the liquid storage tank 42 through the liquid inlet pipe 48, so that the target material in the crucible 3 is circularly cooled, meanwhile, the heat dissipation fan 43 is started, the cooling liquid flowing into the liquid storage tank 42 again is heat-dissipated, the cooling performance is prevented from being greatly reduced due to overheating of the cooling liquid, and the cooling liquid is prevented from being blown out of the liquid storage tank 42 by the heat dissipation fan 43 to cause waste of the cooling liquid through the blocking of the baffle 45.

[0032] Please refer to Figures 3 to 4 , as the second embodiment of the utility model: based on the above-mentioned embodiment, further, the speed reducer 51 is started when the cooling liquid is heat-dissipated, the output shaft of the speed reducer 51 drives the connecting shaft 52 to rotate, the connecting shaft 52 drives the connecting sleeve 53 to rotate in the process of rotating, the connecting sleeve 53 drives the stirring rod 54 to rotate in the process of rotating, the cooling liquid is stirred, convection in the cooling liquid is caused, the pneumatic cylinder 55 is started, the telescopic end of the pneumatic cylinder 55 drives the connecting disc 56 to displace up and down, the connecting disc 56 drives the rotating connecting sleeve 53 to displace up and down, so that the purpose of stirring the cooling liquid while lifting the cooling liquid is achieved, the contact area of the cooling liquid and the air is increased, the cooling liquid is promoted to be heat-dissipated, and the cooling performance is prevented from being greatly reduced due to overheating of the cooling liquid.

[0033] The above merely describes preferred embodiments of the present application and is not intended to limit the present application, and any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A target material production apparatus having a rapid cooling structure, comprising: The utility model provides a tank body (1) and cooling part (4), it is characterized by, the upper end of the tank body (1) is provided with the cover plate (2), the inside of the tank body (1) is provided with the crucible (3), the left side of the tank body (1) is provided with cooling part (4), the inside of cooling part (4) is provided with heat dissipation part (5), the left side surface of the tank body (1) is fixedly connected with the mounting plate (6), the water pump (7) is fixedly installed on the mounting plate (6), Cooling part (4) includes connecting plate (41), connecting plate (41) is fixedly connected to the left side of tank body (1), the inner side of connecting plate (41) is fixedly connected with liquid storage tank (42), the front side of liquid storage tank (42) is provided with heat dissipation fan (43), the rear side of liquid storage tank (42) is fixedly connected with air outlet pipe (44), the inner side of air outlet pipe (44) is fixedly connected with baffle (45), air outlet pipe (44) is fixedly connected with baffle ring (46) in the inside, The lower end of liquid storage tank (42) is fixedly connected with liquid outlet pipe (47), the upper end right side of liquid storage tank (42) is fixedly connected with liquid inlet pipe (48), and liquid inlet pipe (48) and liquid outlet pipe (47) are fixedly penetrated in the inside of tank body (1).

2. The target production apparatus having a rapid cooling structure according to claim 1, wherein: The inside of the pot wall of the crucible (3) is a hollow structure for cooling liquid to enter, and the liquid inlet pipe (48) and the liquid outlet pipe (47) are connected with the inner wall of the crucible (3).

3. The target production apparatus having a rapid cooling structure according to claim 1, wherein: The liquid outlet pipe (47) is provided with a control valve for controlling the flow of cooling liquid.

4. The target production apparatus having a rapid cooling structure according to claim 1, wherein: The input end and the output end of the water pump (7) are fixedly connected with the liquid inlet pipe (48) for pumping cooling liquid.

5. The target production apparatus having a rapid cooling structure according to claim 1, wherein: The heat dissipation part (5) includes a speed reducer (51), the speed reducer (51) is fixedly installed on the upper end of the liquid storage tank (42), the output shaft of the speed reducer (51) is connected with the connecting shaft (52) through the shaft sleeve, the outer side of the connecting shaft (52) is slidably sleeved with the connecting sleeve (53), and the outer side of the connecting sleeve (53) is fixedly connected with the stirring rod (54).

6. The target production apparatus having a rapid cooling structure according to claim 5, wherein: The upper end of the liquid storage tank (42) is fixedly connected with the cylinder (55), the outer side of the connecting sleeve (53) is sleeved with the connecting disc (56) through the bearing, and the connecting disc (56) is fixedly connected with the telescopic end of the cylinder (55).

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