Vacuum cavity structure and vacuum coating equipment
By setting a coating chamber inside the vacuum chamber and spacing it apart from the vacuum chamber, the problems of vacuum chamber thickness and complex sealing structure are solved, and the amount of material used and cost are reduced.
Patent Information
- Application Number
- CN202520104449.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-15
- Publication Date
- 2025-12-19
- Estimated Expiration
- 2035-01-15
AI Technical Summary
Existing vacuum coating equipment has thicker cavity walls, more complex sealing structures, and higher material usage and costs due to the airtightness requirements of the vacuum chamber.
A coating chamber is set inside the vacuum chamber. The walls of the coating chamber and the vacuum chamber are spaced apart and sealed together by a coating mechanism, which reduces the sealing structure and the thickness of the chamber walls.
While ensuring airtightness, the amount of material used in the vacuum chamber and sealing structure is significantly reduced, thereby lowering production costs.
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Figure CN223688439U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to vacuum coating technology field especially relates to a vacuum cavity structure and vacuum coating equipment. BACKGROUND
[0002] The traditional lithium battery generally adopts aluminum foil as the positive current collector and copper foil as the negative current collector. In order to reduce the cost and weight of the battery and improve the cycle life and safety of the battery, the new lithium battery adopts composite aluminum foil as the positive current collector and composite copper foil as the negative current collector. The composite aluminum foil and the composite copper foil are made by coating the surface of the aluminum foil and the copper foil in a vacuum coating equipment.
[0003] In order to ensure the air tightness of the vacuum cavity, the cavity wall of the existing vacuum coating equipment is thick, and the coating structure, cooling structure and the like are sealed between the vacuum cavity by a large number of sealing structures, which significantly increases the material consumption of the vacuum cavity structure and significantly increases the cost. SUMMARY
[0004] In order to solve the above technical problems, the utility model provides a kind of vacuum cavity structure and vacuum coating equipment to reduce material consumption and production cost.
[0005] The utility model discloses a first aspect of a kind of vacuum cavity structure, comprising:
[0006] Vacuum cavity, vacuum cavity is vacuum sealing structure;
[0007] Coating cavity, coating cavity is vacuum structure, coating cavity is located in vacuum cavity, and the cavity wall of coating cavity and the cavity wall of vacuum cavity are spaced apart;
[0008] Coating mechanism, coating mechanism is located in coating cavity and sequentially passes out coating cavity and vacuum cavity, and coating mechanism is sealedly connected between vacuum cavity.
[0009] As an optional implementation, in the first aspect of the utility model, the cavity wall of the vacuum cavity includes a side wall, a top wall and a bottom wall, the two ends of the side wall are respectively sealedly connected with the outer edge of the top wall and the outer edge of the bottom wall to form a vacuum cavity.
[0010] As an optional implementation, in the first aspect of the utility model, the cavity wall of the coating cavity includes a side plate, the side plate is correspondingly spaced apart from the side wall, and the two ends of the side plate are respectively sealedly connected with the top wall and the bottom wall to form a coating cavity.
[0011] As an optional implementation, in the first aspect of the utility model, the side wall and the side plate are connected by a reinforcing rib, and the reinforcing rib is provided with at least one.
[0012] As an optional implementation, in the first aspect of the utility model, the reinforcing rib is a plate structure, and the reinforcing rib is arranged obliquely from top to bottom.
[0013] As an optional implementation, in the first aspect of the utility model, the side wall and the top wall, and the side wall and the bottom wall are all sealed and connected through sealing pads.
[0014] As an optional implementation, in the first aspect of the utility model, the coating mechanism comprises a driving motor and a coating roller, the driving motor is arranged outside the vacuum cavity, and the output shaft of the driving motor passes through the vacuum cavity and extends into the coating cavity, the output shaft and the vacuum cavity are sealed and connected through a sealing ring;
[0015] The coating roller is arranged in the coating cavity and is sleeved on the output shaft, and the coating roller rotates coaxially with the output shaft.
[0016] As an optional implementation, in the first aspect of the utility model, the vacuum cavity structure further comprises a cooling mechanism, the cooling mechanism is arranged in the coating cavity and sequentially passes through the coating cavity and the vacuum cavity, and the cooling mechanism is located on the side of the coating mechanism, and the cooling mechanism and the vacuum cavity are sealed and connected.
[0017] As an optional implementation, in the first aspect of the utility model, the cooling mechanism comprises at least one cooling water pipe, the cooling water pipe passes through the vacuum cavity and extends into the coating cavity, and the cooling water pipe is arranged in parallel and spaced apart from the coating roller, and the cooling water pipe and the vacuum cavity are sealed and connected through a sealing ring.
[0018] The second aspect of the utility model discloses a vacuum coating equipment, comprising: the vacuum cavity structure.
[0019] Compared with the prior art, the utility model has the following beneficial effects:
[0020] In the utility model, the coating cavity is arranged in the vacuum cavity, the cavity wall of the coating cavity is arranged in spaced relation with the cavity wall of the vacuum cavity, the thickness of the cavity wall of the vacuum cavity can be greatly reduced on the basis of ensuring the air tightness of the vacuum cavity, the sealing effect of the vacuum cavity structure can be realized only by sealing the vacuum cavity with the coating mechanism and other structures, and the sealing structure is obviously reduced. BRIEF DESCRIPTION OF DRAWINGS
[0021] In order to make the technical scheme in the embodiments of the present application clearer, the following will briefly introduce the drawings needed in the embodiment description. Obviously, the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained without creative labor.
[0022] Figure 1 is a structural schematic view of a vacuum cavity structure disclosed by the embodiments of the present application;
[0023] Figure 2 is a right view of a vacuum cavity structure disclosed by the embodiments of the present application;
[0024] Figure 3 is a left view of a vacuum cavity structure disclosed by the embodiments of the present application;
[0025] Figure 4 is a sectional view of a vacuum cavity structure disclosed by the embodiments of the present application.
[0026] In the figure: 1, vacuum cavity; 11, side wall; 12, top wall; 13, bottom wall; 2, coating cavity; 21, side plate; 3, coating mechanism; 31, driving motor; 311, output shaft; 32, coating roller; 4, reinforcing rib; 5, sealing gasket; 6, sealing ring; 7, cooling mechanism; 71, cooling water pipe. DETAILED DESCRIPTION
[0027] In order to make the technical scheme in the embodiments of the present application clearer, the following will briefly introduce the drawings needed in the embodiment description. Obviously, the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained without creative labor.
[0028] The terms "first", "second", and the like in the specification and claims of the present application and the above drawings are used to distinguish different objects, and are not used to describe a specific order. In addition, the terms "include" and "have" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, device, product or end including a series of steps or units is not limited to the listed steps or units, but can optionally include steps or units not listed, or can optionally include other steps or units inherent to the process, method, product or end.
[0029] Reference herein to "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of the application. The appearances of the phrase in various places in the specification are not necessarily all referring to the same embodiment nor are separate or alternative embodiments mutually exclusive of other embodiments. As will be apparent to those of ordinary skill in the art, embodiments described herein can be combined with other embodiments.
[0030] Embodiment 1
[0031] Referring to Figure 1 The embodiment discloses a vacuum cavity structure, which comprises a vacuum cavity 1, a coating cavity 2 and a coating mechanism 3. The vacuum cavity 1 is a vacuum sealing structure, and the vacuum cavity 1 is vacuumized by a vacuumizing device to form a vacuum cavity. The coating cavity 2 is a vacuum structure, and the coating cavity 2 is arranged in the vacuum cavity 1, and the cavity wall of the coating cavity 2 is arranged in a spaced manner with the cavity wall of the vacuum cavity 1. The coating mechanism 3 is arranged in the coating cavity 2 and sequentially penetrates the coating cavity 2 and the vacuum cavity 1, and the coating mechanism 3 is sealingly connected with the vacuum cavity 1.
[0032] When it is needed to coat the surface of a copper foil and / or an aluminum foil of a lithium battery in the vacuum cavity structure, the copper foil and / or the aluminum foil are wound on the coating mechanism 3 and placed in the coating cavity 2, then the vacuumizing device is used to vacuumize the inside of the vacuum cavity 1 and the inside of the coating cavity 2 to make them in a vacuum state, and then the coating mechanism 3 is started to drive the copper foil and / or the aluminum foil to rotate to coat the surface of the copper foil and / or the aluminum foil.
[0033] In the embodiment, the coating cavity 2 is arranged in the vacuum cavity 1, and the cavity wall of the coating cavity 2 is arranged in a spaced manner with the cavity wall of the vacuum cavity 1, so that the thickness of the cavity wall of the vacuum cavity 1 can be greatly reduced on the basis of ensuring the air tightness of the vacuum cavity 1, and only the coating mechanism 3 and other structures need to be sealingly connected with the vacuum cavity 1 to realize the sealing effect of the vacuum cavity structure, and the sealing structure is obviously reduced. Therefore, the vacuum cavity structure of the embodiment obviously reduces the material consumption of the cavity wall of the vacuum cavity 1 and the sealing structure without affecting the air tightness, and greatly reduces the production cost of the vacuum cavity structure.
[0034] Referring to Figure 4 The cavity wall of the vacuum cavity 1 comprises a side wall 11, a top wall 12 and a bottom wall 13, and the two ends of the side wall 11 are sealingly connected with the outer edge of the top wall 12 and the outer edge of the bottom wall 13 respectively to enclose a vacuum cavity. The shape of the vacuum cavity 1 can be cylindrical, cuboid or any other shape, as long as the side wall 11, the top wall 12 and the bottom wall 13 can enclose a sealed vacuum cavity. In the embodiment, the vacuum cavity 1 is a cuboid structure, the top of the side wall 11 is sealingly connected with the outer edge of the top wall 12, and the bottom of the side wall 11 is sealingly connected with the outer edge of the bottom wall 13 to form a cuboid-shaped vacuum cavity in the vacuum cavity 1.
[0035] Specifically, the sealing connection of the side wall 11 with the top wall 12 and the bottom wall 13 can be achieved by means of screws, welding, gluing, etc. The sealing method in actual application is determined according to the material of the vacuum cavity 1 and the assembly requirement. In order to improve the sealing performance of the connection of the side wall 11 with the top wall 12 and the bottom wall 13, the side wall 11 and the top wall 12 and the side wall 11 and the bottom wall 13 are both sealingly connected by means of the sealing gasket 5. The sealing gasket 5 is of an elastic structure, and is arranged between the side wall 11 and the top wall 12 and between the side wall 11 and the bottom wall 13, so as to further improve the sealing performance of the vacuum cavity 1.
[0036] On the basis of the structure of the vacuum cavity 1, the cavity wall of the coating cavity 2 comprises a side plate 21, which is correspondingly arranged in the vacuum cavity 1 and sealingly connected with the top wall 12 and the bottom wall 13 at both ends thereof to enclose a coating cavity. Specifically, the shape of the side plate 21 is adapted to the shape of the side wall 11, and the top of the side plate 21 is fixedly connected with the top wall 12, and the bottom of the side plate 21 is fixedly connected with the bottom wall 13. The fixed connection can be achieved by means of screws, welding, gluing, etc.
[0037] The arrangement of the side plate 21 forms a sandwich in the vacuum cavity of the vacuum cavity 1 to separate the coating cavity, which reduces the condition for forming the vacuum cavity in the vacuum cavity 1, and not only significantly reduces the thickness of the side wall 11, the top wall 12 and the bottom wall 13 of the vacuum cavity 1, but also only needs to design a sealing structure on the outside of the vacuum cavity 1 to achieve a good sealing effect, thereby saving the amount of material and reducing the cost. Moreover, the formation of the coating cavity makes the internal layout of the vacuum cavity 1 more regular, which facilitates the coating operation.
[0038] Since the vacuumization needs to withstand a large pressure, the vacuum cavity structure needs to have a high strength. For this purpose, the side wall 11 and the side plate 21 are connected by means of the reinforcing rib 4, and at least one reinforcing rib 4 is provided. The arrangement of the reinforcing rib 4 improves the connection strength of the vacuum cavity 1 and the coating cavity 2, thereby improving the strength of the vacuum cavity structure.
[0039] In the present embodiment, the coating mechanism 3 horizontally penetrates the middle part of the vacuum cavity 1 and the coating cavity 2, and the reinforcing rib 4 is arranged above and below the coating mechanism 3, so that the strength of the vacuum cavity structure is further improved.
[0040] Moreover, the reinforcing rib 4 is of a plate structure, and is arranged in an inclined manner from top to bottom. The inclined arrangement of the reinforcing rib 4 makes the connection strength between the side wall 11 and the side plate 21 uniformly distributed in the horizontal direction and the vertical direction, so that the improvement of the strength of the vacuum cavity structure is more uniform, and the local weakness is avoided to affect the normal use.
[0041] As to the coating mechanism 3, reference can be made to the description of the coating mechanism 3 in the first embodiment. Figures 2-4The coating mechanism 3 comprises a driving motor 31 and a coating roller 32. The driving motor 31 is arranged outside the vacuum cavity 1, and an output shaft 311 of the driving motor 31 extends into the coating cavity 2 through the vacuum cavity 1 and is sealingly connected to the vacuum cavity 1 by a sealing ring 6. The coating roller 32 is arranged in the coating cavity 2 and is sleeved on the output shaft 311, and the coating roller 32 rotates coaxially with the output shaft 311. The driving motor 31 is started to rotate the output shaft 311, thereby driving the coating roller 32 to rotate coaxially to realize the surface coating of the copper foil and / or the aluminum foil.
[0042] Since the output shaft 311 of the coating mechanism 3 penetrates the vacuum cavity 1 and the coating cavity 2, and the coating cavity 2 is arranged inside the vacuum cavity 1, only the sealing ring 6 needs to be arranged at the connection between the output shaft 311 and the vacuum cavity 1 to realize the sealing connection between the coating mechanism 3 and the vacuum cavity 1, and the sealing structure is simple and low in cost.
[0043] The coating mechanism 3 generates heat during long-term rotation and coating, which affects the quality and efficiency of the surface coating of the copper foil and / or the aluminum foil. Therefore, the coating mechanism 3 needs to be cooled during the vacuum coating process. To this end, the vacuum cavity structure of the embodiment further comprises a cooling mechanism 7 arranged in the coating cavity 2 and sequentially penetrating the coating cavity 2 and the vacuum cavity 1, and the cooling mechanism 7 is located at the side of the coating mechanism 3 and is sealingly connected to the vacuum cavity 1. During the vacuum coating process, circulating cooling water is introduced into the cooling mechanism 7 to cool the coating mechanism 3, thereby avoiding the problem of excessively high temperature of the coating mechanism 3 affecting the quality and efficiency of the surface coating of the copper foil and / or the aluminum foil.
[0044] Specifically, the cooling mechanism 7 comprises at least one cooling water pipe 71 penetrating the vacuum cavity 1 and extending into the coating cavity 2, and the cooling water pipe 71 is arranged in parallel and spaced apart from the coating roller 32, and the cooling water pipe 71 is sealingly connected to the vacuum cavity 1 by the sealing ring 6.
[0045] The number of the cooling water pipes 71 is determined according to the coating working condition. In the embodiment, a plurality of cooling water pipes 71 are arranged in parallel and spaced apart, and are arranged in parallel with the coating roller 32. The plurality of cooling water pipes 71 are uniformly distributed at the side of the coating roller 32 to uniformly cool each part of the coating roller 32 during the coating process, thereby avoiding the problem of excessively high temperature of the coating roller 32 affecting the quality of the surface coating of the copper foil and / or the aluminum foil.
[0046] The plurality of cooling water pipes 71 are sealingly connected to the vacuum cavity 1 by the sealing ring 6, and the sealing structure is simple and can achieve good sealing effect.
[0047] A plurality of cooling water pipes 71 pass through the vacuum cavity 1 to connect with external cooling water.
[0048] Embodiment 2
[0049] The embodiment discloses a vacuum cavity structure and a vacuum coating equipment.
[0050] Finally, it should be pointed out that the vacuum cavity structure and the vacuum coating equipment disclosed in the embodiments of the utility model are only the preferred embodiments of the utility model, and are used to illustrate the technical solutions of the utility model, but not to limit them. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that the technical solutions recorded in the foregoing embodiments can still be modified, or some technical features can be replaced equivalently. These modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the utility model.
Claims
1. A vacuum chamber structure, characterized by The vacuum cavity is a vacuum sealed structure. The film coating cavity is a vacuum structure, which is arranged in the vacuum cavity, and the cavity wall of the film coating cavity is arranged in a spaced manner with the cavity wall of the vacuum cavity. The film coating mechanism is arranged in the film coating cavity and sequentially penetrates the film coating cavity and the vacuum cavity, and is sealingly connected with the vacuum cavity. The cavity wall of the vacuum cavity includes a side wall, a top wall and a bottom wall, two ends of the side wall are sealingly connected with the outer edge of the top wall and the outer edge of the bottom wall respectively to form a vacuum cavity.
2. The vacuum chamber structure according to claim 1, characterized in that: The cavity wall of the film coating cavity includes a side plate, which is arranged in a spaced and corresponding manner with the side wall, and two ends of the side plate are sealingly connected with the top wall and the bottom wall to form a film coating cavity.
3. The vacuum chamber structure according to claim 2, characterized in that: The side wall and the side plate are connected by a reinforcing rib, and the reinforcing rib is provided with at least one.
4. The vacuum chamber structure according to claim 3, characterized in that: The reinforcing rib is a plate structure, and the reinforcing rib is arranged in an inclined manner from top to bottom.
5. The vacuum chamber structure according to claim 4, characterized in that: The side wall and the top wall, and the side wall and the bottom wall are sealingly connected by a sealing gasket.
6. The vacuum chamber structure of claim 2, wherein: The film coating mechanism includes a driving motor and a film coating roller, the driving motor is arranged outside the vacuum cavity, and the output shaft of the driving motor penetrates the vacuum cavity and extends into the film coating cavity, and the output shaft and the vacuum cavity are sealingly connected by a sealing ring.
7. The vacuum chamber structure according to claim 1, characterized in that: The film coating roller is arranged in the film coating cavity and is sleeved on the output shaft, and the film coating roller rotates coaxially with the output shaft. The vacuum cavity structure further includes a cooling mechanism, which is arranged in the film coating cavity and sequentially penetrates the film coating cavity and the vacuum cavity, and is located on the side of the film coating mechanism, and is sealingly connected with the vacuum cavity.
8. The vacuum chamber structure according to claim 7, characterized in that: The cooling mechanism includes at least one cooling water pipe, which penetrates the vacuum cavity and extends into the film coating cavity, and is arranged in a spaced and parallel manner with the film coating roller, and is sealingly connected with the vacuum cavity by a sealing ring.
9. The vacuum chamber structure according to claim 8, characterized in that: The vacuum cavity structure of any one of claims 1-9.
10. A vacuum coating apparatus, characterized by, The vacuum cavity structure of any one of claims 1-9.