Spray plate and atomic layer deposition equipment
By designing a detachable spray plate structure, the problem of easy clogging of the spray holes was solved, thus ensuring the quality of film growth and improving production efficiency.
Patent Information
- Application Number
- CN202520051919.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-09
- Publication Date
- 2025-12-19
- Estimated Expiration
- 2035-01-09
AI Technical Summary
The spray holes of traditional spray plates are prone to clogging, which affects the quality of film growth.
Design a detachable spray plate structure, in which the inner and outer plates are detachably connected and meshed by inner and outer teeth. The spray holes are designed to be staggered and fixed by fastening screws. Deposits can be removed when the inner and outer plates are disassembled.
It effectively prevents spray hole clogging, ensures uniform material distribution, and improves film growth quality and production efficiency.
Smart Images
Figure CN223688446U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to atomic layer deposition technical field especially relates to a kind of spray plate and atomic layer deposition equipment. BACKGROUND
[0002] In the preparation process of advanced materials such as semiconductor manufacturing and photovoltaic cell production, atomic layer deposition equipment plays a vital role. The atomic layer deposition equipment includes a spray plate. During atomic layer deposition, the material can flow through the flow channel in the spray plate to the spray hole and be sprayed out of the spray hole, and be plated on the substrate surface in the form of a single atomic film layer by layer.
[0003] The traditional spray plate is a single-layer plate structure. When the material is sprayed from the spray hole to the substrate surface, the reaction product and other deposits generated by the reaction are easily deposited on the surface of the spray plate facing the substrate. When the deposits are deposited too much, they will enter the spray hole. Since the spray hole and the flow channel are relatively narrow, the deposits cannot be removed from the spray hole when they enter the deep position of the spray hole, causing partial blockage of the spray hole. When part of the spray hole is blocked, the material sprayed from the spray hole is unevenly distributed, affecting the growth quality of the thin film. SUMMARY
[0004] Therefore, it is necessary to provide a spray plate and atomic layer deposition equipment that can reduce the blockage of the spray hole to ensure the growth quality of the thin film in view of the problem that the spray hole of the traditional spray plate is easily blocked, thereby affecting the growth quality of the thin film.
[0005] A spray plate comprises:
[0006] An outer plate is provided with a first outer hole and a second outer hole;
[0007] An inner plate is detachably connected with the outer plate and is provided with a first inner hole and a second inner hole along a first direction;
[0008] When the inner plate is connected with the outer plate, the surfaces of the inner plate and the outer plate facing each other along the first direction are attached, the first outer hole and the first inner hole are spliced to form a first spray hole for spraying precursors, and the second outer hole and the second inner hole are spliced to form a second spray hole for spraying reaction gas.
[0009] In one embodiment, the outer plate is provided with a plurality of rows of first outer holes and a plurality of rows of second outer holes, and the plurality of rows of first outer holes and the plurality of rows of second outer holes are arranged in a staggered manner along a second direction. Each row of first outer holes comprises a plurality of first outer holes distributed along a third direction, and each row of second outer holes comprises a plurality of second outer holes distributed along the third direction.
[0010] The first inner holes are arranged one-to-one with the first outer holes, and the second inner holes are arranged one-to-one with the second outer holes.
[0011] The first direction, the second direction, and the third direction intersect with each other.
[0012] In one embodiment, the outer plate includes an outer plate body and a plurality of outer teeth arranged on the outer plate body, the plurality of outer teeth are arranged at intervals along a second direction, and each outer tooth extends along a third direction; the first direction, the second direction, and the third direction intersect with each other.
[0013] The inner plate includes an inner plate body and a plurality of inner teeth arranged on the inner plate body, the plurality of inner teeth are arranged at intervals along the second direction, and each inner tooth extends along the third direction.
[0014] The outer teeth are provided with the second outer holes, and the inner teeth are provided with the first inner holes; when the inner plate is connected with the outer plate, the outer teeth are engaged with the inner teeth.
[0015] In one embodiment, the cross-sectional area of the first inner hole gradually increases from one end close to the first outer hole to one end away from the first outer hole.
[0016] In one embodiment, the first inner hole extends in a spiral shape from one end close to the first outer hole to one end away from the first outer hole.
[0017] In one embodiment, the outer plate is provided with a first flow channel having a first inlet and a second flow channel having a second inlet, all the first outer holes are in communication with the first flow channel, and all the second outer holes are in communication with the second flow channel.
[0018] In one embodiment, the spray plate includes fastening screws, the fastening screws are arranged in the outer plate and the inner plate along the first direction, so that the inner plate and the outer plate are fixedly connected.
[0019] In one embodiment, the spray plate includes a plurality of first fastening screws and a plurality of second fastening screws, the plurality of first fastening screws are arranged at intervals along a surrounding direction surrounding the first direction to fix a peripheral part of the inner plate and the outer plate, the plurality of second fastening screws are located in an annular space formed by the plurality of first fastening screws, and the plurality of second fastening screws are distributed in a cross shape to fix a middle part of the inner plate and the outer plate.
[0020] In one embodiment, the inner plate and the outer plate are provided with a disassembly groove at an edge part of a surface facing each other along the first direction, the disassembly groove is configured to extend into by an external tool to disassemble the inner plate and the outer plate.
[0021] An atomic layer deposition apparatus, the atomic layer deposition apparatus comprising a spray plate as described above.
[0022] In the aforementioned spray plate and atomic layer deposition equipment, during atomic layer deposition, the inner plate is positioned close to the substrate. Precursor gases and reactant gases are ejected from the first inner hole (part of the first spray hole) and the second inner hole (part of the second spray hole), respectively. Deposits are readily deposited on the surface of the spray plate facing the substrate, i.e., on the surface of the inner plate. When excessive deposits penetrate deep into the spray holes, since the inner and outer plates are separate and detachably connected, the inner and outer plates can be disassembled. A tool can then be used to remove the deposits penetrating the first and second inner holes along the first direction on the inner plate. Compared to the single-layer structure of existing spray plates, this method facilitates the removal of deposits from the spray holes, reducing the risk of clogging and ensuring uniform material distribution and high-quality film growth. Attached Figure Description
[0023] Figure 1 This is a structural diagram of a spray plate provided in a preferred embodiment of this application;
[0024] Figure 2 for Figure 1 The diagram shows the structure of the inner and outer panels of the spray plate when unfolded.
[0025] Figure 3 for Figure 1 Another structural diagram of the spray plate shown;
[0026] Figure 4 for Figure 1 Partial cross-sectional view of the spray plate shown ( Figure 1 and Figure 4 The inner and outer panels are in a separated state when Figure 1 and Figure 4 When the inner and outer panels are in the assembled state, the surfaces of the inner and outer panels that are close to each other are in contact.
[0027] Figure 5 for Figure 1 The diagram shows the structure of the outer panel of the spray plate.
[0028] Figure 6 for Figure 1 The diagram shows the structure of the inner plate of the spray plate.
[0029] Explanation of reference numerals in the attached figures:
[0030] 100, spray plate; 10, outer plate; 11, first outer hole; 12, second outer hole; 13, outer plate body; 14, outer tooth; 15, first flow channel; 151, first inlet; 16, second flow channel; 161, second inlet; 20, inner plate; 21, first inner hole; 22, second inner hole; 23, inner plate body; 24, inner tooth; 30, first spray hole; 40, second spray hole; 50, fastening screw; 50a, first fastening screw; 50b, second fastening screw; 60, easy-to-disassemble groove; 70, first screw hole; 80, second screw hole; X, first direction; Z, second direction; Y, third direction. DETAILED DESCRIPTION
[0031] In order to make the above objectives, characteristics and advantages of the present application more apparent, concrete embodiments of the present application will be described in detail below with reference to the drawings. In the following description, a large number of specific details are set forth in order to provide a comprehensive understanding of the present application. However, the present application can be implemented in many different ways other than those described herein, and those skilled in the art can make similar improvements without departing from the spirit of the present application, and therefore the present application is not limited to the specific embodiments disclosed below.
[0032] In the description of the present application, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.
[0033] In addition, the terms "first" and "second" are only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined with "first" and "second" can explicitly or implicitly include at least one of the features. In the description of the present application, the meaning of "a plurality of" is at least two, such as two, three, etc., unless otherwise explicitly specified.
[0034] In the utility model, unless another definite provision and limitation, the terms "mount", "connect", "joint", "fix" and so on should do the broad sense understanding, for example, can be fixed connection, also can be detachable connection, or be integrated;Can be mechanical connection, also can be electrical connection;Can be directly connected, also can be indirectly connected through the intermediate medium, can be the communication of two elements or the interaction of two elements, unless another definite limitation.For the ordinary skilled person in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.
[0035] In the utility model, unless another definite provision and limitation, the first feature is "on" or "under" the second feature, which can be direct contact between the first and second features, or indirect contact between the first and second features through an intermediate medium.Moreover, the first feature "above", "above" and "on" the second feature can be directly above or obliquely above the first feature, or only indicate that the horizontal height of the first feature is higher than that of the second feature.The first feature "below", "below" and "below" the second feature can be directly below or obliquely below the first feature, or only indicate that the horizontal height of the first feature is less than that of the second feature.
[0036] It should be noted that when an element is referred to as "fixed to" or "provided on" another element, it can be directly on another element or there can be a middle element.When an element is considered "connected" to another element, it can be directly connected to another element or there can be a middle element.The terms "vertical", "horizontal", "up", "down", "left", "right" and similar expressions used herein are for illustrative purposes only and are not the only implementation.
[0037] Referring to Figure 1 And Figure 2 , an embodiment of the application provides a spray plate 100, which comprises an inner plate 20 and an outer plate 10 arranged separately, and the inner plate 20 and the outer plate 10 are detachably connected.The outer plate 10 is provided with a first outer hole 11 and a second outer hole 12, and the inner plate 20 is provided with a first inner hole 21 and a second inner hole 22 along a first direction X.Specifically, the first direction X is the thickness direction of the outer plate 10 and the inner plate 20.When the inner plate 20 and the outer plate 10 are connected, the surfaces of the inner plate 20 and the outer plate 10 facing each other along the first direction X are fitted, that is, the inner plate 20 and the outer plate 10 are spliced along the first direction X, wherein the first outer hole 11 and the first inner hole 21 are spliced to form a first spray hole 30, and the second outer hole 12 and the second inner hole 22 are spliced to form a second spray hole 40.
[0038] When performing atomic layer deposition, the inner plate 20 is arranged close to the substrate relative to the outer plate 10, and the substances (including precursors and reaction gases) can be sprayed from the inner holes on the inner plate 20 and plated on the substrate surface. Among them, the first spray hole 30 is used to spray the precursor, and the precursor can be selected from TMA (trimethylaluminum), metal aluminum oxide, etc. The second spray hole 40 is used to spray the reaction gas, and the reaction gas can be selected from oxygen, water vapor, etc. As for how to select the precursor and the reaction gas, it depends on the working condition and is not limited here.
[0039] The spray plate 100 provided by the embodiment of the present application is arranged close to the substrate when performing atomic layer deposition, that is, the precursors and the reaction gases are sprayed from the first inner hole 21 which is part of the first spray hole 30 and the second inner hole 22 which is part of the second spray hole 40. The deposits are easy to deposit on the surface of the spray plate 100 facing the substrate, that is, the deposits are easy to deposit on the surface of the inner plate 20. When the deposits are deposited too much into the deep position of the spray hole, since the inner plate 20 and the outer plate 10 are arranged separately and detachably connected, the inner plate 20 and the outer plate 10 are detached, and the deposits in the first inner hole 21 and the second inner hole 22 on the inner plate 20 along the first direction X are poked out by using a tool. Compared with the prior art in which the spray plate 100 is a single-layer plate structure, the deposits are easy to be cleaned out of the spray hole, and the spray hole is not easy to be blocked, thereby ensuring the uniformity of the distribution of the substances and the growth quality of the thin film.
[0040] It should be noted that when the inner plate 20 is connected with the outer plate 10, since the surfaces of the inner plate 20 and the outer plate 10 facing each other along the first direction X are attached, the first outer hole 11 and the first inner hole 21 are spliced to form the first spray hole 30, and the second outer hole 12 and the second inner hole 22 are spliced to form the second spray hole 40. Therefore, when the precursor enters the first inner hole 21 from the first outer hole 11 or the reaction gas enters the second inner hole 22 from the second outer hole 12, since there is no gap between the inner plate 20 and the outer plate 10, the substances will not enter between the inner plate 20 and the outer plate 10 to generate deposits, that is, the deposits will not be deposited between the inner plate 20 and the outer plate 10, and further will not cause the blockage of the spray hole. At the same time, since the deposits are not deposited in the spray hole, the substances flow smoothly in the spray hole, and the production efficiency can also be improved.
[0041] Further, continuing to refer to Figure 2The outer plate 10 is provided with a plurality of rows of first outer holes 11 and a plurality of rows of second outer holes 12. The plurality of rows of first outer holes 11 and the plurality of rows of second outer holes 12 are arranged in turn and staggered along the second direction Z. Each row of first outer holes 11 includes a plurality of first outer holes 11 distributed along the third direction Y. Each row of second outer holes 12 includes a plurality of second outer holes 12 distributed along the third direction Y. The first inner holes 21 and the second outer holes 12 are arranged one-to-one. The second inner holes 22 and the second outer holes 12 are arranged one-to-one. That is, the inner plate 20 is provided with a plurality of rows of first inner holes 21 and a plurality of rows of second inner holes 22. The number of rows of first inner holes 21 is the same as the number of rows of first outer holes 11. The number of rows of second inner holes 22 is the same as the number of rows of second outer holes 12. The number of first inner holes 21 included in each row of first inner holes 21 is the same as the number of first outer holes 11 included in the corresponding row of first outer holes 11. The number of second inner holes 22 included in each row of second inner holes 22 is the same as the number of second outer holes 12 included in the corresponding row. The first direction X, the second direction Z, and the third direction Y intersect. Specifically, the first direction X, the second direction Z, and the third direction Y are perpendicular to each other. When the inner plate 20 and the outer plate 10 are both in the shape of a cuboid plate, the first direction X is the thickness direction of the inner plate 20 and the outer plate 10. One of the second direction Z and the third direction Y is the length direction of the inner plate 20 and the outer plate 10, and the other is the width direction of the inner plate 20 and the outer plate 10. It should be understood that in some other embodiments, the shape of the inner plate 20 and the outer plate 10 is not limited, such as a circular plate and the like.
[0042] When the inner plate 20 and the outer plate 10 are connected, the spray plate 100 forms a plurality of rows of first spray holes 30 and a plurality of rows of second spray holes 40. The plurality of rows of first spray holes 30 and the plurality of rows of second spray holes 40 are arranged in turn and staggered along the second direction Z. Each row of first spray holes 30 includes a plurality of first spray holes 30 distributed along the third direction Y. Each row of second spray holes 40 includes a plurality of second spray holes 40 distributed along the third direction Y. This can ensure uniform distribution of the substance when it is sprayed out of the spray holes, thereby ensuring the quality of film growth.
[0043] Referring to Figures 2-4 The outer plate 10 is provided with a first flow channel 15 having a first inlet 151 and a second flow channel 16 having a second inlet 161. The first flow channel 15 communicates with the first outer holes 11, and the second flow channel 16 communicates with the second outer holes 12. In this way, the precursor enters the first flow channel 15 from the first inlet 151, and is then distributed to each first outer hole 11 from the first flow channel 15. The reaction gas enters the second flow channel 16 from the second inlet 161, and is then distributed to each second outer hole 12 from the second flow channel 16, thereby facilitating the distribution of the substances.
[0044] In some embodiments, referring to Figure 5 and Figure 6The outer plate 10 comprises an outer plate body 13 and a plurality of outer teeth 14 arranged on the outer plate body 13, the plurality of outer teeth 14 are arranged at intervals along the second direction Z, and each outer tooth 14 extends along the third direction Y. The inner plate 20 comprises an inner plate body 23 and a plurality of inner teeth 24 arranged on the inner plate body 23, the plurality of inner teeth 24 are arranged at intervals along the second direction Z, and each inner tooth 24 extends along the third direction Y.
[0045] Further, referring to Figure 5 The area of the outer plate body 13 without the outer teeth 14 (including the area of the outer plate body 13 between two adjacent outer teeth 14 and the area of the outer plate body 13 close to the two end outer teeth 14 in the second direction Z) is arranged with a row of first outer holes 11, and each outer tooth 14 is arranged with a row of second outer holes 12. Referring to Figure 6 Each inner tooth 24 is arranged with a first inner hole 21, and the area of the inner plate body 23 without the inner teeth 24 (including the area of the inner plate body 23 between two adjacent inner teeth 24 and the area of the inner plate body 23 close to the two end inner teeth 24 in the second direction Z) is arranged with a row of second inner holes 22. The first inner hole 21 penetrates the inner plate body 23 and the inner tooth 24 along the first direction X, and the second inner hole 22 penetrates the inner plate body 23 along the first direction X. When the inner plate 20 is connected with the outer plate 10, the outer teeth 14 and the inner teeth 24 are located at one end of the inner plate 20 and the outer plate 10 facing each other along the first direction X, and the outer teeth 14 and the inner teeth 24 are engaged. That is, when the inner plate 20 is connected with the outer plate 10, the outer tooth structure formed by the plurality of outer teeth 14 and the inner tooth structure formed by the plurality of inner teeth 24 are engaged with each other, that is, when the inner plate 20 is connected with the outer plate 10, the plurality of outer teeth 14 and the plurality of inner teeth 24 are engaged and arranged in sequence along the second direction Z.
[0046] The above arrangement is that when the inner plate 20 is connected with the outer plate 10, the outer teeth 14 and the inner teeth 24 are engaged. At this time, the tooth top surface of the inner tooth 24 is in contact with the outer plate body 13, the surface of the inner tooth 24 between the tooth top surface and the inner plate body 23 is in contact with the surface of the outer tooth 14, the tooth top surface of the outer tooth 14 is in contact with the inner plate body 23, and the surface of the outer tooth 14 between the tooth top surface and the outer plate body 13 is in contact with the surface of the inner tooth 24. In this way, the inner plate 20 and the outer plate 10 are tightly contacted and fixed together through engagement, avoiding the gap between the inner plate 20 and the outer plate 10 to cause the phenomenon of material overflowing and depositing from the reaction between the two plates.
[0047] It is conceivable that in some other embodiments, the outer plate 10 can omit the outer teeth 14, and the inner plate 20 can omit the inner teeth 24, and the two plates are contacted together by the way of flat surface, which is not limited herein.
[0048] In some embodiments, referring to Figure 5 and Figure 6The outer teeth 14 are arranged at a middle position of the outer plate body 13, and the inner teeth 24 are arranged at a middle position of the inner plate body 23. In this way, when the inner teeth 24 and the outer teeth 14 are engaged, the external air is prevented from entering the space between the inner teeth 24 and the outer teeth 14 from both ends of the third direction Y, so as to avoid the adverse effects on the material.
[0049] In some embodiments, the cross-sectional area of the first inner hole 21 gradually increases from the end close to the first outer hole 11 to the end away from the first outer hole 11. Specifically, the first inner hole 21 is conical. In this way, on the one hand, the precursor sprayed from the first spray hole 30 can form a more uniform distribution, increase the contact area of the precursor with the substrate, improve the uniformity of the precursor distribution, and facilitate the growth of the thin film; on the other hand, the first inner hole 21 adopts an outward expansion design, which can also reduce the deposition of particulate matter in the precursor on the inner plate 20 to cause the occurrence of the blocking phenomenon.
[0050] In some specific embodiments, continuing to refer to Figure 4 Since most of the first inner hole 21 is arranged on the inner teeth 24, and the cross-sectional area of the tooth root of the inner teeth 24 is larger than that of the tooth top, the cross-sectional shape of the first inner hole 21 can be matched with that of the inner teeth 24, so that the first inner hole 21 forms an outward expansion form, thereby making the precursor distribution uniform and effectively preventing the deposition of particulate matter on the inner plate 20.
[0051] In other embodiments, the first inner hole 21 extends in a spiral shape from the end close to the first outer hole 11 to the end away from the first outer hole 11. In this way, when the precursor is sprayed from the spray hole, a certain centrifugal force can be generated to make the precursor more uniformly distributed on the substrate, which is beneficial to the growth of the thin film.
[0052] In some embodiments, continuing to refer to Figure 1 The spray plate 100 includes a fastening screw 50, which is arranged through the outer plate 10 and the inner plate 20 along the first direction X, so that the inner plate 20 and the outer plate 10 are fixedly connected. The way of connecting the inner plate 20 and the outer plate 10 through the fastening screw 50 not only makes the inner plate 20 and the outer plate 10 fixedly firm, but also facilitates the disassembly of the inner plate 20 and the outer plate 10.
[0053] Optionally, the shower plate 100 comprises a plurality of first fastening screws 50a and a plurality of second fastening screws 50b, the plurality of first fastening screws 50a are arranged along a circumferential direction of the first direction X to fix the peripheral portions of the inner plate 20 and the outer plate 10, the plurality of second fastening screws 50b are located in the annular space formed by the plurality of first fastening screws 50a, and the plurality of second fastening screws 50b are distributed in a cross shape to fix the central portions of the inner plate 20 and the outer plate 10. Specifically, the horizontal part of the cross shape extends along the second direction Z, and the vertical part of the cross shape extends along the third direction Y. In order to install the first fastening screws 50a and the second fastening screws 50b, the inner plate 20 and the outer plate 10 are respectively provided with first screw holes 70 and second screw holes 80.
[0054] The above arrangement, under the action of the plurality of first fastening screws 50a and the plurality of second fastening screws 50b, causes the peripheral portions and the central portions of the inner plate 20 and the outer plate 10 to be firmly fixed together, ensuring the fitting effect between the inner plate 20 and the outer plate 10, and avoiding the situation that substances leak between the inner plate 20 and the outer plate 10 due to poor fitting of the inner plate 20 and the outer plate 10.
[0055] It should be understood that in some other embodiments, the inner plate 20 and the outer plate 10 can also be detachably connected in other ways, such as through a clamping connection, which is not limited herein.
[0056] In some embodiments, continuing to refer to Figures 1-3 The edge portions of the surfaces of the inner plate 20 and the outer plate 10 facing each other along the first direction X are provided with a detachable slot 60, and the detachable slot 60 is configured to allow an external tool to extend in to detach the inner plate 20 and the outer plate 10. Generally, the inner plate 20 and the outer plate 10 are large in size, and it is difficult to manually pry them apart. By providing the detachable slot 60, an external tool can extend into the detachable slot 60 to pry them apart, thereby achieving separation of the outer plate 10 and the inner plate 20.
[0057] Another embodiment of the present application also provides an atomic layer deposition device comprising the above-mentioned shower plate 100.
[0058] The shower plate 100 and the atomic layer deposition device provided by the embodiments of the present application have the following beneficial effects:
[0059] 1. When the inner plate 20 and the outer plate 10 are connected, the inner teeth 24 and the outer teeth 14 are engaged with each other, which can ensure the splicing effect of the first inner hole 21 and the first outer hole 11 and the second inner hole 22 and the second outer hole 12, and avoid the phenomenon that substances overflow and react between the inner plate 20 and the outer plate 10 due to the existence of gaps between the two plates.
[0060] 2、The first inner hole 21 adopts an outward expansion design, which can reduce the deposition of particulate matters in the precursor on the inner plate 20 and reduce the occurrence of blockage; at the same time, the outward expansion of the first inner hole 21 can make the precursor gas form a more uniform distribution when being sprayed, increase the contact area of the gas and the substrate, improve the uniformity, and thus improve the growth quality of the thin film.
[0061] 3、The inner plate 20 and the outer plate 10 are fixedly connected by the plurality of first fastening screws 50a and the plurality of second fastening screws 50b, so that there is no gap between the inner plate 20 and the outer plate 10, thereby avoiding the situation that the gap between the inner plate 20 and the outer plate 10 causes the precursor and the reaction gas to react in advance between the two plates and cause blockage. At the same time, the way of connecting the inner plate 20 and the outer plate 10 by the fastening screws 50 facilitates the disassembly and maintenance of the inner plate 20 and the outer plate 10.
[0062] 4、After the spray plate 100 is used for a long time, it is difficult to disassemble the inner plate 20 and the outer plate 10 due to the meshing of the inner teeth 24 and the outer teeth 14, and the disassembly slot 60 is arranged, so that an external tool can be inserted into the disassembly slot 60 to pry open the inner plate 20 and the outer plate 10, thereby facilitating the maintenance of the inner plate 20 and the outer plate 10.
[0063] The technical features of the above-described embodiments can be combined in any manner. To make the description concise, all possible combinations of the technical features in the above-described embodiments are not described, but as long as the combinations of the technical features do not exist contradictions, they should be considered as the scope of the present disclosure.
[0064] The above-described embodiments only express several implementation manners of the present application, and the description is relatively specific and detailed, but it should not be understood as a limitation on the scope of the present application. It should be pointed out that for ordinary skilled persons in the art, without departing from the concept of the present application, a number of modifications and improvements can be made, which all belong to the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the appended claims.
Claims
1. A spray plate, characterized in that The utility model relates to a shower plate for showering precursor and reaction gas, comprising: an outer plate (10) provided with a first outer hole (11) and a second outer hole (12); an inner plate (20) provided separately from the outer plate (10) and detachably connected, and provided with a first inner hole (21) and a second inner hole (22) penetrating in a first direction (X); when the inner plate (20) is connected with the outer plate (10), the surface of the inner plate (20) and the surface of the outer plate (10) facing each other in the first direction (X) are attached, the first outer hole (11) and the first inner hole (21) are spliced to form a first shower hole (30) for showering precursor, and the second outer hole (12) and the second inner hole (22) are spliced to form a second shower hole (40) for showering reaction gas.
2. The shower panel according to claim 1, characterized in that The outer plate (10) is provided with a plurality of rows of first outer holes (11) and a plurality of rows of second outer holes (12), and the plurality of rows of first outer holes (11) and the plurality of rows of second outer holes (12) are arranged alternately in a second direction (Z), each row of first outer holes (11) comprises a plurality of first outer holes (11) distributed in a third direction (Y), and each row of second outer holes (12) comprises a plurality of second outer holes (12) distributed in the third direction (Y); the first inner hole (21) and the first outer hole (11) are arranged one by one, and the second inner hole (22) and the second outer hole (12) are arranged one by one; the first direction (X), the second direction (Z) and the third direction (Y) intersect each other.
3. The shower panel according to claim 1, characterized in that The outer plate (10) comprises an outer plate body (13) and a plurality of outer teeth (14) arranged on the outer plate body (13), the plurality of outer teeth (14) are arranged at intervals in the second direction (Z), and each outer tooth (14) extends in the third direction (Y); the first direction (X), the second direction (Z) and the third direction (Y) intersect each other; the inner plate (20) comprises an inner plate body (23) and a plurality of inner teeth (24) arranged on the inner plate body (23), the plurality of inner teeth (24) are arranged at intervals in the second direction (Z), and each inner tooth (24) extends in the third direction (Y); the second outer hole (12) is arranged on the outer tooth (14), and the first inner hole (21) is arranged on the inner tooth (24); when the inner plate (20) is connected with the outer plate (10), the outer tooth (14) and the inner tooth (24) are engaged.
4. A shower panel according to any one of claims 1 to 3, wherein The cross-sectional area of the first inner hole (21) gradually increases from one end close to the first outer hole (11) to one end away from the first outer hole (11).
5. The shower panel according to any one of claims 1-3, characterized in that, The first inner hole (21) extends in a spiral shape from one end close to the first outer hole (11) to one end away from the first outer hole (11).
6. The shower panel according to claim 1, characterized in that The outer plate (10) is provided with a first flow channel (15) with a first inlet (151) and a second flow channel (16) with a second inlet (161), all the first outer holes (11) are communicated with the first flow channel (15), and all the second outer holes (12) are communicated with the second flow channel (16).
7. The shower panel according to claim 1, characterized in that, The spray plate comprises fastening screws (50) penetrating the outer plate (10) and the inner plate (20) along the first direction (X) so that the inner plate (20) is fixedly connected with the outer plate (10).
8. The shower panel according to claim 7, characterized in that The spray plate comprises a plurality of first fastening screws (50a) and a plurality of second fastening screws (50b), the plurality of first fastening screws (50a) are arranged at intervals along a circumferential direction surrounding the first direction (X) to fix the peripheral portions of the inner plate (20) and the outer plate (10), the plurality of second fastening screws (50b) are located in the annular space formed by the plurality of first fastening screws (50a), and the plurality of second fastening screws (50b) are distributed in a cross shape to fix the central portions of the inner plate (20) and the outer plate (10).
9. The shower panel of claim 1, wherein, The edge portions of the inner plate (20) and the outer plate (10) facing each other along the first direction (X) are provided with a detachable groove (60) configured to extend into an external tool to detach the inner plate (20) from the outer plate (10).
10. An atomic layer deposition apparatus, characterized by, The atomic layer deposition apparatus comprises the spray plate according to any one of claims 1-9.