Single crystal furnace base structure with magnetic field

Abstract

The utility model discloses a single crystal furnace base structure with a magnetic field, which comprises a base main body, and a furnace chamber supporting assembly and a magnetic field supporting assembly are respectively arranged on the base main body and are used for supporting the operation of a furnace chamber and the magnetic field of a single crystal furnace; the top of the magnetic field supporting assembly is provided with a first installation plate, and the top of the first installation plate is provided with a fine adjustment assembly, so that the relative position of the installed magnetic field and the horizontal position of the furnace chamber can be adjusted, the design structure is reasonable, the top of the magnetic field supporting assembly is provided with second installation plates, and a control structure is arranged between the second installation plates; and the control assembly is used for controlling the horizontal movement of the second mounting plate and freely adjusting the relative position of the second mounting plate and the middle furnace chamber in the horizontal direction, and then the adjusted second mounting plate is locked and fixed through the locking assembly, so that the problem that when deviation occurs between the elevator assembly and the furnace chamber supporting assembly in an existing base structure, the elevator assembly and the furnace chamber supporting assembly cannot move is solved. And the position of the magnetic field cannot be finely adjusted, so that the assembly efficiency and precision are influenced.

Description

TECHNICAL FIELD

[0001] The utility model relates to single crystal furnace base technical field, concretely is a kind of single crystal furnace base structure with magnetic field. BACKGROUND

[0002] At present, the preparation of semiconductor grade single crystal silicon, widely through the introduction of magnetic field to increase the viscous coefficient of conductive melt, inhibit the convection of silicon melt, can effectively control the content and distribution uniformity of oxygen, carbon and other impurities in silicon single crystal, reduce the microdefects in silicon single crystal, to improve the quality of single crystal;And for the base used for this single crystal furnace with magnetic field, it can meet the support of stainless steel furnace chamber main body, the support of lower transmission system, the support of furnace chamber lifting mechanism, also need to meet the support operation of magnetic field.

[0003] In the Chinese invention patent with the publication number CN108385164A discloses a kind of semiconductor single crystal furnace, including base body, lifting assembly is arranged on base body, the top of lifting assembly is connected in the bottom of magnetic field generation source by elevator nut, so that magnetic field production source is set on the outside of furnace chamber, however, after lifting assembly is fixed and assembled on base body, the distance between magnetic field production source and furnace chamber body level is difficult to adjust, when deviation appears between lifting assembly and furnace chamber support assembly, the position of magnetic field cannot be fine-tuned, only the position of magnetic field lifting assembly or furnace chamber support assembly can be adjusted by re-punching, it leads to more complicated assembly, affect assembly efficiency and accuracy. UTILITY MODEL CONTENT

[0004] The utility model aims at making up for the deficiency of prior art, provide a kind of single crystal furnace base structure with magnetic field.

[0005] To achieve the above object, the utility model provides the following technical scheme:

[0006] A kind of single crystal furnace base structure with magnetic field, including base body, furnace chamber support assembly and magnetic field support assembly are respectively arranged on base body, for the support operation of the furnace chamber and magnetic field of single crystal furnace;

[0007] The top of magnetic field support assembly is equipped with first mounting plate, the top of first mounting plate is provided with fine adjustment component, to adjust the relative position of magnetic field and furnace chamber level after installation;

[0008] Fine adjustment component includes the third mounting plate of detachable connection in the top of first mounting plate, the top of third mounting plate is provided with control structure, the top of control structure is provided with second mounting plate, control structure controls the horizontal motion adjustment of second mounting plate relative to furnace chamber support assembly;

[0009] Locking structure is further provided on control structure, for locking the position of second mounting plate.

[0010] Further, the control structure comprises a mounting cover fixedly connected to the third mounting plate, a circular opening is formed in the top of the mounting cover, a connecting column is arranged in the circular opening, the bottom of the connecting column is fixedly connected to a limiting plate, the bottom and the top of the limiting plate are slidably connected to the inner wall of the third mounting plate and the mounting cover respectively, and the top of the connecting column is fixedly connected to the bottom of the second mounting plate;

[0011] The inner wall of the mounting cover and the limiting plate are circular.

[0012] When the limiting plate and the axis of the circular opening coincide, the distance between the outer diameter of the limiting plate and the inner wall of the mounting cover is the same as the distance between the outer wall of the connecting column and the circular opening, the diameter of the limiting plate is smaller than the diameter of the inner wall of the mounting cover, and the diameter of the limiting plate is larger than the diameter of the circular opening, so that the limiting plate slides horizontally in the mounting cover.

[0013] Further, the locking structure comprises a control ring, the control ring is sleeved outside the mounting cover, at least three groups of threaded rods are arranged on the outer side of the control ring, one end of the threaded rod is arranged on the outer side of the control ring, the other end of the threaded rod penetrates the mounting cover, and the end of the threaded rod inside the mounting cover abuts against the outer side of the limiting plate.

[0014] The threaded rods are arranged in an annular array, and are used to fix the position of the limiting plate.

[0015] Further, the base body is a frame structure, the base body comprises a support seat, first support columns are arranged at the four corners of the top of the support seat, three third support columns are arranged at the top of the four first support columns, the two ends of each third support column are fixedly connected to the top of two first support columns, the three third support columns form a U-shaped structure, and the top of the furnace chamber supporting assembly is located at the opening of the U-shaped structure.

[0016] The outer side close to the top and the outer side close to the bottom of the first support column are both provided with second reinforcing plates, the shape of the second reinforcing plate is a right triangle, one right angle plate of the two second reinforcing plates is arranged on the first support column, and the other right angle edges of the two second reinforcing plates are fixedly connected to the third support column and the support seat respectively, so as to strengthen the stability of the base body.

[0017] Further, the furnace chamber supporting assembly comprises a furnace body supporting structure and a first support frame, the bottom of the first support frame is arranged on the top of the support seat, and is used to mount a furnace body lifting mechanism assembly.

[0018] The furnace body supporting structure comprises a plurality of second support columns, the plurality of second support columns are arranged in an annular array on the top of the support seat, the outer sides close to the top of the two adjacent second support columns are fixedly connected through second reinforcing ribs, and the top of the second reinforcing rib and the top of the second support column are fixedly connected to a support ring together, which is used to mount a stainless steel furnace chamber part of the equipment.

[0019] The top of the support base is fixedly connected with a support plate between the second support columns, and the support plate is used for mounting a lower transmission assembly of the equipment.

[0020] Further, the first reinforcing plates are fixedly connected to the outer sides of the second support columns close to the top and the bottom, and the first reinforcing plates are in the shape of right-angled triangles, and the top and the bottom of the two groups of first reinforcing plates are fixedly connected to the second reinforcing ribs and the top of the support base respectively, so as to reinforce the stability between the second support columns, the second reinforcing ribs and the support base.

[0021] Further, the magnetic field support assembly comprises a plurality of lifting structures mounted on the support base, and the plurality of lifting structures are symmetrically arranged on both sides of the furnace chamber support assembly in two groups, and the top of each lifting structure is connected to a corresponding third support column.

[0022] The top of the movable part of the lifting structure is connected to the bottom of the first mounting plate, so as to adjust the height of the magnetic field.

[0023] Further, the bottom of the support base is provided with a plurality of adjusting shims to adapt to the base surface with different flatness.

[0024] Compared with the prior art, the single crystal furnace base structure with a magnetic field has the following beneficial effects:

[0025] Firstly, the second mounting plate is arranged at the top of the magnetic field support assembly, and the control structure is arranged between the second mounting plates, so as to control the horizontal movement of the second mounting plate, freely adjust the relative position of the second mounting plate and the middle furnace chamber in the horizontal direction, and then lock and fix the adjusted second mounting plate through the locking assembly, so as to solve the problem that the position of the magnetic field cannot be finely adjusted when the deviation occurs between the elevator assembly and the furnace chamber support assembly in the existing base structure, and the assembly efficiency and precision are affected.

[0026] Secondly, the base body is connected and assembled through the support base, the first support column and the third support column, and the corresponding second reinforcing plate and the first reinforcing rib are arranged at the connection respectively, so as to prevent the deformation of the base body in use, improve the stability of the overall structure of the base body, and adopt the furnace chamber support assembly and the magnetic field support assembly respectively to support the furnace chamber and the magnetic field running on the base, so as to ensure the precision of the magnetic field and the furnace chamber in the installation and lifting process, and enable the equipment to work and run for a long time.

[0027] Thirdly, the bottom of the base is provided with adjusting shims, the contact area between the bottom of the base structure and the installation base surface is reduced through the adjusting shims, the requirement for the flatness of the equipment installation base surface is effectively reduced, the height of the adjusting shims at different positions is adjusted, the machining error is eliminated, and the level and plumb precision requirements of the equipment installation surface on the base are ensured. BRIEF DESCRIPTION OF DRAWINGS

[0028] Figure 1 It is the three-dimensional structure schematic view of the utility model;

[0029] Figure 2 It is the three-dimensional structure schematic view of the utility model base body;

[0030] Figure 3 It is the three-dimensional structure schematic view of the utility model magnetic field support assembly;

[0031] Figure 4 It is the three-dimensional structure schematic view of the utility model fine adjustment assembly;

[0032] Figure 5 It is the sectional view of the utility model installation cover

[0033] In the drawing: 1, support seat, 2, first support column, 3, third support column, 4, first support frame, 5, second support column, 6, second reinforcing rib, 7, first mounting plate, 8, support ring, 9, lifting structure, 10, support plate, 11, second mounting plate, 12, first reinforcing plate, 13, installation cover, 14, limiting plate, 15, connecting column, 16, threaded rod, 17, control ring, 18, second reinforcing plate, 19, third mounting plate. DETAILED DESCRIPTION

[0034] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0035] As Figures 1-5The utility model provides a technical scheme: a single crystal furnace base structure with magnetic field, including base main part, be provided with furnace chamber support subassembly and magnetic field support subassembly respectively on base main part for supporting the operation of furnace chamber and magnetic field of single crystal furnace, the top of magnetic field support subassembly is equipped with first mounting plate 7, the top of first mounting plate 7 is equipped with fine adjustment subassembly to make the relative position of the magnetic field and furnace chamber level after adjustment installation, fine adjustment subassembly includes the third mounting plate 19 of detachable connection in the top of first mounting plate 7, the top of third mounting plate 19 is equipped with control structure, the top of control structure is equipped with second mounting plate 11, and control structure controls the horizontal motion adjustment of second mounting plate 11 relative to furnace chamber support subassembly, control structure is also equipped with locking structure for locking the position of second mounting plate 11, in use, the magnetic field production structure is installed on second mounting plate 11, and the furnace chamber is arranged on furnace chamber support subassembly, then when needing fine adjustment, locking structure is opened, then second mounting plate 11 is pushed horizontally relative to furnace chamber away or close, the position of the magnetic field above is adjusted, then second mounting plate 11 is locked and fixed through locking subassembly to prevent the magnetic field from deviating in operation, and through fine adjustment subassembly, the second mounting plate 11 above multiple first mounting plates 7 is adjusted, which is favorable to eliminate processing error and reduce the precision requirement between magnetic field installation and furnace chamber.

[0036] The control structure includes a mounting cover 13 fixedly connected to the third mounting plate 19, which are detachably connected by bolts. The top of the mounting cover 13 is provided with a circular opening, and a connecting column 15 is arranged in the circular opening. The bottom of the connecting column 15 is fixedly connected with a limiting plate 14. The bottom and top of the limiting plate 14 are slidably connected with the inner wall of the third mounting plate 19 and the mounting cover 13 respectively. The top of the connecting column 15 is fixedly connected with the bottom of the second mounting plate 11. The inner wall of the mounting cover 13 and the limiting plate 14 are circular. When the limiting plate 14 and the axis of the circular opening coincide, the distance between the outer diameter of the limiting plate 14 and the inner wall of the mounting cover 13 is the same as the distance between the outer wall of the connecting column 15 and the circular opening. The diameter of the limiting plate 14 is smaller than the inner diameter of the mounting cover 13, and the diameter of the limiting plate 14 is larger than the diameter of the circular opening, so that the limiting plate 14 can slide horizontally in the mounting cover 13. In use, the bottom of the second mounting plate 11 is slidably connected with the top of the mounting cover 13, and can slide freely on the mounting cover 13 to adjust the relative position between the second mounting plate 11 and the furnace chamber. When adjusting, the second mounting plate 11 drives the limiting plate 14 to slide in the mounting cover 13 through the connecting column 15, so that the limiting plate 14 and the mounting cover 13 limit the up-down movement of the second mounting plate 11 to ensure the stability of the second mounting plate 11 in the up-down direction.

[0037] The locking structure comprises a control ring 17 sleeved on the outside of the mounting cover 13, the outside of the control ring 17 is provided with at least three groups of threaded rods 16, one end of the threaded rod 16 is arranged on the outside of the control ring 17, the other end of the threaded rod 16 penetrates the mounting cover 13, and the end of the threaded rod 16 inside the mounting cover 13 abuts against the outside of the limiting plate 14; the threaded rods 16 are arranged in an annular array for fixing the position of the limiting plate 14; in use, first, the third mounting plate 19 is installed on the first mounting plate 7 through bolts, then the control ring 17 is sleeved on the outside of the mounting cover 13, and the threaded rods 16 on the control ring 17 are aligned with the penetrating holes of the mounting cover 13, then the second mounting plate 11 is fixed on the connecting column 15, then the position of the second mounting plate 11 is adjusted, then the corresponding threaded rods 16 are rotated respectively, the end of the threaded rod 16 inside the mounting cover 13 moves towards the limiting plate 14, and the three threaded rods 16 abut against the limiting plate 14 in three directions, so that the limiting plate 14 is locked and fixed.

[0038] The base body is a frame structure, and the base body comprises a support seat 1, first support columns 2 are arranged at four corners of the top of the support seat 1, three third support columns 3 are arranged at the top of the four first support columns 2, the two ends of each third support column 3 are fixedly connected to the top of two first support columns 2 respectively, the three third support columns 3 form a U-shaped structure, and the top of the furnace chamber support assembly is located at the opening of the U-shaped structure; the outer side close to the top and the outer side close to the bottom of the first support column 2 are provided with second reinforcing plates 18, the shape of the second reinforcing plate 18 is a right-angled triangle, one right-angled plate of the two second reinforcing plates 18 is arranged on the first support column 2, and the other right-angled edges of the two second reinforcing plates 18 are fixedly connected to the third support column 3 and the support seat 1 respectively, thereby playing a role in strengthening the stability of the base body; a stabilizing rod is further arranged at the opening of the U-shaped structure, the side close to the two ends of the stabilizing rod is detachably connected to the two first support columns 2 respectively, thereby playing a role in preventing deformation of parts; in use, the support seat 1, the first support column 2 and the third support column 3 are composed of square tubes welded together, and the second reinforcing plate 18 is arranged at the connection position, thereby improving the stability of the base body as a whole, and a first reinforcing rib is further arranged between the two adjacent third support columns 3, thereby further improving the stability between the two third support columns 3, so as to ensure the stability and precision of the parts of the single crystal furnace.

[0039] The furnace chamber support assembly comprises a furnace body support structure and a first support frame 4, the bottom of the first support frame 4 is arranged on the top of the support base 1, and the furnace body lifting mechanism assembly is arranged on the first support frame 4; the furnace body support structure comprises a plurality of second support columns 5, the plurality of second support columns 5 are arranged in an annular array on the top of the support base 1, and two adjacent second support columns 5 are fixedly connected through a second reinforcing rib 6 close to the outer side of the top, and the top of the second reinforcing rib 6 and the top of the second support column 5 are fixedly connected with a support ring 8, which is used for mounting the stainless steel furnace chamber part of the equipment; the support base 1 is further fixedly connected with a support plate 10 at a position between the plurality of second support columns 5 on the top, which is used for mounting the lower transmission assembly of the equipment; in use, the number of the second support columns 5 is four, the intervals are equal, the bottoms are fixedly connected on the support base 1, and the tops are connected with the support ring 8, which is used for supporting the furnace chamber to ensure the normal operation of the furnace chamber.

[0040] The outer sides of the second support columns 5 close to the top and the bottom are fixedly connected with first reinforcing plates 12, the first reinforcing plates 12 are in the shape of right-angled triangles, the tops and the bottoms of the two groups of first reinforcing plates 12 are fixedly connected with the top of the second reinforcing rib 6 and the support base 1 respectively, and the first reinforcing plates 12 play a role in reinforcing the stability between the second support columns 5, the second reinforcing rib 6 and the support base 1; in use, the number of the first reinforcing plates 12 at the bottom of each second support column 5 is two, and the four groups of first reinforcing plates 12 are located outside the four second support columns 5, so that the stability of the support of the furnace chamber is improved, and the furnace chamber can be stably operated for a long time.

[0041] The magnetic field support assembly further comprises a plurality of lifting structures 9 mounted on the support base 1, the plurality of lifting structures 9 are symmetrically arranged in two groups on the two sides of the furnace chamber support assembly, and the tops of the lifting structures 9 are connected with the corresponding third support columns 3 respectively; the top of the movable part in the lifting structure 9 is connected with the bottom of the first mounting plate 7, which is used for adjusting the height of the magnetic field; in use, the lifting structure 9 can adopt screw rod transmission, the number of the screw rod transmissions is four, the screw rod transmissions are symmetrically arranged on the two sides of the furnace chamber support assembly, the tops and the bottoms of the screw rod transmissions are mounted on the support base 1 and the third support column 3 through the fixed plates respectively, and the bottom side is provided with a motor, the screw rod transmission is driven by the motor to drive the first mounting plate 7 to move up and down, and the height of the magnetic field is adjusted.

[0042] The bottom of the support base 1 is provided with a plurality of adjusting shims to adapt to the base surfaces with different flatness; in use, the contact area of the base and the equipment installation base surface is reduced through the adjusting shims, the requirement for the flatness of the equipment installation base surface can be reduced, and the height of the shims at different positions can be adjusted to eliminate the machining error and ensure the level and plumb precision of the equipment installation surface on the base.

Claims

1. A single crystal furnace base structure with magnetic field, comprising a base body, a furnace chamber support assembly and a magnetic field support assembly are arranged on the base body respectively, for supporting the furnace chamber and the magnetic field of the single crystal furnace; characterized in that: a first mounting plate (7) is mounted on the top of the magnetic field support assembly, and a fine adjustment assembly is arranged on the top of the first mounting plate (7) to adjust the relative position of the installed magnetic field and the furnace chamber horizontally; the fine adjustment assembly comprises a third mounting plate (19) detachably connected to the top of the first mounting plate (7), a control structure is arranged on the top of the third mounting plate (19), and a second mounting plate (11) is arranged on the top of the control structure, and the control structure controls the horizontal movement adjustment of the second mounting plate (11) relative to the furnace chamber support assembly; a locking structure is further arranged on the control structure to lock the position of the second mounting plate (11).

2. The magnetic field single crystal furnace base structure of claim 1, wherein: the control structure comprises a mounting cover (13) fixedly connected to the third mounting plate (19), a circular opening is formed in the top of the mounting cover (13), a connecting column (15) is arranged in the circular opening, a limiting plate (14) is fixedly connected to the bottom of the connecting column (15), the bottom and the top of the limiting plate (14) are slidably connected with the inner wall of the third mounting plate (19) and the mounting cover (13) respectively, and the top of the connecting column (15) is fixedly connected with the bottom of the second mounting plate (11); the inner wall of the mounting cover (13) and the limiting plate (14) are circular; when the limiting plate (14) and the axis of the circular opening coincide, the distance between the outer diameter of the limiting plate (14) and the inner wall of the mounting cover (13) is the same as the distance between the outer wall of the connecting column (15) and the circular opening, the diameter of the limiting plate (14) is smaller than the diameter of the inner wall of the mounting cover (13), and the diameter of the limiting plate (14) is greater than the diameter of the circular opening, so that the limiting plate (14) slides horizontally in the mounting cover (13).

3. The magnetic field single crystal furnace base structure of claim 2, wherein: the locking structure comprises a control ring (17) sleeved on the outside of the mounting cover (13), at least three groups of threaded rods (16) are arranged on the outside of the control ring (17), one end of the threaded rod (16) is arranged on the outside of the control ring (17), the other end of the threaded rod (16) penetrates the mounting cover (13), and the end of the threaded rod (16) inside the mounting cover (13) abuts against the outside of the limiting plate (14); a plurality of threaded rods (16) are arranged in a ring array for fixing the position of the limiting plate (14).

4. The magnetic field single crystal furnace base structure of claim 1, wherein: The base body is a frame structure, the base body comprises a support seat (1), the four corners of the top of the support seat (1) are provided with first support columns (2), the top of the four first support columns (2) is provided with three third support columns (3), the two ends of each third support column (3) are respectively fixedly connected with the top of two first support columns (2), the three third support columns (3) form a U-shaped structure, and the top of the furnace chamber support assembly is located at the opening of the U-shaped structure; The outer side close to the top and the outer side close to the bottom of the first support column (2) are provided with second reinforcing plates (18), the shape of the second reinforcing plate (18) is a right triangle, one right angle plate of the two second reinforcing plates (18) is arranged on the first support column (2), and the other side of the two second reinforcing plates (18) is fixedly connected with the third support column (3) and the support seat (1), so as to strengthen the stability of the base body.

5. The magnetic field single crystal furnace base structure of claim 4, wherein: The furnace chamber support assembly comprises a furnace body support structure and a first support frame (4), the bottom of the first support frame (4) is arranged on the top of the support seat (1), and is used for mounting a furnace body lifting mechanism assembly; The furnace body support structure comprises a plurality of second support columns (5), the plurality of second support columns (5) are arranged in a ring array on the top of the support seat (1), the outer sides close to the top of the two adjacent second support columns (5) are fixedly connected through second reinforcing ribs (6), the top of the second reinforcing rib (6) and the top of the second support column (5) are fixedly connected with a support ring (8), and the support ring (8) is used for mounting a stainless steel furnace chamber component of equipment; The top of the support seat (1) is fixedly connected with a support plate (10) between the plurality of second support columns (5), and the support plate (10) is used for mounting a lower transmission assembly of equipment.

6. The magnetic field single crystal furnace base structure of claim 5, wherein: The outer sides close to the top and the bottom of the second support column (5) are fixedly connected with first reinforcing plates (12), the shape of the first reinforcing plate (12) is a right triangle, the top and the bottom of the two first reinforcing plates (12) are fixedly connected with the second reinforcing rib (6) and the top of the support seat (1) respectively, and the first reinforcing plates (12) are used for reinforcing the stability between the second support column (5), the second reinforcing rib (6) and the support seat (1).

7. The magnetic field single crystal furnace base structure of claim 4, wherein: The magnetic field support assembly comprises a plurality of lifting structures (9) mounted on the support seat (1), the plurality of lifting structures (9) are symmetrically arranged on the two sides of the furnace chamber support assembly and divided into two groups, and the top of the lifting structure (9) is connected with the corresponding third support column (3); The top of the movable part of the lifting structure (9) is connected with the bottom of the first mounting plate (7), and is used for adjusting the height of the magnetic field.

8. The magnetic field single crystal furnace base structure of claim 4, wherein: The bottom of the support seat (1) is provided with a plurality of adjusting shims to adapt to different flatness of the base surface.

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