Material taking device for silicon carbide crystal production

Abstract

The utility model discloses a material taking device for silicon carbide crystal production, which comprises a supporting table, a linkage mechanism is arranged on the supporting table, the linkage mechanism comprises a rotating motor, a supporting rod, a supporting frame, a telescopic cylinder, a connecting block and a rotating cylinder, and a material taking mechanism is arranged below the rotating motor. The material taking mechanism comprises a mounting sleeve, push rods, clamping jaws, pressing plates, a pressing sleeve and a transmission mechanism, the mounting sleeve is mounted at the output end of the rotating motor, the push rods are slidably arranged on the mounting sleeve, the clamping jaws are mounted at the bottom ends of the push rods, the pressing plates are rotatably mounted on the outer wall of the mounting sleeve, and the pressing sleeve is slidably arranged on the outer wall of the mounting sleeve. Through cooperative work of the micro motor and the transmission mechanism, the material taking mechanism can accurately grab and release the silicon carbide crystals, the material taking stability and reliability are improved, and the quality and production efficiency of the silicon carbide crystals are ensured.

Description

TECHNICAL FIELD

[0001] The utility model relates to the production technology field of silicon carbide crystal, more specifically, it relates to a material taking device for silicon carbide crystal production. BACKGROUND

[0002] In the production of silicon carbide crystal using PVT method, silicon carbide seed crystal is placed at the top of the crucible, and silicon carbide powder is placed as raw material at the bottom of the crucible, in a high-temperature and low-pressure closed environment, silicon carbide powder sublimates and transports to the vicinity of the seed crystal under the action of temperature gradient and concentration difference, and then recrystallizes to form silicon carbide crystal growth, after the production of silicon carbide crystal is completed, the crystal in the crucible needs to be taken out.

[0003] During the production of silicon carbide crystal, especially during the high-temperature growth stage, the temperature is relatively high, the traditional material taking method usually relies on manual operation, which not only has low efficiency, but also is easily affected by high temperature, increasing the safety risk of the operator, in addition, the high-temperature silicon carbide crystal is easily damaged during the material taking process, affecting the quality and performance of the crystal.

[0004] The existing material taking device has obvious shortcomings in handling high-temperature silicon carbide crystal, a single material taking method often cannot meet the requirements of high precision and high efficiency, especially during the crystal growth process, the precision of material taking directly affects the quality of the crystal, in addition, the traditional material taking device lacks effective cooling measures, and cannot maintain the stability and reliability of the material taking tool in high-temperature environment, leading to frequent failures and damages during the material taking process. UTILITY MODEL CONTENTS

[0005] (I) Technical problem solved

[0006] In view of the problems in the prior art, the utility model provides a material taking device for silicon carbide crystal production to solve the technical problem that the traditional material taking method usually relies on manual operation, which not only has low efficiency, but also is easily affected by high temperature.

[0007] (II) Technical scheme

[0008] To achieve the above object, the utility model provides the following technical scheme: A kind of taking-out device for silicon carbide crystal production, including support table, linkage mechanism is arranged on the support table, the linkage mechanism includes rotating motor, support rod, support frame, telescopic cylinder, connecting block and rotary cylinder, rotating motor is installed on support table, support rod is installed in rotating motor output end, support frame is installed in support rod top end, telescopic cylinder is installed in support frame two sides, connecting block is installed in the telescopic end of two groups telescopic cylinder, rotating motor is installed in the bottom surface of two groups connecting block, taking-out mechanism is arranged below rotating motor, the taking-out mechanism includes mounting sleeve, push rod, jaw, pressing plate, pressure sleeve and transmission mechanism, mounting sleeve is installed in rotating motor output end, push rod is provided with multiple groups sliding on mounting sleeve, jaw is installed in the bottom end of multiple push rods, pressing plate is provided with multiple groups rotationally installed in mounting sleeve outer wall, pressure sleeve slides in mounting sleeve outer wall.

[0009] The utility model further sets up, transmission mechanism includes transmission sleeve, micro motor and screw rod, transmission sleeve is installed in pressure sleeve outer wall, micro motor is installed in mounting sleeve outer wall, screw rod is installed in micro motor output end and is connected with mounting sleeve rotationally, the screw rod is connected with transmission sleeve screw, accurate control is realized to pressure sleeve and pressing plate by micro motor and screw rod, the accurate capture and release of jaw are ensured.

[0010] The utility model further sets up, the mounting sleeve outer wall is equipped with limit strip, the limit strip is provided with multiple groups and is connected with pressure sleeve slidingly, and the stability and reliability of pressure sleeve in sliding process are ensured by the arrangement of limit strip, so that the deviation or jamming of pressure sleeve in movement process is prevented.

[0011] The utility model further sets up, the top end of multiple push rods is equipped with abutment, and the top surface of multiple abutts is all set as cambered surface, and the design of abutment and compression spring ensures the accurate control and stable operation of jaw.

[0012] The utility model further sets up, and the bottom surface of multiple abutments is connected with the outer wall of mounting sleeve and is equipped with compression spring, and the reset force of push rod is provided by compression spring, so that jaw can be reset quickly when releasing silicon carbide crystal.

[0013] The utility model further sets up, and the inner wall of multiple pressing plates is connected with the outer wall of mounting sleeve and is equipped with reset spring, and the design of reset spring ensures the reset force of pressing plate, so that pressing plate can be reset quickly when releasing jaw.

[0014] The utility model further sets up, be provided with cooling mechanism in the mounting bush, cooling mechanism includes refrigeration pipe, blow fan and air hole, refrigeration pipe sets up in the mounting bush, blow fan installs in the mounting bush top surface, air hole is provided with multiple groups distribution in the mounting bush outer wall, passes through the collaborative work of refrigeration pipe, blow fan and air hole, and cooling mechanism can effectively reduce the temperature of material taking mechanism.

[0015] The utility model further sets up, refrigeration pipe both ends are equipped with external connection pipe, two groups external connection pipe extend out mounting bush and are connected with external refrigerating plant, and the design of external connection pipe ensures the effective connection of refrigeration pipe and external refrigerating plant, realizes the efficient cooling of inside mounting bush.

[0016] (Three) beneficial effect

[0017] Compared with the prior art, the utility model provides a kind of material taking device for silicon carbide crystal production, with following beneficial effects:

[0018] 1, linkage mechanism is started by rotary motor, drives support rod and support frame to rotate to predetermined position, realizes the accurate movement of material taking mechanism in horizontal direction, subsequently, telescopic cylinder starts, and its telescopic end lengthens or shortens, drives connecting block to move up and down, moves material taking mechanism to target position, ensures the accurate movement of material taking mechanism in vertical direction, finally, rotary cylinder starts, and its output end rotates, drives material taking mechanism to move above silicon carbide crystal, realizes the fine adjustment of material taking mechanism in horizontal direction, by the collaborative work of rotary motor, telescopic cylinder and rotary cylinder, linkage mechanism can realize the multi-degree-of-freedom motion of material taking mechanism, ensures the accuracy and flexibility of material taking, improves material taking efficiency and the convenience of operation.

[0019] 2, material taking mechanism is started by micro motor, drives screw rod to rotate, and screw rod drives transmission sleeve and pressure sleeve to slide by screw connection, and pressure sleeve abuts against multiple pressure plates and pushes pressure plate to rotate, and the rotation of pressure plate pushes push rod by abutting block, and push rod pushes jaw, so that jaw is tightened, and carbonized silicon crystal is grabbed, and the tightening and loosening of jaw are realized by the elastic reset of compression spring and return spring, to ensure the accurate control and stable operation of jaw, in addition, the outer wall of mounting bush is equipped with limiting strip, and limiting strip is slidably connected with pressure sleeve, to ensure the stability and reliability of pressure sleeve in sliding process, by the collaborative work of micro motor and transmission mechanism, material taking mechanism can realize the accurate grabbing and releasing of carbonized silicon crystal, to improve the stability and reliability of material taking, to ensure the quality and production efficiency of carbonized silicon crystal.

[0020] 3、The cooling mechanism is started by an external refrigeration device, and the refrigerant is delivered into the refrigeration pipe, the refrigerant in the refrigeration pipe removes the heat inside the mounting sleeve through heat exchange, cooling is realized, at the same time, the blowing fan is started, and the cold air generated by the refrigeration pipe is uniformly distributed to the inside of the mounting sleeve through blowing, so that the temperature inside the mounting sleeve is uniformly reduced, the air holes are arranged on the outer wall of the mounting sleeve, the cold air is allowed to be discharged from the inside of the mounting sleeve, the temperature inside the mounting sleeve is kept in a suitable range, through the cooperative work of the refrigeration pipe, the blowing fan and the air holes, the cooling mechanism can effectively reduce the temperature of the material taking mechanism, the stability and reliability of the material taking mechanism in a high-temperature environment are ensured, damage of the material taking mechanism and the silicon carbide crystal caused by high temperature is prevented, and the safety of material taking and product quality are improved. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 It is a whole structure schematic view of a material taking device for silicon carbide crystal production in the utility model.

[0022] Figure 2 It is a structure schematic view of the telescopic air cylinder.

[0023] Figure 3 It is a structure schematic view of the mounting sleeve.

[0024] Figure 4 It is a sectional structure schematic view of the material taking mechanism.

[0025] Figure 5 It is a structure schematic view of the clamping jaw.

[0026] In the drawing: 1, support table; 2, rotary motor; 3, support rod; 4, support frame; 5, telescopic air cylinder; 6, connecting block; 7, rotary air cylinder; 8, mounting sleeve; 9, push rod; 10, clamping jaw; 11, pressing plate; 12, pressing sleeve; 13, transmission sleeve; 14, micro motor; 15, screw rod; 16, limiting strip; 17, abutting block; 18, compression spring; 19, return spring; 20, refrigeration pipe; 21, blowing fan; 22, air hole; 23, external pipe. DETAILED DESCRIPTION

[0027] It should be noted that the embodiments in the present application and the features in the embodiments can be combined with each other without conflict. The present application will be described in detail below with reference to the drawings and in combination with embodiments.

[0028] It should be noted that, unless otherwise specified, all technical and scientific terms used in the present application have the same meaning as generally understood by those skilled in the art to which the present application belongs.

[0029] In the utility model, in the case that no opposite statement is made, the orientation such as "upper, lower" is usually for the direction shown in the drawing, or for the vertical, perpendicular or gravity direction; similarly, for the convenience of understanding and description, "left, right" is usually for the left, right shown in the drawing; "inner, outer" refers to the inner, outer relative to the contour of each component itself, but the above orientation words are not used to limit the utility model.

[0030] Please refer to Figures 1-5 The utility model relates to a kind of material taking device for silicon carbide crystal production, including support table 1, linkage mechanism is provided on support table 1, linkage mechanism includes rotating motor 2, support rod 3, support frame 4, telescopic cylinder 5, connecting block 6 and rotary cylinder 7, rotating motor 2 is installed on support table 1, support rod 3 is installed in rotating motor 2 output end, support frame 4 is installed in support rod 3 top end, telescopic cylinder 5 is installed in support frame 4 both sides, connecting block 6 is installed in the telescopic end of two groups of telescopic cylinder 5, rotating motor 2 is installed in the bottom surface of two groups of connecting block 6, material taking mechanism is provided below rotating motor 2, material taking mechanism includes mounting sleeve 8, push rod 9, jaw 10, pressing plate 11, pressure sleeve 12 and transmission mechanism, mounting sleeve 8 is installed in rotating motor 2 output end, push rod 9 is provided with multiple groups of sliding in mounting sleeve 8, jaw 10 is installed in the bottom end of multiple push rods 9, pressing plate 11 is provided with multiple groups of rotationally installed in the outer wall of mounting sleeve 8, pressure sleeve 12 is slid in the outer wall of mounting sleeve 8.

[0031] Transmission mechanism includes transmission sleeve 13, micro motor 14 and screw 15, transmission sleeve 13 is installed in the outer wall of pressure sleeve 12, micro motor 14 is installed in the outer wall of mounting sleeve 8, screw 15 is installed in the output end of micro motor 14 and is rotationally connected with mounting sleeve 8, screw 15 is threadedly connected with transmission sleeve 13, when micro motor 14 starts, screw 15 rotates, drives transmission sleeve 13 and pressure sleeve 12 to slide along the outer wall of mounting sleeve 8 by thread connection, the sliding of pressure sleeve 12 drives pressing plate 11 to rotate, and pushing rod 9 is pushed by abutting block 17 to make pushing rod 9 drive jaw 10 to tighten or open.

[0032] The outer wall of mounting sleeve 8 is provided with limit strip 16, limit strip 16 is provided with multiple groups and is slidably connected with pressure sleeve 12, the action of limit strip 16 is to limit the sliding path of pressure sleeve 12, to ensure that pressure sleeve 12 remains stable during sliding, to prevent it from deviating or jamming during movement.

[0033] Multiple push rods 9 top end are each provided with abutting block 17, and the top surface of multiple abutting blocks 17 is provided as arc surface, when pressing plate 11 rotates, pushing rod 9 is pushed by abutting block 17 to make pushing rod 9 drive jaw 10 to tighten.

[0034] The bottom surface of the plurality of abutting blocks 17 is connected with the outer wall of the mounting sleeve 8, and a compression spring 18 is arranged therebetween. When the clamping jaw 10 needs to be released, the pressing plate 11 is reversely rotated, and the abutting blocks 17 are reset under the action of the compression spring 18, and the push rod 9 drives the clamping jaw 10 to open.

[0035] The inner wall of the plurality of pressing plates 11 is connected with the outer wall of the mounting sleeve 8, and a reset spring 19 is arranged therebetween. When the pressing plate 11 is rotated, the reset spring 19 is compressed. When the clamping jaw 10 needs to be released, the reset spring 19 reversely drives the pressing plate 11 to rotate, and the abutting blocks 17 are reset under the action of the compression spring 18, and the push rod 9 drives the clamping jaw 10 to open.

[0036] In the embodiment, when the material needs to be taken, the rotary motor 2 is started to drive the support rod 3 and the support frame 4 to rotate to a predetermined position. Then, the telescopic cylinder 5 is started, the telescopic end of which is extended or shortened to drive the connecting block 6 to move up and down, so that the material taking mechanism moves to a target position. Subsequently, the rotary cylinder 7 is started, the output end of which is rotated to drive the material taking mechanism to move above the silicon carbide crystal. The micro motor 14 is started to rotate the screw rod 15, which drives the transmission sleeve 13 and the pressing sleeve 12 to slide through the threaded connection. The pressing sleeve 12 abuts against the plurality of pressing plates 11 and drives the pressing plates 11 to rotate, and the pressing plates 11 press the reset spring 19. The rotation of the pressing plates 11 drives the push rod 9 through the abutting blocks 17, and the abutting blocks 17 press the compression spring 18. The push rod 9 drives the clamping jaw 10, and then the clamping jaw 10 tightens to grab the silicon carbide crystal. Subsequently, the material taking mechanism is moved to a material placing position through the linkage mechanism. Then, the micro motor 14 is reversely rotated, the screw rod 15 is reversely rotated, and the transmission sleeve 13 and the pressing sleeve 12 are reversely slid through the threaded connection, so that the abutting of the plurality of pressing plates 11 is released. The pressing plates 11 are reversely rotated outwardly through the reset spring 19 to release the abutting of the abutting blocks 17. The abutting blocks 17 are reversely reset through the compression spring 18 to drive the abutting blocks 17 to move outwardly, so that the clamping jaw 10 is opened through the push rod 9 to release the silicon carbide crystal.

[0037] Please refer to Figure 4 , as an embodiment of the cooling mechanism: the mounting sleeve 8 is provided with a cooling mechanism, which includes a refrigeration pipe 20, a blowing fan 21 and a plurality of air holes 22. The refrigeration pipe 20 is arranged in the mounting sleeve 8, the blowing fan 21 is arranged on the top surface of the mounting sleeve 8, and the air holes 22 are arranged on the outer wall of the mounting sleeve 8.

[0038] The refrigeration pipe 20 is provided with an external connection pipe 23 at both ends, and the two external connection pipes 23 extend out of the mounting sleeve 8 and are connected with an external refrigeration device. The external refrigeration device sends refrigerant into the refrigeration pipe 20 through the external connection pipe 23, and the refrigerant in the refrigeration pipe 20 exchanges heat to take away the heat inside the mounting sleeve 8, so as to achieve cooling.

[0039] More specifically, when the taking mechanism works, the external refrigeration device starts, and the refrigerant is transported into the refrigeration pipe 20 through the external pipe 23. The refrigerant in the refrigeration pipe 20 removes the heat inside the mounting sleeve 8 through heat exchange, so as to achieve cooling. At the same time, the blowing fan 21 starts, and the cold air generated by the refrigeration pipe 20 is uniformly distributed to the inside of the mounting sleeve 8 through blowing, so as to ensure that the temperature inside the mounting sleeve 8 is uniformly reduced to cool the silicon carbide crystal. The air flow channel for the blowing operation of the blowing fan 21 is realized through the air permeable hole 22.

[0040] In summary, when the device is in use or operation: when taking materials is needed, the rotating motor 2 starts to drive the support rod 3 and the support frame 4 to rotate to the predetermined position. Then, the telescopic cylinder 5 starts, and the telescopic end thereof is elongated or shortened to drive the connecting block 6 to move up and down, so as to move the taking mechanism to the target position. Subsequently, the rotating cylinder 7 starts, and the output end thereof rotates to drive the taking mechanism to move above the silicon carbide crystal. The micro motor 14 starts to drive the screw rod 15 to rotate. The screw rod 15 drives the transmission sleeve 13 and the pressing sleeve 12 to slide through threaded connection. The pressing sleeve 12 abuts against and pushes the pressure plates 11 to rotate. At the same time, the pressure plates 11 extrude the return springs 19. The rotation of the pressure plates 11 drives the push rod 9 through the abutting block 17, which extrudes the compression spring 18. The push rod 9 drives the clamping jaw 10, and then the clamping jaw 10 tightens to grab the silicon carbide crystal. Subsequently, the taking mechanism is moved to the material placing position through the linkage mechanism. Then, the micro motor 14 reversely rotates, and the screw rod 15 reversely rotates to reversely slide the transmission sleeve 13 and the pressing sleeve 12 through threaded connection, so as to release the abutment of the plurality of pressure plates 11. The pressure plates 11 are pushed outward to rotate by the return springs 19, so as to release the abutment of the abutting block 17. The abutting block 17 is elastically reset by the compression spring 18 to drive the abutting block 17 to move outward, so as to drive the push rod 9 to pull the clamping jaw 10 to open, and the silicon carbide crystal is released.

[0041] When the taking mechanism works, the external refrigeration device starts, and the refrigerant is transported into the refrigeration pipe 20 through the external pipe 23. The refrigerant in the refrigeration pipe 20 removes the heat inside the mounting sleeve 8 through heat exchange, so as to achieve cooling. At the same time, the blowing fan 21 starts, and the cold air generated by the refrigeration pipe 20 is uniformly distributed to the inside of the mounting sleeve 8 through blowing, so as to ensure that the temperature inside the mounting sleeve 8 is uniformly reduced to cool the silicon carbide crystal. The air flow channel for the blowing operation of the blowing fan 21 is realized through the air permeable hole 22.

[0042] In all the above-mentioned solutions, the connection between the two components can be selected according to the actual situation, such as welding, bolt and nut connection, bolt or screw connection or other known connection mode, which will not be described here. In the above, whenever there is a fixed connection, welding is preferred. Although the embodiments of the utility model have been shown and described, those skilled in the art can understand that various changes, modifications, replacements and variations can be made to these embodiments without departing from the principles and spirits of the utility model, and the scope of the utility model is defined by the appended claims and their equivalents.

Claims

1. A material taking-out device for producing silicon carbide crystal, comprising a support table (1), characterized in that: The support table (1) is provided with a linkage mechanism, the linkage mechanism comprises a rotary motor (2), a support rod (3), a support frame (4), a telescopic cylinder (5), a connecting block (6) and a rotary cylinder (7), the rotary motor (2) is installed on the support table (1), the support rod (3) is installed on the output end of the rotary motor (2), the support frame (4) is installed on the top end of the support rod (3), the telescopic cylinder (5) is installed on both sides of the support frame (4), the connecting block (6) is installed on the telescopic end of the two groups of telescopic cylinders (5), the rotary motor (2) is installed on the bottom surface of the two groups of connecting blocks (6), a material taking mechanism is arranged below the rotary motor (2), the material taking mechanism comprises a mounting sleeve (8), a push rod (9), a clamping jaw (10), a pressing plate (11), a pressing sleeve (12) and a transmission mechanism, the mounting sleeve (8) is installed on the output end of the rotary motor (2), the push rod (9) is provided with a plurality of groups of sliding on the mounting sleeve (8), the clamping jaw (10) is installed at the bottom end of the plurality of push rods (9), the pressing plate (11) is provided with a plurality of groups of rotatingly installed on the outer wall of the mounting sleeve (8), and the pressing sleeve (12) slides on the outer wall of the mounting sleeve (8).

2. The material taking-out device for producing silicon carbide crystal according to claim 1, characterized in that: The transmission mechanism comprises a transmission sleeve (13), a micro motor (14) and a screw rod (15), the transmission sleeve (13) is installed on the outer wall of the pressing sleeve (12), the micro motor (14) is installed on the outer wall of the mounting sleeve (8), the screw rod (15) is installed on the output end of the micro motor (14) and is rotationally connected with the mounting sleeve (8), and the screw rod (15) is in threaded connection with the transmission sleeve (13).

3. The material taking-out device for producing silicon carbide crystal according to claim 2, characterized in that: The outer wall of the mounting sleeve (8) is provided with a limiting strip (16), and the limiting strip (16) is provided with a plurality of groups and is in sliding connection with the pressing sleeve (12).

4. The material taking-out device for producing silicon carbide crystal according to claim 3, characterized in that the plurality of groups The top end of the push rod (9) is provided with a resisting block (17), and the top surface of the resisting block (17) is an arc surface.

5. The material taking-out device for producing silicon carbide crystal according to claim 4, characterized in that the plurality of groups of the material taking-out devices are arranged in a plurality of rows. The bottom surface of the resisting block (17) and the outer wall of the mounting sleeve (8) are connected with a compression spring (18).

6. The material taking-out device for producing silicon carbide crystal according to claim 5, characterized in that: A reset spring (19) is connected between the inner wall of the plurality of pressing plates (11) and the outer wall of the mounting sleeve (8).

7. The material taking-out device for producing silicon carbide crystal according to claim 6, characterized in that: A cooling mechanism is arranged in the mounting sleeve (8), the cooling mechanism comprises a refrigeration pipe (20), a blowing fan (21) and a ventilation hole (22), the refrigeration pipe (20) is arranged in the mounting sleeve (8), the blowing fan (21) is installed on the top surface in the mounting sleeve (8), and the ventilation hole (22) is provided with a plurality of groups and is distributed on the outer wall of the mounting sleeve (8).

8. The material taking-out device for producing silicon carbide crystal according to claim 7, characterized in that: External pipes (23) are arranged at both ends of the refrigeration pipe (20), and the two groups of external pipes (23) extend out of the mounting sleeve (8) and are connected with external refrigeration devices.

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