Suction nozzle structure and die bonder

Abstract

The utility model is suitable for the technical field of semiconductor equipment, and provides a suction nozzle structure and a die bonder. The suction nozzle structure comprises a main sleeve body, a working assembly and an elastic piece. The die bonder comprises the suction nozzle structure of any one of the above items. When a chip is sucked, the second opening on the main sleeve body can be communicated with an external air channel, and at the moment, a passage for connecting the suction nozzle body with the external air channel is formed through the first channel and the second channel, so that negative pressure can be generated at the suction nozzle body to suck a chip. In addition, an elastic piece abutting against the first end of the suction nozzle guide rod is further arranged in the first channel, and the elastic piece can deform when the suction nozzle body makes contact with the chip and is extruded, so that the elastic piece can play a role in buffering the whole working assembly. Therefore, the problem that the suction nozzle is easy to damage the chip due to the motion inertia of the swing arm can be avoided, and the die bonding quality is improved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to semiconductor equipment technical field especially, it relates to a suction nozzle structure and fixed crystal machine. BACKGROUND

[0002] The fixed crystal machine is one of the devices for semiconductor device manufacturing, which connects the semiconductor wafer and other components together. The suction nozzle structure is an important part of the fixed crystal machine. In the working process of the fixed crystal machine, the crystal ring is usually supported by the crystal supply platform, then the chip on the crystal ring is separated from the blue film by the needle device, finally the suction nozzle structure is moved and the chip on the crystal ring is sucked by the swing arm driving, then the chip is transported and firmly connected with the solder joint of the packaging substrate to realize the fixed crystal. However, the existing fixed crystal machine has inertia during the swing arm movement, which may cause damage to the chip and affect the quality of the fixed crystal and the product quality when the swing arm drives the suction nozzle structure to suck the chip. SUMMARY

[0003] The utility model aims at providing a suction nozzle structure and fixed crystal machine, which solves the technical problem of the existing suction nozzle structure that is easy to damage the chip during use.

[0004] The utility model is realized in this way, first, a suction nozzle structure is provided, which comprises:

[0005] A main sleeve body is arranged at the end of the swing arm, and the main sleeve body has a first channel arranged along the axis direction of the main sleeve body, and the first channel has a first opening and a second opening;

[0006] A working assembly comprises a suction nozzle guide rod and a suction nozzle body, the first end of the suction nozzle guide rod is movably inserted into the first channel, the second end of the suction nozzle guide rod extends out of the main sleeve body through the first opening, the suction nozzle body is arranged at the second end of the suction nozzle guide rod and is used for adsorbing the chip, and a second channel is arranged on the suction nozzle guide rod and is used for connecting the suction nozzle body and the first channel; and

[0007] An elastic member is arranged in the first channel, the elastic member abuts against the first end of the suction nozzle guide rod, and is deformed to buffer the working assembly when the suction nozzle body is extruded.

[0008] In an alternative embodiment, the second opening is provided with an elastic force adjusting member, which has a degree of freedom of movement along the axis of the main sleeve body, one end of the elastic member abutting against the elastic force adjusting member, and the other end abutting against the mouthpiece guide rod, the elastic force adjusting member being used to adjust the initial compression amount of the elastic member by changing its position, and the elastic force adjusting member being provided with a third channel for connecting the second opening with the outside.

[0009] In an alternative embodiment, the outer wall of the elastic force adjusting member is provided with a first thread, and the inner wall of the first channel is provided with a second thread, the elastic force adjusting member being movably arranged at the second opening through the intermeshing of the first thread and the second thread.

[0010] In an alternative embodiment, the second end of the mouthpiece guide rod is provided with a first plug-in part, and the mouthpiece body is provided with a second plug-in part for plugging with the first plug-in part to achieve the detachable connection of the mouthpiece guide rod and the mouthpiece body.

[0011] In an alternative embodiment, the first opening is further provided with a limiting member, the limiting member being provided with a relief structure for allowing the mouthpiece guide rod to pass through the limiting member, and the first end of the mouthpiece guide rod being provided with an anti-disengagement part for cooperating with the limiting member to prevent the first end of the mouthpiece guide rod from disengaging from the first channel.

[0012] In an alternative embodiment, the main sleeve body is rotatably arranged on the swing arm, and the mouthpiece structure further comprises a mounting end cover for being fixedly arranged on the swing arm, and a sealing structure being arranged between the main sleeve body and the mounting end cover, the main sleeve body being sealingly connected with the mounting end cover and being rotatable relative to the mounting end cover, and the mounting end cover being further provided with a fourth channel for connecting the second opening with an external air passage.

[0013] In an alternative embodiment, the mounting end cover is provided with a pipeline connecting column for plugging with a connecting pipeline, the fourth channel penetrating through the mounting end cover and the pipeline connecting column, and the fourth channel being arranged along the axis of the pipeline connecting column.

[0014] In an alternative embodiment, the outer periphery of the main sleeve body is further provided with a transmission structure, and the transmission structure is used to be drivingly connected with a driving end of a power unit to drive the main sleeve body to rotate around the axis of the main sleeve body by the power unit.

[0015] In an alternative embodiment, the outer sleeve of the main sleeve body is provided with a rotating positioning sleeve, the outer ring of the rotating positioning sleeve is used to abut against the swing arm, and the number of the rotating positioning sleeves is two, and the two rotating positioning sleeves are respectively located on the two sides of the transmission structure.

[0016] In a second aspect, a die bonder is provided, comprising the suction nozzle structure of any one of the above aspects.

[0017] The technical effect of the present application is that the first channel is arranged on the main sleeve body along the axial direction of the main sleeve body, and the first channel has a first opening and a second opening. When the working assembly is assembled with the main sleeve body, the first end of the suction nozzle guide rod is movably inserted into the first channel, the second end of the suction nozzle guide rod extends to the outside of the main sleeve body through the first opening, and the suction nozzle body is installed at the second end of the suction nozzle guide rod. A second channel is arranged on the suction nozzle guide rod to communicate the suction nozzle body with the first channel. In addition, an elastic member is arranged in the first channel and abuts against the first end of the suction nozzle guide rod to deform when the suction nozzle body is pressed to buffer the working assembly. Compared with the suction nozzle structure in the prior art, the second opening of the main sleeve body can be communicated with the external air path during the suction work, and a passage is formed between the first channel and the second channel to connect the suction nozzle body with the external air path, thereby generating negative pressure at the suction nozzle body to suck the chip. In addition, the elastic member arranged in the first channel abuts against the first end of the suction nozzle guide rod, and the elastic member can deform when the suction nozzle body is pressed to contact the chip, so that the elastic member can buffer the working assembly as a whole, thereby avoiding the problem that the swing arm has a large inertia and the suction nozzle is easily damaged when the chip is sucked, and the quality of die bonding is improved.

[0018] It can be understood that the beneficial effects of the second aspect described above can be referred to the related description in the first aspect described above, which will not be repeated here. BRIEF DESCRIPTION OF DRAWINGS

[0019] In order to more clearly illustrate the technical scheme of the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments of the present application or the prior art description. Obviously, the drawings described below are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creating laborious work.

[0020] Figure 1 is a structural schematic diagram of the suction nozzle structure provided by the embodiments of the present application;

[0021] Figure 2 is an exploded structural schematic diagram of the suction nozzle structure provided by the embodiments of the present application;

[0022] Figure 3 is a sectional structure schematic view of the nozzle structure provided by the embodiment of the present application;

[0023] Figure 4 is Figure 2 is an enlarged structure schematic view of position A in the middle;

[0024] Figure 5 is Figure 3 is an enlarged structure schematic view of position B in the middle.

[0025] Mark explanation:

[0026] 1, main sleeve body; 11, first channel; 12, first opening; 13, second opening; 14, transmission structure; 15, second thread; 2, working assembly; 21, nozzle guide rod; 22, nozzle body; 23, second channel; 24, anti-dropping part; 25, first plug-in part; 26, second plug-in part; 3, elastic member; 4, elastic force adjusting member; 41, third channel; 42, first thread; 5, limiting member; 6, mounting end cover; 61, fourth channel; 62, pipeline connecting column; 63, accommodating groove; 7, rotary positioning sleeve; 8, sealing structure; 9, swing arm. DETAILED DESCRIPTION

[0027] The embodiments of the present application are described in detail below, and examples of the embodiments are shown in the drawings, wherein the same or similar reference signs represent the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary and are intended to explain the present application, and cannot be understood as a limitation of the present application.

[0028] In the description of the present application, it should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the purpose of facilitating the description of the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application.

[0029] In addition, the terms "first", "second" are only for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined with "first", "second" can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "multiple" is two or more, unless otherwise specifically limited.

[0030] In the utility model, unless another definite provision and limitation, the terms "mount", "link", "connect", "fix" and so on terms should do broad sense understanding, for example, can be fixed connection, also can be detachable connection, or be integrated;Can be mechanical connection, also can be electrical connection;Can be direct connection, also can through intermediate medium indirectly connect, can be two element internal communication or two element's mutual action relationship.For ordinary skilled person in the art, can understand the concrete meaning of above-mentioned terms in the utility model according to specific circumstances.

[0031] In order to make the purpose, technical scheme and advantages of the utility model more clear and obvious, the utility model is further described in detail below in combination with the drawings and examples.

[0032] Please refer to Figures 1 to 5 As shown in the utility model embodiment, first, a kind of nozzle structure is provided, including main sleeve body 1, working assembly 2 and elastic piece 3.Main sleeve body 1 is used to set in the end of swing arm 9, and main sleeve body 1 has the first passageway 11 being arranged along the axis direction of main sleeve body 1, and the first passageway 11 has first opening 12 and second opening 13.Working assembly 2 includes nozzle guide rod 21 and nozzle body 22, and the first end of nozzle guide rod 21 is movably inserted into first passageway 11, and the second end of nozzle guide rod 21 extends to the outside of main sleeve body 1 by first opening 12, and nozzle body 22 is arranged at the second end of nozzle guide rod 21, for adsorbing chip, and second passageway 23 for connecting nozzle body 22 with first passageway 11 is arranged on nozzle guide rod 21.Elastic piece 3 is located in first passageway 11, and the first end of elastic piece 3 is in abutment with nozzle guide rod 21, for deforming when nozzle body 22 is extruded, to buffer working assembly 2.

[0033] Specifically, main sleeve body 1 refers to the component with certain length, and main sleeve body 1 can be columnar, rod-shaped or block-shaped etc.First passageway 11 refers to the channel structure with certain length, and first passageway 11 is arranged along the axis direction of main sleeve body 1, and first passageway 11 has first opening 12 and second opening 13, and first opening 12 and second opening 13 can be respectively located at two end portions of main sleeve body 1.

[0034] The working assembly 2 refers to an assembly or component for sucking the chip, and the working assembly 2 comprises a suction nozzle guide rod 21 and a suction nozzle body 22. The suction nozzle guide rod 21 and the suction nozzle body 22 can be a split structure, and can be fixed by clamping, inserting or bonding. The suction nozzle guide rod 21 and the suction nozzle body 22 can also be an integral structure, that is, two different parts of the same component. The suction nozzle guide rod 21 refers to a component with a certain length, and the suction nozzle guide rod 21 can be columnar, rod-shaped or block-shaped. The suction nozzle body 22 refers to a component or assembly for sucking objects. The suction nozzle body 22 is provided with a suction port, which usually uses the method of generating negative pressure (lower than atmospheric pressure) at the suction port to suck and adsorb objects or new products. The second channel 23 also refers to a channel structure with a certain length, and both ends of the second channel 23 are open. The second channel 23 can be arranged along the axis direction of the suction nozzle guide rod 21. The suction nozzle body 22 is communicated with the first channel 11 through the second channel 23.

[0035] The elastic member 3 refers to a component that can be elastically deformed when subjected to external force. The elastic member 3 usually has a certain length. The elastic member 3 can be a metal spring, a rubber column or a nitrogen spring. At least part of the elastic member 3 abuts against the first end of the suction nozzle guide rod 21, and another part of the elastic member 3 is fixed by clamping, abutting or fastening. The elastic member 3 can be compressed after being subjected to force.

[0036] The suction nozzle structure provided by the embodiment of the utility model, by setting the first channel 11 along the axis direction of the main sleeve body 1 on the main sleeve body 1, the first channel 11 has the first opening 12 and the second opening 13. When the working assembly 2 and the main sleeve body 1 are assembled, the first end of the suction nozzle guide rod 21 can be movably inserted into the first channel 11, the second end of the suction nozzle guide rod 21 extends to the outside of the main sleeve body 1 through the first opening 12, and the suction nozzle body 22 is installed at the second end of the suction nozzle guide rod 21. In addition, the second channel 23 for communicating the suction nozzle body 22 with the first channel 11 is also arranged on the suction nozzle guide rod 21. Furthermore, the elastic member 3 is arranged in the first channel 11, and the elastic member 3 abuts against the first end of the suction nozzle guide rod 21, which is used for deforming when the suction nozzle body 22 is extruded to buffer the working assembly 2.

[0037] Compared with the suction nozzle structure in the prior art, the second opening 13 on the main sleeve body 1 can be communicated with the external air path during the die bonding work, at this time, the first channel 11 and the second channel 23 form a passage connecting the suction nozzle body 22 with the external air path, so that a negative pressure can be generated at the suction nozzle body 22 to suck the chip. In addition, the elastic member 3 abuts against the first end of the suction nozzle guide rod 21 in the first channel 11. When the suction nozzle body 22 is in contact with the chip and is extruded, the elastic member 3 can be deformed, so that the elastic member 3 can buffer the whole working assembly 2, thereby avoiding the problem that the suction nozzle is easy to damage the chip due to the inertia of the swing arm 9, thereby improving the quality of die bonding.

[0038] In addition, it should be noted that in the embodiment, the elastic member 3 is arranged in the first channel 11, so that the overall volume of the whole suction nozzle structure is smaller. At the same time, the elastic member 3 is arranged in the first channel 11 to buffer the working assembly 2, so that it is not necessary to additionally arrange a buffering structure inside the working assembly 2, thereby making the overall structure of the working assembly 2 simpler and reducing the manufacturing cost of the working assembly 2.

[0039] In one embodiment, please refer to Figure 2 Compared with Figure 4 The elastic force adjusting member 4 is arranged at the second opening 13 and has a degree of freedom of movement along the axis direction of the main sleeve body 1. One end of the elastic member 3 abuts against the elastic force adjusting member 4, and the other end of the elastic member 3 abuts against the first section of the suction nozzle guide rod 21. The elastic force adjusting member 4 is used to adjust the initial compression amount of the elastic member 3 by changing its position, and the elastic force adjusting member 4 has a third channel 41 for communicating the second opening 13 with the outside, and the third channel 41 is arranged through the elastic force adjusting member 4. Specifically, the elastic force adjusting member 4 refers to a component with a certain volume. The elastic force adjusting member 4 can be located entirely in the first channel 11, or only partially in the first channel 11. The elastic force adjusting member 4 can be connected by sliding or screwing, so as to have the degree of freedom of movement along the axis direction of the main sleeve body 1 while being installed.

[0040] In the working process, the elastic member 3 is generally in a compressed state, wherein the initial compression amount of the elastic member 3 refers to the length of the elastic member 3 compressed when the nozzle guide rod 21 is not subjected to extrusion force, and the initial compression amount of the elastic member 3 is different. When the elastic member 3 is compressed by the same distance on the basis of the initial compression amount, the force applied by the elastic member 3 to the nozzle guide rod 21 is also different. The force applied by the nozzle body 22 to the chip when the nozzle body 22 contacts the chip is also different. For example, when the elastic force adjusting member 4 moves towards the nozzle guide rod 21, the initial compression amount of the elastic member 3 increases, and the force applied by the elastic member 3 to the nozzle guide rod 21 increases, and the force applied by the nozzle body 22 to the chip when the nozzle body 22 contacts the chip also increases. When the elastic force adjusting member 4 moves away from the nozzle guide rod 21, the initial compression amount of the elastic member 3 decreases, the force applied by the elastic member 3 to the nozzle guide rod 21 decreases, and the force applied by the nozzle body 22 to the chip when the nozzle body 22 contacts the chip also decreases. The third channel 41 refers to a channel structure with a certain length, and the third channel 41 penetrates the elastic force adjusting member 4.

[0041] In the embodiment, the elastic force adjusting member 4 is arranged at the second opening 13, the elastic member 3 is located between the elastic force adjusting member 4 and the first end of the working assembly 2, and the elastic force adjusting member 4 has a degree of freedom of moving along the axis of the main sleeve 1 relative to the main sleeve 1. The position of the elastic force adjusting member 4 can be adjusted along the axis of the main sleeve 1, so that the initial compression amount of the elastic member 3 can be adjusted, and the elastic force of the elastic member 3 in the working process can be adjusted, so that the extrusion force applied by the nozzle to the chip when the nozzle contacts the chip, i.e. the die bonding force, can be controlled, and the use of the nozzle structure is more convenient. Meanwhile, the third channel 41 is arranged on the elastic force adjusting member 4, the second opening 13 is communicated with the outside through the third channel 41, and the communication between the second opening 13 and the outside air path can be avoided under the premise of adjusting the torque of the elastic member 3 by the elastic force adjusting member 4, so that the structure of the nozzle structure is more reasonable.

[0042] In addition, the elastic force adjusting member 4 is arranged at the second opening 13, and the second opening 13 is located at the end region of the main sleeve 1. After the main sleeve 1 is installed, the second opening 13 and the elastic force adjusting member 4 are generally located at the uppermost position of the main sleeve 1, so that the elastic force adjusting member 4 can be prevented from being blocked by other components, and the position adjustment of the elastic force adjusting member 4 is more convenient, and the adjustment of the elastic force of the elastic member 3 is also more convenient.

[0043] In an optional embodiment, please refer to Figure 4The elastic member 3 comprises a spring. Specifically, the spring refers to a mechanical part that works by using elasticity. It is generally made of elastic material by spiral, and by setting the spring between the elastic adjusting member 4 and the nozzle guide rod 21, and because the spring itself has a passage structure and a gap for the gas flow to pass through, it can play a buffering role on the working assembly 2 while not blocking the gas flow in the first channel 11, making it more convenient for the working assembly 2 to suck crystals.

[0044] In one embodiment, referring to Figure 4 The outer wall of the elastic adjusting member 4 is provided with a first thread 42, and the inner wall of the first channel 11 is provided with a second thread 15. The elastic adjusting member 4 is movably arranged at the second opening 13 by the mutual engagement of the first thread 42 and the second thread 15. Specifically, the first thread 42 and the second thread 15 both refer to the spiral groove structure arranged on the surface of the object. In this embodiment, by arranging the first thread 42 on the outer wall of the elastic adjusting member 4 and the second thread 15 on the inner wall of the first channel 11, and by arranging the first thread 42 and the second thread 15 in mutual engagement, the elastic adjusting member 4 can be arranged at the second opening 13 by the first thread 42 and the second thread 15, which can make the installation of the elastic adjusting member 4 more firm and reliable. When the position of the elastic adjusting member 4 needs to be adjusted, by rotating the elastic adjusting member 4 along its own axis, the elastic adjusting member 4 can move along the axis of the main sleeve body 1 under the action of the first thread 42 and the second thread 15, making the position adjustment of the elastic adjusting member 4 more convenient.

[0045] Based on the above features of the first thread 42 and the second thread 15, referring to Figure 4 The elastic adjusting member 4 is also provided with a rotating structure for cooperating with a tightening tool. Specifically, the rotating structure can be a rotating groove, and the cross section of the rotating groove can be a regular hexagon, which can be driven by an internal hexagonal wrench to rotate the elastic adjusting member 4, making the rotation of the elastic adjusting member 4 more convenient.

[0046] In one embodiment, referring to Figure 5The second end of the mouthpiece guide rod 21 is provided with a first plug-in part 25, and the mouthpiece body 22 is provided with a second plug-in part 26, which is used for plug-in with the first plug-in part 25 to realize the detachable connection of the mouthpiece guide rod 21 and the mouthpiece body 22. Specifically, the first plug-in part 25 and the second plug-in part 26 both refer to structures or components used for plug-in cooperation with other components or structures. The first plug-in part 25 can adopt a plug-in block, which is used for cooperation. When the first plug-in part 25 is a plug-in block, the second plug-in part 26 can be a plug-in groove. The first plug-in part 25 can also adopt a plug-in groove, which is used for cooperation. When the first plug-in part 25 is a plug-in groove, the second plug-in part 26 is a plug-in block. In the embodiment, the second end of the mouthpiece guide rod 21 is provided with the first plug-in part 25, and the mouthpiece body 22 is provided with the second plug-in part 26. When the mouthpiece body 22 is installed to the second end of the mouthpiece guide rod 21, plug-in cooperation of the first plug-in part 25 and the second plug-in part 26 can be realized, so that the installation of the mouthpiece body 22 is more convenient and firm, and the disassembly of the mouthpiece body 22 is more convenient, and the convenience of replacement of the mouthpiece body 22 is improved.

[0047] In an optional embodiment, referring to Figure 5 The first plug-in part 25 includes a plug-in block, and the second plug-in part 26 includes a plug-in groove. Specifically, the plug-in block refers to a block-shaped component with a certain volume, and the plug-in block can be an integral molding structure with the mouthpiece guide rod 21. The plug-in groove refers to a groove structure with a certain depth, and the plug-in groove is recessed on the mouthpiece body 22. During the installation of the mouthpiece body 22, the plug-in block is inserted into the plug-in groove, so that the installation and disassembly of the mouthpiece body 22 are more convenient and fast.

[0048] In an embodiment, referring to Figure 2 and Figure 3 The first opening 12 is also provided with a limiting piece 5, and the limiting piece 5 is provided with a avoiding structure, which is used for avoiding the mouthpiece guide rod 21. The first end of the mouthpiece guide rod 21 is provided with an anti-dropping part 24, which is used for cooperating with the limiting piece 5 to avoid the first end of the mouthpiece guide rod 21 from being dropped out of the first channel 11. Specifically, the limiting piece 5 refers to a component with a certain volume, which can be block-shaped, column-shaped or rod-shaped, etc. The avoiding structure refers to a structure for avoiding other objects, which can be an avoiding hole, an avoiding groove or an avoiding space, etc. The anti-dropping part 24 also refers to a component with a certain volume, which can be block-shaped, column-shaped or plate-shaped, etc.

[0049] In the embodiment, by disassembling the limiting piece 5 at the first opening 12, and setting the avoiding structure on the limiting piece 5, and setting the anti-dropping part 24 at the first end of the suction nozzle guide rod 21, the relative movement between the suction nozzle guide rod 21 and the limiting piece 5 can be realized by passing the suction nozzle guide rod 21 through the avoiding structure when the suction nozzle guide rod 21 is installed, and then the limiting piece 5 is installed at the first opening 12, so as to block the anti-dropping part 24 by the limiting piece 5, and the purpose of avoiding the first end of the suction nozzle guide rod 21 from being dropped out of the first channel 11 is realized without affecting the movement of the suction nozzle guide rod 21, so that the installation of the suction nozzle guide rod 21 is more stable.

[0050] In an optional embodiment, referring to Figure 2 , the limiting piece 5 is threadedly connected with the first channel 11, which makes the installation of the limiting piece 5 more convenient under the premise of ensuring that the limiting piece 5 is firmly installed.

[0051] In an embodiment, referring to Figure 2 , the main sleeve body 1 is rotationally arranged on the swing arm 9, and the suction nozzle structure further comprises a mounting end cover 6, the mounting end cover 6 is used for being fixedly arranged on the swing arm 9, a sealing structure 8 is arranged between the main sleeve body 1 and the mounting end cover 6, the main sleeve body 1 is sealingly connected with the mounting end cover 6 and can rotate relative to the mounting end cover 6, and a fourth channel 61 is further arranged on the mounting end cover 6, the fourth channel 61 is used for connecting the second opening 13 with an external air path. Specifically, the mounting end cover 6 refers to a component with a certain volume, and the mounting end cover 6 can be fixedly installed on the swing arm 9 by means of clamping, welding or fastener connection and the like. The fourth channel 61 refers to a channel structure with a certain length, one end of the fourth channel 61 can be communicated with the second opening 13, and the other end is used for external air path communication. The sealing structure 8 refers to a structure or assembly that can seal the connection area of two components, and the sealing structure 8 can be a sealing ring or a sealing bearing and the like.

[0052] In the embodiment, by rotationally arranging the main sleeve body 1 on the swing arm 9, the angle of the crystal can be finely adjusted by the rotation of the main sleeve body 1 when the crystal pulling work is performed, so that the position and posture of the chip during die bonding are more accurate, and the die bonding is more accurate. At the same time, the mounting end cover 6 is fixedly arranged on the swing arm 9, and the fourth channel 61 is further arranged on the mounting end cover 6, the fourth channel 61 is used for connecting the second opening 13 with an external air path, so that the main sleeve body 1 can still be communicated with the external air path through the fourth channel 61 while rotating, and the sealing structure 8 is arranged between the main sleeve body 1 and the mounting end cover 6, so that the main sleeve body 1 can be sealingly connected with the mounting end cover 6 during rotation, thereby making the connection between the fourth channel 61 and the second opening 13 more airtight, and making the crystal pulling and die bonding work more convenient.

[0053] In an optional embodiment, referring to Figure 4The sealing structure 8 comprises a sealing ring arranged around the axis of the main sleeve 1. Specifically, the sealing ring refers to a ring-shaped component with certain elasticity, and the sealing ring can be made of rubber. The sealing ring can be sleeved on the outside of the main sleeve 1, and the outside of the main sleeve 1 and the mounting end cover 6 are both provided with extrusion surfaces, so that the sealing ring is pressed and fixed by the two extrusion surfaces, thereby achieving static sealing connection and dynamic sealing connection between the main sleeve 1 and the mounting end cover 6.

[0054] In another optional embodiment, referring to Figure 4 The mounting end cover 6 is further provided with a receiving groove 63, the first end of the main sleeve 1 can be inserted into the receiving groove 63, and the second opening 13 is arranged at the first end of the main sleeve 1, and one end of the fourth channel 61 is arranged at the bottom of the receiving groove 63. Meanwhile, the sealing ring can be arranged around the opening of the receiving groove 63, so that the first channel 11 and the fourth channel 61 are more convenient to connect, and the second opening 13 and the fourth channel 61 are more airtight.

[0055] In an embodiment, referring to Figure 3 The mounting end cover 6 is provided with a pipeline connecting column 62, the pipeline connecting column 62 is used for plug-in cooperation with a connecting pipeline, the fourth channel 61 penetrates through the mounting end cover 6 and the pipeline connecting column 62, and the fourth channel 61 is arranged along the axis direction of the pipeline connecting column 62. Specifically, the pipeline connecting column 62 refers to a component with a certain height, and the pipeline connecting column 62 can be column-shaped, rod-shaped or block-shaped, etc. In this embodiment, the mounting end cover 6 is provided with the pipeline connecting column 62, and the fourth channel 61 penetrates through the mounting end cover 6 and the pipeline connecting column 62, so that when the fourth channel 61 is connected with an external air path, the pipeline in the external air path can be sleeved on the outside of the pipeline connecting column 62, thereby making the connection between the fourth channel 61 and the external air path more firm and stable, and further improving the stability and safety of the entire suction nozzle structure during work.

[0056] In an embodiment, referring to Figure 4 The outer periphery of the main sleeve 1 is further provided with a transmission structure 14, and the transmission structure 14 is used for transmission connection with the driving end of the power unit, so as to drive the main sleeve 1 to rotate around the axis of the main sleeve 1 by the power unit. Specifically, the transmission structure 14 refers to a component or assembly that can transmit torque, and the transmission structure 14 can be a gear, a belt pulley or a chain wheel, etc. The transmission structure 14 is integrally formed with the main sleeve 1, and in this embodiment, the outer periphery of the main sleeve 1 is further provided with the transmission structure 14, and the transmission structure 14 is used for transmission connection with the driving end of the power unit, so that the main sleeve 1 can rotate around the axis of the main sleeve 1 under the driving of the power unit, thereby making the rotation adjustment of the main sleeve 1 and the working assembly 2 more convenient, and correcting the chip offset to ensure the die bonding precision.

[0057] In an alternative embodiment, referring to Figure 3 The transmission structure 14 comprises a belt pulley, and the transmission structure 14 is integrally formed with the main sleeve 1. By integrally forming the transmission structure 14 with the main sleeve 1, the structure of the main sleeve 1 can be reasonably arranged, and the length of the swing arm 9 that protrudes from the mouthpiece surface can be reduced.

[0058] In an embodiment, referring to Figure 3 and Figure 4 The outer sleeve of the main sleeve 1 is provided with a rotary positioning sleeve 7. The outer ring of the rotary positioning sleeve 7 is used to abut the swing arm 9. The number of rotary positioning sleeves 7 is two, and the two rotary positioning sleeves 7 are respectively located on the two sides of the transmission structure 14. Specifically, the rotary positioning sleeve 7 refers to a sleeve-shaped component with a certain length. The mounting hole for mounting and accommodating the main sleeve 1 is usually provided on the swing arm 9. The rotary positioning sleeve 7 is located between the inner wall of the mounting hole and the outer surface of the main sleeve 1. The rotary positioning sleeve 7 can limit the position of the main sleeve 1 along the radial direction of the main sleeve 1, so that the installation position of the main sleeve 1 along the radial direction of the main sleeve 1 is more accurate. Meanwhile, the two rotary positioning sleeves 7 are respectively located on the two sides of the transmission structure 14, which limits the position of the main sleeve 1 along the axial direction of the main sleeve 1, so that the installation of the main sleeve 1 along the axial direction of the main sleeve 1 is more stable, and the stability of the mouthpiece structure is improved.

[0059] In an alternative embodiment, referring to Figure 4 The rotary positioning sleeve 7 can be a rotary bearing. The inner ring of the rotary bearing is sleeved on the outer surface of the main sleeve 1, and the outer ring of the rotary bearing abuts the inner wall of the mounting hole on the swing arm 9. By providing the rotary bearing, the rotation of the main sleeve 1 is more flexible and convenient.

[0060] In a second aspect, a pick-and-place machine is provided, comprising the mouthpiece structure according to any one of the above aspects, wherein the main sleeve 1 in the mouthpiece structure can be arranged at the end of the swing arm 9. It can be understood that the beneficial effects of the second aspect described above can be referred to the related description in the first aspect described above, which will not be repeated here.

[0061] The above is only a preferred embodiment of the present application, and only the technical principle of the present application is specifically described. These descriptions are only for explaining the principle of the present application, and cannot be interpreted as limiting the protection scope of the present application in any way. Based on the explanation herein, any modification, equivalent replacement and improvement made within the spirit and principle of the present application, and other specific embodiments of the present application that can be conceived by those skilled in the art without creative labor, should be included in the protection scope of the present application.

Claims

1. A nozzle structure provided on a swing arm, characterized by, The utility model relates to a chip suction nozzle structure, including: a main sleeve body for being arranged at the end of the swing arm, the main sleeve body has a first channel arranged along the axial direction of the main sleeve body, the first channel has a first opening and a second opening; a working assembly including a suction nozzle guide rod and a suction nozzle body, the first end of the suction nozzle guide rod is movably inserted into the first channel, the second end of the suction nozzle guide rod extends out of the main sleeve body through the first opening, the suction nozzle body is arranged at the second end of the suction nozzle guide rod for suctioning a chip, a second channel is arranged on the suction nozzle guide rod for connecting the suction nozzle body and the first channel; and a resilient member located in the first channel, the resilient member abuts against the first end of the suction nozzle guide rod for deforming when the suction nozzle body is extruded to buffer the working assembly.

2. The mouthpiece structure of claim 1, wherein A spring force adjusting member is arranged at the second opening, the spring force adjusting member has a degree of freedom of movement along the axial direction of the main sleeve body relative to the main sleeve body, one end of the resilient member abuts against the spring force adjusting member, and the other end abuts against the suction nozzle guide rod, the spring force adjusting member is used for adjusting the initial compression amount of the resilient member by changing its position, and the spring force adjusting member has a third channel for connecting the first channel and the outside.

3. The mouthpiece structure of claim 2, wherein A first thread is arranged on the outer wall of the spring force adjusting member, and a second thread is arranged on the inner wall of the first channel, the spring force adjusting member is movably arranged at the second opening through the mutual engagement of the first thread and the second thread.

4. The mouthpiece structure of claim 1, wherein A first insertion part is arranged at the second end of the suction nozzle guide rod, a second insertion part is arranged on the suction nozzle body, the second insertion part is used for being inserted with the first insertion part to realize the detachable connection of the suction nozzle guide rod and the suction nozzle body.

5. The mouthpiece structure of claim 1, wherein A limiting member is also detachably arranged at the first opening, an avoiding structure is arranged on the limiting member, the avoiding structure is used for allowing the suction nozzle guide rod to penetrate through the limiting member, a anti-dropping part is arranged at the first end of the suction nozzle guide rod, the anti-dropping part is used for cooperating with the limiting member to avoid the first end of the suction nozzle guide rod from being taken out of the first channel.

6. A mouthpiece structure according to any one of claims 1 to 5, wherein The main sleeve body is rotatably arranged on the swing arm, the suction nozzle structure further includes a mounting end cover, the mounting end cover is used for being fixedly arranged on the swing arm, a sealing structure is arranged between the main sleeve body and the mounting end cover, the main sleeve body is sealingly connected with the mounting end cover and can relatively rotate, a fourth channel is further arranged on the mounting end cover, the fourth channel is used for connecting the second opening and an external air path.

7. The mouthpiece structure of claim 6, wherein A pipeline connecting column is arranged on the mounting end cover, the pipeline connecting column is used for being inserted and matched with a connecting pipeline, the fourth channel penetrates through the mounting end cover and the pipeline connecting column, and the fourth channel is arranged along the axial direction of the pipeline connecting column.

8. A mouthpiece structure according to any one of claims 1 to 5, wherein A transmission structure is further arranged around the outer periphery of the main sleeve body, and the transmission structure is used for being transmissionally connected with the driving end of a power unit to drive the main sleeve body to rotate around the axis of the main sleeve body through the power unit.

9. The mouthpiece structure of claim 8, wherein The outer sleeve of the main sleeve body is provided with a rotating positioning sleeve, the outer ring of the rotating positioning sleeve is used for abutting with the swing arm, the number of the rotating positioning sleeve is two, and the two rotating positioning sleeves are located on the two sides of the transmission structure respectively.

10. A die bonder, characterized by comprising: A mouthpiece structure as claimed in any of claims 1 to 9.

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