Sucker trimming device

Abstract

The utility model relates to the technical field of semiconductor manufacturing, and provides a suction cup trimming device which comprises a support and a trimming unit. The trimming unit comprises an adjusting assembly and a grinding piece, the grinding piece is arranged on the support and used for grinding the surface of the suction cup, and the adjusting assembly is used for adjusting the acting force of the grinding piece on the suction cup. The suction cup trimming device can trim the surface of the suction cup, improve the roughness of the surface of the suction cup and prolong the service life of the suction cup.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor manufacturing, especially relates to a chuck trimming device. BACKGROUND

[0002] In each link of semiconductor production, such as from fine etching to complex photolithography, to precision thin film deposition, the substrate cannot be stabilized and accurately fixed.

[0003] In the prior art, the substrate is usually fixed by suction through a chuck, such as a vacuum chuck, an electrostatic chuck, etc. After the substrate is fixed by suction, it is processed in the corresponding process chamber. After the processing is completed, solid particles are usually generated in the process chamber. If the solid particles fall on the surface of the chuck, the suction effect of the chuck will be affected, and in the next suction process, the particles and the surface of the chuck and the surface of the substrate will generate interaction force, which will easily damage the surface of the chuck and the surface of the substrate. Long-term use will easily increase the roughness of the surface of the chuck and will easily cause abnormal helium flow of the chuck, which will also affect the service life of the chuck.

[0004] Therefore, the utility model provides a chuck trimming device, which can trim the surface of the chuck, improve the roughness of the surface of the chuck, and improve the service life of the chuck. UTILITY MODEL CONTENTS

[0005] The utility model aims at providing a chuck trimming device, which can trim the surface of the chuck, improve the roughness of the surface of the chuck, and improve the service life of the chuck.

[0006] The utility model provides a chuck trimming device, which comprises a support and a trimming unit.

[0007] The trimming unit comprises an adjusting assembly and a grinding piece, the grinding piece is arranged on the support to grind the surface of the chuck, and the adjusting assembly is used to adjust the force of the grinding piece pressing on the chuck.

[0008] Optionally, the grinding piece is arranged to rotate relative to the support.

[0009] Optionally, the grinding piece has a grinding surface, and the rotation axis of the grinding piece is perpendicular to the grinding surface.

[0010] Optionally, the grinding piece is arranged to move on the support.

[0011] Optionally, the movement track of the grinding piece relative to the support is annular.

[0012] Optionally, the support comprises a track, and the grinding piece is arranged to move on the track.

[0013] Optionally, the track is annular.

[0014] Optionally, the adjusting assembly comprises an adjusting body and an adjusting member, the grinding member is arranged on the adjusting body in a linear motion, and the adjusting member is arranged on the adjusting body and used for driving the grinding member to move in the linear motion direction to adjust the force of the grinding member pressing on the suction disc.

[0015] Optionally, the grinding member is detachably arranged on the adjusting body.

[0016] Optionally, when the grinding member is arranged in the relative rotation with the support,

[0017] the grinding member is arranged on the adjusting body in a single-degree-of-freedom linear motion, and the adjusting body is arranged on the support in the rotation to drive the grinding member to rotate.

[0018] In this way, the suction disc trimming device can be used for trimming the surface of the suction disc, so that the roughness of the surface of the suction disc is restored to an ideal level, so as to ensure the adsorption effect of the suction disc. Meanwhile, the phenomenon of abnormal helium flow caused by the damage of the surface of the suction disc can be improved. The suction disc trimming device helps to improve the service life of the suction disc and reduce the use cost of the suction disc. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 FIG. 4 is a side view of a suction disc trimming device according to an embodiment of the present application;

[0020] Figure 2 FIG. 5 is a top view of a suction disc trimming device according to an embodiment of the present application;

[0021] Figure 3 FIG. 6 is a partial view of a suction disc trimming device according to an embodiment of the present application.

[0022] In the drawings:

[0023] 10 - support; 11 - track; 12 - leg;

[0024] 20 - trimming unit; 21 - adjusting assembly; 211 - adjusting body; 212 - adjusting member; 213 - sliding seat; 214 - connecting rod; 215 - elastic member; 216 - handle; 217 - sliding block; 22 - grinding member; 221 - grinding surface; 30 - suction disc. DETAILED DESCRIPTION

[0025] The suction cup trimming device is further described in detail below in combination with the drawings and specific embodiments. The advantages and features of the present application will be more apparent according to the following description. It should be noted that the drawings are in a very simplified form and all use non-precise proportions, only for the purpose of conveniently and clearly assisting the description of the embodiments of the present application.

[0026] As used in the present application, the singular forms "a", "an" and "the" include plural referents unless the context clearly dictates otherwise. The term "or" is generally employed in its sense including "and / or" unless the content clearly dictates otherwise. The term "at least two" or "a plurality of" is generally employed in its sense including "two or more" unless the content clearly dictates otherwise. In addition, the terms "first", "second", "third", etc. are used only for descriptive purposes and should not be construed as indicating or implying relative importance or an indicated number of technical features. Thus, the features defined as "first", "second", "third" can explicitly or implicitly include one or at least two of the features. In addition, as used in the present application, "mounting", "connection", "connection", "setting" of one element to another element should be interpreted broadly, generally only indicating a connection, coupling, cooperation or transmission relationship between two elements, and the two elements can be directly or indirectly connected, coupled, cooperated or transmitted, and cannot be understood as indicating or implying the spatial position relationship between the two elements, i.e. one element can be in any direction inside, outside, above, below or one side of another element, unless the content is otherwise clearly indicated. For ordinary skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances. In addition, directional terms such as upper, lower, up, down, left, right, etc. are used with respect to the exemplary embodiments as they are shown in the drawings, upward or upward direction is toward the top of the corresponding drawing, and downward or downward direction is toward the bottom of the corresponding drawing.

[0027] The present embodiment provides a suction cup trimming device, comprising: a bracket 10 and a trimming unit 20;

[0028] The trimming unit 20 comprises an adjusting assembly 21 and a grinding piece 22, the grinding piece 22 is arranged on the bracket 10 for grinding the surface of the suction cup, and the adjusting assembly 21 is used for adjusting the acting force of the grinding piece 22 on the suction cup.

[0029] In combination Figure 1 And Figure 2 As shown in the drawings, the bracket 10 comprises a track 11, the track 11 is annular, and the grinding piece 22 is slidably arranged on the track 11. Therefore, when the grinding piece 22 moves along the track 11, the movement track of the grinding piece 22 relative to the bracket 10 is annular.

[0030] In addition, the support 10 further comprises a plurality of legs 12 connected to the track 11 and extending along the axial direction of the track 11. The legs 12 are evenly arranged along the circumferential direction of the track 11. The legs 12 are arranged such that a polishing space for accommodating the chuck is formed below the track 11 and surrounded by the legs 12. When polishing the chuck, the chuck can be placed in the polishing space formed by the legs 12 below the track 11.

[0031] In the embodiment, the legs 12 are in the shape of long strips. The legs 12 can have a circular or rectangular cross section, and the specific shape of the legs 12 can be set based on the use requirements. For example, the inner side of the leg 12 can be arranged as an arc surface structure matching the shape of the outer circumferential surface of the chuck. The inner side of each leg 12 can be conformally fitted to the outer circumferential surface of the chuck, thereby achieving positioning of the chuck.

[0032] In combination with Figure 1 As shown, the chuck 30 is placed in the polishing space below the track 11, and the polishing member 22 abuts against the surface of the chuck 30 for polishing. The adjusting assembly 21 can adjust the force with which the polishing member 22 presses against the surface of the chuck 30, so as to adjust the friction between the polishing member 22 and the surface of the chuck 30.

[0033] In actual polishing, the legs 12 of the support 10 can be fixed to a workbench (not shown in the figure), and the chuck 30 is placed on the workbench. Alternatively, the support 10 can be additionally provided with a base, and the legs 12 can be detachably connected to the base. In polishing, the chuck 30 is carried on the base.

[0034] The chuck polishing device described above can be used to polish the surface of the chuck, so that the roughness of the surface of the chuck is restored to the ideal level, thereby ensuring the adsorption effect of the chuck. At the same time, it can also improve the phenomenon of abnormal helium flow caused by damage to the surface of the chuck. The chuck polishing device helps to improve the service life of the chuck and reduce the use cost of the chuck.

[0035] The chuck polishing device described above can be used for surface polishing of an electrostatic chuck, and can also be used for surface roughness polishing of a vacuum chuck or other types of chucks.

[0036] In the embodiment, the polishing member 22 is in the shape of a disc. The polishing member 22 can have a circular or rectangular cross section, and the specific shape of the polishing member 22 can be set based on the use requirements. Figure 1The lower end of the grinding member 22 is provided with a grinding surface 221 which is in contact with the surface of the chuck 30. The grinding surface 221 and the surface of the chuck 30 are in relative motion, so as to grind and trim the surface of the chuck 30. The grinding member 22 can be made of diamond, silicon carbide, alumina or the like, and the material thereof can be adjusted according to the grinding precision requirement. In other alternative embodiments, the grinding member 22 can be in a cylindrical structure, and the outer circumferential surface thereof can be used as the grinding surface. The grinding surface and the surface of the chuck 30 are in relative motion, so as to grind and trim the surface of the chuck 30. The specific shape of the grinding member 22 can be adjusted according to the actual requirement.

[0037] In the embodiment, the track 11 is in a circular ring shape, and the grinding member 22 can revolve along the track 11. As shown in Figure 1 the grinding member 22 is pressed against the surface of the chuck 30 near the edge thereof. Therefore, when the grinding member 22 revolves along the track 11, the edge of the surface of the chuck 30 can be ground and trimmed. In actual use, the surface of the chuck 30 is easy to be damaged near the edge thereof, so the above-mentioned setting mode is more in line with the trimming requirement of the actual damage position of the chuck 30. In other alternative embodiments, the grinding member 22 can also be arranged to move radially relative to the track 11, so as to adjust the grinding position. Alternatively, in other alternative embodiments, the track 11 can be composed of an X-direction track and a Y-direction track which are perpendicular to each other, so that the grinding member 22 can move in the X-direction and the Y-direction which are parallel to the surface of the chuck 30, thereby flexibly adjusting the position of the grinding member 22 relative to the chuck 30, so as to grind and trim any position of the surface of the chuck 30.

[0038] In the embodiment, the chuck 30 is relatively static, and the grinding member 22 revolves along the track 11 during the grinding process. In other alternative embodiments, the grinding member 22 can be fixedly arranged on the support 10, and the chuck 30 can be driven to rotate by an external device, so that the chuck 30 and the grinding member 22 are in relative motion, thereby grinding the surface of the chuck.

[0039] In the embodiment, the grinding member 22 is arranged to rotate relative to the support 10. The rotation axis of the grinding member 22 is perpendicular to the grinding surface 221. The grinding member 22 rotates to make the grinding surface 221 move relative to the surface of the chuck 30, thereby grinding and trimming the surface of the chuck 30. The grinding member 22 adjusts the position relative to the chuck 30 by revolving, thereby adjusting the grinding position.

[0040] As shown in Figure 3 the adjusting assembly 21 includes an adjusting body 211 and an adjusting member 212.

[0041] In the embodiment, the adjusting body 211 is in a hollow shell structure. Specifically, the adjusting body 211 is in a sleeve structure, and the axial direction of the adjusting body 211 is parallel to the axial direction of the track 11. The adjusting assembly 21 further comprises a sliding seat 213, which is arranged inside the adjusting body 211 and is arranged to slide in the axial direction of the adjusting body 211 in one degree of freedom. The outer shape of the sliding seat 213 can be, for example, a spline structure, and the position where the inner wall of the adjusting body 211 cooperates with the sliding seat 213 can be an inner spline structure that matches the sliding seat 213, so as to realize the one-degree-of-freedom sliding cooperation of the two. The sliding seat 213 is connected with a connecting rod 214, one end of the connecting rod 214 is connected with the sliding seat 213, and the other end is slidably arranged to pass through the lower end of the adjusting body 211. The end of the connecting rod 214 located outside the adjusting body 211 is provided with external threads, and the grinding piece 22 is detachably screwed on the connecting rod 214, so as to facilitate the replacement of the grinding piece 22, thereby meeting the grinding requirements of different roughnesses.

[0042] Please continue to refer to Figure 3 As shown, the adjusting member 212 is in a screw structure, and the adjusting member 212 is coaxially arranged with the adjusting body 211. The adjusting member 212 is screwed on the upper end of the adjusting body 211, and a part of the adjusting member 212 is located outside the adjusting body 211, and another part is located inside the adjusting body 211. When the adjusting member 212 rotates relative to the adjusting body 211, a pressure along the linear motion direction of the sliding seat 213 can be applied to the sliding seat 213, so that the sliding seat 213 moves axially relative to the adjusting body 211, and the pressure of the grinding piece 22 pressed on the surface of the suction cup 30 is adjusted.

[0043] Please continue to refer to Figure 3 As shown, the adjusting member 212 is in a stepped shaft structure, the small-diameter section of which is a threaded section, and the large-diameter section is located inside the adjusting body 211 and is in conformal cooperation with the inner cavity of the adjusting body 211. The large-diameter section of the adjusting member 212 is in a smooth surface structure, and the large-diameter section of the adjusting member 212 can rotate or axially slide relative to the adjusting body 211. The end face of the large-diameter section of the adjusting member 212 can apply a pressure to the sliding seat 213 to ensure a more uniform force.

[0044] Please continue to refer to Figure 3 As shown, in the embodiment, the adjusting assembly 21 further comprises an elastic member 215, which is arranged inside the adjusting body 211 and located between the large-diameter section of the adjusting member 212 and the sliding seat 213. At this time, the adjusting member 212 can apply an elastic force to the sliding seat 213 through the elastic member 215, so as to ensure that the grinding piece 22 is elastically pressed on the surface of the suction cup 30.

[0045] In the embodiment, the elastic member 215 is a cylindrical coil spring. In other alternative embodiments, the elastic member 215 can be a disc spring or other known elastic structure.

[0046] Please continue to refer to Figure 3 As shown in the figure, in this embodiment, the adjusting assembly 21 further comprises a handle 216 connected to the end of the small-diameter section of the adjusting member 212, for manually rotating the adjusting member 212. The handle 216 can be circular, cross-shaped, one-character-shaped or other shapes, and the specific structure of the handle 216 can be adjusted based on actual use requirements. In other alternative embodiments, the adjusting member 212 can also be externally connected to a motor or other driving device for driving its rotation.

[0047] In other alternative embodiments, a spring can be added between the sliding seat 213 and the bottom of the adjusting body 211 to automatically reset the sliding seat 213.

[0048] In this embodiment, the adjusting body 211 adopts a hollow shell structure, which serves as the shell of the adjusting member 212, the sliding seat 213, the connecting rod 214 and the spring 215. In other alternative embodiments, the adjusting body 211 can be the shell of an air cylinder, in which case the adjusting member 212 can be the output shaft of the air cylinder, and the grinding member 22 can be detachably connected to the output shaft of the air cylinder. Alternatively, the adjusting body 211 can be the shell of a hydraulic cylinder, in which case the adjusting member 212 can be the output shaft of the hydraulic cylinder, and the grinding member 22 can be detachably connected to the output shaft of the hydraulic cylinder. Alternatively, the adjusting body 211 can be the shell of a motor, in which case the adjusting member 212 can be the rotor of the motor, and the grinding member 22 can be detachably connected to the output shaft of the motor.

[0049] In this embodiment, the adjusting body 211 adopts a hollow shell structure. In other alternative embodiments, the adjusting body 211 can also adopt a solid structure, in which case the adjusting member 212 can be installed on the adjusting body 211 in a threaded connection manner. The specific connection manner of the adjusting member 212 can be flexibly adjusted based on the actual structure of the adjusting body 211.

[0050] Please continue to refer to Figure 3 As shown in the figure, in this embodiment, the adjusting body 211 is arranged to rotate on the support 10, and the rotation central axis of the adjusting body 211 coincides with its own central axis.

[0051] Specifically, in this embodiment, the adjusting assembly 21 further comprises a sliding block 217, and an installation hole for installing the adjusting body 211 is formed in the sliding block 217. The adjusting body 211 is installed to rotate in the installation hole. In addition, an annular slide is formed in the outer wall of the adjusting body 211 and the inner wall of the installation hole, and the two slides are arranged in a radial direction. A ball or a snap spring can be arranged between the two slides to realize the single-degree-of-freedom rotation cooperation between the adjusting body 211 and the sliding block 217. When the adjusting body 211 rotates relative to the sliding block 217, it drives the grinding member 22 to rotate relative to the support 10.

[0052] In other alternative embodiments, the adjusting body 211 can be rotatably mounted on the sliding block 217, and the adjusting body 211 is rotatably mounted, which is a prior art and will not be described here.

[0053] In other alternative embodiments, the adjusting body 211 can be fixedly mounted on the sliding block 217, and a motor driving connecting rod 214 is additionally arranged inside the adjusting body 211 to rotate, so as to realize the rotation driving of the grinding piece 22. The rotation mode of the grinding piece 22 can be flexibly adjusted based on actual needs.

[0054] In other alternative embodiments, the adjusting body 211 can also be arranged on the sliding block 217 to move linearly in the axial direction, and a motor can be fixedly arranged on the adjusting body 211, and the grinding piece 22 is connected with the output shaft of the motor. At this time, the adjusting part 212 and the sliding seat 213 and other components do not need to be configured. When the adjusting body 211 moves linearly in the axial direction relative to the sliding block 217, the grinding piece 22 can be driven to move linearly, so as to adjust the force acting on the suction cup. The motor arranged on the adjusting body 211 can drive the grinding piece 22 to rotate. Therefore, the grinding piece 22 still maintains the rotation and linear motion relative to the support 10.

[0055] In other alternative embodiments, in order to accurately control the force between the grinding piece 22 and the suction cup 30, a pressure sensor can also be additionally arranged, for example, a pressure sensor is arranged at the position where the connecting rod 214 is connected with the grinding piece 22, so as to accurately obtain the pressure of the grinding piece 22 on the suction cup 30, and then the grinding effect can be accurately controlled, so that the surface roughness of the suction cup 30 is restored to an ideal level.

[0056] Please continue to refer to Figure 3 As shown in the figure, in the embodiment, the track 11 is a T-shaped track, and the sliding block 217 has a T-shaped groove matched with the track 11. The sliding block 217 is mounted on the track 11 in a conforming sliding manner, and the sliding block 217 slides along the track 11, thereby driving the adjusting body 211 and the grinding piece 22 to slide along the track 11, so as to realize the revolution motion of the grinding piece 22. In other alternative embodiments, the track 11 can adopt a rectangular shape, an H shape or other known structures.

[0057] In the embodiment, the sliding block 217 moves along the track 11 by manual driving. In other alternative embodiments, an electric wheel can be additionally arranged on the sliding block 217, the electric wheel is in rolling cooperation with the track 11, and the sliding block 217 is driven to slide along the track 11 by the rotation of the electric wheel, so as to improve the automatic performance of the entire suction cup trimming device.

[0058] In the present specification, each embodiment is described in a progressive manner, and each embodiment focuses on the difference from other embodiments. The same or similar parts between each embodiment can be referred to each other.

[0059] The above description is only a description of the preferred embodiments of the present application, and is not any limitation on the scope of the present application. Any modification or modification made by a person skilled in the art according to the above disclosure is within the protection scope of the claims.

Claims

1. A suction cup trimming device, characterized in that, The application relates to a polishing device for polishing a surface of a suction cup, comprising: a support and a trimming unit; the trimming unit comprises an adjusting assembly and a grinding piece, the grinding piece is arranged on the support for polishing the surface of the suction cup, and the adjusting assembly is used for adjusting the pressing force of the grinding piece on the suction cup.

2. The chucking apparatus of claim 1, wherein The grinding piece is arranged in self-rotation relative to the support.

3. The chucking apparatus of claim 2, wherein The grinding piece is provided with a grinding surface, and the self-rotation axis of the grinding piece is perpendicular to the grinding surface.

4. The chucking apparatus of claim 1, wherein The grinding piece is arranged in motion on the support.

5. The chucking apparatus of claim 4, wherein The motion track of the grinding piece relative to the support is annular.

6. The chucking apparatus of claim 5, wherein The support comprises a track, and the grinding piece is arranged in motion on the track.

7. The chucking apparatus of claim 6, wherein The track is annular.

8. The chucking apparatus of claim 1 wherein, The grinding piece is detachably arranged on the adjusting assembly.

9. The chucking apparatus of any one of claims 1 to 8, wherein, The adjusting assembly comprises an adjusting body and an adjusting piece. The grinding piece is arranged in linear motion on the adjusting body. The adjusting piece is arranged on the adjusting body and used for driving the motion of the grinding piece in the linear motion direction, so as to adjust the pressing force of the grinding piece on the suction cup.

10. The chucking apparatus of claim 9, wherein When the grinding piece is arranged in self-rotation relative to the support, the grinding piece is arranged in single-degree-of-freedom linear motion on the adjusting body, and the adjusting body is arranged in self-rotation on the support, so as to drive the self-rotation of the grinding piece.

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