Vacuum pump cooling auxiliary device

Abstract

The utility model belongs to the technical field of vacuum pumps, and particularly relates to a vacuum pump cooling auxiliary device which comprises a vacuum pump and a filtering system, the filtering system is connected with the vacuum pump and a first cooling system, the first cooling system is connected with a second cooling system, and the second cooling system is connected with the water inlet end of the vacuum pump. The vacuum pump, the filtering system, the first cooling system and the second cooling system are all connected with the control system; the cooling auxiliary device can form a complete cooling liquid circulation loop, not only solves the problems that the vacuum pump is prone to scaling and low in cooling efficiency in the cooling process, but also lowers the requirement for water quality and reduces the corrosion risk caused by scaling, so that the service life of the vacuum pump is prolonged, the working efficiency of the vacuum pump is improved, and the service life of the vacuum pump is prolonged. And through intelligent management of the control system, automation and accurate control of the cooling process are achieved, and the cooling effect is further improved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to vacuum pump technical field, concretely relates to a vacuum pump cooling auxiliary device. BACKGROUND

[0002] As a kind of in scientific research, industrial production, semiconductor manufacturing, aerospace and other fields widely used equipment, its core function is to create lower than atmospheric pressure environment to meet the specific process requirement. However, in the running process, vacuum pump interior will produce a large amount of heat due to the high-speed rotating component friction, gas compression heat and other factors, if not effectively dissipate heat, it will lead to pump body temperature rise, in turn affect its working efficiency, shorten service life, even cause failure.

[0003] At present, the common vacuum pump cooling mode on market mainly includes natural cooling, air cooling and water cooling etc. Natural cooling relies on the heat conduction of pump body material and the airflow of surrounding environment to dissipate heat, and the efficiency is lower, suitable for small power or low load working condition. Air cooling system improves heat dissipation efficiency by fan forced air convection, but limited by the heat capacity of air, for high-power vacuum pump, the heat dissipation effect is limited, water cooling system uses circulating coolant to take away heat, and the heat dissipation effect is remarkable, but still has a series of problems, the most notable of which is that cooling water channel is easy to scale. Because of the impurities such as mineral matter, microorganism and its metabolites contained in water, in long time circulation process, it will gradually deposit in the inner wall of cooling water channel, form difficult to remove scale, which not only reduces the cooling efficiency, increases energy consumption, but also may cause cooling system failure due to water channel blockage, seriously even affect the normal work of vacuum pump, shorten the service life of equipment, increase maintenance cost.

[0004] In addition, the existing water-cooled cooling device also has the problems of high water quality requirement and corrosion risk caused by scaling, therefore, there is an urgent need for a device that can effectively solve the problems of easy scaling and low cooling efficiency of water-cooled cooling device. UTILITY MODEL CONTENTS

[0005] In view of the above shortcomings of the prior art, the utility model provides a vacuum pump cooling auxiliary device, which solves the problems of easy scaling and low cooling efficiency of the existing cooling device.

[0006] To achieve the above purpose, the technical scheme adopted by the utility model is as follows:

[0007] The application provides a vacuum pump cooling auxiliary device, which comprises a vacuum pump and a filtering system, a water inlet end of the filtering system is connected with a water outlet end of the vacuum pump, a water outlet end of the filtering system is connected with a water inlet end of a first cooling system, a water outlet end of the first cooling system is connected with a water inlet end of a second cooling system, a water outlet end of the second cooling system is connected with a water inlet end of the vacuum pump, and the vacuum pump, the filtering system, the first cooling system and the second cooling system are connected with a control system.

[0008] The filtering system comprises a cylinder body, a first water inlet and a first water outlet are arranged above the cylinder body, a second water outlet is arranged below the cylinder body, a filtering assembly is arranged in the cylinder body, the filtering assembly comprises a first filtering cylinder and a second filtering cylinder, a first filtering membrane is arranged on the first filtering cylinder, a second filtering membrane is arranged on the second filtering cylinder, the second filtering cylinder is arranged outside the first filtering cylinder, a water inlet end of the first filtering cylinder is communicated with the first water inlet, and the pore diameter of the first filtering membrane is larger than that of the second filtering membrane.

[0009] The device can effectively solve the problem of easy scaling during the cooling process of the vacuum pump, reduce the problem of low cooling efficiency caused by scaling, prolong the service life of the vacuum pump, improve the working efficiency, and realize the automation, intelligence and accurate control of the cooling process through the automatic management of the control system, thereby further improving the cooling effect. The filtering system can be provided with two or more filtering levels according to actual needs, thereby effectively removing impurities and particulate matters in the circulating water after the cooling of the vacuum pump, the first filtering membrane on the first filtering cylinder has a large pore diameter and can preliminarily filter large impurities, the second filtering membrane on the second filtering cylinder has a small pore diameter and can further remove fine particulate matters, and the problem that the impurities filtered out are accumulated and block the filter membrane due to long filtering time of a single filtering hole can be avoided, the water quality cleanliness entering the first cooling system and the second cooling system is ensured through the double filtering mechanism, the possibility of scaling in the cooling water channel is reduced, the cooling efficiency is ensured, and the energy consumption is reduced. The first cooling system can preliminarily cool the circulating water, and the second cooling system can realize secondary cooling, thereby further reducing the temperature of the circulating water, and the step-by-step cooling of the circulating water can be realized through the synergistic effect of the first cooling system and the second cooling system, the cooling efficiency is improved, and effective heat dissipation of the vacuum pump during the operation process is ensured.

[0010] Further, the first cooling system comprises a first cooling water tank, a second water inlet is arranged on one side of the upper portion of the first cooling water tank, the second water inlet is connected with the second water outlet through a first pipeline, a first water pump and a first control valve are arranged on the first pipeline, a third water outlet is arranged on one side of the lower portion of the first cooling water tank, the third water outlet is connected with the second cooling system through a second pipeline, a second control valve is arranged on the second pipeline, and a refrigeration fin is arranged in the first cooling water tank.

[0011] The beneficial effects of the above technical scheme are that the second water inlet is used to receive the circulating water filtered by the filtering system and make the circulating water enter the first cooling water tank, the refrigerating fin can be started by the control system to quickly absorb and take away the heat in the circulating water, rapid cooling is realized, the circulating water preliminarily cooled by the first cooling system can enter the second cooling system through the second water outlet, and the first control valve can control the opening and closing of the first pipeline, whether the first cooling system is started or not can be selected according to actual needs, the preliminary cooling of the circulating water by the first cooling system can reduce the burden of the second cooling system and improve the cooling efficiency and stability of the whole cooling system.

[0012] Further, the second cooling system comprises a second cooling water tank, a third water inlet is arranged on one side below the second cooling water tank, the third water inlet is connected with a second pipeline, the second pipeline is connected with a fifth pipeline, the fifth pipeline is connected with the first water outlet, and a third water pump and a third control valve are arranged on the fifth pipeline; a fourth water outlet is arranged on one side above the second cooling water tank, the fourth water outlet is connected with the water inlet end of the vacuum pump through a third pipeline; and a heat dissipation pipeline is arranged in the second cooling water tank, the water inlet end of the heat dissipation pipeline is connected with the third water inlet, and the outlet end of the heat dissipation pipeline is connected with the fourth water outlet.

[0013] The beneficial effects of the above technical scheme are that when the second control valve is closed and the third control valve is opened, the second cooling water tank can directly receive the circulating water from the filtering system, and when the third control valve is closed and the second control valve is opened, the second cooling water tank can receive the circulating water preliminarily cooled by the first cooling water tank, the heat dissipation pipeline in the second cooling water tank can absorb the heat in the circulating water, so that the secondary cooling of the circulating water is realized, the circulating water cooled is re-input into the vacuum pump through the fourth water outlet, the vacuum pump is cooled, the cooling efficiency is improved through the second cooling system, so that the cooling effect of the vacuum pump is ensured, and the energy consumption and maintenance cost are reduced.

[0014] Further, the heat dissipation pipeline is in an "S" shape.

[0015] The beneficial effects of the above technical scheme are that the "S" shape layout can increase the cooling path, increase the time of the circulating water in the pipeline, increase the contact area of the heat dissipation pipeline and the circulating water, and be beneficial to accelerating the cooling rate of the circulating water, so that the cooling effect is improved.

[0016] Further, a water storage cavity is arranged at the lower end of the second cooling water tank, a fifth water outlet is arranged on one side of the water storage cavity, the fifth water outlet is connected with a spraying pipeline through a fourth pipeline, a plurality of spray heads are arranged on the spraying pipeline, and the spraying pipeline is arranged at the upper end and the side wall of the second cooling water tank; and a fourth control valve is arranged on the fourth pipeline.

[0017] The beneficial effects of the above technical scheme are that the water storage cavity at the lower end of the second cooling water tank can be used to store a certain amount of water, the water can be sprayed in the form of mist through the spray pipe connected with the water storage cavity and the plurality of nozzles, the temperature in the second cooling water tank can be further reduced, the heat exchange rate can be improved, and impurities and particulate matters on the surface of the water tank can be removed to keep the second cooling tank clean.

[0018] Further, one side of the vacuum pump is provided with a cooling fan, and the cooling fan is connected with the control system.

[0019] The beneficial effects of the above technical scheme are that the cooling fan can effectively remove the heat on the surface of the vacuum pump during operation, effectively reduce the temperature of the pump body, and prevent performance degradation or failure caused by excessively high temperature.

[0020] In summary, the vacuum pump cooling auxiliary device has the following beneficial effects:

[0021] (1) The vacuum pump cooling auxiliary device mainly comprises a vacuum pump, a filtering system, a first cooling system, a second cooling system, and a control system, can form a complete cooling liquid circulation loop, solves the problems of easy scaling and low cooling efficiency during the cooling process of the vacuum pump, reduces the requirement for water quality, reduces the corrosion risk caused by scaling, prolongs the service life of the vacuum pump, improves the working efficiency, and realizes the automation and accurate control of the cooling process through the intelligent management of the control system, and further improves the cooling effect.

[0022] (2) The filtering system effectively removes impurities and particulate matters in the cooling water through two-stage filtering, ensures the cleanliness of the water entering the cooling system, reduces the possibility of scaling in the cooling water channel, improves the cooling efficiency, and reduces the energy consumption.

[0023] (3) The first cooling system realizes the preliminary cooling of the cooling water through the combination of the first cooling water tank and the refrigeration fin, the refrigeration fin can quickly and effectively absorb the heat in the cooling water, the preliminary cooling of the circulating water can be realized when the temperature of the circulating water is high through the first cooling system, the burden of the second cooling system is reduced, and the cooling efficiency and stability of the entire cooling system are improved.

[0024] (4) The second cooling system realizes the secondary cooling of the cooling water through the combination of the second cooling water tank and the heat dissipation pipeline, and the heat dissipation pipeline is arranged in an "S" shape, the contact area and time of the cooling water and the inner wall of the heat dissipation pipeline are increased, and the heat dissipation efficiency is improved.

[0025] (5) The second cooling water tank can further reduce the temperature in the second cooling water tank, improve the heat exchange rate, and remove impurities and particulate matters on the surface of the water tank to keep the second cooling tank clean through the connection with the spray pipeline and the nozzles. BRIEF DESCRIPTION OF DRAWINGS

[0026] Figure 1 is a front view of the present application;

[0027] Figure 2 is a rear view of the present application;

[0028] Figure 3 is a structure schematic view of the filtering system in the present application;

[0029] Figure 4 is a structure schematic view of the second cooling system in the present application;

[0030] Wherein, 1, vacuum pump; 2, filtering system; 21, barrel; 22, first water inlet; 23, first water outlet; 24, second water outlet; 25, first filter cartridge; 26, first filter membrane; 27, second filter cartridge; 28, second filter membrane; 3, first cooling system; 31, first cooling water tank; 32, second water inlet; 33, first pipeline; 34, third water outlet; 35, second pipeline; 4, second cooling system; 41, second cooling water tank; 42, third water inlet; 43, fifth pipeline; 44, fourth water outlet; 45, third pipeline; 46, heat dissipation pipeline; 47, water storage cavity; 48, fifth water outlet; 49, spraying pipeline; 410, spray head; 5, heat dissipation fan. DETAILED DESCRIPTION

[0031] The specific embodiments of the present application are described below to facilitate the understanding of the present application for those skilled in the art, but it should be clear that the present application is not limited to the scope of the specific embodiments, for those skilled in the art, as long as various changes are within the spirit and scope of the present application defined and determined by the appended claims, these changes are obvious, all the utility model creations utilizing the concept of the present application are within the scope of protection.

[0032] Example 1

[0033] As Figures 1-4As shown, the vacuum pump cooling auxiliary device provided by the utility model, including vacuum pump 1 and filter system 2, the water inlet end of filter system 2 is connected with the water outlet end of vacuum pump 1, the water outlet end of filter system 2 is connected with the water inlet end of second cooling system 4, the water outlet end of second cooling system 4 is connected with the water inlet end of vacuum pump 1, vacuum pump 1, filter system 2 and second cooling system 4 are connected with control system;The vacuum cooling auxiliary device passes through the synergies of vacuum pump 1, filter system 2 and second cooling system 4, can use when the working temperature of vacuum pump 1 is lower or the cooling demand is lower, passes through the circulation path of vacuum pump 1-filter system 2-second cooling system 4-vacuum pump 1, can make circulating water flow through vacuum pump 1 and radiate more quickly, can reduce unnecessary energy consumption, saves the cost.

[0034] As Figure 1 and Figure 3 shown, filter system 2 includes cylinder body 21, the upper of cylinder body 21 is provided with first water inlet 22 and first water outlet 23, the lower of cylinder body 21 is provided with second water outlet 24, the inside of cylinder body 21 is provided with filter assembly, filter assembly includes first filter cylinder 25 and second filter cylinder 27, first filter membrane 26 is provided on first filter cylinder 25, second filter membrane 28 is provided on second filter cylinder 27, second filter cylinder 27 is arranged outside first filter cylinder 25, the water inlet end of first filter cylinder 25 is communicated with first water inlet 22, the aperture of first filter membrane 26 is greater than the aperture of second filter membrane 28. When using, filter system 2 can set two-stage or multistage filtration according to actual demand, and then can effectively remove the impurities and particulate matters in circulating water after vacuum pump 1 is cooled, and first filter membrane 26 on first filter cylinder 25 has greater aperture, can preliminarily filter larger impurities, and the aperture of second filter membrane 28 on second filter cylinder 27 is smaller, can further remove fine particulate matters, and can avoid the problem that the impurities filtered out are accumulated and block filter membrane due to too long filtering time of single filter hole, ensure the water quality cleanliness of entering first cooling system 3 and second cooling system 4 through this double filtration mechanism, reduce the possibility of cooling water channel scale, thereby ensure the cooling efficiency, reduce energy consumption.

[0035] As Figure 1 , Figure 2 and Figure 4As shown, the second cooling system 4 includes a second cooling water tank 41, a third water inlet 42 is arranged on the lower side of the second cooling water tank 41, the third water inlet 42 is connected with the second pipeline 35, the second pipeline 35 is connected with the fifth pipeline 43, the fifth pipeline 43 is connected with the first water outlet 23, and the third water pump and the third control valve are arranged on the fifth pipeline 43; the fourth water outlet 44 is arranged on the upper side of the second cooling water tank 41, and the fourth water outlet 44 is connected with the water inlet end of the vacuum pump 1 through the third pipeline 45; the heat dissipation pipeline 46 is arranged in the second cooling water tank 41, the water inlet end of the heat dissipation pipeline 46 is connected with the third water inlet 42, and the outlet end of the heat dissipation pipeline 46 is connected with the fourth water outlet 44. When the second control valve is closed and the third control valve is opened, the second cooling water tank 41 can directly receive the circulating water from the filtering system 2, and when the third control valve is closed and the second control valve is opened, the second cooling water tank 41 can receive the circulating water preliminarily cooled by the first cooling water tank 31, the heat dissipation pipeline 46 in the second cooling water tank 41 can absorb the heat in the circulating water, so that the secondary cooling of the circulating water is realized, and the cooled circulating water is input into the vacuum pump 1 again through the fourth water outlet 44, so that the vacuum pump 1 is cooled, and the second cooling system 4 is beneficial to improving the cooling efficiency, so as to ensure the cooling effect of the vacuum pump 1 and reduce the energy consumption and the maintenance cost. Figure 4 As shown, the heat dissipation pipeline 46 is in the shape of "S", and the layout of the shape of "S" can increase the cooling path, increase the time of the circulating water in the pipeline, increase the contact area of the heat dissipation pipeline 46 and the circulating water, and is beneficial to accelerating the cooling rate of the circulating water, so as to improve the cooling effect.

[0036] As shown, Figure 4 As shown, the lower end of the second cooling water tank 41 is provided with a water storage cavity 47, one side of the water storage cavity 47 is provided with a fifth water outlet 48, the fifth water outlet 48 is connected with the spraying pipeline 49 through the fourth pipeline, a plurality of spray heads 410 are arranged on the spraying pipeline 49, and the spraying pipeline 49 is arranged at the upper end and the side wall of the second cooling water tank 41; the fourth control valve is arranged on the fourth pipeline; the water storage cavity 47 at the lower end of the second cooling water tank 41 can be used for storing a certain amount of water, the water can be sprayed in the form of mist through the spraying pipeline 49 and the plurality of spray heads 410 connected with the water storage cavity 47, the temperature in the second cooling water tank 41 can be further reduced, the heat exchange rate can be improved, and the impurities and particulate matters on the surface of the water tank can also be taken away, so that the second cooling tank is kept clean.

[0037] The working mode of the embodiment is that: the vacuum pump 1 generates heat during operation, the circulating water containing heat after cooling the vacuum pump 1 is discharged through the water outlet end, enters the first filter cylinder 25 of the filtering system 2 through the first water inlet 22, the circulating water filtered through the first filter cylinder 25 enters the second filter cylinder 27, the circulating water filtered through the second filter cylinder 27 enters the second cooling water tank 41 through the first water outlet 23, the fifth pipeline 43, the second pipeline 35 and the third water inlet 42, the heat dissipation pipeline 46 in the second cooling water tank 41 cools the circulating water, and the cooling water after cooling is input into the water inlet end of the vacuum pump 1 through the third pipeline 45, to complete a cycle. During the cooling process of the second cooling water tank 41, the fourth control valve on the fourth pipeline can be opened through the control system to spray the inside of the second cooling water tank 41, so as to improve the heat exchange rate, and also can take away the impurities and particles on the surface of the water tank, to keep the second cooling tank clean.

[0038] Embodiment 2

[0039] As shown in Figure 1 and Figure 2 , the embodiment further includes the first cooling system 3 on the basis of the embodiment 1, the water inlet end of the first cooling system 3 is connected with the water outlet end of the filtering system 2, the water outlet end of the first cooling system 3 is connected with the water inlet end of the second cooling system 4, the first cooling system 3 includes the first cooling water tank 31, the upper side of the first cooling water tank 31 is provided with the second water inlet 32, the second water inlet 32 is connected with the second water outlet 24 through the first pipeline 33, the first pipeline 33 is provided with the first water pump and the first control valve; the lower side of the first cooling water tank 31 is provided with the third water outlet 34, the third water outlet 34 is connected with the second cooling system 4 through the second pipeline 35, the second pipeline 35 is provided with the second control valve; the inside of the first cooling water tank 31 is provided with the refrigeration fin, and the refrigeration fin is a semiconductor refrigeration fin. The second water inlet 32 is used for receiving the circulating water filtered from the filtering system 2, so that the circulating water enters the first cooling water tank 31, the refrigeration fin can be started through the control system to quickly absorb and take away the heat in the circulating water, to realize rapid cooling, the circulating water after preliminary cooling through the first cooling system 3 can enter the second cooling system 4 through the second water outlet 24, and the first control valve can control the opening and closing of the first pipeline 33, so that whether to start the first cooling system 3 can be selected according to actual needs, the preliminary cooling of the circulating water through the first cooling system 3 can reduce the burden of the second cooling system 4, and also can improve the cooling efficiency and stability of the whole cooling system.

[0040] As shown in Figure 1 and Figure 2As shown, one side of the vacuum pump 1 is provided with a cooling fan 5, and the cooling fan 5 is connected with the control system; through the cooling fan 5, the heat on the surface of the vacuum pump 1 during the operation of the vacuum pump 1 can be effectively taken away, the temperature of the pump body is effectively reduced, and the performance decline or failure caused by the excessively high temperature is prevented.

[0041] The working mode of the embodiment is that: the vacuum pump 1 is cooled, and the circulating water containing heat enters the first filter cylinder 25 of the filtering system 2 from the water outlet end of the vacuum pump 1 through the first water inlet 22, the circulating water filtered through the first filter cylinder 25 enters the second filter cylinder 27, the circulating water filtered through the second filter cylinder 27 enters the first cooling water tank 31 through the second water outlet 24, the first pipeline 33 and the second water inlet 32, in the first cooling water tank 31, the refrigeration fin rapidly absorbs and takes away the heat in the circulating water, preliminary cooling is realized, at this time, the third control valve is closed, the second control valve is opened, the cooling water after preliminary cooling enters the second cooling water tank 41 through the third water outlet 34, the second pipeline 35 and the third water inlet 42, in the second cooling water tank 41, the circulating water is secondarily cooled through the heat dissipation pipeline 46, and the cooling water after cooling enters the water inlet end of the vacuum pump 1 through the fourth water outlet 44 and the third pipeline 45;

[0042] In summary, the vacuum pump cooling auxiliary device provided by the utility model mainly includes a vacuum pump 1, a filtering system 2, a first cooling system 3, a second cooling system 4 and a control system, can form a complete cooling liquid circulation loop, not only solves the problems of easy scaling and low cooling efficiency during the cooling process of the vacuum pump 1, but also reduces the requirement for water quality, reduces the corrosion risk caused by scaling, thereby prolongs the service life of the vacuum pump 1 and improves the working efficiency.

Claims

1. A vacuum pump cooling assist device, characterized by: The system comprises a vacuum pump (1) and a filtering system (2), the water inlet end of the filtering system (2) is connected with the water outlet end of the vacuum pump (1), the water outlet end of the filtering system (2) is connected with the water inlet end of a first cooling system (3), the water outlet end of the first cooling system (3) is connected with the water inlet end of a second cooling system (4), the water outlet end of the second cooling system (4) is connected with the water inlet end of the vacuum pump (1), and the vacuum pump (1), the filtering system (2), the first cooling system (3) and the second cooling system (4) are connected with a control system; The filtering system (2) comprises a cylinder (21), a first water inlet (22) and a first water outlet (23) are arranged above the cylinder (21), a second water outlet (24) is arranged below the cylinder (21), a filtering assembly is arranged in the cylinder (21), the filtering assembly comprises a first filtering cylinder (25) and a second filtering cylinder (27), a first filtering membrane (26) is arranged on the first filtering cylinder (25), a second filtering membrane (28) is arranged on the second filtering cylinder (27), the second filtering cylinder (27) is arranged outside the first filtering cylinder (25), the water inlet end of the first filtering cylinder (25) is communicated with the first water inlet (22), and the pore diameter of the first filtering membrane (26) is larger than that of the second filtering membrane (28).

2. Vacuum pump cooling aid according to claim 1, characterized in that: The first cooling system (3) comprises a first cooling water tank (31), a second water inlet (32) is arranged on one side above the first cooling water tank (31), the second water inlet (32) is connected with the second water outlet (24) through a first pipeline (33), a first water pump and a first control valve are arranged on the first pipeline (33), a third water outlet (34) is arranged on one side below the first cooling water tank (31), the third water outlet (34) is connected with the second cooling system (4) through a second pipeline (35), a second control valve is arranged on the second pipeline (35), and a refrigeration fin is arranged in the first cooling water tank (31).

3. Vacuum pump cooling aid according to claim 1, characterized in that: The second cooling system (4) comprises a second cooling water tank (41), a third water inlet (42) is arranged on one side below the second cooling water tank (41), the third water inlet (42) is connected with the second pipeline (35), the second pipeline (35) is connected with a fifth pipeline (43), the fifth pipeline (43) is connected with the first water outlet (23), a third water pump and a third control valve are arranged on the fifth pipeline (43), a fourth water outlet (44) is arranged on one side above the second cooling water tank (41), the fourth water outlet (44) is connected with the water inlet end of the vacuum pump (1) through a third pipeline (45), and a heat dissipation pipeline (46) is arranged in the second cooling water tank (41), the water inlet end of the heat dissipation pipeline (46) is connected with the third water inlet (42), and the outlet end of the heat dissipation pipeline (46) is connected with the fourth water outlet (44).

4. Vacuum pump cooling aid according to claim 3, characterized in that: The heat dissipation pipeline (46) is in an "S" shape.

5. Vacuum pump cooling aid according to claim 3, characterized in that: The lower end of the second cooling water tank (41) is provided with a water storage cavity (47), one side of the water storage cavity (47) is provided with a fifth water outlet (48), the fifth water outlet (48) is connected with a spraying pipeline (49) through a fourth pipeline, a plurality of spray heads (410) are arranged on the spraying pipeline (49), and the spraying pipeline (49) is arranged on the upper end and the side wall of the second cooling water tank (41); and the fourth pipeline is provided with a fourth control valve.

6. The vacuum pump cooling assist device of claim 1, wherein: One side of the vacuum pump (1) is provided with a heat dissipation fan (5), and the heat dissipation fan (5) is connected with a control system.

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