Viscous force testing equipment
By designing an adhesive force testing device, which utilizes connection and displacement components to test the adhesive force between the substrate and the bonding plate, the problem of existing equipment being expensive and unsuitable for small-scale testing is solved, achieving low-cost and efficient adhesive force testing results.
Patent Information
- Application Number
- CN202522491226.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-11-25
- Publication Date
- 2025-12-23
- Estimated Expiration
- 2035-11-25
AI Technical Summary
Existing equipment for testing the adhesive mechanical properties of workpieces is expensive and unsuitable for small-scale testing, especially in wafer-level packaging in the field of microelectronics packaging. There is a need to design a low-cost and simple testing device.
An adhesive force testing device was designed, including a connecting component, a first displacement component, a thrust device, and a second displacement component. These components enable the testing of the adhesive force between a substrate and an adhesive plate. The thrust device applies precise thrust, and a cover enhances safety.
It enables low-cost and efficient testing of adhesive strength, with a simple structure, easy use and high safety, making it suitable for small-scale testing needs.
Smart Images
Figure CN223711386U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to the technical field of microcrystalline testing, in particular to a bonding force testing device. BACKGROUND
[0002] In the field of microelectronic packaging and semiconductors, the stability and reliability of the structure are extremely high. For example, in wafer-level packaging, a layer of glass is bonded to a wafer of silicon or other material as a temporary carrier or permanent cover plate to protect the delicate circuit structure. The bonding strength between the silicon substrate and the glass is an important manifestation of the stability and reliability of the structure, and testing the bonding strength can predict the reliability of the product within the expected service life.
[0003] During the bonding strength test, the bonding strength of two workpieces under various stress states needs to be tested, including tensile, compression and shear mechanical property tests. The existing universal material testing machine and other equipment for testing the shear direction bonding strength of workpieces (such as glass and substrates) are not only expensive and have a large floor area, but also have a low cost performance ratio for small-scale workpiece quantity detection. Therefore, a labor-saving, simple and low-cost testing device needs to be designed to meet the testing requirements. CONTENT OF THE INVENTION
[0004] The purpose of the embodiments of the present application is to provide a bonding force testing device that can realize mechanical property testing of the shear direction bonding strength of workpieces at a low cost.
[0005] In order to achieve the above-mentioned purpose, the present application provides a bonding force testing device for testing the bonding force between a substrate and a bonding plate, comprising: a connecting assembly for fixing the substrate and connecting a first displacement assembly; the bonding surface of the substrate faces horizontally upwards, and the bonding plate is bonded to the bonding surface of the substrate; the first displacement assembly is connected with the substrate through the connecting assembly and is used to adjust the height of the substrate; a thrust device, the thrust device comprises a main body and an output shaft, the output shaft abuts against the side wall of the bonding plate, and is used to apply a thrust to the bonding plate, the thrust is parallel to the bonding surface of the substrate, and the main body is connected with a second displacement assembly; the second displacement assembly is used to adjust the distance between the thrust device and the bonding plate, and control the thrust size of the thrust device applied to the bonding plate.
[0006] In the embodiments of the present application, the connecting assembly comprises an L-shaped fixing plate, the L-shaped fixing plate comprises a transverse connecting plate and a longitudinal connecting plate connected with each other and perpendicular to each other, the transverse connecting plate faces horizontally upwards, the top surface of the transverse connecting plate is used to place the substrate and the bonding plate, and the longitudinal connecting plate is connected with the first displacement assembly.
[0007] In the embodiment of the present application, the connecting assembly further comprises a plurality of limiting blocks, the plurality of limiting blocks are arranged around the periphery of the base plate and abut against the base plate respectively, and the height of the limiting block is lower than the thickness of the base plate; the top surface of the transverse connecting plate is provided with a plurality of fixing holes for fixing the limiting blocks.
[0008] In the embodiment of the present application, the thrust device is a thrust meter.
[0009] In the embodiment of the present application, the first displacement assembly or the second displacement assembly comprises: a base provided with a sliding rail; wherein the sliding rail of the first displacement assembly is perpendicular to the sliding rail of the second displacement assembly; a sliding member, the sliding member is provided with a sliding groove matched with the sliding rail, and the sliding member is slidably connected with the sliding rail through the sliding groove; the sliding member is fixedly connected with the longitudinal connecting plate or the thrust meter, and is used to drive the base on the longitudinal connecting plate or the thrust meter to move along the sliding rail; a control member, the control member is connected with the sliding member, and is used to control the movement of the sliding member along the sliding rail and the position of the sliding member on the sliding rail.
[0010] In the embodiment of the present application, the base comprises a bottom plate, two parallel sliding rails arranged on the bottom plate, and a baffle arranged at one end of the sliding rail; the sliding member comprises a sliding plate and a connecting block connected with each other, two sides of the sliding plate are respectively connected with sliding blocks, the sliding blocks are provided with the sliding grooves, and the side of the sliding plate away from the sliding rail is used to fixedly connect the longitudinal connecting plate or the thrust meter; the connecting block is located in the cavity surrounded by the sliding plate, the two sliding rails and the bottom plate; the control member comprises a screw rod, a limiting member and a hand wheel, one end of the screw rod passes through the baffle and the connecting block in sequence and is connected with the limiting member, the other end of the screw rod is connected with the hand wheel, and the screw rod is threadedly connected with the connecting block.
[0011] In the embodiment of the present application, the hand wheel is further provided with a handle.
[0012] In the embodiment of the present application, the adhesive force testing device further comprises: a reinforcing member, the reinforcing member abuts against the first displacement assembly, and the side of the first displacement assembly abutting against the reinforcing member is away from the second displacement assembly; a mounting plate, the mounting plate is provided with a plurality of mounting holes for fixing the first displacement assembly, the second displacement assembly and the reinforcing member.
[0013] In the embodiment of the present application, the reinforcing member comprises an L-shaped reinforcing plate and a wedge block, the L-shaped reinforcing plate comprises a horizontal plate and a vertical plate connected with each other and perpendicular to each other, and the wedge block is arranged between the horizontal plate and the vertical plate and connected with the horizontal plate and the vertical plate respectively.
[0014] In the embodiment of the present application, the adhesive force testing device further comprises: a cover, the cover is arranged around the periphery of the first displacement assembly, the base plate and the bonding plate, the cover is provided with a window, and the window is used for the output shaft of the thrust device to extend into the cover and abut against the side wall of the bonding plate.
[0015] The scheme provided in the application has at least the following beneficial effects:
[0016] In the adhesion testing device provided in the application, the height of the substrate is adjusted by the first displacement assembly, the distance between the pushing device and the bonding plate is adjusted by the second displacement assembly, and the pushing force applied by the pushing device to the bonding plate is controlled, so that the output shaft of the pushing device and the side wall of the bonding plate can be precisely aligned, and the pushing force can be precisely controlled. In addition, a cover can be additionally arranged around the first displacement assembly, the substrate and the bonding plate to improve the safety of the test.
[0017] Other features and advantages of the embodiments of the application will be described in detail in the following specific implementation part. BRIEF DESCRIPTION OF DRAWINGS
[0018] The accompanying drawings are included to provide a further understanding of the embodiments of the application, and constitute a part of the specification, and are used together with the following specific implementation to explain the embodiments of the application, but do not constitute a limitation on the embodiments of the application. In the drawings:
[0019] Figure 1 A front view of the adhesion testing device in the embodiment is schematically shown;
[0020] Figure 2 A perspective structural schematic view of the adhesion testing device in the embodiment is schematically shown from a first perspective;
[0021] Figure 3 A perspective structural schematic view of the adhesion testing device in the embodiment is schematically shown from a second perspective;
[0022] Figure 4 A perspective structural schematic view of the adhesion testing device with a cover in the embodiment is schematically shown.
[0023] Explanation of reference signs
[0024] 1, first displacement assembly; 2, second displacement assembly; 3, pushing device; 31, main body; 32, output shaft; 4, connecting assembly; 41, L-shaped fixed plate; 42, limiting block; 5, base; 51, sliding rail; 52, baffle; 6, sliding piece; 61, sliding plate; 62, sliding block; 7, control piece; 71, screw rod; 72, limiting piece; 73, hand wheel; 74, handle; 75, brake piece; 751, fastening sleeve; 752, fastening bolt; 8, reinforcing piece; 9, mounting plate; 10, cover; 101, window; 100, substrate. DETAILED DESCRIPTION
[0025] In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. It should be understood that the specific implementation described herein is only used to explain and illustrate the embodiments of the present application, and should not be used to limit the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the scope of protection of the present application.
[0026] It should be noted that if the embodiments of the present application involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative positional relationship, movement condition, etc. between components in a certain specific posture (as shown in the drawings), and if the specific posture changes, the directional indications also change accordingly.
[0027] In addition, if the embodiments of the present application involve descriptions such as "first", "second", etc., the descriptions of "first", "second", etc. are only for description purposes, and cannot be understood as indicating or implying the relative importance of the indicated technical features or implicitly indicating the number of the indicated technical features. Therefore, the features limited by "first", "second" can explicitly or implicitly include at least one of the features. In addition, the technical solutions of each embodiment can be combined with each other, but it must be based on the fact that a person of ordinary skill in the art can realize it, and when the combination of technical solutions contradicts each other or cannot be realized, it should be considered that the combination of technical solutions does not exist, and is also not within the scope of protection claimed by the present application.
[0028] Embodiments
[0029] As Figure 1As shown, the present application provides a kind of adhesive force testing equipment for testing the adhesive force between substrate 100 and adhesive plate, which comprises connecting assembly 4, first displacement assembly 1, thrust device 3 and second displacement assembly 2;Wherein connecting assembly 4 is used to fix substrate 100 and connect first displacement assembly 1;The adhesive surface of the substrate 100 is horizontally upward, and the adhesive plate is adhered to the adhesive surface of the substrate 100;The first displacement assembly 1 is connected with the substrate 100 through the connecting assembly 4, for adjusting the height of the substrate 100;Thrust device 3, the thrust device 3 includes main body 31 and output shaft 32 (exemplarily, the thrust device 3 is a thrust meter, and the thrust meter has induction and digital display functions, which is mature in technology and easy to use, such as S type or column type thrust meter with model number SGSF-1K~SGSF-200K), the output shaft 32 is in abutment with the side wall of the adhesive plate, for applying thrust to the adhesive plate, and the thrust is parallel to the adhesive surface of the substrate 100, and the main body 31 is connected with the second displacement assembly 2;The second displacement assembly 2 is used to adjust the distance between the thrust device 3 and the adhesive plate, and control the thrust size of the thrust device 3 applied to the adhesive plate.
[0030] Specifically, as shown in Figure 2 Or 3, the connecting assembly 4 includes L-shaped fixing plate 41, the L-shaped fixing plate 41 includes transverse connecting plate and longitudinal connecting plate connected with each other and perpendicular to each other, the transverse connecting plate is horizontally upward, and the top surface of the transverse connecting plate is used to place the substrate 100 and the adhesive plate, and the longitudinal connecting plate is connected with the first displacement assembly 1.
[0031] In the embodiment of the present application, the connecting assembly 4 further comprises a plurality of limiting blocks 42, which are arranged around the substrate 100 and abut with the substrate 100 respectively, and the sizes of the limiting blocks 42 are different, wherein the limiting block 42 located at the distal end of the output shaft 32 has the largest volume. When the thrust device 3 applies pressure to the adhesive plate through the output shaft 32, the substrate 100 will tend to move to the opposite side (the direction of the limiting block 42 with the largest volume) under the driving of the adhesive plate, and the limiting block 42 with the largest volume needs to be able to withstand the pressure brought by the substrate 100 to avoid the horizontal displacement of the substrate 100, which affects the test result. In addition, the height of the limiting block 42 needs to be lower than the thickness of the substrate 100 to avoid limiting the adhesive plate adhered above the substrate 100;A plurality of limiting blocks 42 are fixedly connected with the transverse connecting plate through a plurality of screws and a plurality of fixing holes arranged on the top surface of the transverse connecting plate.
[0032] For example, the first displacement component 1 and the second displacement component 2 in this embodiment can adopt the same or similar structural design. Specifically, the first displacement component 1 or the second displacement component 2 includes: a base 5 with a slide rail 51, a slider 6, and a control component 7; wherein, the slide rail 51 of the first displacement component 1 is perpendicular to the slide rail 51 of the second displacement component 2, that is, the placement orientations of the first displacement component 1 and the second displacement component 2 are different, the slide rail 51 of the first displacement component 1 is parallel to the vertical direction, and the slide rail 51 of the second displacement component 2 is parallel to the horizontal direction. The slider 6 is provided with a groove adapted to the slide rail 51, and the slider 6 is slidably connected to the slide rail 51 through the groove. The slider 6 is fixedly connected to the longitudinal connecting plate or the thrust gauge, and is used to drive the base plate 100 on the thrust gauge or the transverse connecting plate to move along the slide rail 51. The control component 7 is connected to the slider 6 and is used to control the movement of the slider 6 along the slide rail 51 and control the position of the slider 6 on the slide rail 51.
[0033] Furthermore, such as Figure 2 and 3 As shown, the base 5 includes a base plate, two parallel slide rails 51 on the base plate, and a baffle 52 at one end of the slide rails 51. The sliding member 6 includes a sliding plate 61 and a connecting block connected to each other. Slider blocks 62 are connected to the left and right sides of the sliding plate 61, and the sliders 62 are provided with the slide grooves. The slide rails 51 are inserted into the slide grooves. Taking the second displacement component 2 as an example, the connecting block is located in the cavity formed by the sliding plate 61 (directly below), the two slide rails 51 (between), and the base plate (above). The control member 7 includes a lead screw 71, a limiting member 72, and a handwheel 73. One end of the lead screw 71 passes through the baffle 52 and the connecting block in sequence and is connected to the limiting member 72 (the through hole on the baffle 52 must be at the same height as the through hole on the connecting block so that the lead screw 71 always remains parallel to the slide rails 51 to prevent jamming during rotation). The other end of the lead screw 71 is connected to the handwheel 73, and the lead screw 71 is threadedly connected to the connecting block. The method for adjusting and controlling the position of the slider 6 on the slide rail 51 is as follows: Rotate the lead screw 71. Since the connecting block is fixedly connected to the sliding plate 61 (or integrally formed), and the grooves on the sliders 62 connected to the left and right sides of the sliding plate 61 are engaged with the slide rail 51, the connecting block will not rotate with the lead screw 71. Instead, it will slide along the axial direction of the lead screw 71 under the threaded engagement, and at the same time drive the sliding plate 61 and the sliders 62 on the left and right sides to slide along the slide rail 51. Stop rotating and stop sliding.
[0034] Furthermore, such as Figure 2 and 3As shown, the control component 7 also includes a braking component 75, which includes a fastening sleeve 751 sleeved on the lead screw 71 and a fastening bolt 752 for loosening or tightening the fastening sleeve 751, and the fastening sleeve 751 is fixedly connected to the baffle 52. When it is necessary to rotate the lead screw 71, the fastening sleeve 751 is loosened to allow the lead screw 71 to rotate flexibly; when it is necessary to restrict the rotation of the lead screw 71, the fastening sleeve 751 is tightened, which can simultaneously fix the sliding component 6 in a specific position.
[0035] In this embodiment of the application, the handwheel 73 is further provided with a handle 74, such as Figure 2 As shown, the handle 74 is located on the side edge of the handwheel 73. The presence of the handle 74 extends the power arm of the lever, making it easier to rotate the lead screw 71 by applying force to the handwheel 73.
[0036] In this embodiment, the adhesion testing device further includes: a reinforcing member 8 and a mounting plate 9; the reinforcing member 8 abuts against the first displacement component 1, and the side of the first displacement component 1 that abuts against the reinforcing member 8 is away from the second displacement component 2. Specifically, as shown... Figure 2 As shown, the reinforcement component 8 includes an L-shaped reinforcing plate and a wedge. The L-shaped reinforcing plate includes a horizontal plate and a vertical plate that are connected to each other and perpendicular to each other. The wedge is located between the horizontal plate and the vertical plate and is connected to the horizontal plate and the vertical plate respectively, which can improve the overall stability of the reinforcement component 8. Since the first displacement component 1 is used to adjust the height of the base plate 100, it needs to be placed vertically (the slide rail 51 is parallel to the vertical direction). Vertical placement will cause the overall center of gravity of the first displacement component 1 to be high, resulting in instability. By having the reinforcement component 8 abut against the first displacement component 1, the first displacement component 1 and the reinforcement component 8 form a structure that is narrow at the top and wide at the bottom, which can effectively improve the stability of the first displacement component 1. The mounting plate 9 is provided with several mounting holes for fixing the first displacement component 1, the second displacement component 2 and the reinforcement component 8. The first displacement component 1, the second displacement component 2 and the reinforcement component 8 are respectively provided with screw holes. The first displacement component 1, the second displacement component 2 and the reinforcement component 8 can be fixedly connected to the mounting plate 9 by bolts and other connecting parts. This is a conventional connection method and will not be described in detail here.
[0037] Preferably, in this embodiment, the adhesion testing device further includes: a cover 10, such as... Figure 4 As shown, the cover 10 is disposed around the first displacement component 1, the substrate 100, and the adhesive plate. The cover 10 has a window 101, which allows the output shaft 32 of the thrust device 3 to extend into the cover 10 and abut against the side wall of the adhesive plate. Specifically, the cover 10 can be made of transparent acrylic or PVC. By adding the cover 10, the adhesive plate can be prevented from being pushed open and flying outwards due to its enormous potential energy, thus avoiding impact on surrounding personnel or equipment and improving the safety of the experiment.
[0038] The process of testing the adhesive force by the adhesive force testing device provided in the application is as follows: the thrust meter, the substrate 100 and the adhesive plate are installed according to the above structure; the first displacement assembly 1 is used to adjust the substrate 100 and the adhesive plate to a suitable position, so that the output shaft 32 of the thrust meter can be aligned with the middle part of the side wall of the adhesive plate (the output shaft 32 cannot contact the substrate 100); the sliding piece 6 of the second displacement assembly 2 is controlled to move to the substrate 100 by the control piece 7 of the second displacement assembly 2, the sliding piece 6 drives the thrust meter to move, so that the output shaft 32 of the thrust meter abuts against the side wall of the adhesive plate; the sliding piece 6 is continuously driven, the thrust of the output shaft of the thrust meter is gradually increased under the pushing of the sliding piece 6, the thrust is read in real time based on the digital display function of the thrust meter itself, until the maximum test thrust is reached or the adhesive plate is separated from the substrate 100 because it cannot bear the thrust.
[0039] It should also be noted that the terms "comprising", "containing", or any other variant thereof are intended to cover a non-exclusive inclusion, such that a process, method, article or apparatus that comprises a list of elements does not include only those elements, but can also include other elements not expressly listed or inherent to such process, method, article or apparatus. Without further limitation, an element defined by the statement "comprising a" does not exclude the existence of additional identical elements in the process, method, article or apparatus that includes the element.
[0040] The above is only an embodiment of the application and is not intended to limit the application. The application can have various changes and modifications for those skilled in the art. Any modification, equivalent replacement, improvement, etc. within the spirit and principle of the application shall be included in the scope of the claims of the application.
Claims
1. A tack force testing apparatus for testing a tack force between a substrate (100) and a tack plate, characterized by, The adhesion force testing device comprises: a connecting assembly (4) for fixing a base plate (100) and connecting a first displacement assembly (1), wherein the adhesion surface of the base plate (100) faces horizontally upwards, and an adhesion plate is adhered to the adhesion surface of the base plate (100); the first displacement assembly (1) is connected to the base plate (100) through the connecting assembly (4) and is used for adjusting the height of the base plate (100); a thrust device (3) comprising a main body (31) and an output shaft (32), wherein the output shaft (32) abuts against the side wall of the adhesion plate and is used for applying a thrust to the adhesion plate, the thrust is parallel to the adhesion surface of the base plate (100), and the main body (31) is connected to a second displacement assembly (2); the second displacement assembly (2) is used for adjusting the distance between the thrust device (3) and the adhesion plate and controlling the thrust size applied by the thrust device (3) to the adhesion plate.
2. The tack force testing apparatus of claim 1, wherein, The connecting assembly (4) comprises an L-shaped fixing plate (41) comprising a transverse connecting plate and a longitudinal connecting plate connected to and perpendicular to each other, wherein the transverse connecting plate faces horizontally upwards, the top surface of the transverse connecting plate is used for placing the base plate (100) and the adhesion plate, and the longitudinal connecting plate is connected to the first displacement assembly (1).
3. The tack force testing apparatus of claim 2, wherein, The connecting assembly (4) further comprises a plurality of limiting blocks (42) circumferentially arranged around the base plate (100) and respectively abutting against the base plate (100), wherein the height of the limiting block (42) is lower than the thickness of the base plate (100); and a plurality of fixing holes for fixing the limiting blocks (42) are arranged on the top surface of the transverse connecting plate.
4. The tack force testing apparatus of claim 2, wherein, The thrust device (3) is a thrust meter.
5. The tack force testing apparatus of claim 4, wherein, The first displacement assembly (1) or the second displacement assembly (2) comprises: a base (5) provided with a sliding rail (51), wherein the sliding rail (51) of the first displacement assembly (1) is perpendicular to the sliding rail (51) of the second displacement assembly (2); a sliding piece (6) provided with a sliding groove matched with the sliding rail (51), wherein the sliding piece (6) is slidably connected to the sliding rail (51) through the sliding groove; the sliding piece (6) is fixedly connected to the longitudinal connecting plate or the thrust meter and is used for driving the base plate (100) on the thrust meter or the transverse connecting plate to move along the sliding rail (51); a control piece (7) connected to the sliding piece (6) and used for controlling the movement of the sliding piece (6) along the sliding rail (51) and the position of the sliding piece (6) on the sliding rail (51).
6. The tack force testing apparatus of claim 5, wherein, The base (5) comprises a bottom plate, two parallel sliding rails (51) arranged on the bottom plate, and a baffle (52) arranged at one end of the sliding rail (51). The sliding piece (6) comprises a sliding plate (61) and a connecting block connected with each other, two sides of the sliding plate (61) are respectively connected with sliding blocks (62), the sliding blocks (62) are provided with the sliding grooves, and one side of the sliding plate (61) away from the sliding rail (51) is used for fixedly connecting the longitudinal connecting plate or the thrust meter; the connecting block is located in a cavity surrounded by the sliding plate (61), the two sliding rails (51) and the bottom plate. The control piece (7) comprises a lead screw (71), a limiting piece (72) and a hand wheel (73), one end of the lead screw (71) is sequentially connected with the limiting piece (72) through the baffle (52) and the connecting block, the other end of the lead screw (71) is connected with the hand wheel (73), and the lead screw (71) is in threaded connection with the connecting block.
7. The tack force testing apparatus of claim 6, wherein, The hand wheel (73) is further provided with a handle (74).
8. The tack force testing apparatus of claim 5, wherein, The adhesive force testing equipment further comprises: A reinforcing piece (8) abutting against the first displacement assembly (1), one side of the reinforcing piece (8) abutting against the first displacement assembly (1) is away from the second displacement assembly (2); A mounting plate (9) provided with a plurality of mounting holes for fixing the first displacement assembly (1), the second displacement assembly (2) and the reinforcing piece (8).
9. The tack force testing apparatus of claim 8, wherein, The reinforcing piece (8) comprises an L-shaped reinforcing plate and a wedge block, the L-shaped reinforcing plate comprises a horizontal plate and a vertical plate connected with each other and perpendicular to each other, and the wedge block is arranged between the horizontal plate and the vertical plate and connected with the horizontal plate and the vertical plate.
10. The tack force testing apparatus of claim 1, wherein, The adhesive force testing equipment further comprises: A cover body (10) covering the periphery of the first displacement assembly (1), the base plate (100) and the adhesive plate, the cover body (10) is provided with a window (101), and the window (101) is used for allowing the output shaft (32) of the thrust device (3) to extend into the cover body (10) and abut against the side wall of the adhesive plate.