Diaphragm adjusting device

Abstract

The utility model relates to the technical field of semiconductor detection, in particular to a diaphragm adjusting device. By arranging the rotary adjusting assembly, the first adjusting assembly and the second adjusting assembly, the diaphragm assembly can achieve rotary motion, plane first-direction motion and plane second-direction motion, the adjusting assemblies are independent assemblies and achieve independent adjustment, and adjustment of any assembly cannot cause interference of the adjustment result of the other assembly; therefore, the error of diaphragm adjustment is reduced, and the position adjustment of the diaphragm is more accurate.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor detection, in particular to a diaphragm adjusting device. BACKGROUND

[0002] The diaphragm adjusting technology plays a crucial role in optical systems, which affects the performance of optical systems by controlling the cross section of the light beam. With the development of technology, the performance requirements of optical systems are becoming higher and higher, which requires precise and reliable diaphragm adjusting mechanism to ensure the accuracy and stability of the diaphragm position. SUMMARY

[0003] Therefore, the purpose of the present application is to provide a diaphragm adjusting device which can flexibly and reliably adjust the position of the diaphragm to meet the requirements of the accuracy and stability of the diaphragm position.

[0004] In the first aspect, the present application provides a diaphragm adjusting device, comprising: a diaphragm fixing seat, which is provided with a through hole for placing a diaphragm assembly, the diaphragm assembly is driven by a rotating adjusting assembly to rotate relative to the diaphragm fixing seat; a planar moving assembly, which comprises a moving block and a first adjusting assembly and a second adjusting assembly, the first adjusting assembly and the second adjusting assembly drive the moving block to move in two directions respectively, the moving block is fixedly connected with the diaphragm fixing seat, and is provided with a light propagation channel for the light beam to pass through, the light propagation channel is correspondingly arranged with the through hole.

[0005] In some specific implementation manners, the diaphragm assembly comprises a diaphragm rotating block, the diaphragm rotating block is movably connected to the surface of the diaphragm fixing seat, and further comprises a diaphragm piece which is abutted to the inner side of the diaphragm rotating block through a pressing ring; the rotating adjusting assembly drives the diaphragm rotating block to rotate relative to the diaphragm fixing seat.

[0006] In some specific implementation manners, the rotating adjusting assembly comprises a force applying member, the force applying member is connected with the diaphragm rotating block, and the force applying member moves based on the external force in the vertical direction to drive the diaphragm rotating block to rotate.

[0007] In some specific implementation manners, the force applying member is a rotating adjusting screw, and the rotating adjusting assembly further comprises a rotating adjusting block which is fixedly arranged on the diaphragm fixing seat, the rotating adjusting block is provided with a threaded hole, and the rotating adjusting screw is matched with the threaded hole to move along the vertical direction.

[0008] In some specific implementation manners, the diaphragm rotating block outwardly extends at least one limiting member, the limiting member is in contact with the end of the force applying member; the limiting member drives the diaphragm rotating block to rotate based on the force of the force applying member.

[0009] In some specific implementation manners, the first adjusting assembly and the second adjusting assembly include a first adjusting screw and a second adjusting screw arranged on two adjacent sides of the moving block, respectively driving the moving block to move in two different directions.

[0010] In some specific implementation manners, the planar moving assembly further includes a planar base, the edge of the planar base upwardly extends to form a side plate, and a placing space is surrounded based on the side plate, the placing space is used for placing the moving block; and the moving block has a moving space with the inner side of the planar base in the first direction and the second direction.

[0011] In some specific implementation manners, the moving block is provided with a limiting spring between the first direction, the second direction and the planar base.

[0012] In some specific implementation manners, the planar moving assembly further includes a cover, one side of the cover is arranged in abutment with the planar base, and a light propagation channel for the light beam to pass through is arranged on the cover.

[0013] In some specific implementation manners, the device further includes an adapter block, one plane of the adapter block is connected with the planar base, and the other plane is connected with an external mechanism.

[0014] The embodiment of the present application brings the following beneficial effects:

[0015] The embodiment of the present application provides a diaphragm adjusting device, through the arrangement of the rotating adjusting assembly, the first adjusting assembly and the second adjusting assembly, the diaphragm assembly can realize rotating movement, planar first direction movement and planar second direction movement, and the above adjusting assemblies are independent assemblies to realize independent adjustment, the adjustment of any one assembly will not cause the interference of the adjustment result of another assembly, thereby reducing the error of diaphragm adjustment and making the diaphragm position adjustment more accurate.

[0016] Other features and advantages of the present disclosure will be described in the following description, or can be known or determined from the description without doubt, or can be known by implementing the above-mentioned technologies of the present disclosure.

[0017] In order to make the above-mentioned purposes, features and advantages of the present disclosure more obvious and easy to understand, the following preferred embodiments are specifically described, and the accompanying drawings are described in detail as follows. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the specific embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the specific embodiments or prior art description. Obviously, the drawings described below are some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained without creative labor on the basis of these drawings.

[0019] Figure 1 A diaphragm adjustment device provided by the embodiment of the present application is shown in the overall structure diagram.

[0020] Figure 2 A rotating adjustment assembly provided by the embodiment of the present application is shown in the structure diagram.

[0021] Figure 3 A planar moving assembly provided by the embodiment of the present application is shown in the structure diagram.

[0022] Figure 4 Another diaphragm adjustment device provided by the embodiment of the present application is shown in the overall structure diagram.

[0023] Figure: 10-diaphragm adjustment device; 10a-diaphragm adjustment device; 20-diaphragm piece;

[0024] 11-diaphragm fixing seat; 12-diaphragm assembly; 13-rotating adjustment assembly; 14-planar moving assembly; 15-adapting block;

[0025] 121-diaphragm rotating block;

[0026] 131-rotating adjustment screw; 132-rotating adjustment block; 133-limiting piece; 134-fixing block; 135-tension spring;

[0027] 141-moving block; 142-planar base; 143-placing space; 144-first adjustment screw; 145-second adjustment screw; 146-limiting spring; 147-buffer piece. DETAILED DESCRIPTION

[0028] In order to make the purpose, technical solutions and advantages of the embodiments of the present application more clear, the technical solutions of the present application will be described clearly and completely below by combining with the drawings. Obviously, the described embodiments are some embodiments of the present application, not all the embodiments. Based on the embodiments in the present application, all the other embodiments obtained by those skilled in the art without creative labor are within the protection scope of the present application.

[0029] The diaphragm adjusting device provided by the embodiments of the present application is applied to semiconductor optical detection, wherein the semiconductor product is a wafer product, including a pattern wafer and a non-pattern wafer. In other embodiments, the device can also be applied to other precise component products. The diaphragm is used to limit the passing of the illumination light beam generated by the illumination device based on the aperture, and in the embodiments, a rectangular diaphragm is preferred, and in other embodiments, a circular diaphragm with a circular aperture can also be used. In the prior art, the adjustment of the diaphragm is mainly used to eliminate stray light, or to obtain a light spot with a required size, or to intercept higher energy uniformity. With the increasing performance requirements of the optical system, a precise and reliable diaphragm adjusting mechanism is needed to ensure the accuracy and stability of the diaphragm position.

[0030] Therefore, based on the above background, the embodiments of the present application provide a diaphragm adjusting device for adjusting the position of the diaphragm to meet the requirements of accuracy and stability. Specifically, the diaphragm adjusting device can be understood with reference to Figure 1 , which comprises a diaphragm fixing seat 11, a rotating adjusting assembly 13 and a plane moving assembly 14. The diaphragm fixing seat 11 is provided with a through hole for placing a diaphragm assembly 12, and the rotating adjusting assembly 13 and the plane moving assembly 14 are respectively used to adjust the two positions of the diaphragm, i.e., the rotating position and the plane position. It can be understood that the rotating position adjustment of the rotating adjusting assembly is the adjustment of the relative rotating angle of the diaphragm on the light propagation path, and the plane position adjustment of the plane moving assembly is the adjustment of the plane position of the diaphragm on the light propagation path.

[0031] Among them, the diaphragm fixing seat does not have active adjustment capability itself in the embodiments because it is used to place the diaphragm assembly, and the rotating adjusting assembly and the plane moving assembly are used to adjust the diaphragm, so the diaphragm fixing seat is the object to be adjusted in the embodiments. In general, the rotating position adjustment and the plane position adjustment of the diaphragm fixing seat can be directly performed to realize the adjustment of the diaphragm in the two positions.

[0032] However, this adjustment method has two direction adjustments, which may cause inaccurate adjustment. Therefore, in the embodiments, the adjustment of the two positions is independent adjustment, i.e., the diaphragm fixing seat can be adjusted only in one position, and specifically, the diaphragm fixing seat can be adjusted only in the plane position by the plane moving assembly in the embodiments. For the rotating position adjustment, the diaphragm assembly is directly adjusted in the embodiments.

[0033] Specifically, in the embodiments, the diaphragm assembly 12 is driven by the rotating adjusting assembly 13 to rotate relative to the diaphragm fixing seat 11, and the diaphragm fixing seat is driven by the plane moving assembly 14 to adjust the plane position.

[0034] Reference can be made to Figure 2The structure of the rotary adjustment assembly 13 and the diaphragm assembly 12 is shown in the figure. The diaphragm assembly includes a diaphragm rotary block 121 movably clamped on the diaphragm fixing seat, and a diaphragm sheet 20 abutting against the inner side of the diaphragm rotary block through a pressing ring. The rotary adjustment assembly 13 drives the diaphragm rotary block 121 to rotate relative to the diaphragm fixing seat 11, and the diaphragm sheet 20 is driven to move based on the movement of the diaphragm rotary block 121.

[0035] In the embodiment, the rotary adjustment assembly 13 includes a force applying member. One end of the force applying member is connected to the diaphragm rotary block, and the force applying member drives the diaphragm rotary block to rotate by receiving external force and applying the external force to the diaphragm rotary block. In the embodiment, the force applying member generates force in the y direction, and the diaphragm rotary block 121 rotates under the pushing of the force.

[0036] Specifically, the force applying member is preferably a rotary adjustment screw 131 in the embodiment.

[0037] Please continue to refer to Figure 2 In the embodiment, the rotary adjustment assembly further includes a rotary adjustment block 132 fixedly arranged on the diaphragm. In order to provide a rotary movement path for the rotary adjustment screw 131, a threaded hole is formed in the rotary adjustment block 132. The rotary adjustment screw rotates and moves in the vertical direction to drive the diaphragm rotary block to rotate. The movement of the rotary adjustment screw includes upward movement and downward movement in the vertical direction, and the diaphragm rotary block rotates counterclockwise and clockwise based on the upward movement and the downward movement.

[0038] In order to ensure the stability of the position of the diaphragm rotary block when it does not move, a fixing assembly and a maintaining assembly are further arranged on the diaphragm rotary block in the embodiment. The diaphragm rotary block extends to a limiting member 133 with the diameter of the diaphragm rotary block as the axis of symmetry. The limiting member is a sheet structure with a certain thickness, and a fixing hole is formed in the limiting member. The fixing hole is movably connected to the diaphragm fixing seat through a fixing column. When the rotary adjustment is performed, the fixing column is loosened, the diaphragm rotary block is rotatable, and the diaphragm rotary block is driven to rotate by the force applying member.

[0039] Specifically, the force applying member can act on the boss of any limiting member in the embodiment, and drive the limiting member and the diaphragm rotary block to rotate.

[0040] Wherein, for the maintaining assembly in the embodiment, the external stretching force applied to the diaphragm rotating block can keep the force of the diaphragm rotating block stable. Specifically, the maintaining assembly comprises two fixed blocks 134 arranged on the diaphragm fixing base and the limiting piece, and the two fixed blocks are connected by the stretching spring 135. The stretching force of the stretching spring can keep the force of the diaphragm rotating block stable.

[0041] It is worth noting that the limiting piece provided with the fixed block in the embodiment should be different from the limiting piece connected with the force applying piece. By such an arrangement, the balance and stability of the two forces can be kept.

[0042] In the embodiment, the arrangement of the two fixed blocks can keep one side of the diaphragm rotating block always subjected to the downward stretching force of the stretching spring. Such an arrangement of the stretching force can provide the external force required for counterclockwise adjustment, i.e. the upward movement of the diaphragm rotating block. Therefore, in the embodiment, the active adjustment of the force applying piece is mainly applied to the clockwise rotation movement of the diaphragm rotating block, while for the counterclockwise rotation movement, the diaphragm rotating block is loosened from the force applying piece to move based on the stretching spring. When the diaphragm rotating block moves to the target position, the force balance is formed by applying the external force to the force applying piece, so as to form a stable force system.

[0043] Further, the stretching force of the stretching spring in the embodiment is arranged based on the maximum stroke of the rotation adjustment, which will not be described herein.

[0044] In the embodiment, the planar movement assembly is directly arranged on the diaphragm fixing base for adjusting the diaphragm in the horizontal direction. Figure 3 The first direction is the transverse direction, i.e. the X-axis direction relative to the diaphragm fixing base, and the second direction is the Y-axis direction perpendicular to the first direction.

[0045] Wherein, the planar movement assembly comprises a moving block 141 and a first adjusting assembly and a second adjusting assembly for driving the moving block to move in the first direction and the second direction, respectively. In order to realize the movement of the diaphragm fixing base 11, the moving block is fixedly connected with the diaphragm fixing base. When the moving block is driven to move by the first adjusting assembly and the second adjusting assembly, the diaphragm fixing base moves from the movement.

[0046] In the embodiment, the planar movement assembly is further provided with a planar base 142. The edges of the planar base extend upward to form side plates, and four side plates enclose a placement space 143. The moving block 141 is placed in the placement space. In order to ensure that the moving block can move in the first direction and the second direction, the placement space has a movable stroke in the first direction and the second direction, i.e. the moving block does not contact the inner side plates of the placement space.

[0047] Further, in order to adapt to the propagation of incident light, the moving block and the plane base in the embodiment are both provided with light propagation channels for the light beam to pass through. Specifically, the size of the channel provided on the moving block is the same as the size of the through hole of the plane base, the fixed seat of the diaphragm, the size of the channel of the rotating block of the diaphragm and the size of the diaphragm piece. The channels of the above-mentioned components are provided in a penetrating structure, thereby realizing the complete propagation of the incident light.

[0048] Among them, the first adjusting screw 144 and the second adjusting screw 145 are provided on the two adjacent sides of the moving block, and the moving block is driven to move in the first direction and the second direction by the first adjusting screw and the second adjusting screw respectively.

[0049] The first adjusting screw and the second adjusting screw have the same working principle as the above-mentioned adjusting screw, and can drive the moving block to move in the placement space through external force.

[0050] Further, in order to ensure the controllability of the moving block in the first direction and the second direction adjustment, a limiting spring 146 is arranged on the inner side of the plane base relative to the first direction and the second direction, and the compression deformation reaction force of the limiting spring 146 makes the moving block play a buffering role when being extruded, thereby making the adjustment process more stable and controllable, and avoiding the problem of excessive adjustment.

[0051] However, it is worth noting that because the contact area of the limiting spring is small, the moving block will be misaligned when being contacted. In order to solve this technical problem, a buffer piece 147 is arranged at the top end of the limiting spring in the embodiment, and the buffer piece 147 directly contacts the moving block 141, thereby increasing the contact area of the limiting spring 146 and making the adjustment more stable.

[0052] In the embodiment, the number of limiting springs is not limited and is correspondingly arranged according to the size of the moving block and the size of the limiting spring. However, it is worth noting that in order to avoid horizontal deviation caused by too few limiting springs during movement, at least two limiting springs should be arranged.

[0053] Further, the moving direction of the moving block in the embodiment includes the first direction and the second direction, and the moving can be single direction moving or multi-direction moving. The single direction moving refers to that the first direction moving adjustment and the second direction moving adjustment can be separately performed in one adjustment, and the multi-direction moving refers to that the first direction and the second direction can be simultaneously adjusted in one adjustment. In the embodiment, in order to ensure the accuracy of the adjustment, the single direction moving is preferred, thereby avoiding the error problem caused by simultaneous movement of two directions.

[0054] Further, in order to ensure the sealing of the translational moving assembly, a cover is arranged on the open surface of the planar base to make the planar moving assembly as a whole into a sealed structure, and in order to ensure the integrity of the light propagation, a light propagation channel is arranged on the cover for the incident light to pass through, and the size of the light propagation channel of the cover and the channel arranged on the moving block, the through hole of the diaphragm fixing seat, the size of the channel of the diaphragm rotating block and the size of the diaphragm piece are the same.

[0055] In the embodiment, the diaphragm assembly can realize the rotational movement, the planar first direction (X-axis) movement and the planar second direction (Y-axis) movement through the two adjusting assemblies, and the two adjusting assemblies are two independent assemblies to realize independent adjustment, and the adjustment of any one assembly will not interfere with the adjustment result of the other assembly, thereby reducing the error of the diaphragm adjustment and making the diaphragm position adjustment more accurate.

[0056] In another embodiment, referring to Figure 4 , a diaphragm adjusting device 10a is provided, and the difference between the diaphragm adjusting device 10a and the diaphragm adjusting device 10 is that the device in the embodiment is further connected with an adapter block 15 on the planar base, and the adapter block 15 is used to connect the diaphragm assembly and the diaphragm adjusting device with external mechanisms. Similarly, in order to ensure the propagation of the incident light beam, a light propagation channel with the same channel size as the planar base, the diaphragm fixing seat and the diaphragm adapter block is arranged on the adapter block to make the incident light realize complete propagation.

[0057] In the embodiment, the diaphragm assembly can realize the rotational movement, the planar first direction (X-axis) movement and the planar second direction (Y-axis) movement through the two adjusting assemblies, and the two adjusting assemblies are two independent assemblies to realize independent adjustment, and the adjustment of any one assembly will not interfere with the adjustment result of the other assembly, thereby reducing the error of the diaphragm adjustment and making the diaphragm position adjustment more accurate.

[0058] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second", "third" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0059] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, and are not intended to limit the present application; although the present application has been described in detail with reference to the above embodiments, those skilled in the art should understand that the technical solutions recorded in the above embodiments can be modified, or some or all of the technical features can be replaced by equivalents; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. An aperture adjustment device, characterized in that, include: An aperture fixing base has a through hole for placing an aperture assembly, and the aperture assembly rotates relative to the aperture fixing base by being driven by a rotation adjustment component; A planar moving component includes a moving block, a first adjusting component, and a second adjusting component. The first adjusting component and the second adjusting component respectively drive the moving block to move in two directions. The moving block is fixedly connected to the aperture fixing seat and has a light propagation channel for the light beam to pass through. The light propagation channel is correspondingly arranged with the through hole.

2. The aperture adjustment device according to claim 1, characterized in that, The aperture assembly includes an aperture rotating block, which is movably engaged with the surface of the aperture fixing seat, and also includes an aperture plate that abuts against the inner side of the aperture rotating block by a pressure ring; the rotation adjustment assembly drives the aperture rotating block to rotate relative to the aperture fixing seat.

3. The aperture adjustment device according to claim 2, characterized in that, The rotation adjustment assembly includes a force-applying component, which is connected to the aperture rotating block. The force-applying component moves based on an external force in the vertical direction, thereby driving the aperture rotating block to rotate.

4. The aperture adjustment device according to claim 3, characterized in that, The force-applying component is a rotary adjusting screw. The rotary adjusting assembly also includes a rotary adjusting block fixedly mounted on the aperture fixing seat. The rotary adjusting block has a threaded hole, and the rotary adjusting screw cooperates with the threaded hole to move the rotary adjusting screw in the vertical direction.

5. The aperture adjustment device according to claim 4, characterized in that, The aperture rotating block extends outward with at least one limiting member, which contacts the end of the force-applying member; the limiting member drives the aperture rotating block to rotate based on the force of the force-applying member.

6. The aperture adjustment device according to claim 1, characterized in that, The first adjustment component and the second adjustment component include a first adjustment screw and a second adjustment screw disposed on adjacent sides of the moving block, which respectively drive the moving block to move in two different directions.

7. The aperture adjustment device according to claim 6, characterized in that, The planar moving component further includes a planar base, the edge of which extends upward to form a side plate, and a placement space is formed based on the side plate, the placement space being used to place the moving block; and the moving block has a moving space with the inner side of the planar base in a first direction and a second direction.

8. The aperture adjustment device according to claim 7, characterized in that, The movable block is provided with limit springs between the first direction, the second direction and the planar base.

9. The aperture adjustment device according to claim 7, characterized in that, The planar moving component also includes a cover, one side of which is fitted to the planar base, and a light propagation channel for the light beam to pass through is provided on the cover.

10. The aperture adjustment device according to claim 7, characterized in that, The device also includes an adapter block, one plane of which is connected to the planar base, and the other plane is connected to an external mechanism.

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