Photomask fixing structure of online photomask box

Abstract

The utility model relates to the technical field of semiconductor production equipment, in particular to a photomask fixing structure of an online photomask box, which comprises a box body, a photomask body, a door body, a pull rod, two fixing frames, a fixing component and an auxiliary component, the door body is rotatably connected with the box body and positioned on one side of the box body, the pull rod is fixedly connected with the door body and positioned on the outer side of the door body, and the fixing component is fixedly connected with the box body. The two fixing frames are detachably connected with the photomask body respectively and located below the photomask body, the fixing part is arranged in the box body, the auxiliary part is arranged in the box body, the door body is opened by holding the pull rod, the photomask body is placed in the box body, and the photomask body is preliminarily fixed in the longitudinal direction under the assistance of the auxiliary part. And then the fixing part is controlled to drive the two fixing frames to move to transversely fix the photomask body, so that the fixing stability of the photomask body in the box body can be improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to semiconductor production equipment technical field especially relates to an online mask box mask fixed structure. BACKGROUND

[0002] Micro - lithography process is to the well - designed circuit pattern, complete and accurate copy to the substrate, the well - designed pattern will make into the mask first, then the principle of optical imaging is applied, the pattern is projected to the substrate, therefore, the protection and cleaning of mask will influence the advantage and the shortcoming of micro - lithography process, but, the mask box in the market is not convenient for the mask dismounting, the contact area is small and is easy to cause the mask instability, the contact area is big and brings the inconvenience to the dismounting, the dismounting, maintenance of mask bring the difficulty.

[0003] In order to solve the above problems, the prior art patent (CN212781664U) discloses an online mask box mask fixed structure, which is provided with movable and fixed pressing strips inside the mask box, which is convenient for fixing the four corners of the mask, and the contact surface is small, and the inclined surface provided on the inner wall of the buckle plate groove and the baffle is convenient for dismounting and fixing the mask.

[0004] But the online mask box mask fixed structure in the prior art only fixes the mask through movable and fixed pressing strips, which leads to poor stability of the mask during fixing. UTILITY MODEL CONTENTS

[0005] The utility model aims at providing an online mask box mask fixed structure, which aims at solving the technical problem that the online mask box mask fixed structure in the prior art only fixes the mask through movable and fixed pressing strips, which leads to poor stability of the mask during fixing.

[0006] To achieve the above object, the utility model adopts an online mask box mask fixed structure, which comprises a box body, a mask body and a fixing assembly, the mask body is arranged in the inside of the box body,

[0007] The fixing assembly comprises a door body, a pull rod, two fixed frames, a fixing component and an auxiliary component, the door body is rotatably connected with the box body and located on one side of the box body, the pull rod is fixedly connected with the door body and located on the outer side of the door body, the two fixed frames are detachably connected with the mask body respectively and located below the mask body, the fixing component is arranged in the inside of the box body, and the auxiliary component is arranged in the inside of the box body.

[0008] The fixing component comprises a threaded rod, two first moving blocks and a stabilizing unit, the threaded rod is rotationally connected with the box body and located inside the box body, the threads on the two ends of the threaded rod are opposite in rotation direction, the two first moving blocks are threadedly connected with the threaded rod and wrap the threaded rod, and the two first moving blocks are detachably connected with the two fixing frames respectively, and the stabilizing unit is arranged inside the box body.

[0009] The stabilizing unit comprises two second moving blocks and a guide rod, the guide rod is fixedly connected with the box body and located inside the box body, the two second moving blocks are slidably connected with the guide rod and wrap the guide rod, and the two second moving blocks are detachably connected with the two fixing frames respectively.

[0010] The auxiliary component comprises a connecting rod, a limiting frame and a moving unit, the connecting rod is fixedly connected with the box body and located inside the box body, the connecting rod is located above the photomask body, the limiting frame is fixedly connected with the connecting rod and located at one end of the connecting rod away from the box body, the limiting frame is attached to the photomask body, and the moving unit is arranged inside the box body and located below the photomask body.

[0011] The moving unit comprises a moving plate and an extension rod, the extension rod is detachably connected with the box body and located at the bottom of the box body, the moving plate is detachably connected with the extension rod and located above the extension rod, and the moving plate is attached to the photomask body.

[0012] The online photomask box photomask fixing structure of the utility model, by holding the pull rod opens the door body with the photomask body is put into the inside of the box body, under the aid of the auxiliary component, the photomask body is fixed in the primary longitudinal direction, and then the fixing component drives two fixing frames to move to fix the photomask body in the horizontal direction, so that the stability of the photomask body in the box body can be increased. BRIEF DESCRIPTION OF DRAWINGS

[0013] In order to more clearly illustrate the technical scheme in the embodiments of the utility model or the prior art, the following will briefly introduce the drawings needed to be used in the embodiment or the prior art description, and obviously, the drawings in the following description are only some embodiments of the utility model, and for those skilled in the art, other drawings can also be obtained according to these drawings without creative labor.

[0014] Figure 1 It is the structure diagram of the online photomask box photomask fixing structure of the utility model.

[0015] Figure 2 is the front view of the online mask box mask fixing structure of the utility model.

[0016] Figure 3 is the side view of the online mask box mask fixing structure of the utility model.

[0017] Figure 4 is the Figure 2 A-A line structure section view of the utility model.

[0018] Figure 5 is the Figure 3 B-B line structure section view of the utility model.

[0019] 101-box body, 102-mask body, 103-door body, 104-pull rod, 105-fixing frame, 106-threaded rod, 107-first moving block, 108-second moving block, 109-guide rod, 110-connecting rod, 111-limiting frame, 112-moving plate, 113-telescopic rod, 114-motor, 115-cylinder. DETAILED DESCRIPTION

[0020] The embodiments of the utility model are described in detail below, the examples of the embodiments are shown in the drawings, wherein the same or similar reference signs represent the same or similar elements or elements with the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary, and are intended to explain the utility model, and cannot be understood as the limitation of the utility model.

[0021] Please refer to Figures 1-5 , wherein Figure 1 is the structure schematic view of the online mask box mask fixing structure of the utility model, Figure 2 is the front view of the online mask box mask fixing structure of the utility model, Figure 3 is the side view of the online mask box mask fixing structure of the utility model, Figure 4 is the Figure 2 A-A line structure section view of the utility model, Figure 5 is the Figure 3 B-B line structure section view of the utility model.

[0022] The utility model provides a kind of online mask box mask fixing structure, including box body 101, mask body 102 and fixed assembly, the mask body 102 is set to the inside of the box body 101;

[0023] The fixing assembly comprises a door body 103, a pull rod 104, two fixing frames 105, a fixing component and an auxiliary component, the door body 103 is rotationally connected with the box body 101 and is located at one side of the box body 101, the pull rod 104 is fixedly connected with the door body 103 and is located at the outer side of the door body 103, the two fixing frames 105 are detachably connected with the photomask body 102 and are located below the photomask body 102, the fixing component is arranged in the interior of the box body 101, and the auxiliary component is arranged in the interior of the box body 101.

[0024] In the embodiment, the photomask body 102 is placed into the interior of the box body 101 by opening the door body 103 by holding the pull rod 104, the photomask body 102 is preliminarily fixed in the longitudinal direction with the assistance of the auxiliary component, and then the fixing component is controlled to drive the two fixing frames 105 to move to fix the photomask body 102 in the transverse direction, so that the stability of the photomask body 102 fixed in the interior of the box body 101 is improved.

[0025] Further, the fixing component comprises a threaded rod 106, two first moving blocks 107 and a stabilizing unit, the threaded rod 106 is rotationally connected with the box body 101 and is located in the interior of the box body 101, the threads at the two ends of the threaded rod 106 are opposite in rotation direction, the two first moving blocks 107 are threadedly connected with the threaded rod 106 and wrap the threaded rod 106, and the two first moving blocks 107 are detachably connected with the two fixing frames 105 respectively, and the stabilizing unit is arranged in the interior of the box body 101.

[0026] In the embodiment, the threaded rod 106 is driven to rotate by controlling the motor 114 fixed outside the box body 101, the threaded rod 106 is driven to move towards the other by the threads at the two ends thereof opposite in rotation direction, and simultaneously, the two fixing frames 105 are driven to move towards the other, so that the two fixing frames 105 fix the photomask body 102 in the transverse direction.

[0027] Further, the stabilizing unit comprises two second moving blocks 108 and a guide rod 109, the guide rod 109 is fixedly connected with the box body 101 and is located in the interior of the box body 101, the two second moving blocks 108 are slidably connected with the guide rod 109 and wrap the guide rod 109, and the two second moving blocks 108 are detachably connected with the two fixing frames 105 respectively.

[0028] In the embodiment, when the two fixing frames 105 move towards the other, the two second moving blocks 108 are driven to slide on the guide rod 109, so that the stability of the movement of the fixing frames 105 is improved.

[0029] Further, the auxiliary component comprises a connecting rod 110, a limiting frame 111 and a moving unit, the connecting rod 110 is fixedly connected with the box body 101 and located inside the box body 101, and the connecting rod 110 is located above the photomask body 102, the limiting frame 111 is fixedly connected with the connecting rod 110 and located at one end of the connecting rod 110 away from the box body 101, and the limiting frame 111 is attached to the photomask body 102, and the moving unit is arranged inside the box body 101 and located below the photomask body 102.

[0030] In the embodiment, the connecting rod 110 fixes the position of the limiting frame 111, and the moving unit can drive the photomask body 102 to move up and down, and when the photomask body 102 abuts against the limiting frame 111, the longitudinal fixation of the photomask body 102 is completed.

[0031] Further, the moving unit comprises a moving plate 112 and a telescopic rod 113, the telescopic rod 113 is detachably connected with the box body 101 and located at the bottom of the box body 101, and the moving plate 112 is detachably connected with the telescopic rod 113 and located above the telescopic rod 113, and the moving plate 112 is attached to the photomask body 102.

[0032] In the embodiment, the air cylinder 115 can drive the moving plate 112 to move up and down, and at the same time, the telescopic rod 113 can increase the stability of the moving plate 112 when moving up and down.

[0033] The above only discloses a preferred embodiment of the utility model, of course, cannot limit the scope of the utility model, and the person skilled in the art can understand that all or part of the processes of the above embodiment are implemented, and equivalent changes are made according to the utility model claim, which still belongs to the range covered by the utility model.

Claims

1. An online photomask box and photomask fixing structure, comprising a box body and a photomask body, wherein the photomask body is disposed inside the box body, characterized in that, It also includes fixed components; The fixing assembly includes a door, a pull rod, two fixing frames, a fixing component, and an auxiliary component. The door is rotatably connected to the box body and is located on one side of the box body. The pull rod is fixedly connected to the door and is located on the outside of the door. The two fixing frames are detachably connected to the photomask body and are located below the photomask body. The fixing component is located inside the box body, and the auxiliary component is located inside the box body.

2. The online photomask box and photomask fixing structure as described in claim 1, characterized in that, The fixing component includes a threaded rod, two first moving blocks, and a stabilizing unit. The threaded rod is rotatably connected to the box body and is located inside the box body. The threads at both ends of the threaded rod have opposite directions. The two first moving blocks are threadedly connected to the threaded rod and wrap around the threaded rod. The two first moving blocks are detachably connected to the two fixing frames respectively. The stabilizing unit is located inside the box body.

3. The online photomask box and photomask fixing structure as described in claim 2, characterized in that, The stabilizing unit includes two second movable blocks and a guide rod. The guide rod is fixedly connected to the box body and located inside the box body. The two second movable blocks are slidably connected to the guide rod and wrap around the guide rod. The two second movable blocks are detachably connected to the two fixed frames respectively.

4. The online photomask box and photomask fixing structure as described in claim 1, characterized in that, The auxiliary components include a connecting rod, a limiting frame, and a moving unit. The connecting rod is fixedly connected to the housing and located inside the housing, with the connecting rod positioned above the photomask body. The limiting frame is fixedly connected to the connecting rod and located at the end of the connecting rod away from the housing, with the limiting frame fitting against the photomask body. The moving unit is disposed inside the housing and located below the photomask body.

5. The online photomask box and photomask fixing structure as described in claim 4, characterized in that, The moving unit includes a moving plate and a telescopic rod. The telescopic rod is detachably connected to the box body and is located at the bottom of the box body. The moving plate is detachably connected to the telescopic rod and is located above the telescopic rod. The moving plate is in contact with the photomask body.

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