Photoetching machine mask clamping and positioning mechanism with size switching structure

Abstract

The utility model provides a photoetching machine mask clamping and positioning mechanism with a size switching structure, which comprises a supporting and assembling component, a transverse positioning component, a longitudinal positioning component, a clamping and driving component, a bidirectional positioning component and a suction positioning component, the mounting positions of a transverse positioning assembly and a longitudinal positioning assembly of the clamping and positioning mechanism can be adjusted along a transverse hole and a longitudinal hole respectively, and a clamping driving assembly is mounted through an inclined notch and can move in the inclined direction, so that the clamping and positioning mechanism can flexibly adapt to masks with different sizes, the universality and applicability of the photoetching machine are improved, and the working efficiency of the photoetching machine is improved. The driving air cylinder in the clamping driving assembly can automatically drive the clamping seat plate to move, rapid clamping and releasing of the mask plate are achieved, the automation degree and efficiency of the photoetching process are improved, a detachable connecting structure and an adjustable mounting position are adopted, the device can adapt to mask plates of different models and specifications, and the compatibility and flexibility of the device are improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to integrated circuit production equipment especially relates to a photolithography mask plate clamping positioning mechanism with size switching structure. BACKGROUND

[0002] Patent document CN117684124A discloses a mask plate clamp, which comprises an outer frame, a supporting part and a positioning part. The outer frame is provided with a through mounting hole. The mounting hole is provided with a first clamping part for clamping a second clamping part of a thin film mask plate. The supporting part is installed at the bottom of the mounting hole and is used for placing and bonding the mask plate. The positioning part is used for applying a force parallel to the axis of the mounting hole to the mask plate to position the thin film mask plate on the supporting part. The fixing mode of the mask plate clamp is mechanical clamping and bonding. After mechanical and bonding fixing, the positioning part is used to position the mask plate on the supporting part. By applying a force to the mask plate in a direction parallel to the axis of the mounting hole, the flatness of the mask plate can be improved. However, when switching the size of the mask plate, the entire platform needs to be disassembled, and the gas circuit and the circuit need to be disassembled and installed again. The wiring is time-consuming and laborious, and there is a risk of collision and damage to parts during disassembly. Therefore, it is necessary to optimize the structure to adapt to mask plates of different sizes. SUMMARY

[0003] The utility model aims at providing a photolithography mask plate clamping positioning mechanism with size switching structure to improve its use flexibility.

[0004] The utility model adopts the technical scheme of:

[0005] A photolithography mask plate clamping positioning mechanism with size switching structure comprises:

[0006] A support assembly is installed in the photolithography machine body and has an assembly space inside;

[0007] A lateral positioning assembly is installed in the support assembly through a detachable connection structure. The installation position can be adjusted along the lateral direction in the support assembly. The shape of the lateral positioning assembly is adapted to the shape of the longitudinal edge of the mask plate, and the longitudinal edge of the mask plate can be positioned.

[0008] A longitudinal positioning assembly is installed in the support assembly through a detachable connection structure. The installation position can be adjusted along the longitudinal direction in the support assembly. The shape of the longitudinal positioning assembly is adapted to the shape of the lateral edge of the mask plate, and the lateral edge of the mask plate can be positioned.

[0009] The clamping driving assembly is installed in the support assembly through a movable connection structure and is arranged obliquely corresponding to the positions of the transverse positioning assembly and the longitudinal positioning assembly, and can move obliquely in the support assembly;

[0010] The bidirectional positioning assembly is installed in the clamping driving assembly and can move with the clamping driving assembly to change the distance between the transverse positioning assembly, the longitudinal positioning assembly and the bidirectional positioning assembly, and the shape of the bidirectional positioning assembly is adapted to the shape of the transverse edge and the longitudinal edge of the mask plate, so that the transverse edge and the longitudinal edge of the mask plate can be bidirectionally positioned and clamped.

[0011] The suction positioning assembly is installed in the support assembly through a detachable connection structure and corresponds to the positions of the transverse positioning assembly, the longitudinal positioning assembly and the bidirectional positioning assembly, and the mask plate is positioned by suction through the suction positioning assembly.

[0012] Specifically, the support assembly comprises:

[0013] The assembly bottom plate is installed in the photoetching machine body through connecting bolts, and an assembly space is formed in the interior thereof;

[0014] The transverse eyelets are provided in two groups, each group of transverse eyelets is respectively formed in the assembly bottom plate, the connecting lines formed by the transverse eyelets extend in the transverse direction, and the transverse positioning assembly is installed in the assembly bottom plate through the transverse eyelets;

[0015] The longitudinal eyelets are provided in two groups, each group of longitudinal eyelets is respectively formed in the assembly bottom plate, the connecting lines formed by the longitudinal eyelets extend in the longitudinal direction, and the longitudinal positioning assembly is installed in the assembly bottom plate through the longitudinal eyelets;

[0016] The oblique notches are formed in the assembly bottom plate and extend in the oblique direction, the positions of the oblique notches correspond to the positions of the transverse eyelets and the longitudinal eyelets, and the clamping driving assembly is installed in the assembly bottom plate through the oblique notches.

[0017] The transverse positioning assembly comprises:

[0018] The transverse seat blocks are provided in a pair, each transverse seat block is installed in the assembly bottom plate through a connecting bolt adapted to the transverse eyelet, and the installation position can be adjusted along the connecting line formed by the transverse eyelet;

[0019] The transverse rollers are provided in a pair, each transverse roller is installed on the transverse seat block through a rotating structure, the installation position can be adjusted with the transverse seat block, and the shape of the transverse roller is adapted to the shape of the longitudinal edge of the mask plate, so that the longitudinal edge of the mask plate is positioned by the transverse roller.

[0020] The longitudinal positioning assembly comprises:

[0021] A pair of longitudinal seat blocks are installed in the assembly base plate through connecting bolts matched with the longitudinal holes, and the installation position can be adjusted along the line formed by the longitudinal holes;

[0022] A pair of longitudinal rollers are installed on the longitudinal seat blocks through rotating structures, and the installation position can be adjusted along with the longitudinal seat blocks, and the transverse edge of the mask plate is positioned by the pair of longitudinal rollers.

[0023] The clamping driving assembly comprises:

[0024] A guide support rail is located in the inclined slot, extends along the inclined direction, and is connected with the assembly base plate through connecting bolts;

[0025] A clamping seat plate is located in the inclined slot and is installed on the guide support rail through a sliding block, and can move along the guide support rail to approach or move away from the transverse positioning assembly and the longitudinal positioning assembly;

[0026] A clamping tension spring is located in the inclined slot, one end of which is connected with the clamping seat plate, and the other end is connected with the assembly base plate, so that the clamping seat plate is driven by the clamping tension spring to approach the transverse positioning assembly and the longitudinal positioning assembly.

[0027] The bidirectional positioning assembly comprises:

[0028] A clamping seat block is installed on the clamping seat plate and can move along with the clamping seat plate;

[0029] A pair of clamping rollers are installed on the clamping seat block through rotating structures, and can move along with the clamping seat block, and are matched with the shape of the transverse edge and the longitudinal edge of the mask plate, respectively, so that the transverse edge and the longitudinal edge of the mask plate are positioned and clamped by the pair of clamping rollers.

[0030] The clamping driving assembly further comprises:

[0031] A driving seat frame is located in the inclined slot and is connected with the assembly base plate through connecting bolts;

[0032] A driving cylinder is installed on the driving seat frame, and the end of the piston rod is connected with the clamping seat plate, so that the clamping seat plate is driven by the driving cylinder to move away from the transverse positioning assembly and the longitudinal positioning assembly.

[0033] The suction positioning assembly comprises:

[0034] A pair of suction supports are installed in the assembly base plate through connecting bolts, and are connected with the suction device through pipelines, so that the mask plate is positioned by the pair of suction supports.

[0035] The advantages of this utility model are:

[0036] The clamping and positioning mechanism's lateral and longitudinal positioning components can be adjusted along the lateral and longitudinal apertures, respectively. The clamping drive component is installed through an oblique slot and can move obliquely, flexibly adapting to masks of different sizes, thus improving the versatility and applicability of the lithography machine. The lateral and longitudinal rollers ensure precise positioning of both the longitudinal and lateral edges of the mask. The clamping rollers in the bidirectional positioning component can simultaneously position and clamp the lateral and longitudinal edges of the mask, ensuring the stability of the mask during the lithography process. The drive cylinder in the clamping drive component can automatically move the clamping base plate, enabling rapid clamping and release of the mask, improving the automation and efficiency of the lithography process. Its detachable connection structure and adjustable installation position allow it to adapt to different models and specifications of masks, enhancing the equipment's compatibility and flexibility. Attached Figure Description

[0037] Fig. 1 This is a front structural schematic diagram of the photolithography mask clamping and positioning mechanism with a size switching structure proposed in this utility model;

[0038] Fig. 2 This is a schematic diagram of the rear structure of the clamping and positioning mechanism;

[0039] Fig. 3 This is one of the isometric views of the clamping and positioning mechanism;

[0040] Fig. 4 This is the second isometric view of the clamping and positioning mechanism. Detailed Implementation

[0041] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of this utility model provided in the accompanying drawings is not intended to limit the scope of the claimed utility model, but merely represents selected embodiments of the utility model. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without inventive effort are within the scope of protection of this utility model.

[0042] like Figs. 1-4As shown, the mask plate clamping and positioning mechanism with size switching structure of the photoetching machine comprises a support assembly component, a transverse positioning component, a longitudinal positioning component, a clamping driving component, a bidirectional positioning component and a suction positioning component, the support assembly component is installed in the photoetching machine body, and an assembly space is formed in the support assembly component; the transverse positioning component is installed in the support assembly component through a detachable connecting structure, the installation position of the transverse positioning component in the support assembly component can be adjusted along the transverse direction, the shape of the transverse positioning component is adapted to the shape of the longitudinal edge of the mask plate, and the longitudinal edge of the mask plate can be positioned; the longitudinal positioning component is installed in the support assembly component through a detachable connecting structure, the installation position of the longitudinal positioning component in the support assembly component can be adjusted along the longitudinal direction, the shape of the longitudinal positioning component is adapted to the shape of the transverse edge of the mask plate, and the transverse edge of the mask plate can be positioned; the clamping driving component is installed in the support assembly component through a movable connecting structure and is arranged along the inclined direction, the clamping driving component is located corresponding to the transverse positioning component and the longitudinal positioning component, the clamping driving component can move in the support assembly component along the inclined direction; the bidirectional positioning component is installed in the clamping driving component and can move together with the clamping driving component, so that the distance between the transverse positioning component, the longitudinal positioning component and the bidirectional positioning component is changed, the shape of the bidirectional positioning component is adapted to the shape of the transverse edge and the longitudinal edge of the mask plate, the transverse edge and the longitudinal edge of the mask plate can be positioned and clamped in two directions; and the suction positioning component is installed in the support assembly component through a detachable connecting structure and is located corresponding to the transverse positioning component, the longitudinal positioning component and the bidirectional positioning component, and the mask plate is positioned by the suction positioning component.

[0043] In the embodiment, the support assembly component comprises an assembly bottom plate 110, transverse eyelets 120, longitudinal eyelets 130 and an inclined slot 140, the assembly bottom plate is installed in the photoetching machine body through connecting bolts, an assembly space is formed in the assembly bottom plate, the transverse eyelets are provided in two groups, each group of the transverse eyelets is formed in the assembly bottom plate, and the lines formed by the transverse eyelets extend along the transverse direction, the transverse positioning component is installed in the assembly bottom plate through the transverse eyelets, the longitudinal eyelets are provided in two groups, each group of the longitudinal eyelets is formed in the assembly bottom plate, and the lines formed by the longitudinal eyelets extend along the longitudinal direction, the longitudinal positioning component is installed in the assembly bottom plate through the longitudinal eyelets, and the inclined slot is formed in the assembly bottom plate and extends along the inclined direction, the position of the inclined slot corresponds to the positions of the transverse eyelets and the longitudinal eyelets, and the clamping driving component is installed in the assembly bottom plate through the inclined slot.

[0044] The transverse positioning component comprises transverse seat blocks 210 and transverse rollers 220, the transverse seat blocks are provided in pairs, each transverse seat block is installed in the assembly bottom plate through connecting bolts matched with the transverse eyelets, and the installation position of each transverse seat block in the assembly bottom plate can be adjusted along the lines formed by the transverse eyelets, the transverse rollers are provided in pairs, each transverse roller is installed on the transverse seat block through a rotating structure, the installation position of each transverse roller can be adjusted together with the transverse seat block, and the shape of each transverse roller is adapted to the shape of the longitudinal edge of the mask plate, so that the longitudinal edge of the mask plate is positioned by the transverse rollers.

[0045] The longitudinal positioning assembly comprises a pair of longitudinal seat blocks 310 and a pair of longitudinal rollers 320. Each longitudinal seat block is installed in the assembly base plate through a connecting bolt matched with the longitudinal hole, and can be adjusted in position along the line formed by the longitudinal hole. Each longitudinal roller is installed on the longitudinal seat block through a rotating structure, and can be adjusted in position together with the longitudinal seat block. The lateral edges of the mask plate are positioned by the pair of longitudinal rollers.

[0046] The clamping driving assembly comprises a guide support rail 410, a clamping seat plate 420, a clamping tension spring 430, a driving seat frame 440 and a driving cylinder 450. The guide support rail is located in the inclined slot, extends along the inclination, and is connected with the assembly base plate through a connecting bolt. The clamping seat plate is located in the inclined slot, and is installed on the guide support rail through a sliding block, and can move along the guide support rail to approach or move away from the lateral positioning assembly and the longitudinal positioning assembly. One end of the clamping tension spring is connected with the clamping seat plate, and the other end is connected with the assembly base plate. The clamping seat plate is driven by the clamping tension spring to approach the lateral positioning assembly and the longitudinal positioning assembly. The driving seat frame is located in the inclined slot, and is connected with the assembly base plate through a connecting bolt. The cylinder body of the driving cylinder is installed on the driving seat frame, and the piston rod end is connected with the clamping seat plate. The clamping seat plate is driven by the driving cylinder to move away from the lateral positioning assembly and the longitudinal positioning assembly.

[0047] In the embodiment, a limiting block 141 is arranged in the inclined slot, which protrudes upwards. The clamping seat plate is provided with a matching flange 421 protruding outward on the side, which cooperates with the limiting block to limit the movement range of the clamping seat plate.

[0048] The bidirectional positioning assembly comprises a clamping seat block 510 and a pair of clamping rollers 520. The clamping seat block is installed on the clamping seat plate and can move together with the clamping seat plate. Each clamping roller is installed on the clamping seat block through a rotating structure, can move together with the clamping seat block, and is matched with the shape of the lateral edge and the longitudinal edge of the mask plate respectively. The lateral edge and the longitudinal edge of the mask plate are positioned and clamped by the pair of clamping rollers.

[0049] The suction positioning assembly comprises a pair of suction supports 600. Each suction support is installed in the assembly base plate through a connecting bolt, and is connected with the suction device through a pipeline. The mask plate is positioned by the pair of suction supports.

[0050] In the description of the utility model, it is necessary to explain that when the terms of indicating the orientation or position relationship such as "upper", "lower", "inner", "outer", "left", "right" and the like appear, it should be understood as the orientation or position relationship based on the orientation or position relationship shown in the drawings, or the orientation or position relationship of the utility model product when it is usually placed, or the orientation or position relationship commonly understood by the person skilled in the art, and it is only for the convenience of describing the utility model and simplifying the description, and therefore cannot be understood as indicating or implying that the device or element indicated must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the utility model. In addition, when the terms such as "first", "second" and the like appear, they are only used for distinguishing the description, and cannot be understood as indicating or implying relative importance. In the description of the utility model, it is also necessary to explain that unless otherwise explicitly specified and limited, the terms such as "mounting", "setting", "connecting" and the like should be understood in a broad sense, for example, "connecting" can be fixed connection, can also be detachable connection, or integral connection; can be mechanical connection, can also be electrical connection; can be direct connection, can also be indirect connection through an intermediate medium, can be the communication inside two elements. For the person skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

Claims

1. A photomask clamping and positioning mechanism with a size switching structure, characterized in that, include: A support assembly assembly is installed inside the lithography machine body and has an assembly space inside. A lateral positioning component is installed in the support assembly assembly via a detachable connection structure. Its installation position can be adjusted laterally in the support assembly assembly. Its shape is adapted to the shape of the longitudinal edge of the mask, and it can position the longitudinal edge of the mask. A longitudinal positioning component is installed in the support assembly assembly via a detachable connection structure. Its installation position can be adjusted longitudinally in the support assembly assembly. Its shape is adapted to the shape of the lateral edge of the mask, and it can position the lateral edge of the mask. A clamping drive assembly is mounted in the support assembly assembly via a movable connection structure and is arranged obliquely, corresponding to the positions of the transverse positioning assembly and the longitudinal positioning assembly. It can move obliquely in the support assembly assembly. A bidirectional positioning component is installed in the clamping drive component and can move together with the clamping drive component to change the distance between the lateral positioning component, the longitudinal positioning component and the bidirectional positioning component. Its shape is adapted to the shape of the lateral and longitudinal edges of the mask, and it can bidirectionally position and clamp the lateral and longitudinal edges of the mask. A suction positioning component is installed in the support assembly component through a detachable connection structure and corresponds to the positions of the horizontal positioning component, the vertical positioning component and the bidirectional positioning component. The suction positioning component performs suction positioning on the mask.

2. The photolithography mask clamping and positioning mechanism with a size switching structure according to claim 1, characterized in that, Support assembly components include: An assembly base plate is installed in the lithography machine body by connecting bolts, forming an assembly space inside it. The transverse holes are provided in two sets, each set of which is opened in the assembly base plate. The line formed by them extends laterally, and the transverse positioning component is installed in the assembly base plate through the transverse holes. The longitudinal holes are provided in two sets, each set of longitudinal holes being opened in the assembly base plate, and the line formed by them extending longitudinally. The longitudinal positioning component is installed in the assembly base plate through the longitudinal holes. An oblique slot is formed in the assembly base plate and extends obliquely. Its position corresponds to the positions of the transverse and longitudinal holes. The clamping drive assembly is installed in the assembly base plate through the oblique slot.

3. The photolithography mask clamping and positioning mechanism with a size switching structure according to claim 2, characterized in that, The lateral positioning components include: A pair of transverse blocks are provided, each of which is installed in the mounting base plate by connecting bolts that are compatible with the transverse holes. The installation position can be adjusted along the line formed by the transverse holes. The transverse rollers are provided in pairs. Each transverse roller is mounted on the transverse seat block via a rotating structure. The installation position can be adjusted together with the transverse seat block and is adapted to the shape of the longitudinal edge of the mask.

4. The photolithography mask clamping and positioning mechanism with a size switching structure according to claim 2, characterized in that, The longitudinal positioning components include: A pair of longitudinal seats are provided, each of which is installed in the mounting base plate by connecting bolts that are adapted to the longitudinal holes. The installation position can be adjusted along the line formed by the longitudinal holes. The longitudinal rollers are provided in pairs, and each longitudinal roller is mounted on the longitudinal seat block by a rotating structure, and the installation position can be adjusted together with the longitudinal seat block.

5. A photolithography mask clamping and positioning mechanism with a size switching structure according to claim 2, characterized in that, The clamping drive assembly includes: The guide rail is located in the inclined slot, extends obliquely, and is engaged with the mounting base plate by connecting bolts; A clamping seat plate is located in an inclined slot and is mounted on a guide rail via a slider, allowing it to move along the guide rail. A clamping spring is located in an oblique slot, with one end engaging with the clamping seat plate and the other end engaging with the mounting base plate.

6. The photolithography mask clamping and positioning mechanism with a size switching structure according to claim 5, characterized in that, The bidirectional positioning component includes: A clamping block is mounted on a clamping plate and can move together with the clamping plate. The clamping rollers are provided in pairs. Each clamping roller is mounted on the clamping block via a rotating structure and can move together with the clamping block. They are adapted to the shapes of the transverse and longitudinal edges of the mask, respectively.

7. A photolithography mask clamping and positioning mechanism with a size switching structure according to claim 5, characterized in that, The clamping drive assembly also includes: A drive mount, which is located in an inclined slot and is engaged with the mounting base plate by connecting bolts; A drive cylinder, the cylinder body of which is mounted on a drive bracket, has its piston rod end engaged with a clamping plate, and the drive cylinder drives the clamping plate away from the lateral positioning assembly and the longitudinal positioning assembly.

8. A photolithography mask clamping and positioning mechanism with a size switching structure according to claim 2, characterized in that, The suction positioning component includes: The suction support is provided in pairs. Each suction support is installed in the assembly base plate by connecting bolts and is connected to the suction equipment through pipeline.

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