Photoetching machine mask micromotion platform with voice coil driving structure

Abstract

The utility model provides a photoetching machine mask micro-motion platform with a voice coil driving structure, which comprises a fixed support substrate, an adapter bracket seat block, a limit retaining support plate, a rolling support ball bead, a pivoting limit bolt, a movable matching cushion block, a movable assembly carrier plate and a voice coil driving component, and is characterized in that the driving structure of the micro-motion platform is manufactured by adopting a voice coil motor; the response speed and the motion precision of the micro-motion platform are greatly improved, the motion smoothness of the platform is improved, the voice coil motor is a direct-drive motor, intermediate transmission links are reduced, the energy loss is reduced, the efficiency and the response speed of the system are improved, and the service life of the micro-motion platform is prolonged. The displacement sensor feeds back the position of the micro-motion platform to the controller in real time to control the motion of the coarse motion platform, so that the motion heights of the coarse motion platform and the micro-motion platform are consistent, the precision of the whole motion platform is improved, and the manufacturing precision and efficiency of the mask plate are greatly improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to integrated circuit production equipment especially relates to a photolithography machine mask plate micro motion platform with voice coil drive structure. BACKGROUND

[0002] Patent document CN113820924B discloses a micro motion platform, which comprises a base, a driving mechanism and a moving seat, the moving seat is spaced apart on the upper side of the base, the driving mechanism is installed between the base and the moving seat, the driving mechanism comprises at least three driving members arranged circumferentially, the driving direction of the driving member is perpendicular to the support plane of the moving seat, and the driving end of the driving member is flexibly connected with the moving seat;At least three height sensors and at least three plane sensors are arranged between the base and the moving seat, the at least three height sensors and the plane sensors are distributed at the corner positions of the moving seat, the height sensor detects the height displacement of the moving seat, the plane sensor detects the plane displacement of the moving seat, and the detection directions of the at least three plane sensors are arranged in intersecting mode. However, with the development of semiconductor integrated circuits, the manufacturing precision of the mask plate is required to be higher and higher, so the requirement for the micro motion platform carrying the mask plate is also continuously improved, and the conventional micro motion platform cannot meet the requirement. Therefore, it is necessary to optimize the structure to overcome the above defects. SUMMARY

[0003] The utility model aims at providing a photolithography machine mask plate micro motion platform with voice coil drive structure.

[0004] The utility model provides a photolithography machine mask plate micro motion platform with voice coil drive structure, which comprises:

[0005] A fixed support substrate is installed in the coarse motion platform of a photolithography machine through a connecting piece, and has an assembly space inside;

[0006] A fixed support substrate is installed in the coarse motion platform of a photolithography machine through a connecting piece, and has an assembly space inside;

[0007] A plurality of adapter support blocks are provided, each adapter support block is installed on the top of the fixed support substrate through a connecting piece, and protrudes upwards from the fixed support substrate;

[0008] A plurality of limiting retaining support plates are provided, each limiting retaining support plate is located above the adapter support block, and a limiting hole is formed in the interior of the limiting retaining support plate, the limiting hole is provided with a plurality of limiting holes, each limiting hole penetrates the two ends of the limiting retaining support plate along the axial direction, and is arranged in sequence along the circumferential direction of the limiting retaining support plate;

[0009] Rolling supporting ball, the rolling supporting ball is provided with a plurality of pieces, each rolling supporting ball is arranged in a limiting hole, and both ends of the rolling supporting ball are exposed from both sides of the limiting retaining support plate, the position of the rolling supporting ball is retained by the limiting retaining support plate, the bottom of the rolling supporting ball is arranged on the top of the adapter support seat block, and the rolling supporting ball can roll on the adapter support seat block;

[0010] Pivot limiting bolt, the bolt rod of the pivot limiting bolt penetrates the bottom of the adapter support seat block from the middle and is screwed into the movable assembly carrier, the bolt head of the pivot limiting bolt protrudes upwards from the adapter support seat block, the pivot core hole is formed in the limiting retaining support plate, the bolt head is inserted into the pivot core hole, and the limiting retaining support plate and the rolling supporting ball can be deflected on the bolt head;

[0011] Movable matching pad, the movable matching pad is provided with a plurality of pieces, each movable matching pad is arranged in position corresponding to the adapter support seat block, and the bottom of each movable matching pad is arranged on the top of the rolling supporting ball and can move on the rolling supporting ball;

[0012] Movable assembly carrier, the movable assembly carrier is arranged above the movable matching pad, and the bottom of the movable assembly carrier is connected with the movable matching pad through a connecting piece and can move together with the movable matching pad;

[0013] Voice coil driving assembly, the voice coil driving assembly is arranged between the fixed support base plate and the movable assembly carrier, and the movable assembly carrier is driven to move by the voice coil driving assembly.

[0014] Specifically, the voice coil driving assembly comprises:

[0015] Horizontal voice coil stator, the horizontal voice coil stator is provided with a pair of horizontal voice coil stators, each horizontal voice coil stator is arranged at the two ends of the fixed support base plate and is arranged in the horizontal direction;

[0016] Horizontal voice coil rotor, the horizontal voice coil rotor is provided with a pair of horizontal voice coil rotors, each horizontal voice coil rotor is arranged at the two ends of the movable assembly carrier and is arranged in the horizontal direction, and each horizontal voice coil rotor is matched with the horizontal voice coil stator, so that the movable assembly carrier is driven to move in the horizontal direction by the horizontal voice coil stator and the horizontal voice coil rotor;

[0017] Longitudinal voice coil stator, the longitudinal voice coil stator is provided with a pair of longitudinal voice coil stators, each longitudinal voice coil stator is arranged at the two ends of the fixed support base plate and is arranged in the longitudinal direction;

[0018] Longitudinal voice coil rotor, the longitudinal voice coil rotor is provided with a pair of longitudinal voice coil rotors, each longitudinal voice coil rotor is arranged at the two ends of the movable assembly carrier and is arranged in the longitudinal direction, and each longitudinal voice coil rotor is matched with the longitudinal voice coil stator, so that the movable assembly carrier is driven to move in the longitudinal direction by the longitudinal voice coil stator and the longitudinal voice coil rotor.

[0019] In an embodiment of the utility model, the micro-motion platform further comprises:

[0020] A displacement sensing assembly is installed between the movable assembly carrier and the fixed support substrate, and the displacement sensing assembly senses the moving distance of the movable assembly carrier.

[0021] Specifically, the displacement sensing assembly comprises:

[0022] A lateral sensing seat plate is installed at the edge of the fixed support substrate;

[0023] A lateral sensing end head is installed on the lateral sensing seat plate and points to the movable assembly carrier;

[0024] A lateral sensing end plate is installed on the movable assembly carrier and moves with the movable assembly carrier, and cooperates with the lateral sensing end head, so that the lateral sensing end head can sense the lateral moving distance of the movable assembly carrier through the movement of the lateral sensing end plate;

[0025] A longitudinal sensing seat plate is installed at the edge of the fixed support substrate;

[0026] A longitudinal sensing end head is installed on the longitudinal sensing seat plate and points to the movable assembly carrier;

[0027] A longitudinal sensing end plate is installed on the movable assembly carrier and moves with the movable assembly carrier, and cooperates with the longitudinal sensing end head, so that the longitudinal sensing end head can sense the longitudinal moving distance of the movable assembly carrier through the movement of the longitudinal sensing end plate;

[0028] A lateral reflecting mirror is installed on the movable assembly carrier through a supporting cushion block and is arranged in the lateral direction, and a lateral photoelectric sensing device adapted to the lateral reflecting mirror can sense the lateral moving distance of the movable assembly carrier;

[0029] A longitudinal reflecting mirror is installed on the movable assembly carrier through a supporting cushion block and is arranged in the longitudinal direction, and a longitudinal photoelectric sensing device adapted to the longitudinal reflecting mirror can sense the longitudinal moving distance of the movable assembly carrier.

[0030] The lateral sensing end head and the longitudinal sensing end head are respectively connected to the coarse movement platform through wires, so that the position information of the movable assembly carrier can be transmitted to the coarse movement platform, and the structure is a prior art and thus is not described in detail.

[0031] In an embodiment of the utility model, the fine movement platform further comprises:

[0032] A clamping positioning assembly is installed on the movable assembly carrier and moves with the movable assembly carrier, and has a space for placing a mask, and the clamping positioning assembly clamps and positions the mask and drives the mask to move.

[0033] Specifically, the clamping positioning assembly comprises:

[0034] transverse holes, the transverse holes are provided in two groups, each group of the transverse holes is arranged in the movable assembly plate, and a line formed by the transverse holes extends in a transverse direction;

[0035] longitudinal holes, the longitudinal holes are provided in two groups, each group of the longitudinal holes is arranged in the movable assembly plate, and a line formed by the longitudinal holes extends in a longitudinal direction;

[0036] oblique notches, the oblique notches are arranged in the movable assembly plate and extend in an oblique direction, and the oblique notches are located at positions corresponding to the transverse holes and the longitudinal holes;

[0037] transverse seat blocks, the transverse seat blocks are provided in a pair, each transverse seat block is installed in the movable assembly plate through a connecting bolt matched with the transverse hole, and the installation position of each transverse seat block can be adjusted along the line formed by the transverse holes;

[0038] transverse rollers, the transverse rollers are provided in a pair, each transverse roller is installed on the transverse seat block through a rotating structure, the installation position of each transverse roller can be adjusted along with the transverse seat block, and the transverse rollers are matched with the longitudinal edge of the mask plate, so that the longitudinal edge of the mask plate is positioned by the transverse rollers;

[0039] longitudinal seat blocks, the longitudinal seat blocks are provided in a pair, each longitudinal seat block is installed in the movable assembly plate through a connecting bolt matched with the longitudinal hole, and the installation position of each longitudinal seat block can be adjusted along the line formed by the longitudinal holes;

[0040] longitudinal rollers, the longitudinal rollers are provided in a pair, each longitudinal roller is installed on the longitudinal seat block through a rotating structure, the installation position of each longitudinal roller can be adjusted along with the longitudinal seat block, and the longitudinal rollers position the transverse edge of the mask plate;

[0041] guide rails, the guide rails are located in the oblique notches, extend in the oblique direction, and are connected to the movable assembly plate through the connecting bolts;

[0042] clamping seat plates, the clamping seat plates are located in the oblique notches and are installed on the guide rails through sliding blocks, and the clamping seat plates can move along the guide rails;

[0043] clamping tension springs, the clamping tension springs are located in the oblique notches, one end of each clamping tension spring is connected to the clamping seat plate, and the other end of each clamping tension spring is connected to the movable assembly plate;

[0044] clamping seat blocks, the clamping seat blocks are installed on the clamping seat plates and can move along with the clamping seat plates;

[0045] Clamping rollers are provided with a pair, each clamping roller is installed on the clamping seat block through a rotating structure, can move together with the clamping seat block, and is respectively matched with the shape of the transverse edge and the longitudinal edge of the mask plate, the transverse edge and the longitudinal edge of the mask plate are positioned and clamped by the clamping roller pair;

[0046] The driving seat frame is located in the inclined slot and is connected with the movable assembly carrier through connecting bolts;

[0047] The driving cylinder is installed on the driving seat frame, and the piston rod end is connected with the clamping seat plate.

[0048] The suction supports are provided with a pair, each suction support is installed in the movable assembly carrier through connecting bolts and is connected with the suction device through a pipeline, and the mask plate is positioned and sucked by the suction support.

[0049] The transverse positioning structure and the longitudinal positioning structure of the clamping positioning assembly can be adjusted and installed in the transverse and longitudinal holes respectively, the clamping driving structure is installed through the inclined slot and can move along the inclined direction, can flexibly adapt to mask plates of different sizes, improve the versatility and applicability of the photoetching machine, the driving cylinder can automatically drive the clamping seat plate to move, realize the rapid clamping and release of the mask plate, improve the automation degree and efficiency of the photoetching process, and the detachable connection structure and the adjustable installation position can adapt to mask plates of different models and specifications, improve the compatibility and flexibility of the equipment.

[0050] In an embodiment of the present application, the micro-motion platform further comprises:

[0051] The positioning mark plate body is installed on the top of the movable assembly carrier through the positioning seat block, and the movable assembly carrier can be aligned through the positioning mark plate body.

[0052] The light intensity sensing module is installed on the top of the movable assembly carrier through the positioning seat plate, and the light intensity of the photoetching mechanism can be sensed through the light intensity sensing module.

[0053] In an embodiment of the present application, the voice coil driving assembly further comprises:

[0054] The transverse limit switches are provided with two groups, each group of transverse limit switches is installed at both ends of the fixed support base plate and cooperates with the transverse voice coil mover, and the movement range of the transverse voice coil mover is limited by the transverse limit switches.

[0055] The longitudinal limit switches are provided with two groups, each group of longitudinal limit switches is installed at both ends of the movable assembly carrier and cooperates with the longitudinal voice coil mover, and the movement range of the longitudinal voice coil mover is limited by the longitudinal limit switches.

[0056] The advantages of this utility model are:

[0057] The drive structure of this micro-motion platform uses a voice coil motor, which not only greatly improves the response speed and motion accuracy of the micro-motion platform, but also enhances the smoothness of the platform's motion. The voice coil motor is a direct-drive motor, which reduces intermediate transmission links, lowers energy loss, and improves the system's efficiency and response speed. The displacement sensor provides real-time feedback on the position of the micro-motion platform to the controller to control the movement of the coarse-motion platform, making the movements of the coarse and micro-motion platforms highly consistent, improving the accuracy of the entire motion platform, and greatly improving the manufacturing accuracy and efficiency of the mask. Attached Figure Description

[0058] Fig. 1 This is a schematic diagram of the micro-motion platform for the photolithography mask with a voice coil driving structure proposed in this utility model;

[0059] Fig. 2 This is a partially exploded view of the micro-motion platform;

[0060] Fig. 3 This is a schematic diagram of the clamping and positioning assembly. Detailed Implementation

[0061] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of this utility model provided in the accompanying drawings is not intended to limit the scope of the claimed utility model, but merely represents selected embodiments of the utility model. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without inventive effort are within the scope of protection of this utility model.

[0062] like Figs. 1-3As shown, the photolithography mask micro-motion platform with a voice coil drive structure proposed in this utility model includes a fixed support substrate 101, a transition support block 102, a limiting and retaining support plate 103, rolling support balls 104, a pivot limiting bolt 105, a movable mating pad 106, a movable assembly carrier plate 107, and a voice coil drive assembly. The fixed support substrate is installed in the coarse motion platform of the photolithography machine through connectors and has an assembly space inside. The transition support block has several components, each of which is installed on the top of the fixed support substrate through connectors and protrudes upward from the fixed support substrate. The limiting and retaining support plate has several components, each of which is located above the transition support block and has a limiting hole inside. The limiting hole has several components, each of which passes through both ends of the limiting and retaining support plate axially and is arranged sequentially along the circumference of the limiting and retaining support plate. The rolling support balls have several components, each of which is placed in the limiting hole. Its two ends protrude from both sides of the limiting and retaining support plate, which holds the position of the rolling support ball. The bottom of the rolling support ball is placed on the top of the transition support block and can roll on the transition support block. The bolt of the pivot limiting bolt passes through the bottom of the transition support block from the middle and is screwed into the movable assembly plate. Its bolt head protrudes upward from the transition support block. The limiting and retaining support plate has a pivot core hole. The bolt head extends into the pivot core hole, so that the limiting and retaining support plate and the rolling support ball can deflect on the bolt head. There are several movable mating pads. Each movable mating pad corresponds to the position of the transition support block. Its bottom is placed on the top of the rolling support ball and can move on the rolling support ball. The movable assembly plate is located above the movable mating pads. Its bottom is engaged with the movable mating pads through a connector and can move together with the movable mating pads. The voice coil drive assembly is installed between the fixed support base plate and the movable assembly plate and drives the movable assembly plate to move.

[0063] In this embodiment, the voice coil drive assembly includes a transverse voice coil stator 201, a transverse voice coil mover 202, a longitudinal voice coil stator 203, and a longitudinal voice coil mover 204. A pair of transverse voice coil stators are provided, each mounted on both ends of a fixed support substrate and arranged transversely. A pair of transverse voice coil movers are provided, each mounted on both ends of a movable assembly plate and arranged transversely, cooperating with the transverse voice coil stators. The transverse voice coil stators and the transverse voice coil movers drive the movable assembly plate to move transversely. A pair of longitudinal voice coil stators are provided, each mounted on both ends of a fixed support substrate and arranged longitudinally. A pair of longitudinal voice coil movers are provided, each mounted on both ends of a movable assembly plate and arranged longitudinally, cooperating with the longitudinal voice coil stators. The longitudinal voice coil stators and the longitudinal voice coil movers drive the movable assembly plate to move longitudinally.

[0064] In this embodiment, the voice coil drive assembly further includes a lateral limit switch 205 and a longitudinal limit switch 206. There are two sets of lateral limit switches, each set of which is installed at both ends of the fixed support substrate and cooperates with the lateral voice coil mover. The lateral limit switches limit the movement range of the lateral voice coil mover. There are two sets of longitudinal limit switches, each set of which is installed at both ends of the movable assembly plate and cooperates with the longitudinal voice coil mover. The longitudinal limit switches limit the movement range of the longitudinal voice coil mover.

[0065] In this embodiment, the micro-motion platform further includes a displacement sensing component, which is installed between the movable assembly plate and the movable assembly plate to sense the movement distance of the movable assembly plate.

[0066] Specifically, the displacement sensing assembly includes a lateral sensing base plate 301, a lateral sensing end head 302, a lateral sensing end plate 303, a longitudinal sensing base plate 304, a longitudinal sensing end head 305, a longitudinal sensing end plate 306, a lateral reflective mirror 307, and a longitudinal reflective mirror 308. The lateral sensing base plate is mounted on the edge of the fixed support substrate. The lateral sensing end head is mounted on the lateral sensing base plate and points towards the movable assembly plate. The lateral sensing end plate is mounted on the movable assembly plate and can move with it. It cooperates with the lateral sensing end head, allowing the lateral sensing end head to sense the lateral movement distance of the movable assembly plate during its movement. The longitudinal sensing base plate is mounted on the edge of the fixed support substrate, and the longitudinal sensing end plate... The sensing end is mounted on the longitudinal sensing base plate and points towards the movable assembly plate. The longitudinal sensing end plate is mounted on the movable assembly plate and can move with the movable assembly plate. It cooperates with the longitudinal sensing end, so that the longitudinal sensing end can sense the longitudinal movement distance of the movable assembly plate through the movement of the longitudinal sensing end plate. The transverse reflector is mounted on the movable assembly plate through the support block and is arranged in the transverse direction. The transverse movement distance of the movable assembly plate can be sensed by the transverse photoelectric sensing device that is adapted to it. The longitudinal reflector is mounted on the movable assembly plate through the support block and is arranged in the longitudinal direction. The longitudinal movement distance of the movable assembly plate can be sensed by the longitudinal photoelectric sensing device that is adapted to it.

[0067] In this embodiment, the micro-motion platform also includes a clamping and positioning component 400. The clamping and positioning component is installed on the movable assembly plate and can move together with the movable assembly plate. It has a space for placing a mask plate inside. The clamping and positioning component clamps and positions the mask plate and moves the mask plate together.

[0068] Specifically, the clamping and positioning assembly includes a transverse eyelet 401, a longitudinal eyelet 402, an oblique slot 403, a transverse seat block 404, a transverse roller 405, a longitudinal seat block 406, a longitudinal roller 407, a guide rail 408, a clamping seat plate 409, a clamping tension spring 410, a clamping seat block 411, a clamping roller 412, a drive frame 413, a drive cylinder 414, and a suction support 415.

[0069] There are two sets of transverse holes, each set of which is opened in the movable assembly carrier plate, and the line formed by them extends transversely.

[0070] There are two sets of longitudinal holes, each set of which is opened in the movable assembly carrier plate, and the line formed by them extends longitudinally.

[0071] The oblique slot is opened in the movable assembly carrier plate and extends obliquely, and its position corresponds to the position of the transverse and longitudinal holes.

[0072] A pair of transverse seats are provided. Each transverse seat is installed in the movable assembly plate by connecting bolts that are compatible with the transverse holes. The installation position can be adjusted along the line formed by the transverse holes.

[0073] A pair of transverse rollers are provided. Each transverse roller is mounted on the transverse seat block through a rotating structure. The installation position can be adjusted together with the transverse seat block and adapted to the shape of the longitudinal edge of the mask. The transverse rollers are used to position the longitudinal edge of the mask.

[0074] A pair of longitudinal seats are provided. Each longitudinal seat is installed in the movable assembly plate by connecting bolts that are compatible with the longitudinal holes. The installation position can be adjusted along the line formed by the longitudinal holes.

[0075] A pair of longitudinal rollers are provided, each of which is mounted on the longitudinal seat block via a rotating structure. The installation position can be adjusted together with the longitudinal seat block, and the longitudinal rollers are used to position the lateral edge of the mask.

[0076] The guide rail is located in the inclined slot, extends along the inclined direction, and is engaged with the movable assembly plate by connecting bolts;

[0077] The clamping seat plate is located in the inclined slot and is mounted on the guide rail by a slider, and can move along the guide rail;

[0078] The clamping spring is located in the inclined slot, with one end engaging with the clamping base plate and the other end engaging with the movable assembly carrier plate;

[0079] The clamping block is mounted on the clamping base plate and can move together with the clamping base plate;

[0080] A pair of clamping rollers are provided. Each clamping roller is mounted on the clamping block through a rotating structure. It can move together with the clamping block and is adapted to the shape of the lateral and longitudinal edges of the mask. The clamping rollers position and clamp the lateral and longitudinal edges of the mask.

[0081] The drive mount is located in an inclined slot and is engaged with the movable assembly plate by connecting bolts;

[0082] The cylinder body of the drive cylinder is mounted on the drive support frame, and the end of its piston rod engages with the clamping seat plate;

[0083] There is a pair of suction supports. Each suction support is installed in the movable assembly plate by connecting bolts and is connected to the suction equipment through pipeline. The suction support is used to suction and position the mask plate.

[0084] In this embodiment, the micro-motion platform also includes a positioning mark plate 510 and a light intensity sensing module 520. The positioning mark plate is mounted on the top of the movable assembly plate via a positioning base block, and the movable assembly plate can be aligned via the positioning mark plate. The light intensity sensing module is mounted on the top of the movable assembly plate via a positioning base plate, and the light intensity sensing module can sense the light intensity of the photolithography mechanism.

[0085] In the description of this utility model, it should be noted that when terms such as "upper," "lower," "inner," "outer," "left," and "right" appear to indicate orientation or positional relationships, they should be understood as being based on the orientation or positional relationships shown in the accompanying drawings, or the orientation or positional relationships commonly used when the product of this utility model is in use, or the orientation or positional relationships commonly understood by those skilled in the art. These terms are used only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, when terms such as "first" and "second" appear, they are only used to distinguish descriptions and should not be construed as indicating or implying relative importance. In the description of this utility model, it should also be noted that unless otherwise explicitly specified and limited, terms such as "installation," "setting," and "connection" should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be a connection within two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

Claims

1. A photolithography mask micro-motion platform with a voice coil driving structure, characterized in that, include: A fixed support substrate is mounted in the roughing platform of the lithography machine via connectors, and has an assembly space inside. The adapter support block has several parts, and each adapter support block is installed on the top of the fixed support base plate through a connector and protrudes upward from the fixed support base plate. The limiting and retaining support plate has several parts, each of which is located above the transition support block. Each limiting and retaining support plate has a limiting hole inside, and each limiting hole has several parts. Each limiting hole passes through both ends of the limiting and retaining support plate axially and is arranged sequentially along the circumference of the limiting and retaining support plate. The rolling support ball has several parts, each of which is placed in a limiting hole, with its two ends protruding from both sides of the limiting and retaining support plate. The limiting and retaining support plate holds the position of the rolling support ball. The bottom of the rolling support ball is placed on the top of the transition support block, and it can roll on the transition support block. The pivoting limit bolt has a bolt shank that passes through the bottom of the transition support block from the middle and is screwed into the movable assembly plate. Its bolt head protrudes upward from the transition support block. The limiting and retaining support plate has a pivoting core hole. The bolt head extends into the pivoting core hole, so that the limiting and retaining support plate and the rolling support ball can deflect on the bolt head. The movable mating pad has several parts, each of which corresponds to the position of the adapter support block. Its bottom is placed on the top of the rolling support ball and can move on the rolling support ball. The movable assembly carrier plate is located above the movable mating pad, and its bottom is engaged with the movable mating pad through a connector, so that it can move together with the movable mating pad. A voice coil drive assembly is installed between a fixed support substrate and a movable assembly carrier plate, and the voice coil drive assembly assembly drives the movable assembly carrier plate to move.

2. The lithography mask micro-motion platform with a voice coil driving structure according to claim 1, characterized in that, The voice coil driver components include: A transverse voice coil stator, comprising a pair, wherein each transverse voice coil stator is respectively mounted on both ends of a fixed support base plate and arranged transversely; A transverse voice coil mover, which is provided in pairs, is installed at both ends of the movable assembly plate, arranged transversely, and respectively cooperates with the transverse voice coil stator; A pair of longitudinal voice coil stators are provided, each of which is installed at both ends of a fixed support base plate and arranged longitudinally. The longitudinal voice coil movers are provided in pairs. Each longitudinal voice coil mover is installed at both ends of the movable assembly plate and is arranged longitudinally, and each of them cooperates with the longitudinal voice coil stator.

3. The lithography mask micro-motion platform with a voice coil driving structure according to claim 1, characterized in that, Also includes: A displacement sensing component is installed between the movable assembly plates to sense the movement distance of the movable assembly plates.

4. The lithography mask micro-motion platform with a voice coil driving structure according to claim 3, characterized in that, The displacement sensing component includes: A lateral sensing base plate is mounted on the edge of a fixed support substrate. A lateral sensing end, which is mounted on a lateral sensing base plate and points towards the movable mounting plate; A lateral sensing end plate is mounted on a movable assembly plate and can move together with the movable assembly plate. It cooperates with the lateral sensing end head. A longitudinal sensing base plate is mounted on the edge of a fixed support substrate; A longitudinal sensing end, which is mounted on a longitudinal sensing base plate and points towards the movable assembly carrier plate; A longitudinal sensing end plate is mounted on a movable assembly plate and can move together with the movable assembly plate. It mates with the longitudinal sensing end head. A transverse reflector, which is mounted on a movable assembly plate via a support block and arranged transversely; A longitudinal reflective mirror is mounted on a movable assembly plate via a support block and is arranged longitudinally.

5. A photolithography mask micro-motion platform with a voice coil driving structure according to claim 1, characterized in that, Also includes: A clamping and positioning assembly is mounted on a movable assembly plate and can move with the movable assembly plate. It has a space inside for placing a mask.

6. A photolithography mask micro-motion platform with a voice coil driving structure according to claim 5, characterized in that, The clamping and positioning components include: The transverse holes are provided in two sets, each set of transverse holes being opened in the movable assembly carrier plate, and the line formed by them extends transversely. Longitudinal holes, which are provided in two sets, each set of longitudinal holes being opened in the movable assembly carrier plate, and the line formed by them extending longitudinally. An oblique slot is formed in the movable assembly carrier plate and extends obliquely, its position corresponding to the positions of the transverse and longitudinal holes. A pair of transverse blocks are provided, each of which is installed in the movable assembly carrier plate by connecting bolts that are adapted to the transverse holes; A pair of transverse rollers are provided, each of which is mounted on a transverse seat block via a rotating structure. The rollers can be adjusted in position along with the transverse seat block and are adapted to the shape of the longitudinal edge of the mask. A pair of longitudinal seats are provided, and each longitudinal seat is installed in the movable assembly carrier plate by connecting bolts that are adapted to longitudinal holes. The longitudinal rollers are provided in pairs, and each longitudinal roller is mounted on the longitudinal seat block through a rotating structure, and the mounting position can be adjusted together with the longitudinal seat block. A guide rail, which is located in an inclined slot, extends along the incline, and is engaged with a movable assembly plate by connecting bolts; A clamping seat plate is located in an inclined slot and is mounted on a guide rail via a slider, allowing it to move along the guide rail. A clamping tension spring is located in an inclined slot, with one end engaging with a clamping base plate and the other end engaging with a movable assembly carrier plate. A clamping block is mounted on a clamping plate and can move together with the clamping plate. The clamping rollers are provided in pairs. Each clamping roller is mounted on the clamping block through a rotating structure and can move together with the clamping block. They are respectively adapted to the shape of the lateral and longitudinal edges of the mask. A drive mount, which is located in an inclined slot and engages with a movable assembly carrier plate by connecting bolts; A drive cylinder, the cylinder body of which is mounted on a drive support, and the end of its piston rod engaging with a clamping seat plate; The suction support is provided in pairs. Each suction support is installed in the movable assembly plate by connecting bolts and is connected to the suction equipment through pipeline.

7. A photolithography mask micro-motion platform with a voice coil driving structure according to claim 1, characterized in that, Also includes: A positioning mark plate is mounted on the top of a movable assembly carrier plate via a positioning seat block. A light intensity sensing module is mounted on the top of a movable assembly carrier plate via a positioning base plate.

8. A photolithography mask micro-motion platform with a voice coil driving structure according to claim 2, characterized in that, The voice coil driver assembly also includes: A lateral limit switch is provided, which has two sets. Each set of lateral limit switches is installed at both ends of the fixed support base plate and cooperates with the lateral voice coil mover. The longitudinal limit switch has two sets, each set of which is installed at both ends of the movable assembly plate and cooperates with the longitudinal voice coil mover.

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