Direct-current magnetron sputtering power supply with wire arrangement structure
By designing a cable management structure on the DC magnetron sputtering power supply, the problems of cable tangling and damage were solved, achieving orderly cable arrangement and buffer protection, thus improving the safety and aesthetics of the equipment.
Patent Information
- Application Number
- CN202522405424.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-11-13
- Publication Date
- 2025-12-23
- Estimated Expiration
- 2035-11-13
AI Technical Summary
The cables of DC magnetron sputtering power supplies are prone to tangling and knotting, and lack buffer protection, leading to cable damage and safety hazards.
Design a DC magnetron sputtering power supply with a cable management structure, including protective components and cable management components. The orderly arrangement and buffer protection of cables are achieved by using guide wheels, flexible connections and threaded connections.
It improves the aesthetics of cable management, reduces the risk of cable damage due to collisions or pulling, and avoids safety hazards such as loose cables and power outages.
Smart Images
Figure CN223714370U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of DC magnetron sputtering power supply technology, and in particular to a DC magnetron sputtering power supply with a wire management structure. Background Technology
[0002] DC magnetron sputtering power supplies, as the core power supply device for magnetron sputtering coating equipment, are widely used in industrial fields such as semiconductors, optical thin films, and decorative coatings. In practical applications, DC magnetron sputtering power supplies typically work in conjunction with multiple devices such as coating chambers, vacuum systems, and control systems. The power supply unit 1 requires connection to multiple sets of power supply cables, signal transmission cables, and control cables at its rear end. These cables vary in specifications (such as diameter and hardness) and can number from 5 to 15. Due to the large number of connected cables, they easily become tangled and piled up, which is unsightly and inconvenient to manage. The piled-up cables are also prone to knotting and tangling. Furthermore, during equipment handling, personnel movement in the workshop environment, or other equipment operation, the messy cables are easily pulled or stepped on accidentally. Due to the lack of a buffer protection structure, the pulling force acts directly on the connection between the cable and the power supply unit's connector, which can easily lead to damage to the cable sheath, breakage of the internal copper core, and even loosening of the cable plug and connector, causing power outages or signal interruptions. In severe cases, poor contact can even generate electric arcs, posing a safety hazard.
[0003] Therefore, it is necessary to provide a new DC magnetron sputtering power supply with a wire management structure to solve the above-mentioned technical problems. Utility Model Content
[0004] To solve the above-mentioned technical problems, this utility model provides a DC magnetron sputtering power supply with a wire management structure.
[0005] The DC magnetron sputtering power supply with a wire management structure provided by this utility model includes a power supply body, on which a protective component for protecting the upper shell of the power supply body is installed, and a mounting bracket is installed on the protective component. Multiple sets of wire management components are installed on the mounting bracket, which are equally distributed and arranged side by side, and the wire management components correspond one-to-one with the plug-in ports provided on the rear end face of the power supply body.
[0006] The cable management component includes a fixing plate, which is fixedly installed on the inner top wall of the mounting frame. The fixing plate is provided with a guide wheel that is elastically connected. An external L-shaped plate is fixedly installed on the fixing plate outside the guide wheel. The horizontal surface of the external L-shaped plate is provided with a recessed arc groove for carrying cables. An internal L-shaped plate is fixedly installed on the fixing plate inside the guide wheel. An open ring is fixedly fitted on the horizontal surface of the internal L-shaped plate. A threaded pressing screw is installed on the open ring.
[0007] Preferably, a central connector is installed on the fixing plate between the external L-shaped plate and the internal L-shaped plate, and a guide wheel is connected through the central connector. The central connector includes a sleeve, which is fixedly installed on the fixing plate. A sliding rod is inserted into the fixing plate and is slidably connected. The bottom end of the sliding rod extends out of the sleeve and is fixedly installed with an L-shaped frame. The guide wheel is rotatably installed on the horizontal plate surface of the L-shaped frame through a rotating shaft. A spring is provided inside the sleeve.
[0008] Preferably, one end of the spring is fixedly connected to the inner top wall of the sleeve, and the other end of the spring is fixedly connected to the insertion end of the sliding rod.
[0009] Preferably, the protective component includes two T-shaped sliding plates, which are respectively inserted into T-shaped grooves on both sides of the power supply body and slidably connected to the T-shaped grooves. Multiple U-shaped rods are fixedly mounted between the two T-shaped sliding plates, and each U-shaped rod has a rotatably connected rubber sleeve on its horizontal section.
[0010] Preferably, a threaded fastening screw is inserted into the side plate surface of the T-shaped slide plate near the insertion end.
[0011] Preferably, the mounting bracket is fixedly mounted on the tail plates of the two T-shaped sliding plates, and the tail plates of the two T-shaped sliding plates extend into T-shaped grooves.
[0012] Preferably, the concave arc groove and the open ring are coaxially arranged, and the concave arc groove, the open ring and the plug-in port on the rear end face of the power supply body are aligned.
[0013] Compared with related technologies, the DC magnetron sputtering power supply with a wire management structure provided by this utility model has the following advantages:
[0014] Because each cable passes through a corresponding cable management component, this invention can neatly organize cables at different locations, thereby improving the aesthetics of the cabinet interior and facilitating organization and connection. When connected cables are impacted or pulled, the cable that passes over the lower wheel surface of the guide wheel is pulled, causing the sliding rod to slide along the sleeve. At this time, the spring is compressed, and the reserved cable section can slide outward along the concave arc groove opened in the external L-shaped plate, thus providing cushioning for the taut cable. This reduces the risk of the cable breaking due to excessive internal stress caused by impact or pulling, and also eliminates the phenomenon of the cable becoming loose from the power supply body's plug port due to pulling. Attached Figure Description
[0015] Figure 1 One of the structural schematic diagrams of a preferred embodiment of the DC magnetron sputtering power supply with wire management structure provided by this utility model;
[0016] Figure 2 A second schematic diagram of a preferred embodiment of the DC magnetron sputtering power supply with wire management structure provided by this utility model;
[0017] Figure 3 for Figure 2 The diagram shows the structure of the power supply unit.
[0018] Figure 4 for Figure 2 The diagram shows the structure of the protective component.
[0019] Figure 5 for Figure 2 A schematic diagram of the installation structure of the cable management component on the protective component shown.
[0020] Figure 6 for Figure 5 The diagram shows the structure of the cable management component.
[0021] Figure 7 for Figure 6 A cross-sectional view of the connecting member in the cable management component shown.
[0022] The following components are labeled in the diagram: 1. Power supply body; 1a. T-shaped slide; 2. Protective component; 21. T-shaped sliding plate; 211. Fastening screw; 22. U-shaped rod; 23. Rubber sleeve; 3. Mounting bracket; 4. Cable management component; 41. Fixing plate; 42. Guide wheel; 43. External L-shaped plate; 431. Recessed arc groove; 44. Internal L-shaped plate; 441. Opening ring; 442. Pressing screw; 45. Connecting component; 451. Sleeve; 452. Sliding rod; 453. L-shaped frame; 454. Spring. Detailed Implementation
[0023] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.
[0024] The specific implementation of this utility model will be described in detail below with reference to specific embodiments.
[0025] Please see Figures 1 to 7 The present invention provides a DC magnetron sputtering power supply with a wire management structure, which includes a power supply body 1, a protective component 2, and a wire management component 4.
[0026] In the embodiments of this utility model, please refer to Figure 1 , Figure 2 , Figure 3 and Figure 4The power supply body 1 is equipped with a protective component 2 for protecting the upper shell of the power supply body 1. The protective component 2 includes a T-shaped sliding plate 21. Two T-shaped sliding plates 21 are provided, and the two T-shaped sliding plates 21 are respectively inserted into the T-shaped sliding grooves 1a opened on the two side walls of the power supply body 1 and slidably connected to the T-shaped sliding grooves 1a. Multiple U-shaped rods 22 are fixedly mounted between the two T-shaped sliding plates 21. Each U-shaped rod 22 has a rotatably connected rubber sleeve 23 on its horizontal section. A threaded fastening screw 211 is inserted into the side plate surface of the T-shaped sliding plate 21 near the insertion end.
[0027] It should be noted that when installing the protective component 2, the two T-shaped sliding plates 21 are respectively inserted into the T-shaped sliding grooves 1a opened on both sides of the power supply body 1 and slid along the T-shaped sliding grooves 1a until the T-shaped sliding plates 21 slide to the bottom of the T-shaped sliding grooves 1a. Then, tighten the fastening screws 211 to complete the installation of the protective component 2. Since multiple U-shaped rods 22 are distributed at equal intervals to form a cover structure, when an object collapses and hits the top of the power supply body 1, the rubber sleeves 23 set on the U-shaped rods 22 can effectively reduce the impact force of the collapse on the power supply body 1, thus improving the protection of the power supply body 1.
[0028] In the embodiments of this utility model, please refer to Figure 1 , Figure 2 , Figure 5 , Figure 6 and Figure 7 The protective component 2 is equipped with a mounting bracket 3. Specifically, the mounting bracket 3 is fixedly mounted on the tail plate of the two T-shaped sliding plates 21, and the tail plate of the two T-shaped sliding plates 21 extends into a T-shaped sliding groove 1a. Multiple sets of cable management components 4 are installed on the mounting bracket 3, which are equidistantly distributed and arranged side by side. The cable management components 4 correspond one-to-one with the plug-in port provided on the rear end face of the power supply body 1.
[0029] The cable management component 4 includes a fixing plate 41, which is fixedly installed on the inner top wall of the mounting bracket 3. The fixing plate 41 is provided with a guide wheel 42 that is elastically connected. Specifically, a central connector 45 is installed on the fixing plate 41 between the outer L-shaped plate 43 and the inner L-shaped plate 44, connecting the guide wheel 42. The central connector 45 includes a sleeve 451, which is fixedly installed on the fixing plate 41. A sliding rod 452 is inserted into the fixing plate 41 and is slidably connected. The bottom end of the sliding rod 452 extends out of the sleeve 451 and is fixedly installed. An L-shaped frame 453 is provided, and a guide wheel 42 is rotatably mounted on the horizontal plate surface of the L-shaped frame 453 via a rotating shaft. A spring 454 is provided inside the sleeve 451. An external L-shaped plate 43 is fixedly installed on the fixing plate 41 on the outer side of the guide wheel 42, and a concave arc groove 431 for carrying cables is provided on the horizontal plate surface of the external L-shaped plate 43. An internal L-shaped plate 44 is fixedly installed on the fixing plate 41 on the inner side of the guide wheel 42, and an open ring 441 is fixedly fitted on the horizontal plate surface of the internal L-shaped plate 44. A threaded pressing screw 442 is installed on the open ring 441.
[0030] It should be noted that the path when plugging in the power supply body 1 is as follows: the cable passes through the concave arc groove 431 opened on the external L-shaped plate 43 → the cable goes around the lower wheel surface of the guide wheel 42 → the cable is snapped into the opening ring 441 from the opening of the opening ring 441 → the cable plug is inserted into the plug-in port provided on the rear end face of the power supply body 1.
[0031] After the cable passes over the lower wheel surface of the guide wheel 42, the guide wheel 42 slides down under the action of the spring 454, so that the cable between the outer L-shaped plate 43 and the inner L-shaped plate 44 forms a U-shaped structure with a downward convex shape. Therefore, this part of the cable constitutes a reserved cable segment, and the reserved cable segment is in a taut state. After the cable is engaged with the opening of the opening ring 441, the pressing screw 442 is tightened to fix the cable in this part. In order to avoid the pressing screw 442 causing damage to the cable, a rubber sleeve can be fixedly sleeved on the head of the pressing screw 442.
[0032] Since each cable passes through the corresponding cable management component 4, cables in different locations can be neatly organized, thereby improving the aesthetics of the cabinet interior and facilitating organization and connection.
[0033] It should also be noted that when the connected cables are subjected to collision or pulling, the cable that passes over the lower wheel surface of the guide wheel 42 is pulled and drives the sliding rod 452 to slide inward along the sleeve 451. At this time, the spring 454 is compressed, and the reserved cable segment can slide outward along the concave arc groove 431 opened in the outer L-shaped plate 43. This allows the cable at the taut point to be buffered, thereby reducing the risk of the cable breaking due to excessive internal stress caused by collision or pulling. It can also eliminate the phenomenon of the cable becoming loose from the plug of the power supply body 1 due to pulling. When the external pulling force on the cable is removed, the sliding rod 452 slides down along the sleeve 451 to reset under the action of the spring 454. Then the reserved cable segment of the outward sliding part is pulled back to the lower wheel surface of the guide wheel 42, so that the cable can cope with the next pulling.
[0034] Furthermore, the concave arc groove 431 and the open ring 441 are coaxially arranged, and the concave arc groove 431 and the open ring 441 are aligned with the plug-in port on the rear end face of the power supply body 1, so the connected cable can be directly inserted into the plug-in port.
[0035] Furthermore, one end of the spring 454 is fixedly connected to the inner top wall of the sleeve 451, and the other end of the spring 454 is fixedly connected to the insertion end of the sliding rod 452, which improves the stability of the spring 454.
[0036] To prevent the sliding rod 452 from rotating inside the sleeve 451, protrusions can be fixedly fitted into the two side walls of the sliding rod 452, and axially arranged grooves can be opened on the two side walls of the sleeve 451. The protrusions are inserted into the grooves to further improve the stability of the sliding rod 452 when sliding inside the sleeve 451.
[0037] The above description is merely an embodiment of this utility model and does not limit the patent scope of this utility model. Any equivalent structural or procedural transformations made based on the content of this utility model specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this utility model.
Claims
1. A DC magnetron sputtering power supply with a wire-gathering structure, characterized in that, Includes a power supply body (1), on which a protective component (2) is installed to protect the upper shell of the power supply body (1), and a mounting bracket (3) is installed on the protective component (2), and multiple sets of cable management components (4) are installed on the mounting bracket (3) and are arranged side by side at equal intervals, and the cable management components (4) correspond one-to-one with the plug-in ports provided on the rear end face of the power supply body (1); The cable management component (4) includes a fixing plate (41), which is fixedly installed on the inner top wall of the mounting frame (3). The fixing plate (41) is provided with a guide wheel (42) that is elastically connected. An external L-shaped plate (43) is fixedly installed on the fixing plate (41) outside the guide wheel (42). A concave arc groove (431) for carrying cables is provided on the horizontal plate surface of the external L-shaped plate (43). An internal L-shaped plate (44) is fixedly installed on the fixing plate (41) inside the guide wheel (42). An open ring (441) is fixedly fitted on the horizontal plate surface of the internal L-shaped plate (44). A threaded pressing screw (442) is installed on the open ring (441).
2. The DC magnetron sputtering power supply with a wire-manifold structure according to claim 1, characterized in that, A central connector (45) is installed on the fixing plate (41) between the external L-shaped plate (43) and the internal L-shaped plate (44). A guide wheel (42) is connected through the central connector (45). The central connector (45) includes a sleeve (451). The sleeve (451) is fixedly installed on the fixing plate (41). A sliding rod (452) is inserted into the fixing plate (41). The bottom end of the sliding rod (452) extends out of the sleeve (451) and is fixedly installed on an L-shaped frame (453). The guide wheel (42) is rotatably installed on the horizontal plate surface of the L-shaped frame (453) through a rotating shaft. A spring (454) is provided inside the sleeve (451).
3. The DC magnetron sputtering power supply with a wire-manifold structure according to claim 2, characterized in that, One end of the spring (454) is fixedly connected to the inner top wall of the sleeve (451), and the other end of the spring (454) is fixedly connected to the insertion end of the sliding rod (452).
4. The DC magnetron sputtering power supply with a wire-manifold structure according to claim 1, characterized in that, The protective component (2) includes a T-shaped sliding plate (21), which has two T-shaped sliding plates (21). The two T-shaped sliding plates (21) are respectively inserted into the T-shaped sliding grooves (1a) opened on both sides of the power supply body (1) and are slidably connected to the T-shaped sliding grooves (1a). Multiple U-shaped rods (22) are fixedly mounted between the two T-shaped sliding plates (21). Each U-shaped rod (22) has a rotatably connected rubber sleeve (23) on its horizontal rod section.
5. The DC magnetron sputtering power supply with a wire-manifold structure according to claim 4, characterized in that, The T-shaped slide plate (21) has a threaded fastening screw (211) inserted on the side plate near the insertion end.
6. The DC magnetron sputtering power supply with a wire-manifold structure according to claim 5, characterized in that, The mounting bracket (3) is fixedly mounted on the tail plate of the two T-shaped sliding plates (21), and the tail plate of the two T-shaped sliding plates (21) extends into a T-shaped groove (1a).
7. The DC magnetron sputtering power supply with a wire-manifold structure according to claim 1, characterized in that, The concave arc groove (431) and the open ring (441) are coaxially arranged, and the concave arc groove (431) and the open ring (441) are aligned with the plug-in port on the rear end face of the power supply body (1).