Hairbrush cylinder score cleaning device

Abstract

The utility model provides a brush cylinder score cleaning device which comprises a cleaning tank, the cleaning tank is in an L shape, a cleaning mechanism is movably arranged at the top of the cleaning tank through a moving mechanism, the cleaning mechanism comprises a water retaining tank body, a lifting plate is movably arranged in the water retaining tank body through a lifting air cylinder, and a brush is arranged on the lifting plate. Brushes are fixedly arranged at the bottom of the lifting plate in a matrix mode. The cleaning mechanism is moved to the position above the cleaning basket through the transverse moving air cylinder and the guide rail, the brush is driven by the lifting air cylinder and the lifting plate to do reciprocating lifting movement and is inserted into a workpiece, the interior of a groove is conveniently cleaned, after cleaning is completed, the brush is moved away from the top of the cleaning basket and does not interfere with a mechanical arm, and semiconductor machining is prevented from being affected.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor tooling, jig cleaning, in particular to a brush cylinder drawing cleaning device. BACKGROUND

[0002] In the semiconductor processing production process, the semiconductor peripheral product is used to assist production, and the semiconductor peripheral product includes tooling, jig and the like. With the continuous development of semiconductor, the peripheral product is more and more. In order to save the cost of semiconductor production, the tooling, jig and the like are repeatedly used. Before repeated use, the tooling, jig and the like after use need to be cleaned.

[0003] The tooling, jig and the like need to be cleaned by using a cleaning machine. The traditional cleaning machine usually uses ultrasonic cleaning, spraying, ultrasonic rinsing and slow pulling dehydration process to clean the tooling, jig and the like. However, the traditional cleaning machine is mostly simply driven by X-axis, Y-axis and Z-axis. Since some columnar and rectangular peripheral products are internally provided with grooves, only relying on the vibration of ultrasonic waves, the driven cleaning machine is difficult to clean the internal grooves of the columnar and rectangular peripheral products, so that the dirt in the internal grooves of the columnar and rectangular peripheral products affects the semiconductor processing. Therefore, the utility model provides a brush cylinder drawing cleaning device. UTILITY MODEL CONTENTS

[0004] In view of the deficiencies in the prior art, the utility model aims to provide a brush cylinder drawing cleaning device to solve the problems in the background art. The utility model moves the cleaning mechanism to the top of the cleaning basket through the horizontal moving air cylinder and the guide rail, drives the brush to reciprocatingly move up and down through the lifting air cylinder and the lifting plate, inserts the brush into the internal part of the workpiece, facilitates the cleaning of the internal part of the groove, and moves away from the top of the cleaning basket after cleaning, does not interfere with the mechanical hand, and avoids affecting the semiconductor processing.

[0005] In order to achieve the above-mentioned purpose, the utility model is implemented by the following technical scheme: a brush cylinder drawing cleaning device, including a cleaning tank, the shape of the cleaning tank is "L" type, the top of the cleaning tank is movably provided with a cleaning mechanism through a moving mechanism, the cleaning mechanism includes a water baffle box body, the inside of the water baffle box body is movably provided with a lifting plate through a lifting air cylinder, the bottom of the lifting plate is fixedly provided with a brush in a matrix, the inside of the lifting plate is provided with an inner cavity, the rear end top of the lifting plate is fixedly provided with a sliding pipe on both sides in symmetry, the sliding pipe and the inner cavity are in communication with each other, the inside of the bottom end of the cleaning tank is fixedly provided with a filter screen, the top of the filter screen is placed with a workpiece through a cleaning basket, the lower side of the filter screen is fixedly provided with an ultrasonic vibration plate, the cleaning basket includes a frame body and a limiting frame, the four sides of the bottom of the inner cavity are fixedly provided with a nozzle corresponding to the brush, and the bottom of one end of the cleaning tank is provided with an inclined surface.

[0006] Further, the limiting frame is fixedly arranged in the top end of the frame body, and the inside of the limiting frame is provided with a square grid.

[0007] Further, a horizontal rod is fixedly arranged in the inside of the bottom end of the frame body, the workpiece is placed on the top of the horizontal rod, and L-shaped rods are fixedly arranged at the positions of the four corners of the top of the frame body.

[0008] Further, the top end of the workpiece is arranged in the inside of the square grid, and grooves are formed in the inner walls of the front and rear sides of the workpiece.

[0009] Further, a discharge port is formed in the inside of the top and bottom of one end of the filter screen corresponding to the cleaning tank, and an electromagnetic valve is fixedly arranged at the outer end of the discharge port.

[0010] Further, the lifting cylinder is fixedly arranged at the top center position of the water blocking tank body, and the output rod of the lifting cylinder is fixedly connected with the top of the lifting plate.

[0011] Further, the sliding pipe is slidingly arranged in the inside of the top end of the water blocking tank body, a water pump is fixedly arranged on the outer wall of the bottom end of the cleaning tank, and the outlet of the water pump is fixedly connected with the top end of the sliding pipe through a hose.

[0012] Further, the inlet of the water pump is fixedly arranged in the inside of the cleaning tank, and the inlet of the water pump is arranged below the filter screen and on one side of the cleaning basket.

[0013] Further, the moving mechanism comprises horizontal moving guide rails, the horizontal moving guide rails are fixedly arranged on the front and rear sides of the top end of the cleaning tank in a symmetrical manner, and the left and right sides of the water blocking tank body are respectively provided with first sliding blocks and second sliding blocks in a symmetrical manner.

[0014] Further, the first sliding block and the second sliding block are limitingly and slidingly arranged on the outside of the horizontal moving guide rail, horizontal moving cylinders are fixedly arranged on the outer walls of the front and rear sides of the cleaning tank, and the output rod of the horizontal moving cylinder is fixedly connected with the bottom end of the second sliding block.

[0015] The brush cylinder cleaning device has the advantages that the brush cylinder cleaning device is provided with a cleaning tank, an ultrasonic vibration plate, a discharge port, horizontal moving guide rails, first sliding blocks, second sliding blocks, horizontal moving cylinders, a cleaning mechanism, a lifting cylinder, a sliding pipe, a cleaning basket, a lifting plate, an inner cavity, a brush, a water blocking tank body, a workpiece, a filter screen, a water pump, a nozzle, a frame body, a limiting frame, L-shaped rods, a horizontal rod and grooves.

[0016] 1. The brush cylinder drawing cleaning device is characterized in that a horizontal moving guide rail is arranged at the top of the cleaning tank, the water blocking box body is limited through the horizontal moving guide rail, the first sliding block and the second sliding block, the water blocking box body is horizontally moved through the horizontal moving cylinder and the second sliding block, the cleaning mechanism is adjusted above the cleaning basket, the lifting plate is reciprocatingly lifted and moved in the water blocking box body through the lifting cylinder, the lifting plate drives the brush to reciprocatingly lift and move, the brush is inserted into the workpiece, the inside of the groove is cleaned, the dirt in the groove does not affect the subsequent semiconductor processing, after cleaning, the cleaning mechanism is reset, the mechanical hand is not interfered, the operation is simple and convenient, and the cleaning efficiency of the cylindrical and rectangular periphery is improved.

[0017] 2. The brush cylinder drawing cleaning device is characterized in that the sliding pipe can limit and guide the lifting plate during lifting, the cleaning liquid in the cleaning tank is pumped out through the water pump, and is discharged into the inner cavity through the hose and the sliding pipe, and finally is sprayed to the brush through the nozzle, the brush is washed, the washed water flows into the cleaning tank through the inclined surface, the cleaning water is recycled, the water blocking box body prevents water from splashing everywhere during cleaning, and the use of the equipment is affected.

[0018] 3. The brush cylinder drawing cleaning device is characterized in that the filter screen can filter the dirt in the cleaning water, and the water and dirt are discharged through the discharge port, and the cleaning water is discharged. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 It is a structure diagram of the brush cylinder drawing cleaning device.

[0020] Figure 2 It is a front view of the brush cylinder drawing cleaning device.

[0021] Figure 3 It is a cleaning state sectional view of the brush cylinder drawing cleaning device.

[0022] Figure 4 It is a cleaning mechanism sectional view of the brush cylinder drawing cleaning device.

[0023] Figure 5 It is a cleaning basket structure diagram of the brush cylinder drawing cleaning device.

[0024] Figure 6 It is a workpiece structure diagram of the brush cylinder drawing cleaning device.

[0025] In the figure: 1, cleaning tank; 2, ultrasonic vibration plate; 3, discharge port; 4, transverse guide rail; 5, first sliding block; 6, second sliding block; 7, transverse moving cylinder; 8, cleaning mechanism; 9, lifting cylinder; 10, sliding pipe; 11, cleaning basket; 12, lifting plate; 13, inner cavity; 14, brush; 15, water baffle box; 16, workpiece; 17, filter screen; 18, water pump; 19, nozzle; 20, frame; 21, limiting frame; 22, L-shaped rod; 23, cross bar; 24, groove. DETAILED DESCRIPTION

[0026] In order to make the technical means, creative features, purposes and effects of the utility model easy to understand, the utility model is further described below in combination with specific embodiments.

[0027] Please refer to Figures 1 to 6 The utility model provides a kind of technical scheme: a brush pulls cylinder cleaning device, including cleaning tank 1, the shape of the cleaning tank 1 is "L" type, cleaning mechanism 8 is movably arranged on the top of the cleaning tank 1 by moving mechanism, the cleaning mechanism 8 includes water baffle box 15, lifting plate 12 is movably arranged in the inside of the water baffle box 15 by lifting cylinder 9, the bottom of the lifting plate 12 is fixedly provided with brush 14 in matrix, inner cavity 13 is opened in the inside of the lifting plate 12, sliding pipe 10 is fixedly arranged on the both sides of the rear end top of the lifting plate 12, the sliding pipe 10 and inner cavity 13 are interconnected, filter screen 17 is fixedly arranged in the inside of the bottom end of the cleaning tank 1, workpiece 16 is placed in the top of the filter screen 17 by cleaning basket 11, ultrasonic vibration plate 2 is fixedly arranged below the filter screen 17, the cleaning basket 11 includes frame 20 and limiting frame 21, nozzle 19 is fixedly arranged on the four sides of the bottom of the inner cavity 13 corresponding brush 14, the bottom of one end of the cleaning tank 1 is provided with inclined plane, cleaning mechanism 8 is moved to the upper of cleaning basket 11 by moving mechanism, and lifting plate 12 is reciprocatingly lifted and moved by lifting cylinder 9, it is convenient to lift reciprocatingly move brush 14 by lifting plate 12, it is convenient to clean the inside of workpiece 16, it is simple and convenient to operate, can improve the cleaning efficiency of workpiece 16.

[0028] The limiting frame 21 is fixedly arranged in the top end of the frame body 20, the inside of the limiting frame 21 is provided with a square grid, the bottom end of the frame body 20 is fixedly arranged with a horizontal rod 23 at equal intervals, the workpiece 16 is placed on the top of the horizontal rod 23, the top of the frame body 20 is fixedly arranged with an L-shaped rod 22 at the four corner positions, the top end of the workpiece 16 is installed in the square grid, grooves 24 are formed in the front and rear inner walls of the workpiece 16, the workpiece 16 can be supported by the horizontal rod 23, the top end of the workpiece 16 can be limited by the limiting frame 21, and the workpiece 16 is positioned, so that the brush 14 can be moved directly above the workpiece 16, and the grooves 24 are convenient for subsequent cleaning.

[0029] In this embodiment, the top and bottom of one end of the filter screen 17 correspond to the inside of the cleaning tank 1 and are provided with a drain port 3, and the outer end of the drain port 3 is fixedly provided with a solenoid valve. The drain port 3 can discharge the dirt and water in the cleaning tank 1, and the cleaning water can be replaced conveniently.

[0030] In this embodiment, the lifting cylinder 9 is fixedly arranged at the top center position of the water blocking box body 15, the output rod of the lifting cylinder 9 is fixedly connected with the top of the lifting plate 12, the lifting plate 12 can be reciprocatingly lifted and lowered by the lifting cylinder 9, and the subsequent lifting adjustment of the brush 14 is facilitated.

[0031] In this embodiment, the sliding pipe 10 is slidingly installed in the top end of the water blocking box body 15, the water pump 18 is fixedly arranged on the outer wall of the bottom end of the cleaning tank 1, the outlet of the water pump 18 is fixedly connected with the top end of the sliding pipe 10 through a hose, the inlet of the water pump 18 is fixedly arranged in the inside of the cleaning tank 1, and the inlet of the water pump 18 is arranged below the filter screen 17 and corresponds to one side of the cleaning basket 11. The sliding pipe 10 can limit the lifting plate 12 and improve the stability of the lifting plate 12, and water can be introduced into the inside of the sliding pipe 10 through the water pump 18 and the hose, so that the subsequent flushing of the brush 14 is facilitated.

[0032] In this embodiment, the moving mechanism comprises horizontal moving guide rails 4, the horizontal moving guide rails 4 are symmetrically fixedly arranged on the front and rear sides of the top end of the cleaning tank 1, the water blocking box body 15 is symmetrically provided with a first sliding block 5 and a second sliding block 6 on the left and right sides, respectively, the first sliding block 5 and the second sliding block 6 are limitingly and slidingly installed on the outer side of the horizontal moving guide rail 4, the cleaning tank 1 is fixedly provided with a horizontal moving cylinder 7 on the outer walls of the front and rear sides, the output rod of the horizontal moving cylinder 7 is fixedly connected with the bottom end of the second sliding block 6, the water blocking box body 15 can be limited by the first sliding block 5, the second sliding block 6 and the horizontal moving guide rail 4, the second sliding block 6 and the water blocking box body 15 can be horizontally moved by the horizontal moving cylinder 7, the cleaning mechanism 8 can be moved and adjusted conveniently, and the subsequent cleaning of the workpiece 16 is facilitated.

[0033] In use of the brush decanning cleaning device, the cleaning device is fixed, the top of the cleaning tank 1 is kept horizontal, cleaning water is added to the inside of the cleaning tank 1, the electromagnetic valve on the discharge port 3 is closed, the ultrasonic vibration plate 2 is powered on, the workpiece 16 is placed in the inside of the cleaning basket 11 and is supported and limited by the limiting frame 21, the frame body 20 and the cross rod 23, the cleaning basket 11 is put into the inside of the cleaning tank 1 by the mechanical arm through the L-shaped rod 22, and the water submerges the workpiece 16, the workpiece 16 is cleaned by the ultrasonic wave, the horizontal moving cylinder 7 is started at the same time, the output rod of the horizontal moving cylinder 7 drives the second sliding block 6 to slide on the horizontal moving guide rail 4, the water tank body 15 is moved conveniently by the cooperation of the first sliding block 5, the second sliding block 6 and the horizontal moving guide rail 4, the cleaning mechanism 8 is moved to the directly above of the cleaning basket 11, the brush 14 is moved to the directly above of the workpiece 16 at this time, the horizontal moving cylinder 7 is closed, the lifting cylinder 9 is started, the lifting cylinder 9 drives the lifting plate 12 to reciprocatingly move up and down in the inside of the water tank body 15, the lifting plate 12 drives the brush 14 and the sliding pipe 10 to reciprocatingly move up and down, the sliding pipe 10 slides in the inside of the water tank body 15, can limit the lifting plate 12, so that the brush 14 reciprocatingly brushes the groove 24 in the inside of the workpiece 16, and the dirt in the inside of the groove 24 is cleaned conveniently, the water tank body 15 can prevent the water from splashing everywhere and affecting the use of the equipment; after the cleaning is completed, the lifting plate 12 and the brush 14 are moved to the highest position by the lifting cylinder 9, the water tank body 15 is reversely moved and removed from the above of the cleaning basket 11 by the horizontal moving cylinder 7, the second sliding block 6 and the first sliding block 5, the cleaning mechanism 8 is reset conveniently, the water pump 18 is started, the water pump 18 pumps water from the inside of the cleaning tank 1 through the inlet, and the water is discharged into the inside of the sliding pipe 10 through the hose, the water enters the inside of the inner cavity 13 through the sliding pipe 10, and finally the water is sprayed to the outside of the brush 14 through the nozzle 19, the brush 14 is washed conveniently, the washing water is re-discharged into the inside of the cleaning tank 1 through the inclined surface, and the cleaning water is recycled conveniently; the filter screen 17 can filter the dirt in the water, the dirt and the water are discharged subsequently conveniently, and waste is avoided.

[0034] The basic principle and main features of the utility model and the advantages of the utility model are shown and described above, for those skilled in the art, obviously, the utility model is not limited to the details of the above exemplary embodiments, and the utility model can be realized in other specific forms without departing from the spirit or basic features of the utility model. Therefore, no matter from which point, the embodiments should be regarded as exemplary and non-restrictive, the scope of the utility model is defined by the appended claims instead of the above description, therefore, all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the utility model. Any figure mark in the claims should not be regarded as limiting the involved claims.

[0035] Furthermore, it should be understood that although the description is made according to the embodiments, not every embodiment contains only one independent technical solution, and the description is made in this way only for the sake of clarity, and the person skilled in the art should consider the description as a whole, and the technical solutions in each embodiment can also be combined appropriately to form other embodiments that the person skilled in the art can understand.

Claims

1. A draw cleaning device for a hair brush, comprising a cleaning tank (1), characterized in that, The shape of the cleaning tank (1) is L-shaped, the top of the cleaning tank (1) is movably provided with a cleaning mechanism (8) through a moving mechanism, the cleaning mechanism (8) comprises a water blocking box body (15), the inside of the water blocking box body (15) is movably provided with a lifting plate (12) through a lifting cylinder (9), the bottom of the lifting plate (12) is fixedly provided with a brush (14) in a matrix, the inside of the lifting plate (12) is provided with an inner cavity (13), the top of the rear end of the lifting plate (12) is fixedly provided with a sliding pipe (10) on both sides in a symmetrical manner, the sliding pipe (10) and the inner cavity (13) are in communication with each other, the inside of the bottom end of the cleaning tank (1) is fixedly provided with a filter screen (17), the top of the filter screen (17) is placed with a workpiece (16) through a cleaning basket (11), the lower side of the filter screen (17) is fixedly provided with an ultrasonic vibration plate (2), the cleaning basket (11) comprises a frame body (20) and a limiting frame (21), the bottom of the inner cavity (13) is fixedly provided with a nozzle (19) on four sides corresponding to the brush (14), and one end of the bottom of the cleaning tank (1) is provided with an inclined surface.

2. A brush draw down cleaning apparatus as claimed in claim 1, wherein: The limiting frame (21) is fixedly arranged in the inside of the top end of the frame body (20), and the inside of the limiting frame (21) is provided with a square grid.

3. A brush draw down cleaning apparatus as claimed in claim 2, wherein: The inside of the bottom end of the frame body (20) is fixedly provided with a cross rod (23) at equal intervals, and the workpiece (16) is placed on the top of the cross rod (23).

4. A brush draw down cleaning apparatus as claimed in claim 3, wherein: The top end of the workpiece (16) is installed in the inside of the square grid, and grooves (24) are formed in the inner walls on the front and rear sides of the workpiece (16).

5. A brush draw down cleaning apparatus as defined in claim 1, wherein: The top and bottom of one end of the filter screen (17) is provided with a discharge port (3) corresponding to the inside of the cleaning tank (1), and the outer end of the discharge port (3) is fixedly provided with an electromagnetic valve.

6. A brush draw down cleaning apparatus as defined in claim 1, wherein: The lifting cylinder (9) is fixedly arranged at the center position of the top of the water blocking box body (15), and the output rod of the lifting cylinder (9) is fixedly connected with the top of the lifting plate (12).

7. A brush draw down cleaning apparatus as defined in claim 1, wherein: The sliding pipe (10) is slidingly installed in the inside of the top end of the water blocking box body (15), and a water pump (18) is fixedly arranged on the outer wall of the bottom end of the cleaning tank (1), and the outlet of the water pump (18) is fixedly connected with the top end of the sliding pipe (10) through a hose.

8. A brush draw down cleaning apparatus as claimed in claim 7, wherein: The inlet of the water pump (18) is fixedly arranged in the inside of the cleaning tank (1), and the inlet of the water pump (18) is arranged below the filter screen (17) corresponding to one side of the cleaning basket (11).

9. A brush draw down cleaning apparatus as defined in claim 1, wherein: The moving mechanism comprises a transverse guide rail (4), the transverse guide rail (4) is fixedly arranged on the front and rear sides of the top end of the cleaning tank (1) in a symmetrical manner, and the left and right sides of the water blocking box body (15) are respectively provided with a first sliding block (5) and a second sliding block (6) in a symmetrical manner.

10. A brush draw down cleaning apparatus as claimed in claim 9, wherein: The first sliding block (5) and the second sliding block (6) are limitingly and slidingly installed on the outer side of the transverse guide rail (4), a transverse cylinder (7) is fixedly arranged on the outer walls on the front and rear sides of the cleaning tank (1), and the output rod of the transverse cylinder (7) is fixedly connected with the bottom end of the second sliding block (6).

Images