Spraying device and cutting equipment
By designing a spray device with movable spray components and universal nozzles, the problem of silicon powder drying on silicon wafers was solved, achieving a highly efficient silicon wafer cleaning effect.
Patent Information
- Application Number
- CN202520043341.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-08
- Publication Date
- 2025-12-26
- Estimated Expiration
- 2035-01-08
AI Technical Summary
There is a lack of effective solutions in the current technology to prevent silicon powder from drying and agglomerating on silicon wafers, which affects the quality of the silicon wafers.
A spraying device is provided, including a support member and a spraying unit. The spraying member of the spraying unit is movable to adjust the distance. It adopts a universal nozzle and multiple spraying units to ensure that the spray liquid uniformly covers the surface of the silicon wafer.
The adaptability and cleaning effect of the spray device have been improved, ensuring that there is no residual silicon powder on the surface of the silicon wafer, thus improving the cleaning quality and efficiency.
Smart Images
Figure CN223719850U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the technical field of silicon rod processing equipment, specifically to a spraying device and a cutting device. Background Technology
[0002] Silicon is a typical semiconductor material, second only to oxygen in abundance on the Earth's surface. It is widely used in diodes, transistors, thyristors, field-effect transistors, various integrated circuits, aerospace, optical fibers, and many other fields, making it a very important material.
[0003] In the production of photovoltaic silicon wafers, after silicon ingots are cut into wafers, the wafers wait on a tooling trolley for a period of time to allow for subsequent debinding and cleaning processes. However, this waiting time often causes residual silicon powder from the cutting process to dry and clump on the wafer, affecting the debinding and cleaning effect. This makes the dried silicon powder difficult to remove, ultimately impacting the quality of the wafer. Currently, there is a lack of effective solutions in existing technologies to prevent silicon powder from drying and clumping on the wafer.
[0004] Accordingly, a new technical solution is needed in this field to solve the above problems. Utility Model Content
[0005] In order to solve at least one of the above-mentioned problems in the prior art, namely, to solve the problem of the lack of an effective solution to prevent silicon powder from drying and sticking on silicon wafers.
[0006] In a first aspect, this application provides a spraying device, the spraying device including a support member and at least one spraying unit, the spraying unit being mounted on top of the support member, the spraying unit including a first spraying member and a second spraying member spaced apart along a first horizontal direction, at least one of the first spraying member and the second spraying member being movable relative to the support member along the first horizontal direction.
[0007] The spraying device provided in this application includes a support member and a spraying unit. A tooling trolley carrying silicon wafers can be placed below the spraying unit, and then the silicon wafers on the tooling trolley are rinsed by a first spraying member and a second spraying member. In addition, by setting the first spraying member and / or the second spraying member to be movable relative to the support member in a first horizontal direction, it is convenient to adjust the distance between the first spraying member and the second spraying member according to the size of the silicon wafer. Specifically, if the size of the silicon wafer is large, the distance between the first spraying member and the second spraying member can be increased; conversely, if the size of the silicon wafer is small, the distance between the first spraying member and the second spraying member can be decreased. This greatly improves the adaptability of the spraying device of this utility model and is more conducive to ensuring the cleaning effect on the silicon wafers.
[0008] In the preferred technical scheme of the spray device, the first spray member and / or the second spray member is connected with the support member through clamping.
[0009] By connecting the first spray member and / or the second spray member with the support member through clamping, the position of the first spray member and / or the second spray member can be changed conveniently, and the use is more convenient.
[0010] In the preferred technical scheme of the spray device, the support member comprises a cross beam extending along the first horizontal direction, a strip-shaped clamping plate extending along the first horizontal direction is arranged on the cross beam, the strip-shaped clamping plate is arranged vertically, a clamping groove is arranged on the first spray member and / or the second spray member, and the clamping groove is clamped with the strip-shaped clamping plate.
[0011] In the preferred technical scheme of the spray device, the first spray member comprises a first spray pipe and a plurality of first spray heads mounted on the first spray pipe, the plurality of first spray heads are distributed at intervals along the length direction of the first spray pipe, and the first spray pipe is connected with the support member; and / or
[0012] The second spray member comprises a second spray pipe and a plurality of second spray heads mounted on the second spray pipe, the plurality of second spray heads are distributed at intervals along the length direction of the second spray pipe, and the second spray pipe is connected with the support member.
[0013] In the preferred technical scheme of the spray device, the first spray pipe and the second spray pipe extend along a second horizontal direction, and the second horizontal direction is perpendicular to the first horizontal direction.
[0014] In the preferred technical scheme of the spray device, the first spray head and / or the second spray head is a universal spray head.
[0015] By adopting the universal spray head, the spraying direction of the universal spray head can be adjusted flexibly, so that the precision and adaptability of the spraying operation can be improved significantly. In addition, by adjusting the direction of the spray head, it can be ensured that the spraying liquid can uniformly and accurately cover the surface of the silicon wafer, whether it is a flat surface or a complex curved surface, and good spraying effect can be achieved, which not only can improve the spraying efficiency, but also can ensure the cleaning quality of the silicon wafer.
[0016] In the preferred technical scheme of the spray device, the spray unit further comprises a connecting hose, and two ends of the connecting hose are respectively communicated with the first spray pipe and the second spray pipe.
[0017] In the preferred technical scheme of the above spraying device, the spraying unit further comprises a first support, the first spraying pipe is installed on the first support, the first support is clamped with the support member and can slide relative to the support member along the first horizontal direction; and / or
[0018] The spraying unit further comprises a second support, the second spraying pipe is installed on the second support, the second support is clamped with the support member and can slide relative to the support member along the first horizontal direction.
[0019] In the preferred technical scheme of the above spraying device, the spraying device comprises a plurality of the spraying units distributed at intervals along the first horizontal direction.
[0020] By arranging a plurality of spraying units, unitized spraying can be achieved, so that each spraying unit can be finely controlled and managed according to production needs, water waste caused by large-scale spraying can be avoided, and the reliability and stability of the spraying device are also enhanced. For example, when a spraying unit fails, it can be quickly isolated and repaired without affecting the operation of the entire spraying device, thereby reducing the risk of production interruption.
[0021] The second aspect of the present application also provides a cutting device comprising the spraying device of the above technical scheme. BRIEF DESCRIPTION OF DRAWINGS
[0022] The spraying device of the present application will be described below with reference to the accompanying drawings. In the drawings:
[0023] Figure 1 A structure diagram of the spraying device of the present application Figure 1 ;
[0024] Figure 2 A partial enlarged view of A in FIG. Figure 1
[0025] Figure 3 A structure diagram of the spraying device of the present application Figure 2 ;
[0026] Figure 4 A partial enlarged view of B in FIG. Figure 3
[0027] A structure diagram of the spraying unit of the spraying device of the present application Figure 5 ; Figure 1
[0028] A structure diagram of the spraying unit of the spraying device of the present application Figure 6 . Figure 2
[0029] List of reference signs
[0030] 1, support member; 11, crossbeam; 111, strip-shaped clamping plate; 12, support column;
[0031] 2, first spraying member; 21, first spraying pipe; 22, first spraying head; 23, first support;
[0032] 3, second spraying member; 31, second spraying pipe; 32, second spraying head; 33, second support;
[0033] 4, clamping groove;
[0034] 5, connecting hose;
[0035] 6, water supply pipe;
[0036] 7, valve;
[0037] 8, main water supply pipe;
[0038] 9, timing water valve. DETAILED DESCRIPTION
[0039] The preferred embodiments of the present application will be described below with reference to the accompanying drawings. It should be understood by those skilled in the art that the embodiments are only used to explain the technical principles of the present application, and are not intended to limit the protection scope of the present application.
[0040] It should be noted that in the description of the present application, the terms indicating the direction or positional relationship of "left", "right" and the like are based on the direction or positional relationship shown in the drawings, which is only for the convenience of description, and does not indicate or imply that the device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present application. In addition, the terms "first", "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.
[0041] In addition, it should also be noted that in the description of the present application, unless otherwise explicitly specified and limited, the terms "mounting", "setting", "connecting" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be directly connected, or indirectly connected through an intermediate medium; it can be the communication inside two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.
[0042] Specifically, the utility model provides a kind of spraying device, the spraying device of the utility model can be used to flush the silicon wafer waiting for degumming operation, and the silicon powder on the silicon wafer is washed away to prevent the silicon powder from drying on the silicon wafer.
[0043] As Figure 1 And Figure 2As shown, the spraying device of this utility model includes a support member 1 and a spraying unit, with the spraying unit installed on the top of the support member 1.
[0044] Cut silicon wafers are usually placed in a tooling trolley. Before the debinding operation, the tooling trolley containing the silicon wafers can be placed under the spray unit. The spray unit can spray water downwards to rinse the silicon wafers on the tooling trolley to prevent silicon powder from drying and agglomerating on the silicon wafers.
[0045] For example, such as Figure 1 and Figure 2 As shown, there are two spray units, and the two spray units are aligned along the first horizontal direction ( Figure 1 The spray units are distributed at intervals in the X direction. A three-way pipe, a three-way valve, or a three-way solenoid valve is installed on the main water supply pipe 8 of the spray unit. The spray units are connected to the main water supply pipe 8 through the three-way pipe, the three-way valve, or the three-way solenoid valve. If the spray units are connected to the main water supply pipe 8 through the three-way pipe, a manual valve or solenoid valve is also required on each spray unit to control the on / off state of the spray unit.
[0046] It should be noted that the number of spray units is not limited to the two mentioned above. For example, the number of spray units can be set to one, three, or more, etc. Such adjustments and changes to the specific number of spray units do not deviate from the principle and scope of this utility model and should be limited to the protection scope of this utility model.
[0047] Preferably, such as Figure 1 and Figure 2 As shown, the spraying device of this utility model includes a plurality of spraying units spaced apart in a first horizontal direction.
[0048] By setting up multiple spray units, unitized spraying can be achieved, which makes it easy for each spray unit to be precisely controlled and managed according to production needs, avoiding water waste caused by large-scale spraying. In addition, unitized spraying also enhances the reliability and stability of the spraying device. For example, when a spray unit fails, it can be quickly isolated and repaired without affecting the operation of the entire spraying device, reducing the risk of production interruption.
[0049] Preferably, such as Figures 1 to 6 As shown, the spray unit of this utility model includes a first spray component 2 and a second spray component 3 that are spaced apart along a first horizontal direction. At least one of the first spray component 2 and the second spray component 3 is movable relative to the support component 1 along the first horizontal direction.
[0050] When it is necessary to rinse the silicon wafers on the tooling trolley, the tooling trolley is placed between the first spraying component 2 and the second spraying component 3, and the first spraying component 2 and the second spraying component 3 spray water towards the silicon wafers on the tooling trolley at the same time.
[0051] By setting the first spraying member 2 and / or the second spraying member 3 to be capable of moving relative to the support member 1 along the first horizontal direction, the distance between the first spraying member 2 and the second spraying member 3 can be adjusted according to the size of the silicon wafer, specifically, if the size of the silicon wafer is too large, the distance between the first spraying member 2 and the second spraying member 3 can be increased, and if the size of the silicon wafer is too small, the distance between the first spraying member 2 and the second spraying member 3 can be decreased, which greatly improves the adaptability of the spraying device of the utility model, and is more conducive to ensuring the cleaning effect on the silicon wafer.
[0052] It should be noted that, in actual application, the first spraying member 2 and the second spraying member 3 can both be set to be capable of moving relative to the support member 1 along the first horizontal direction, or one of the first spraying member 2 and the second spraying member 3 can be set to be capable of moving relative to the support member 1 along the first horizontal direction, and the like, and such flexible adjustment and change do not deviate from the principles and scope of the utility model, and should be limited within the protection scope of the utility model.
[0053] In addition, it should be noted that, in actual application, the first spraying member 2 and / or the second spraying member 3 can be connected with the support member 1 through clamping, or the first spraying member 2 and / or the second spraying member 3 can be connected with the support member 1 through insertion, or the first spraying member 2 and / or the second spraying member 3 can be connected with the support member 1 through bolts, for example, a strip-shaped connecting hole extending along the first horizontal direction is arranged on the support member 1, the first spraying member 2 and / or the second spraying member 3 is connected with the strip-shaped connecting hole through bolts, when the distance between the first spraying member 2 and the second spraying member 3 needs to be adjusted, the bolts are loosened, the first spraying member 2 and / or the second spraying member 3 is moved along the strip-shaped connecting hole, and after the first spraying member 2 and / or the second spraying member 3 is moved to a suitable position, the bolts are tightened, and such adjustment and change of the specific connection mode of the first spraying member 2 and / or the second spraying member 3 with the support member 1 do not deviate from the principles and scope of the utility model, and should be limited within the protection scope of the utility model.
[0054] Preferably, as shown in Figure 1 and Figure 2 , the first spraying member 2 and / or the second spraying member 3 is connected with the support member 1 through clamping.
[0055] By connecting the first spraying member 2 and / or the second spraying member 3 with the support member 1 through clamping, the position of the first spraying member 2 and / or the second spraying member 3 can be changed, which is more convenient to use.
[0056] It should be noted that this utility model does not limit the specific snap-fit method between the first spray component 2 and / or the second spray component 3 and the support component 1. For example, they can be snapped in the form of a slot and a plate, or they can be snapped in the form of a claw and a slot, etc.
[0057] Preferably, such as Figure 1 , Figure 2 and Figure 6 As shown, the support member 1 of this utility model includes a crossbeam 11 extending along a first horizontal direction. A strip-shaped clamping plate 111 extending along the first horizontal direction is provided on the crossbeam 11. The strip-shaped clamping plate 111 is vertically arranged. A slot 4 is provided on the first spraying member 2 and / or the second spraying member 3. The slot 4 is engaged with the strip-shaped clamping plate 111.
[0058] For example, the first end of the first spray member 2 and the first end of the second spray member 3 are both provided with slots 4. The crossbeam 11 is a U-shaped crossbeam, consisting of a base plate and two side plates. One of the side plates forms a strip-shaped clamping plate 111. The strip-shaped clamping plate 111 is inserted into the slots 4 of the first spray member 2 and the second spray member 3 so that the first spray member 2 and the second spray member 3 are clamped and connected to the crossbeam 11. Furthermore, the first spray member 2 and the second spray member 3 can move along the strip-shaped clamping plate 111. The support member 1 also includes a plurality of support columns 12. The plurality of support columns 12 are spaced apart along the length direction of the crossbeam 11. The bottom end of the support column 12 is fixedly connected to the ground, and the top end of the support column 12 is fixedly connected to the base plate of the crossbeam 11.
[0059] It should be noted that, in practical applications, those skilled in the art may also set the number of crossbeams 11 to two, with the two crossbeams 11 along the second horizontal direction ( Figure 1 The two crossbeams 11 are spaced apart in the Y direction. Each crossbeam 11 is provided with a strip plate 111. The first and second ends of the first spray component 2 and the first and second ends of the second spray component 3 are provided with slots 4. The two slots 4 on the first spray component 2 are respectively engaged with the strip plates 111 on the two crossbeams 11. The two slots 4 on the second spray component 3 are also respectively engaged with the strip plates 111 on the two crossbeams 11. In addition, the support column 12 can be replaced with a support frame or support plate, etc. Such adjustments and changes to the specific structural form of the support component 1 do not deviate from the principle and scope of this utility model and should be limited to the protection scope of this utility model.
[0060] In addition, it also needs to be explained that, in the case of only one beam 11, the clamping groove 4 can also be arranged at the middle position of the first spraying member 2 and / or the second spraying member 3, that is, the beam 11 is located at the middle position of the first spraying member 2 and the second spraying member 3, and such flexible adjustment and change also do not deviate from the principles and scope of the present application, and should be limited within the protection scope of the present application.
[0061] Preferably, as shown in the drawings, Figures 3 to 6 The first spraying member 2 comprises a first spraying pipe 21 and a plurality of first nozzles 22 mounted on the first spraying pipe 21, the plurality of first nozzles 22 are distributed at intervals along the length direction of the first spraying pipe 21, and the first spraying pipe 21 is connected with the support member 1.
[0062] Exemplarily, the first spraying pipe 21 extends along the second horizontal direction (Y direction) in the drawings, and the second horizontal direction is perpendicular to the first horizontal direction (X direction) in the drawings, that is, the extension direction of the first spraying pipe 21 is perpendicular to the beam 11, the first nozzles 22 are located on the side close to the second spraying pipe 31, and the first nozzles 22 are arranged obliquely downward. Figure 5 Figure 5 It needs to be explained that the present application does not limit the type of the first nozzles 22, and the person skilled in the art can set the first nozzles 22 as ordinary nozzles or universal nozzles in actual application. Of course, the present application preferably sets the first nozzles 22 as universal nozzles, and the spraying direction of the universal nozzles can be flexibly adjusted, so as to significantly improve the precision and adaptability of the spraying operation. In addition, by adjusting the direction of the nozzles, it can be ensured that the spraying liquid can uniformly and accurately cover the surface of the silicon wafer, whether it is a plane or a complex curved surface, and good spraying effect can be achieved, which not only can improve the spraying efficiency, but also can ensure the cleaning quality of the silicon wafer.
[0063] In addition, it also needs to be explained that the first spraying pipe 21 can be a hard pipe, such as a metal pipe, and in this case, the clamping groove 4 can be arranged on the first spraying pipe 21, so that the first spraying pipe 21 is directly connected with the beam 11 of the support member 1, or the first spraying pipe 21 can also be a soft pipe, such as a plastic pipe, and in this case, the first spraying pipe 21 can be connected with the beam 11 of the support member 1 by means of a bracket (that is, the clamping groove 4 is arranged on the bracket), and the like, and such flexible adjustment and change also do not deviate from the principles and scope of the present application, and should be limited within the protection scope of the present application.
[0064] Preferably, as shown in the drawings,
[0065] Preferably, as shown in the drawings, Figures 3 to 6 As shown, the spraying unit of the utility model further comprises a first support 23, the first spraying pipe 21 is installed on the first support 23, and the first support 23 is clamped with the support member 1 and can slide relative to the support member 1 along the first horizontal direction.
[0066] Exemplarily, the first support 23 extends along the second horizontal direction, the length of the first support 23 is slightly greater than the length of the first spraying pipe 21, the first spraying pipe 21 is fixedly connected with the first support 23, the first end of the first support 23 is provided with a clamping groove 4, and the first support 23 is clamped and connected with the crossbeam 11 of the support member 1 through the clamping groove 4.
[0067] Preferably, as Figures 3 to 6 As shown, the second spraying member 3 comprises a second spraying pipe 31 and a plurality of second nozzles 32 installed on the second spraying pipe 31, the second nozzles 32 are distributed at intervals along the length direction of the second spraying pipe 31, and the second spraying pipe 31 is connected with the support member 1.
[0068] Exemplarily, the second spraying pipe 31 also extends along the second horizontal direction, that is, the second spraying pipe 31 is arranged in parallel with the first spraying pipe 21, the second nozzles 32 are located on the side close to the first spraying pipe 21, and the second nozzles 32 are arranged obliquely downward.
[0069] It should be noted that the utility model does not limit the type of the second nozzle 32, and the second nozzle 32 can be arranged as an ordinary nozzle or a universal nozzle and the like in actual application by those skilled in the art. Of course, the utility model preferably also arranges the second nozzle 32 as a universal nozzle.
[0070] In addition, it should also be noted that the second spraying pipe 31 can be a hard pipe, such as a metal pipe and the like, in which case the clamping groove 4 can be arranged on the second spraying pipe 31, so that the second spraying pipe 31 is directly connected with the crossbeam 11 of the support member 1, or the second spraying pipe 31 can also be a soft pipe, such as a plastic pipe and the like, in which case the second spraying pipe 31 can be connected with the crossbeam 11 of the support member 1 by means of a support (that is, the clamping groove 4 is arranged on the support), and the like, and such flexible adjustment and change also do not deviate from the principles and scope of the utility model, and should be limited within the protection scope of the utility model.
[0071] Preferably, as Figures 3 to 6 As shown, the spraying unit of the utility model further comprises a second support 33, the second spraying pipe 31 is installed on the second support 33, and the second support 33 is clamped with the support member 1 and can slide relative to the support member 1 along the first horizontal direction.
[0072] Exemplarily, the second support 33 extends along a second horizontal direction, a length of the second support 33 is slightly greater than a length of the second spraying pipe 31, the second spraying pipe 31 is fixedly connected with the second support 33, and the first end of the second support 33 is provided with a clamping groove 4, and the second support 33 is clamped and connected with the cross beam 11 of the support member 1 through the clamping groove 4.
[0073] Preferably, as Figures 3 to 6 shown, the spraying unit further comprises a connecting hose 5, and two ends of the connecting hose 5 are respectively communicated with the first spraying pipe 21 and the second spraying pipe 31.
[0074] Exemplarily, the spraying unit further comprises a branch water supply pipe 6 and a valve 7 installed on the branch water supply pipe 6, the branch water supply pipe 6 is also fixedly connected with the first support 23, a first end of the branch water supply pipe 6 is communicated with a main water supply pipe 8, a second end of the branch water supply pipe 6 is communicated with the first end of the first spraying pipe 21, the second end of the first spraying pipe 21 is communicated with the second spraying pipe 31 through the connecting hose 5, and the main water supply pipe 8 is provided with a timing water valve 9, and the timing water valve 9 is used for controlling a spraying time.
[0075] When it is needed to make the spraying unit flush the silicon wafer, the valve 7 is opened, the spraying unit is connected with the main water supply pipe 8, water in the main water supply pipe 8 flows along the branch water supply pipe 6, the first spraying pipe 21 and the second spraying pipe 31, and the water in the first spraying pipe 21 and the second spraying pipe 31 is respectively sprayed to the silicon wafer below through the first spray head 22 and the second spray head 32, when the flushing time reaches the set spraying time, the timing water valve 9 is closed, and the spraying is stopped.
[0076] It should be noted that, in actual application, a person skilled in the art can also cancel the branch water supply pipe 6, so that the first spraying pipe 21 or the second spraying pipe 31 is directly communicated with the main water supply pipe 8, and this flexible adjustment and change also does not deviate from the principles and ranges of the utility model, and should be limited in the protection range of the utility model.
[0077] The utility model also provides a cutting equipment, the cutting equipment includes the above-mentioned spraying device.
[0078] It should be noted that, in addition to the spraying device, the cutting equipment can also include a wire cutting machine and a degumming device, wherein the wire cutting machine can cut the silicon rod into a plurality of silicon wafers, and the degumming device can perform degumming operation on the silicon wafer.
[0079] Furthermore, those skilled in the art will recognize that, while certain embodiments described herein include certain features that are not included in other embodiments, combinations of features of the different embodiments are to be construed as being within the scope of the present application and forming different embodiments by themselves. For example, in the claims, any of the claimed embodiments can be used in any combination.
[0080] So far, the technical solution of the present application has been described in combination with the preferred embodiments shown in the drawings, but those skilled in the art can easily understand that the protection scope of the present application is obviously not limited to these specific embodiments. Those skilled in the art can make equivalent changes or replacements to the related technical features without departing from the principles of the present application, and the technical solutions after the changes or replacements will all fall within the protection scope of the present application.
Claims
1. A spray device, characterized in that The spraying device comprises a support member (1) and at least one spraying unit mounted on the top of the support member (1), the spraying unit comprising first spraying members (2) and second spraying members (3) spaced apart along a first horizontal direction, at least one of the first spraying members (2) and the second spraying members (3) being movable relative to the support member (1) along the first horizontal direction.
2. The spray device of claim 1, wherein The first spraying members (2) and / or the second spraying members (3) are connected to the support member (1) through clamping.
3. The spray device of claim 2, wherein The support member (1) comprises a cross beam (11) extending along the first horizontal direction, the cross beam (11) being provided with a strip-shaped clamping plate (111) extending along the first horizontal direction, the strip-shaped clamping plate (111) being vertically arranged, the first spraying members (2) and / or the second spraying members (3) being provided with clamping grooves (4) matched with the strip-shaped clamping plate (111).
4. The spray device of claim 1, wherein The first spraying members (2) comprise first spraying pipes (21) and a plurality of first nozzles (22) mounted on the first spraying pipes (21), the plurality of first nozzles (22) being spaced apart along the length direction of the first spraying pipes (21), the first spraying pipes (21) being connected to the support member (1); and / or The second spraying members (3) comprise second spraying pipes (31) and a plurality of second nozzles (32) mounted on the second spraying pipes (31), the plurality of second nozzles (32) being spaced apart along the length direction of the second spraying pipes (31), the second spraying pipes (31) being connected to the support member (1).
5. The shower assembly of claim 4, wherein, The first spraying pipes (21) and the second spraying pipes (31) extend along a second horizontal direction perpendicular to the first horizontal direction.
6. The spray device of claim 4, wherein The first nozzles (22) and / or the second nozzles (32) are universal nozzles.
7. The spray device of claim 4, wherein The spraying unit further comprises a connecting hose (5) in communication with the first spraying pipes (21) and the second spraying pipes (31) at two ends thereof.
8. The spray device of claim 4, wherein, The spraying unit further comprises a first bracket (23), the first spraying pipes (21) being mounted on the first bracket (23), the first bracket (23) being clamped to the support member (1) and being slidable relative to the support member (1) along the first horizontal direction; and / or The spraying unit further comprises a second bracket (33), the second spraying pipes (31) being mounted on the second bracket (33), the second bracket (33) being clamped to the support member (1) and being slidable relative to the support member (1) along the first horizontal direction.
9. The shower assembly of any one of claims 1 to 8, wherein, The spraying device comprises a plurality of the spraying units spaced apart along the first horizontal direction.
10. A cutting apparatus characterized by, The cutting device comprises the spraying device according to any one of claims 1 to 9.