Locking structure of chemical vapor deposition chamber

Abstract

The utility model discloses a locking structure of a chemical vapor deposition chamber, which comprises a deposition chamber and a chamber door, a first chamber door connecting frame is arranged on the deposition chamber, a second chamber door connecting frame is arranged on the chamber door, and one side of the first chamber door connecting frame is movably connected with one side of the second chamber door connecting frame through a hinge. A locking base is arranged on the other side of the first chamber door connecting frame, a locking handle assembly is arranged on the other side of the second chamber door connecting frame, and the locking handle assembly and the locking base are matched to lock the chamber door. According to the utility model, the locking handle component is matched with the locking seat, so that the locking handle can be pressed more and more tightly when the locking handle is rotated clockwise, and the locking handle can be loosened more and more tightly when the locking handle is rotated anticlockwise, and the door can be opened more easily.

Description

TECHNICAL FIELD

[0001] The utility model relates to chemical vapor deposition technical field, especially a kind of lock structure of chemical vapor deposition chamber. BACKGROUND

[0002] CVD (Chemical Vapor Deposition), full name is chemical vapor deposition, is a chemical reaction process. It is heated to one or more gas (referred to as precursor) and is decomposed, and polymerization reaction is generated, and is deposited on substrate surface, and the thin film required is formed. CVD has the characteristics such as low deposition temperature, film composition easy to control, film thickness and deposition time are proportional, uniformity is good, repeatability is good and step coverage is excellent.

[0003] In CVD process needs to be completed in chemical vapor deposition chamber, and chemical vapor deposition chamber needs to be in a closed space when substrate is chemically deposited, until the chamber door can be opened after deposition is completed. And the existing chamber door lock structure is generally realized by buckle structure, and the buckle structure needs to be separated, and needs larger door opening force, and door opening and locking are more laborious.

[0004] Therefore, the utility model aims at providing a kind of lock structure of chemical vapor deposition chamber, which can easily open chamber door and lock chamber door by ingenious structure design. SUMMARY

[0005] In order to overcome the shortcomings and deficiencies in the prior art, the purpose of the utility model is to provide a kind of lock structure of chemical vapor deposition chamber.

[0006] The utility model discloses the purpose is realized through the following technical scheme: a kind of lock structure of chemical vapor deposition chamber, including deposition chamber and chamber door, the first chamber door connecting frame is equipped on the deposition chamber, the second chamber door connecting frame is equipped on the chamber door, one side of the first chamber door connecting frame and the second chamber door connecting frame is connected by hinge, the other side of the first chamber door connecting frame is equipped with lock seat, the other side of the second chamber door connecting frame is equipped with lock handle assembly, the lock handle assembly and the lock seat cooperation can lock the chamber door. The utility model adopts lock handle assembly and lock seat cooperation, when clockwise rotating lock handle, it can be pressed more and more tight, when counterclockwise rotating lock handle, it will be more and more loose, and door opening is more easy.

[0007] As a kind of improvement of the utility model chemical vapor deposition chamber's lock structure, the lock handle assembly includes handle seat installed in the side of the second chamber door connecting frame and lock handle installed on the handle seat, and the lock handle is connected on the handle seat by screw.

[0008] As an improvement of the locking structure of the chemical vapor deposition chamber, one end of the locking handle is locked with a locking limiting block, the inner side of the locking limiting block is provided with a locking groove, an arc-shaped protruding part is arranged on one side wall of the locking groove, and the locking groove has an unlocking notch and a locking groove bottom, and the arc-shaped protruding part is located between the unlocking notch and the locking groove bottom.

[0009] As an improvement of the locking structure of the chemical vapor deposition chamber, a locking rod is arranged on the locking seat, and when the locking handle is rotated, the locking rod can slide in the locking groove.

[0010] As an improvement of the locking structure of the chemical vapor deposition chamber, when the locking handle is rotated clockwise, the locking rod can slide out of the unlocking notch, and the opening restriction of the chamber door is cancelled, and when the locking handle is rotated counterclockwise, the locking rod slides to the locking groove bottom position, and the locking rod can restrict the opening of the chamber door.

[0011] As an improvement of the locking structure of the chemical vapor deposition chamber, the locking seat is fixedly installed on the side of the first chamber door connecting frame through a screw, and the handle seat is fixedly installed on the side of the second chamber door connecting frame through a screw.

[0012] As an improvement of the locking structure of the chemical vapor deposition chamber, an observation window is arranged on the chamber door. The observation window facilitates observation of the substrate deposition effect in the deposition chamber.

[0013] The utility model discloses the beneficial effect lies in: the utility model discloses locking handle assembly and locking seat cooperation, when rotating locking handle clockwise can press more and more tightly, when rotating locking handle counterclockwise, will be more and more loose, and the door is more easy to open. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 It is the perspective view of the utility model;

[0015] Figure 2 It is the locking structure unlocking separation state schematic drawing of the utility model;

[0016] Figure 3 It is the locking structure locking state diagram of the utility model;

[0017] Figure 4 It is the locking handle assembly structure schematic drawing of the utility model;

[0018] The attached figures are labeled as follows: 1. Sedimentation chamber; 2. Chamber door; 3. First chamber door connecting frame; 4. Second chamber door connecting frame; 5. Hinge; 6. Locking seat; 7. Locking handle assembly; 8. Observation window; 61. Locking rod; 71. Handle seat; 72. Locking handle; 73. Screw; 74. Locking limit block; 75. Locking groove; 76. Arc-shaped protrusion; 77. Unlocking slot; 78. Locking groove bottom. Detailed Implementation

[0019] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0020] It should be noted that all directional indicators (such as up, down, left, right, front, back, etc.) in this utility model embodiment are only used to explain the relative positional relationship and movement of each component in a specific posture (as shown in the figure). If the specific posture changes, the directional indicator will also change accordingly.

[0021] Furthermore, the use of terms such as "first" and "second" in this utility model is for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the technical solutions of the various embodiments can be combined with each other, but only on the basis of being achievable by those skilled in the art. If the combination of technical solutions is contradictory or impossible to implement, such a combination of technical solutions should be considered non-existent and not within the scope of protection claimed by this utility model.

[0022] like Figures 1-4 As shown, a locking structure for a chemical vapor deposition chamber includes a deposition chamber 1 and a door 2. A first door connecting frame 3 is provided on the deposition chamber 1, and a second door connecting frame 4 is provided on the door 2. The first door connecting frame 3 and the second door connecting frame 4 are movably connected on one side by a hinge 5 or a hinge joint. A locking seat 6 is provided on the other side of the first door connecting frame 3, and a locking handle assembly 7 is provided on the other side of the second door connecting frame 4. The locking handle assembly 7 and the locking seat 6 cooperate to lock the door 2. This invention uses the locking handle assembly 7 and the locking seat 6 in such a way that when the locking handle is turned clockwise, it becomes increasingly tighter, and when the locking handle is turned counterclockwise, it becomes increasingly looser, making it easier to open the door.

[0023] Preferably, the locking handle assembly 7 comprises a handle seat 71 mounted on the side of the second chamber door connecting frame 4 and a locking handle 72 mounted on the handle seat 71, and the locking handle 72 is connected to the handle seat 71 by a screw 73.

[0024] Preferably, one end of the locking handle 72 is provided with a locking limiting block 74, the inner side of the locking limiting block 74 is provided with a locking groove 75, one side wall of the locking groove 75 is provided with an arc-shaped protruding part 76, the locking groove 75 is provided with an unlocking notch 77 and a locking groove bottom 78, and the arc-shaped protruding part 76 is located between the unlocking notch 77 and the locking groove bottom 78. When the chamber door 2 is locked, the chamber door 2 can be locked by the structure of the arc-shaped protruding part 76, and the design of the arc-shaped protruding part 76 can make the chamber door more and more tight.

[0025] Preferably, the locking seat 6 is provided with a locking rod 61, and when the locking handle 72 is rotated, the locking rod 61 can slide in the locking groove 75.

[0026] Preferably, when the locking handle 72 is rotated clockwise, the locking rod 61 can slide out of the unlocking notch 77, and the opening of the chamber door 2 is cancelled. When the locking handle 72 is rotated counterclockwise, the locking rod 61 slides to the position of the locking groove bottom 78, and the locking rod 61 can limit the opening of the chamber door 2.

[0027] Preferably, the locking seat 6 is fixedly mounted on the side of the first chamber door connecting frame 3 by a screw, and the handle seat 71 is fixedly mounted on the side of the second chamber door connecting frame 4 by a screw.

[0028] Preferably, the chamber door 2 is provided with an observation window 8. The observation window 8 facilitates the observation of the deposition effect of the substrate in the deposition chamber.

[0029] Although the embodiments of the utility model have been shown and described, it can be understood by those skilled in the art that various changes, modifications, replacements and variations can be made to the embodiments without departing from the principles and structures of the utility model, and the scope of the utility model is defined by the appended claims and their equivalent scope.

Claims

1. A lock structure of a chemical vapor deposition chamber comprising a deposition chamber and a chamber door, characterized in that, The first chamber door connecting frame and the second chamber door connecting frame are hingedly connected on one side, the other side of the first chamber door connecting frame is provided with a locking seat, and the other side of the second chamber door connecting frame is provided with a locking handle assembly.

2. The lock structure of a chemical vapor deposition chamber according to claim 1, wherein, The locking handle assembly comprises a handle seat mounted on the side of the second chamber door connecting frame and a locking handle mounted on the handle seat.

3. The lock structure of a chemical vapor deposition chamber according to claim 2, wherein, One end of the locking handle is provided with a locking limiting block, the inner side of the locking limiting block is provided with a locking groove, one side wall of the locking groove is provided with an arc-shaped protruding part, and the locking groove has an unlocking notch and a locking groove bottom.

4. The lock structure of a chemical vapor deposition chamber according to claim 3, wherein, The locking seat is provided with a locking rod, and the locking rod can slide in the locking groove when the locking handle is rotated.

5. The lock structure of a chemical vapor deposition chamber according to claim 4, wherein, When the locking handle is rotated clockwise, the locking rod can slide out of the unlocking notch, and the opening of the chamber door is not limited; when the locking handle is rotated counterclockwise, the locking rod slides into the locking groove bottom position, and the opening of the chamber door is limited.

6. The lock structure of a chemical vapor deposition chamber according to claim 2, wherein, The locking seat is fixedly installed on the side of the first chamber door connecting frame by screws, and the handle seat is fixedly installed on the side of the second chamber door connecting frame by screws.

7. The lock structure of a chemical vapor deposition chamber according to claim 1, wherein, The chamber door is provided with an observation window.

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