Lifting transmission mechanism for silicon carbide crystal growth device

Abstract

The utility model relates to the technical field of semiconductor crystal growth, and particularly discloses a lifting transmission mechanism for a silicon carbide crystal growth device. The lifting transmission mechanism for the silicon carbide crystal growth device comprises a transverse output shaft mounted on a fixed bottom plate, and is characterized in that one end of the transverse output shaft is connected with an output shaft of a servo motor, and the other end of the transverse output shaft is connected with a commutator; a ball screw is connected to a switching output shaft of the commutator, the ball screw is erected on the vertical supporting frame, a plurality of evenly-distributed lead screw nuts are arranged on the ball screw, and the coil fixing frame is connected to the lead screw nuts through corresponding nut seats. The power output device is reasonable in structural design and good in operation stability, and power output can be converted from the transverse direction to the vertical direction through matching of the transverse output shaft and the reverser; meanwhile, due to the application of the long transverse output shaft, electromagnetic interference is effectively reduced, and compared with a traditional lifting device, the production precision is high, and the anti-electromagnetic interference capacity is high.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor crystal growth, particularly relates to a lifting transmission mechanism for silicon carbide crystal growth device. BACKGROUND

[0002] Due to the characteristics of wide band gap, high thermal conductivity, high electron saturation drift rate, high breakdown field and the like, silicon carbide becomes the representative of the third generation wide band gap semiconductor material. The PVT method is currently the mainstream technology for growing silicon carbide single crystal, and the silicon carbide raw material sublimates under high temperature conditions, and the silicon carbide seed crystal surface is recrystallized to grow a silicon carbide single crystal of a required size under the action of temperature gradient and concentration gradient.

[0003] In the prior art, the coil used in the silicon carbide furnace is fixed. With the growth of the crystal, the positions of the crucible and the seed crystal change, while the position of the coil remains unchanged, and the coil cannot be matched with the change of the crystal growth interface. At present, a coil lifting mechanism that can meet the needs of the crystal growth process and make the heat field change accordingly with different stages of crystal growth is needed, which is a problem to be solved in the art. SUMMARY

[0004] The utility model discloses in order to make up for the insufficient of prior art, provide a kind of operation stable, production precision is high, the lifting transmission mechanism for silicon carbide crystal growth device of anti-electromagnetic interference.

[0005] The utility model is realized through the following technical schemes:

[0006] A lifting transmission mechanism for silicon carbide crystal growth device, comprising a horizontal output shaft mounted on a fixed base plate, characterized in that: the horizontal output shaft is connected to the output shaft of a servo motor at one end and to a reversing device at the other end; a ball screw is connected to the adapter output shaft of the reversing device, the ball screw is mounted on a vertical support frame, and a plurality of evenly distributed screw nuts are provided on the ball screw; a coil fixing frame is connected to the screw nuts through corresponding nut seats.

[0007] The application of the reversing device converts the horizontal output torque into vertical output torque, achieving a change in the direction of power. In addition, the use of a longer horizontal output shaft can effectively reduce electromagnetic interference and provide high electromagnetic shielding for the servo motor.

[0008] The more optimal technical solution of the utility model is:

[0009] The horizontal output shaft is mounted on the fixed base plate through a seat deep groove ball bearing, and a coupling is mounted on the two ends of the horizontal output shaft. A speed reducer is mounted on the output shaft of the servo motor, and the output shaft of the speed reducer is connected to the horizontal output shaft through a coupling. The other end of the horizontal output shaft is connected to the power input shaft of the reversing device.

[0010] The servo motor is directly connected with the speed reducer, then the horizontal output shaft is connected through the shaft coupling, and the horizontal output shaft is guaranteed to be horizontal and concentric under the fixing of the deep groove ball bearing with seat.

[0011] Further preferably, the end of the fixed base plate is provided with a speed reducer fixing plate, and the speed reducer is arranged on the speed reducer fixing plate to realize positioning of the speed reducer on the fixed base plate.

[0012] The vertical support frame is provided with a fixed seat and a supporting seat at two ends respectively, and the ball screw is arranged on the fixed seat and the supporting seat at two ends to realize vertical and stable installation of the ball screw.

[0013] The vertical support frame is provided with linear sliding rails on the symmetrical two sides of the ball screw, the sliding block is movably arranged between the two linear sliding rails, and the sliding block is connected with the coil fixing frame; through the joint action of the sliding block and the nut seat on the coil fixing frame, the stable and firm adhesion of the coil fixing frame and the vertical support frame is guaranteed.

[0014] The ball screw is connected with the adapter output shaft of the commutator through the shaft coupling, and the stability of power transmission is realized.

[0015] The screw nut is two or more than two in position symmetry, and the screw nut is used as a power output component of the ball screw to realize up and down movement and flexible adjustment of the coil support frame position.

[0016] The utility model discloses a structure design is reasonable, and the operation stability is good, and through the cooperation of horizontal output shaft and commutator, power output can be realized by horizontal to vertical, and the application of long horizontal output shaft effectively reduces electromagnetic interference, and compared with traditional lifting device, production precision is high, and the anti-electromagnetic interference ability is strong, satisfies the requirement of crystal growth process. BRIEF DESCRIPTION OF DRAWINGS

[0017] The utility model will be further described in connection with the drawings.

[0018] Figure 1 It is the structure schematic drawing of the utility model.

[0019] In the drawing, 1 fixed base plate, 2 horizontal output shaft, 3 servo motor, 4 commutator, 5 ball screw, 6 vertical support frame, 7 screw nut, 8 coil fixing frame, 9 deep groove ball bearing with seat, 10 shaft coupling, 11 speed reducer, 12 speed reducer fixing plate, 13 fixed seat, 14 supporting seat, 15 linear sliding rail, 16 sliding block. DETAILED DESCRIPTION

[0020] In order to make the above objects, features and advantages of the present application more obvious and easy to understand, the specific embodiments of the present application will be described in detail below with reference to the drawings. In the following description, many specific details are set forth in order to provide a thorough understanding of the present application. However, the present application can be practiced in many different ways other than those described herein, and those skilled in the art can make similar improvements without departing from the spirit of the present application, so the present application is not limited to the specific embodiments disclosed below.

[0021] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which the present application belongs. The terminology used in the description of the present application herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the present application. As used herein, the term "and / or" includes any and all combinations of one or more of the associated listed items.

[0022] The present application will be described in detail below with reference to the drawings: this embodiment includes a transverse output shaft 2 mounted on a fixed base plate 1, one end of the transverse output shaft 2 is connected to the output shaft of a servo motor 3, the other end is connected to a commutator 4; the commutator 4 is connected to a ball screw 5 on the adapter output shaft, the ball screw 5 is erected on a vertical support frame 6, a plurality of evenly distributed screw nuts 7 are provided on the ball screw 5, and a coil fixing frame 8 is connected to the screw nuts 7 through a corresponding nut seat.

[0023] As shown in the accompanying Figure 1 The transverse output shaft 2 is erected on the fixed base plate 1 through the bearing 9 with seat, the both ends of the transverse output shaft 2 are provided with the shaft coupling 10, the output shaft of the servo motor 3 is provided with the speed reducer 11, the output shaft of the speed reducer 11 is connected to the transverse output shaft 2 through the shaft coupling 10; the other end of the transverse output shaft 2 is connected to the power input shaft of the commutator 4; the end of the fixed base plate 1 is provided with the speed reducer fixing plate 12, the speed reducer 11 is erected on the speed reducer fixing plate 12; the vertical support frame 6 is provided with the fixed seat 13 and the support seat 14 at both ends respectively, the ball screw 5 is erected on the fixed seat 13 and the support seat 14 at both ends; the vertical support frame 6 is provided with the linear slide rail 15 located on both sides of the ball screw 5, the sliding block 16 is movably mounted between the two linear slide rails 15, and the sliding block 16 is connected with the coil fixing frame 8; the ball screw 5 is provided with the shaft coupling 10 on the adapter output shaft connecting end of the commutator 4.

[0024] The working principle of the present application is as follows:

[0025] The servo motor 3 is fixedly installed on the fixed base plate 1 through a speed reducer 11, one end of the horizontal output shaft 2 is connected with the speed reducer 11 through a shaft coupling 10, the other end is connected with the commutator 4 through a shaft coupling 10, the horizontal output torque of the servo motor 3 is converted into vertical torque, the horizontal output shaft 2 drives the ball screw 5 to rotate, the rotation of the ball screw 5 drives the up-and-down movement of the screw nut 7, so that the coil fixing frame 8 connected with the screw nut moves uniformly and stably upwards or downwards.

[0026] The linear slide rails 15 are arranged on both sides of the ball screw 5 on the vertical support frame 6, the slide block 16 and the nut seat on the screw nut 7 jointly act on the coil fixing frame 8, so that the coil fixing frame 8 is stably and firmly attached to the vertical support frame 6, and the running stability of the lifting transmission device is ensured.

[0027] In the embodiment, the screw nut 7 is positionally symmetrical and two, and can be arranged as multiple uniformly distributed according to the height of the coil fixing frame 8 or the length of the ball screw 5.

[0028] The horizontal output shaft 2 and the commutator 4 are matched, the horizontal output of the servo motor 3 can be converted into vertical output, the longer horizontal output shaft 2 can effectively reduce electromagnetic interference, has high electromagnetic shielding effect on the servo motor 3, the connection of the horizontal output shaft 2 and the commutator 4 realizes torque illusion, drives the ball screw 5 to rotate, realizes the lifting of the coil, and meets the requirements of the crystal growth process in the maintenance aspect.

[0029] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the utility model, and not to limit them; although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement to part or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the utility model, and they should be covered in the scope of the claims and the description of the utility model.

Claims

1. A lifting transmission mechanism for a silicon carbide crystal growth apparatus, comprising a transverse output shaft (2) mounted on a fixed base plate (1), characterized in that: One end of the transverse output shaft (2) is connected with the output shaft of the servo motor (3), and the other end is connected with the commutator (4); the ball screw (5) is connected on the output shaft of the commutator (4), the ball screw (5) is arranged on the vertical support frame (6), a plurality of screw nuts (7) are arranged on the ball screw (5), and the coil fixing frame (8) is connected on the screw nut (7) through the corresponding nut seat.

2. The lifting transmission mechanism for a silicon carbide crystal growing apparatus according to claim 1, characterized by: The transverse output shaft (2) is arranged on the fixed bottom plate (1) through the deep groove ball bearing (9) with a seat, the both ends of the transverse output shaft (2) are provided with the shaft coupling (10), the output shaft of the servo motor (3) is provided with the speed reducer (11), and the output shaft of the speed reducer (11) is connected with the transverse output shaft (2) through the shaft coupling (10); the other end of the transverse output shaft (2) is connected with the power input shaft of the commutator (4).

3. The lifting drive mechanism for a silicon carbide crystal growing apparatus according to claim 2, characterized by: The end of the fixed bottom plate (1) is provided with the speed reducer fixing plate (12), and the speed reducer (11) is arranged on the speed reducer fixing plate (12).

4. The lifting transmission mechanism for a silicon carbide crystal growing apparatus according to claim 1, characterized by: The vertical support frame (6) is provided with the fixed seat (13) and the support seat (14) at both ends, respectively, and the both ends of the ball screw (5) are arranged on the fixed seat (13) and the support seat (14).

5. The lifting drive mechanism for a silicon carbide crystal growing apparatus according to claim 1, wherein: The vertical support frame (6) is provided with the linear slide rail (15) located on the symmetrical two sides of the ball screw (5), the slider (16) is movably arranged between the two linear slide rails (15), and the slider (16) is connected with the coil fixing frame (8).

6. The lifting transmission mechanism for a silicon carbide crystal growing apparatus according to claim 1, characterized by: The ball screw (5) is provided with the shaft coupling (10) on the connecting end of the output shaft of the commutator (4).

7. The lifting drive mechanism for a silicon carbide crystal growing apparatus according to claim 1, wherein: The screw nut (7) is two or more than two in position symmetry.

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