Silicon carbide seed crystal coating device

Abstract

The utility model relates to the technical field of silicon carbide seed crystals, and discloses a silicon carbide seed crystal coating device which comprises a box body, a supporting plate is fixedly connected in the box body, a turnover mechanism is fixedly connected to the surface of the supporting plate, a placing table is fixedly connected to the outer portion of the turnover mechanism, and the placing table is fixedly connected to the bottom of the box body. The turnover mechanism is used for conveniently driving the placement table to turn over, a clamping mechanism is rotationally connected to the interior of the placement table, a silicon carbide sheet is placed on the surface of the placement table, and the clamping mechanism is used for conveniently clamping the silicon carbide sheet. According to the silicon carbide seed crystal coating device, through the arrangement of the turnover mechanism, the air cylinder is started, the piston rod of the air cylinder drives the sliding block to move, then the rack is driven to move, the rack drives the gear to rotate, and then the rotating shaft is driven to rotate on the fixed block, so that the placing table can be turned over left and right, and a silicon carbide sheet can be turned over continuously in the coating process; and the coating uniformity is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of silicon carbide seed crystal, specifically relates to a silicon carbide seed crystal coating device. BACKGROUND

[0002] The silicon carbide seed crystal coating device is used for coating a thin film on the surface of a crystal during the growth of a silicon carbide crystal to improve the performance of the crystal or the growth process of the crystal. Silicon carbide is a material widely used in semiconductors, high-power electronic devices, LEDs, optoelectronic devices, and high-temperature, high-frequency fields, and has excellent mechanical strength, high-temperature resistance, and radiation resistance. Seed crystal refers to a material used as a seed for crystal growth during the growth of a silicon carbide single crystal. Coating technology improves the efficiency, quality, and environmental adaptability of crystal growth by covering a specific thin film on the surface of the seed crystal.

[0003] The distribution of the coating source of the traditional device may not be uniform, or the fixation method and placement position of the seed crystal may not be suitable for covering the entire surface of the seed crystal, resulting in differences in the thickness and quality of the coating on different areas of the seed crystal, and the device cannot effectively fix seed crystals of different shapes and sizes, limiting the applicability of the device.

[0004] Therefore, there is an urgent need for a silicon carbide seed crystal coating device to solve the above problems. UTILITY MODEL CONTENT

[0005] (I) Technical problems solved

[0006] To solve the above-mentioned shortcomings of the prior art, the utility model provides a silicon carbide seed crystal coating device, which can effectively solve the problems of differences in the thickness and quality of the coating on different areas of the seed crystal and the inability to effectively fix seed crystals of different shapes and sizes.

[0007] (II) Technical solutions

[0008] To achieve the above-mentioned purposes, the utility model is implemented by the following technical solutions: a silicon carbide seed crystal coating device, comprising a box body, a support plate is fixedly connected inside the box body, a turnover mechanism is fixedly connected to the surface of the support plate, a placement table is fixedly connected to the outside of the turnover mechanism, the turnover mechanism facilitates the turnover of the placement table, a clamping mechanism is rotatably connected inside the placement table, a silicon carbide wafer is placed on the surface of the placement table, and the clamping mechanism facilitates the clamping of the silicon carbide wafer.

[0009] As a further scheme of the utility model, the turnover mechanism includes the air cylinder fixedly connected to the surface of the supporting plate, the piston rod of the air cylinder is fixedly connected with the sliding block, one side of the sliding block is fixedly connected with the rack, the outer portion of the rack is slidably connected with the guide block, the upper portion of the rack is engaged with the gear, one side of the gear is fixedly connected with the rotating shaft, the outer portion of the rotating shaft is rotatably connected with the fixed block, the placing table is fixedly connected to the outer portion of the rotating shaft, and the placing table is conveniently turned over through the rotation of the rotating shaft.

[0010] As a further scheme of the utility model, the clamping mechanism includes the forward and reverse screw rod rotatably connected to the inside of the placing table, the outer portion of the forward and reverse screw rod is threadedly connected with the threaded block, one side of the two threaded blocks is fixedly connected with a group of clamping heads, the outer portion of the two groups of clamping heads is sleeved with the anti-skid sleeve, and one end of the forward and reverse screw rod is fixedly connected with the rotating handle.

[0011] As a further scheme of the utility model, the two fixed blocks are fixedly connected to the surface of the supporting plate, and the rotation of the rotating shaft is conveniently supported.

[0012] As a further scheme of the utility model, the surface of the placing table is provided with the sliding groove, and the two threaded blocks are slidably connected to the inside of the sliding groove, so that the movement of the threaded blocks is conveniently limited.

[0013] As a further scheme of the utility model, the top of the box body is rotatably connected with the box cover, and the surface of the box cover is fixedly connected with the handle, so that the box cover is conveniently opened.

[0014] (Three) beneficial effects

[0015] The utility model provides a kind of silicon carbide seed crystal coating device, with the following beneficial effects:

[0016] 1, the silicon carbide seed crystal coating device, by the setting of turnover mechanism, air cylinder is started, the piston rod of air cylinder drives sliding block to move, to drive rack movement in turn, rack drives gear rotation, to drive rotating shaft rotation on fixed block, so that placing table can be turned over left and right, it is convenient to make silicon carbide piece constantly turn over in coating process, improve the uniformity of coating.

[0017] 2, the silicon carbide seed crystal coating device, by the setting of clamping mechanism, rotating handle is rotated, rotating handle drives forward and reverse screw rod rotation in the inside of placing table, to drive threaded block, clamping head and anti-skid sleeve reverse synchronous movement on placing table and be clamped and fixed to silicon carbide piece, it is convenient to be fixed according to different shape and size of silicon carbide piece, improve the applicability of device. DRAWINGS

[0018] Figure 1 It is whole structure schematic view of the utility model;

[0019] Figure 2 It is the structure schematic view of the turnover mechanism of the utility model;

[0020] Figure 3 It is the structure schematic view of the clamping mechanism of the utility model;

[0021] Figure 4 It is the structure schematic view of the box section of the utility model.

[0022] In the drawing: 1, box; 2, support plate; 3, turnover mechanism; 301, air cylinder; 302, sliding block; 303, rack; 304, guide block; 305, gear; 306, rotating shaft; 307, fixed block; 4, placing table; 5, clamping mechanism; 501, positive and negative screw rod; 502, threaded block; 503, chuck; 504, anti-skid sleeve; 505, rotating handle; 6, silicon carbide wafer; 7, box cover; 8, handle. DETAILED DESCRIPTION

[0023] The technical solutions in the embodiments of the utility model will be clearly and completely described in combination with the drawings in the embodiments of the utility model. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the utility model.

[0024] Please refer to Figures 1 to 4 The utility model provides a technical scheme: a silicon carbide seed crystal coating device, including the box 1, the inside fixed connection of box 1 has support plate 2, the surface fixed connection of support plate 2 has turnover mechanism 3, through the setting of turnover mechanism 3, improve the uniformity of coating, the outside fixed connection of turnover mechanism 3 has placing table 4, turnover mechanism 3 is convenient for driving placing table 4 to overturn, the inside rotation connection of placing table 4 has clamping mechanism 5, through the setting of clamping mechanism 5, improve the applicability of device, the surface of placing table 4 is placed with silicon carbide wafer 6, clamping mechanism 5 is convenient for the clamping of silicon carbide wafer 6;

[0025] Please refer to Figure 2 Turnover mechanism 3 includes the air cylinder 301 fixedly connected on the surface of support plate 2, the piston rod of air cylinder 301 is fixedly connected with sliding block 302, one side of sliding block 302 is fixedly connected with rack 303, the outside of rack 303 is slidably connected with guide block 304, the upper portion of rack 303 is engaged with gear 305, one side of gear 305 is fixedly connected with rotating shaft 306, the outside both sides of rotating shaft 306 are rotatably connected with fixed block 307, placing table 4 is fixedly connected on the outside of rotating shaft 306, and it is convenient to drive placing table 4 to overturn by the rotation of rotating shaft 306;

[0026] Please refer to Figure 3The clamping mechanism 5 comprises a forward and reverse screw rod 501 rotatably connected to the inside of the placing table 4, the outer two sides of the forward and reverse screw rod 501 are threadedly connected with threaded blocks 502, one side of each of the two threaded blocks 502 is fixedly connected with a group of clamping heads 503, the outside of the two groups of clamping heads 503 is sleeved with anti-skid sleeves 504, one end of the forward and reverse screw rod 501 is fixedly connected with a rotating handle 505, and the rotating handle 505 facilitates rotation of the forward and reverse screw rod 501.

[0027] Please refer to Figure 2 The two fixed blocks 307 are fixedly connected to the surface of the supporting plate 2 and facilitate rotation of the rotating shaft 306.

[0028] Please refer to Figure 3 The surface of the placing table 4 is provided with a sliding groove, and the two threaded blocks 502 are slidingly connected to the inside of the sliding groove, thereby facilitating movement limitation of the threaded blocks 502.

[0029] Please refer to Figure 1 The top of the box body 1 is rotatably connected with a box cover 7, and the surface of the box cover 7 is fixedly connected with a handle 8, and the handle 8 facilitates opening of the box cover 7.

[0030] In the utility model, the working steps of the device are as follows:

[0031] The first step is that the rotating handle 505 is rotated, the rotating handle 505 drives the forward and reverse screw rod 501 to rotate in the inside of the placing table 4, thereby driving the threaded blocks 502, the clamping heads 503 and the anti-skid sleeves 504 to move reversely and synchronously on the placing table 4 to clamp and fix the silicon carbide wafer 6;

[0032] The second step is that the box cover 7 is closed, the air cylinder 301 is started, the piston rod of the air cylinder 301 drives the sliding block 302 to move, thereby driving the rack 303 to move, the rack 303 drives the gear 305 to rotate, thereby driving the rotating shaft 306 to rotate on the fixed block 307, so that the placing table 4 can be flipped left and right, and the silicon carbide wafer 6 can be continuously flipped in the coating process. The foregoing embodiments are only used to illustrate the technical scheme of the utility model, rather than limit it; although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that the technical scheme recorded in the foregoing embodiments can be modified, or some technical features can be replaced equivalently; and these modifications or replacements will not make the essence of the corresponding technical scheme deviate from the protection scope of the technical scheme of the utility model.

Claims

1. A silicon carbide seed crystal coating apparatus comprising a housing (1), characterized in that, The inside of the box (1) is fixedly connected with a support plate (2), the surface of the support plate (2) is fixedly connected with a turnover mechanism (3), the outside of the turnover mechanism (3) is fixedly connected with a placing table (4), the turnover mechanism (3) is convenient for driving the placing table (4) to overturn, the inside of the placing table (4) is rotatably connected with a clamping mechanism (5), the surface of the placing table (4) is placed with a silicon carbide wafer (6), and the clamping mechanism (5) is convenient for clamping the silicon carbide wafer (6).

2. The apparatus for coating silicon carbide seeds as claimed in claim 1, wherein The turnover mechanism (3) comprises a cylinder (301) fixedly connected to the surface of the support plate (2), a piston rod of the cylinder (301) is fixedly connected with a sliding block (302), one side of the sliding block (302) is fixedly connected with a rack (303), the outside of the rack (303) is slidably connected with a guide block (304), the upper side of the rack (303) is engaged with a gear (305), one side of the gear (305) is fixedly connected with a rotating shaft (306), the outside of the rotating shaft (306) is rotatably connected with a fixed block (307), and the placing table (4) is fixedly connected to the outside of the rotating shaft (306).

3. The apparatus of claim 1, wherein the apparatus further comprises a seed crystal holder configured to hold the seed crystal, and a seed crystal heater configured to heat the seed crystal. The clamping mechanism (5) comprises a positive and negative screw rod (501) rotatably connected to the inside of the placing table (4), the outside of the positive and negative screw rod (501) is screw-connected with a threaded block (502), one side of the two threaded blocks (502) is fixedly connected with a group of clamping heads (503), the outside of the two groups of clamping heads (503) is sleeved with an anti-skid sleeve (504), and one end of the positive and negative screw rod (501) is fixedly connected with a rotating handle (505).

4. The apparatus of claim 2, wherein the seed crystal is a silicon carbide seed crystal. The two fixed blocks (307) are fixedly connected to the surface of the support plate (2).

5. The apparatus of claim 3, wherein the seed crystal is a silicon carbide seed crystal. The surface of the placing table (4) is provided with a sliding groove, and the two threaded blocks (502) are slidably connected in the sliding groove.

6. The apparatus of claim 1, wherein the apparatus further comprises a seed crystal holder configured to hold the seed crystal, and a seed crystal heater configured to heat the seed crystal. The top of the box (1) is rotatably connected with a box cover (7), and the surface of the box cover (7) is fixedly connected with a handle (8).

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