Sealing detection auxiliary tool and sealing detection device for gas distribution disc

Abstract

The utility model relates to a sealing detection auxiliary tool and a sealing detection device for a gas distribution plate, in particular to the field of gas tightness detection, and the sealing detection auxiliary tool for the gas distribution plate comprises a hollow pipe body matched with the end part of the gas distribution plate; the hollow connecting end is connected with the hollow pipe body through a locking structure; the length of the hollow pipe body is smaller than that of the end part of the gas distribution plate; a sealing ring is arranged at the end part of the gas distribution plate between the hollow connecting end and the hollow pipe body; and the inner diameter of the hollow pipe body is the same as the outer diameter of the end part of the gas distribution disc. According to the sealing detection auxiliary tool provided by the utility model, the hollow pipe body, the hollow connecting end and the sealing ring which are in specific connection design are adopted, so that the hollow connecting end can abut against the sealing ring when the sealing detection auxiliary tool is used, the sealing performance of the sealing detection auxiliary tool is enhanced, and the accuracy of sealing detection is improved; therefore, the gas distribution disc is ensured to have a good use effect.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of air tightness detection, specifically relates to a kind of sealing detection auxiliary tool and sealing detection device for gas distribution tray. BACKGROUND

[0002] At present, chemical vapor deposition technology is widely used in electronic, optoelectronic, catalysis and energy fields, especially in semiconductor industry, chemical vapor deposition is used to prepare silicon wafer and other electronic devices.

[0003] CN113584465A discloses a kind of chemical vapor deposition equipment, belongs to semiconductor technical field.The chemical vapor deposition equipment includes reaction cavity, gas supply component, gas distribution tray, gas control component.Among them, reaction cavity has multiple load platforms for carrying wafer.Gas supply component is used to provide reaction gas.Gas distribution tray, the number is multiple and is set up one by one with multiple load platforms one by one.Gas control component, the number is multiple and is set up one by one with multiple gas distribution trays one by one.Gas distribution tray is connected between gas supply component, by corresponding gas control component.

[0004] Specifically, in deposition process, in chemical vapor deposition process, gas distribution tray is located above wafer, and corresponding material is obtained by distributing reaction deposition to input gas.

[0005] As CN102534559A discloses a kind of inlet nozzle for metal organic vapor deposition equipment, including: multiple inlet pipelines;A upper plate, the upper plate is disc-shaped;A shell body, the shell body is cylindrical, located below the upper plate;A lower plate, the lower plate is disc-shaped, located below the shell body;Gas distribution pipeline, located on the upper layer board, inside the shell body, multiple inlet pipelines pass through upper plate and are connected with gas distribution pipeline.

[0006] And in deposition process, the sealing property of gas distribution tray can affect the stability of deposition process, when the sealing property of gas distribution tray is not good, it can lead to uneven coating, and further affect the use of product.Therefore, before the use of gas distribution tray, it is usually necessary to carry out air tightness detection, however, when sealing detection is carried out for gas spraying disc with component series, suitable tooling needs to be made according to product size, there is poor applicability of air tightness detection tooling, further leading to the defect of poor economy. UTILITY MODEL CONTENTS

[0007] In view of the problems existing in prior art, the purpose of the utility model is to provide a kind of sealing detection auxiliary tool and sealing detection device for gas distribution tray, to solve the defect that when sealing detection is carried out for gas spraying disc with component series, suitable tooling needs to be made according to product size, there is poor applicability of air tightness detection tooling, further leading to poor economy.

[0008] To achieve this purpose, the utility model discloses the following technical scheme:

[0009] First, the utility model provides a kind of sealing detection auxiliary tool for gas distribution tray, and the sealing detection auxiliary tool for gas distribution tray includes:

[0010] Hollow pipe body matched with gas distribution tray end portion;

[0011] Hollow connecting end connected with the hollow pipe body by locking structure;

[0012] The length of the hollow pipe body is less than the length of the gas distribution tray end portion;

[0013] Sealing ring is arranged on the gas distribution tray end portion between the hollow connecting end and the hollow pipe body;

[0014] The inner diameter of the hollow pipe body is same with the outer diameter of the gas distribution tray end portion.

[0015] The sealing detection auxiliary tool provided by the utility model can make hollow connecting end abut against sealing ring when using, so as to enhance the sealing property of sealing detection auxiliary tool, improve the accuracy of sealing detection, so as to ensure that gas distribution tray has good use effect.

[0016] As the preferred technical scheme of the utility model, the hollow connecting end includes connection area, transition area, necking area and enlarged area arranged in sequence.

[0017] As the preferred technical scheme of the utility model, the connection area is connected with hollow pipe body by locking structure.

[0018] As the preferred technical scheme of the utility model, the inner diameter of the connection area is greater than the outer diameter of the gas distribution tray end portion.

[0019] As the preferred technical scheme of the utility model, sealing ring is arranged in transition area.

[0020] As the preferred technical scheme of the utility model, the sealing ring is interference fit with gas distribution tray end portion.

[0021] As the preferred technical scheme of the utility model, the inner diameter of the necking area is less than the inner diameter of the gas distribution tray end portion.

[0022] As the preferred technical scheme of the utility model, the outer diameter of the sealing ring is greater than the inner diameter of the necking area;

[0023] The inner diameter of the enlarged area is greater than the inner diameter of the necking area.

[0024] As the preferred technical scheme of the utility model, the expansion area is connected with the sealing detection equipment.

[0025] In the second aspect, the utility model provides a sealing detection device for gas distribution tray, sealing detection device for gas distribution tray includes sealing detection equipment and sealing detection auxiliary tool as first aspect.

[0026] Compared with prior art scheme, the utility model has the following beneficial effects:

[0027] The sealing detection auxiliary tool provided by the utility model can make the hollow connecting end abut against the sealing ring after being locked with the hollow pipe body, thereby enhancing the sealing property of the sealing detection auxiliary tool, improving the accuracy of sealing detection, thereby ensuring that the gas distribution tray has good use effect, and since the outer diameters of the gas inlet pipes of various gas distribution trays with belt members, i.e., the outer diameters of the end portions of the gas distribution trays, are the same, the tool can be used for sealing property test operation and has universality, i.e., good applicability, thereby significantly reducing the manufacturing cost of the sealing detection auxiliary tool. BRIEF DESCRIPTION OF DRAWINGS

[0028] Figure 1 It is the schematic view of the sealing detection auxiliary tool for gas distribution tray provided by the utility model embodiment.

[0029] In the figure: 100-gas distribution tray, 200-hollow pipe body, 300-sealing ring, 410-connection area, 420-transition area, 430-necking area, 440-expansion area.

[0030] The utility model will be further described in detail below. However, the following examples are only simple examples of the utility model, and do not represent or limit the protection scope of the utility model, and the protection scope of the utility model is subject to the claims. DETAILED DESCRIPTION

[0031] In order to better illustrate the utility model and facilitate understanding of the technical scheme of the utility model, the typical but non-limiting embodiments of the utility model are as follows:

[0032] The embodiment provides a sealing detection auxiliary tool for gas distribution tray, as shown in the figure, the sealing detection auxiliary tool for gas distribution tray includes: Figure 1

[0033] The hollow pipe body 200 cooperates with the end portion of the gas distribution tray 100.

[0034] The hollow connecting end is connected with the hollow pipe body 200 through the locking structure.

[0035] ​The length of the hollow tube body 200 is less than the length of the end of the gas distribution plate 100.

[0036] A sealing ring 300 is arranged on the end of the gas distribution plate 100 between the hollow connecting end and the hollow tube body 200.

[0037] The inner diameter of the hollow tube body 200 is the same as the outer diameter of the end of the gas distribution plate 100.

[0038] In this embodiment, the gas distribution plate 100 refers to a plate used for distributing, mixing, transporting and supplying reaction gas in the chemical vapor deposition process. The end of the gas distribution plate 100 is used for gas inlet, and the gas outlet holes arranged on the surface of the gas distribution plate 100 are used for uniformly distributing the reaction gas to promote deposition. Therefore, the sealing property of the gas distribution plate 100 will obviously affect the distribution of the gas during use, and uneven distribution of the gas will significantly affect the result of the chemical vapor deposition.

[0039] In this embodiment, the hollow tube body 200 refers to a hollow structure with a certain wall thickness. The size of the hollow structure of the hollow tube body 200 is the same as the size of the end of the gas distribution plate 100, so as to ensure tight connection and avoid gas leakage.

[0040] Further, the hollow tube body 200 can be optionally provided with a structure such as a lug for easy disassembly, so as to facilitate efficient disassembly of the sealing detection auxiliary tool after detection.

[0041] The hollow connecting end comprises a connecting area 410, a transition area 420, a necking area 430 and an expanding area 440 arranged in sequence.

[0042] The connecting area 410 is connected to the hollow tube body 200 through a locking structure.

[0043] In this embodiment, the connecting area 410 is provided with a locking structure connected to the hollow tube body 200. The locking structure refers to the locking structure of adjacent components such as threads and buckles. The shape of the threads used includes triangular threads or rectangular threads.

[0044] When the locking structure is selected as a thread, it is arranged on the inner side of the connecting area 410. When a buckle is selected, it is arranged on the outer side of the connecting area 410.

[0045] The inner diameter of the connecting area 410 is greater than the outer diameter of the end of the gas distribution plate 100.

[0046] In the embodiment, the size relationship between the inner diameter of the connecting area 410 and the outer diameter of the end of the gas distribution plate 100 is controlled to ensure that the end of the gas distribution plate 100, the hollow pipe body 200 and the hollow connecting end are connected and matched to achieve good matching effect.

[0047] The transition area 420 is provided with a sealing ring 300.

[0048] In the embodiment, after the sealing ring 300 is provided, the end of the gas distribution plate 100, the hollow pipe body 200 and the hollow connecting end are connected and matched, and the sealing ring 300 is pressed by the hollow pipe body 200 and the hollow connecting end to form a seal in the area of the sealing ring 300, thereby ensuring the accuracy of the sealing detection.

[0049] The sealing ring 300 is in interference fit with the end of the gas distribution plate 100.

[0050] In the embodiment, the sealing ring 300 is in interference fit with the end of the gas distribution plate 100, which can ensure the close contact of the contact surface, thereby improving the sealing effect.

[0051] In the embodiment, the sealing ring 300 refers to a sealing structure that can prevent the leakage or entry of liquids, gases and solid particles and other substances in mechanical structures. It is compressed and deformed to fill the gap and achieve sealing. The commonly used material is a rubber sealing ring 300, such as a V-shaped sealing ring 300, an O-shaped sealing ring 300 and other sealing rings 300 commonly used in the art.

[0052] The inner diameter of the necked-down area 430 is less than the inner diameter of the end of the gas distribution plate 100.

[0053] The outer diameter of the sealing ring 300 is greater than the inner diameter of the necked-down area 430.

[0054] In the embodiment, the size relationship between the necked-down area 430 and the sealing ring 300 is controlled to facilitate the close contact of the sealing ring 300 and the necked-down area 430, thereby improving the sealing effect, avoiding the leakage of auxiliary tooling during testing, and further improving the accuracy of sealing detection.

[0055] The inner diameter of the enlarged area 440 is greater than the inner diameter of the necked-down area 430.

[0056] The enlarged area 440 is connected to the sealing detection equipment.

[0057] In the embodiment, the connection of the enlarged area 440 to the sealing detection equipment means that the enlarged area 440 is connected to the sealing detection equipment through the pipe material using the aforementioned fastening structure or fastener, and the sealing detection equipment is used to detect the sealing performance of the gas distribution plate 100 by means of inflation or air extraction.

[0058] In the embodiment, the hollow pipe body 200 in the sealing detection auxiliary tool can be obtained by machining, such as turning, milling, drilling and milling, grinding and the like, or can be obtained by pre-molding during material preparation and then by fine machining.

[0059] In the embodiment, the metal material refers to stainless steel, copper and copper alloy, aluminum and aluminum alloy and the like.

[0060] In the embodiment, the stainless steel used is, for example, 201 stainless steel, 301 stainless steel, 303 stainless steel, 316 stainless steel, 408 stainless steel, 410 stainless steel and the like.

[0061] In the embodiment, the copper alloy used is, for example, H65 brass, H62 brass, HSn70-1 tin brass, HFe59-1-1 iron brass, C70600 copper-nickel alloy and the like.

[0062] In the embodiment, the aluminum alloy used is, for example, 1060 aluminum alloy, 2024 aluminum alloy, 5052 aluminum alloy and the like.

[0063] In the embodiment, the high polymer material used is, for example, polyethylene, polypropylene, polyvinyl chloride, organic glass and the like.

[0064] In the embodiment, the materials corresponding to the connecting area 410, the transition area 420, the necking area 430 and the enlarged area 440 in the hollow connecting end can be selected and combined as metal materials or high polymer materials, for example, the connecting area 410 corresponds to a metal material, the transition area 420 corresponds to a high polymer material, the necking area 430 corresponds to a metal material, and the enlarged area 440 corresponds to a high polymer material, or the connecting area 410 corresponds to a metal material, the transition area 420 corresponds to a metal material, the necking area 430 corresponds to a high polymer material, and the enlarged area 440 corresponds to a high polymer material, which can be connected by using a conventional connection method in the art, such as adhesion.

[0065] Further, the utility model provides a kind of sealing detection device for gas distribution disc 100, and the sealing detection device for gas distribution disc 100 includes sealing detection equipment and aforementioned sealing detection auxiliary tool.

[0066] In the utility model, sealing detection equipment refers to the equipment that can be inflated or pumped by sealing detection auxiliary tool to gas distribution disc, simultaneously can detect gas pressure, and the accessory of analyzing and detecting sensing leakage gas, to realize sealing detection to gas distribution disc further.

[0067] Further, the utility model provides a kind of using process of aforementioned sealing detection auxiliary tool for gas distribution disc 100, specifically as follows:

[0068] The hollow pipe body 200 is sleeved on the end of the gas distribution plate 100 of the series of gas distribution plates with belt members, then the sealing ring 300 is arranged on the end of the gas distribution plate 100, and then the hollow connecting end is locked with the hollow pipe body 200 through the locking structure, at this time, the sealing ring 300 is pressed and extruded on the end of the gas distribution plate 100 and the inner wall of the hollow connecting end, so as to play a sealing effect, at this time, the hollow connecting end is only needed to be connected with the detection equipment to carry out the sealing detection.

[0069] The detection process can select the inflation or deflation form to detect the air tightness, the inflation is, for example, the helium gas and the like is injected into the gas distribution plate 100 as a mark gas, the inflation is to a set pressure, whether the helium gas leaks in the detection environment, and then the gas distribution plate 100 can be confirmed to have good sealing performance, if the helium leaks in the detection environment, the sealing performance of the gas distribution plate 100 does not meet the requirements, if there is no helium leakage in the detection environment, the gas distribution plate 100 reaches the required sealing performance.

[0070] The sealing detection auxiliary tool provided by the utility model can make the hollow connecting end abut against the sealing ring 300 after being locked with the hollow pipe body 200, so as to enhance the sealing performance of the sealing detection auxiliary tool, improve the accuracy of the sealing detection, and ensure that the gas distribution plate 100 has good use effect, meanwhile, since the outer diameters of the gas inlet pipes of various gas distribution plates with belt members, that is, the ends of the gas distribution plates 100, are the same, the tool can be used for sealing performance test operation and has universality, that is, good applicability, and the manufacturing cost of the sealing detection auxiliary tool is significantly reduced.

[0071] The preferred embodiments of the utility model are described in detail above, but the utility model is not limited to the specific details in the above embodiments, within the technical concept range of the utility model, the technical scheme of the utility model can be variously modified, and these simple modifications all belong to the protection range of the utility model.

[0072] In addition, it should be noted that various specific technical features described in the above specific embodiments can be combined in any suitable manner without contradiction, and in order to avoid unnecessary repetition, the utility model will not further describe various possible combination manners.

[0073] In addition, various different embodiments of the utility model can also be combined arbitrarily, as long as they do not deviate from the idea of the utility model, and they should also be regarded as the disclosed content of the utility model.

Claims

1. A seal detection aid tool for a gas distribution plate, characterized by, The sealing detection auxiliary tool of the gas distribution plate comprises: a hollow pipe body matched with the end of the gas distribution plate; a hollow connecting end connected with the hollow pipe body through a locking structure; the length of the hollow pipe body is less than the length of the end of the gas distribution plate; a sealing ring is arranged on the end of the gas distribution plate between the hollow connecting end and the hollow pipe body; the inner diameter of the hollow pipe body is the same as the outer diameter of the end of the gas distribution plate.

2. The seal detection aid tool for a gas distribution plate of claim 1, wherein, The hollow connecting end comprises a connecting area, a transition area, a necking area and an expanding area arranged in sequence.

3. The seal detection aid tool for a gas distribution plate of claim 2, wherein, The connecting area is connected with the hollow pipe body through the locking structure.

4. The seal detection aid tool for a gas distribution plate of claim 2, wherein, The inner diameter of the connecting area is greater than the outer diameter of the end of the gas distribution plate.

5. The seal detection aid tool for a gas distribution plate of claim 2, wherein, A sealing ring is arranged in the transition area.

6. The seal detection aid tool for a gas distribution plate of claim 5, wherein, The sealing ring is interference-fitted with the end of the gas distribution plate.

7. The seal detection aid tool for a gas distribution plate of claim 2, wherein, The inner diameter of the necking area is less than the inner diameter of the end of the gas distribution plate.

8. The seal detection aid tool for a gas distribution plate of claim 5, wherein, The outer diameter of the sealing ring is greater than the inner diameter of the necking area. The inner diameter of the expanding area is greater than the inner diameter of the necking area.

9. The seal detection aid tool for a gas distribution plate of claim 2, wherein, The expanding area is connected with a sealing detection device.

10. A seal detection device for a gas distribution plate, characterized by The sealing detection device for the gas distribution plate comprises a sealing detection device and the sealing detection auxiliary tool according to any one of claims 1-9.

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