Silicon wafer supporting device of gluing developing machine

Abstract

The utility model discloses a silicon wafer supporting device of a gluing developing machine, which comprises a supporting base, a movable column is slidably connected in the supporting base, the top end of the movable column is fixedly connected with a fixed ring, an adjusting structure is arranged in the fixed ring, a limiting structure is rotatably connected on the fixed ring, a sliding groove is formed in the fixed ring, and the sliding groove is connected with the movable column. And the limiting structure is slidably connected into the sliding groove, the limiting structure comprises a plurality of limiting blocks and a rotating disc, and guide rods are fixedly connected to the upper portions of the limiting blocks. According to the utility model, the fixing ring, the limiting structure and the sliding chute are arranged, and the silicon wafers in large-size and small-size intervals can be positioned through the matching among the guide rod, the turntable and the arc-shaped groove, so that the stability of the silicon wafers in all sizes in the gluing and developing process is ensured, the overall quality and consistency of products are improved, and the production efficiency is improved. The frequency of part replacement and adjustment of equipment is reduced, and the flexibility of the bracket device is guaranteed.

Description

TECHNICAL FIELD

[0001] The utility model relates to chip processing technical field, concretely is a silicon wafer support device of gluing developing machine. BACKGROUND

[0002] With the rapid development of semiconductor technology, the role of the gluing developing machine in the integrated circuit manufacturing process is increasingly important. The gluing developing machine is mainly used for uniformly coating photoresist on the silicon wafer and developing to ensure the accuracy of the subsequent photolithography process. The silicon wafer support device is a key component of the gluing developing machine, which is responsible for carrying the silicon wafer and ensuring the stability of the silicon wafer during the gluing and developing process.

[0003] Some chip processing technical field utility model patents are disclosed in the prior art, one of which is a silicon wafer support device of a gluing developing machine with the application number CN202222928795.5. The silicon wafer support device is installed on the execution end of a silicon wafer transfer robot. The silicon wafer support device includes a support ring fixed to the execution end. The support ring is open. At least two layers of mounting surfaces are provided on the support ring. Each mounting surface forms a step. At least three support blocks are installed on each mounting surface. Each support block has a support piece at the bottom for supporting the silicon wafer. Each support block has a positioning circular arc surface for positioning the edge of the silicon wafer. The positioning circular arc surfaces of the support blocks on the same layer of mounting surfaces are on the same positioning circle. The positioning circles of different layers are concentrically arranged. This device can support different sizes of silicon wafers, eliminating the need to replace the support ring. It can accurately position the silicon wafer, improving accuracy and efficiency.

[0004] However, the above-mentioned method has the following defects in actual use: Although it can position different sizes of silicon wafers, it can only position three specific sizes of silicon wafers. It cannot accurately support and position all silicon wafers within the size range, reducing the flexibility of the support device. UTILITY MODEL CONTENTS

[0005] The utility model aims to provide a silicon wafer support device for a gluing developing machine to solve the problems raised in the background technology.

[0006] To achieve the above object, the utility model provides the following technical scheme: A silicon wafer support device of gluing developing machine, including support base, the support base is connected with the moving column in sliding, the top fixed connection of moving column has the fixed ring, be equipped with adjusting structure in the fixed ring, the fixed ring is rotatably connected with the limiting structure on, the fixed ring is equipped with the sliding slot, the limiting structure is connected in sliding in the sliding slot, the limiting structure includes a plurality of limit blocks and carousel, the upper fixed connection of limit block has the guide rod, the carousel is equipped with a plurality of arc grooves, the lower of limit block is equipped with the lug.

[0007] As further preferred of the technical scheme, the outer surface of the support base is fixedly connected with a supporting leg, and the limit block is rotatably connected above the fixed ring.

[0008] As further preferred of the technical scheme, the guide rod is slidably connected in the arc groove, and the lug below the limit block is slidably connected in the sliding slot.

[0009] As further preferred of the technical scheme, the adjusting structure includes a gear one and a gear two, the gear two is rotatably connected above the fixed ring, and the carousel is fixedly connected in the gear two.

[0010] As further preferred of the technical scheme, the gear one is rotatably connected in the fixed ring, and the lower of the gear one is fixedly connected with a motor.

[0011] As further preferred of the technical scheme, the gear one is engaged with the gear two, and the motor drives the gear one to reverse.

[0012] As further preferred of the technical scheme, a plurality of mounting holes are formed in the moving column, a bolt is arranged in the support base, and the support base is threadedly connected with the moving column through the bolt.

[0013] The utility model provides a kind of silicon wafer support device of gluing developing machine, with the following beneficial effects:

[0014] (1) the utility model is through being provided with fixed ring, limiting structure and sliding slot, carousel is rotated above the fixed ring by gear two, guide rod is moved in arc groove, limit block is moved in sliding slot by the action of guide rod, so that limit block can be expanded to maximum size after sliding, silicon wafer in size interval is placed above the fixed ring, limit block is positioned with silicon wafer after recovery, the support device is cooperated between guide rod, carousel and arc groove, so that it can be positioned to silicon wafer in large size and small size interval, ensure the stability of all size silicon wafer in gluing developing process, improve the overall quality and consistency of product, reduce the frequency of equipment replacement parts and adjustment, guarantee the flexibility of the support device.

[0015] (2)The utility model discloses a adjusting structure is set up, through the motor drive gear one clockwise rotation, because gear two is engaged with gear one, gear two then will drive the turntable rotation in the top of fixed ring, make adjusting structure can drive the turntable in the top of fixed ring and carry out positive and negative rotation, avoid the phenomenon that the silicon wafer appears loose in the process of positioning. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 It is the three-dimensional structure schematic diagram of the utility model;

[0017] Figure 2 It is the three-dimensional structure schematic diagram of the utility model's limiting structure;

[0018] Figure 3 It is the three-dimensional structure schematic diagram of the utility model's fixed ring;

[0019] Figure 4 It is the three-dimensional structure schematic diagram of the utility model's Figure 1 Amplification structure schematic diagram of place A;

[0020] In the drawing: 1, support base;2, moving column;3, fixed ring;4, adjusting structure;401, gear one;402, gear two;403, motor;5, limiting structure;501, limiting block;502, guide rod;503, turntable;504, arc slot;6, sliding slot;7, mounting hole;8, bolt;9, supporting leg. DETAILED DESCRIPTION

[0021] The technical scheme in the embodiments of the utility model will be described clearly and completely below in conjunction with the drawings in the embodiments of the utility model.

[0022] The utility model provides technical scheme: as Figure 1 And Figure 4 Shown, in the embodiment, a silicon wafer support device of gluing developing machine, including support base 1, support base 1 in sliding connection has moving column 2, and the top of moving column 2 is fixedly connected with fixed ring 3, and fixed ring 3 is equipped with adjusting structure 4 in, and fixed ring 3 is rotatably connected with limiting structure 5, and fixed ring 3 is equipped with sliding slot 6, and limiting structure 5 is slidably connected in sliding slot 6, and limiting structure 5 includes several limiting blocks 501 and turntable 503, and the top of limiting block 501 is fixedly connected with guide rod 502, and several arc slots 504 are set up in turntable 503, and the lower portion of limiting block 501 is equipped with lug.

[0023] As Figure 1 、 Figure 2 And Figure 4As shown, the outer surface of the support base 1 is fixedly connected with the supporting leg 9, the limiting block 501 is rotatably connected above the fixed ring 3, the guide rod 502 is slidably connected in the arc-shaped groove 504, and the protrusion below the limiting block 501 is slidably connected in the sliding groove 6.

[0024] By arranging the sliding groove 6, when the rotating disc 503 rotates, the guide rod 502 slides in the arc-shaped groove 504, and the protrusion below the limiting block 501 moves in the sliding groove 6, so that the sliding groove 6 guides the movement of the limiting block 501, avoiding the phenomenon of jamming of the limiting block 501 during movement.

[0025] As shown, Figure 2 The adjusting structure 4 comprises a gear one 401 and a gear two 402, the gear two 402 is rotatably connected above the fixed ring 3, the rotating disc 503 is fixedly connected in the gear two 402, the gear one 401 is rotatably connected in the fixed ring 3, the gear one 401 is fixedly connected below with the motor 403, the gear one 401 is engaged with the gear two 402, the motor 403 drives the gear one 401 to reverse, a plurality of mounting holes 7 are arranged in the moving column 2, the support base 1 is provided with the bolt 8, and the support base 1 is threadedly connected with the moving column 2 through the bolt 8.

[0026] By arranging the mounting hole 7 and the bolt 8, the moving column 2 can be clamped into the support base 1, then the support base 1 is inserted into the corresponding mounting hole 7 of the moving column 2 through the bolt 8, and then the moving column 2 is fixed with the support base 1 through the bolt 8, so that the supporting device can realize the height adjustment function, facilitating the processing of the silicon wafer according to the actual situation, and ensuring the applicability of the supporting device.

[0027] The utility model provides a kind of silicon wafer supporting device of gluing developing machine, specific working principle is as follows:

[0028] When the supporting device is used, the moving column 2 can be clamped into the support base 1, then the support base 1 is inserted into the corresponding mounting hole 7 of the moving column 2 through the bolt 8, and then the moving column 2 is fixed with the support base 1 through the bolt 8, so that the supporting device can realize the height adjustment function, facilitating the processing of the silicon wafer according to the actual situation, and ensuring the applicability of the supporting device.

[0029] Although the embodiments of the present application have been shown and described, it is to be understood that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present application, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A silicon wafer support device for a spin coater, comprising a support base (1), characterized in that: The support base (1) is slidably connected with a moving column (2), the top end of the moving column (2) is fixedly connected with a fixed ring (3), the fixed ring (3) is provided with an adjusting structure (4), the fixed ring (3) is rotatably connected with a limiting structure (5), the fixed ring (3) is provided with a sliding groove (6), the limiting structure (5) is slidably connected in the sliding groove (6), the limiting structure (5) comprises a plurality of limiting blocks (501) and a rotating disc (503), the upper portion of the limiting block (501) is fixedly connected with a guide rod (502), the rotating disc (503) is provided with a plurality of arc-shaped grooves (504), and the lower portion of the limiting block (501) is provided with a protruding block.

2. The wafer holder of claim 1 wherein: The outer surface of the support base (1) is fixedly connected with a supporting leg (9), and the limiting block (501) is rotatably connected above the fixed ring (3).

3. The wafer holder of claim 1 wherein: the wafer holder is a part of a spin coater. The guide rod (502) is slidably connected in the arc-shaped groove (504), and the protruding block below the limiting block (501) is slidably connected in the sliding groove (6).

4. The wafer holder of claim 1 wherein: The adjusting structure (4) comprises a gear one (401) and a gear two (402), the gear two (402) is rotatably connected above the fixed ring (3), and the rotating disc (503) is fixedly connected in the gear two (402).

5. A silicon wafer support device for a coating and developing machine according to claim 4, characterized in that: The gear one (401) is rotatably connected in the fixed ring (3), and the lower portion of the gear one (401) is fixedly connected with a motor (403).

6. The wafer holder assembly of claim 5 wherein: The gear one (401) is engaged with the gear two (402), and the motor (403) drives the gear one (401) to reverse.

7. The wafer holder of claim 1 wherein: A plurality of mounting holes (7) are formed in the moving column (2), the support base (1) is provided with a bolt (8), and the support base (1) is threadedly connected with the moving column (2) through the bolt (8).

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