Tank type cleaning equipment

Abstract

The utility model belongs to the technical field of groove type wet process, and particularly relates to groove type cleaning equipment, which comprises a pipeline area and a processing area, and further comprises: 1) a spacing structure which is arranged at the adjoining part of the processing area and the pipeline area and spatially separates the processing area and the pipeline area; an air draft passage of the air draft system sequentially passes through a process area air inlet, a process area vent hole, a vertical exhaust channel and an air draft valve, and the process area air inlet, the process groove exhaust position, the process area vent hole and the air draft valve are arranged from bottom to top in the vertical direction. The air draft passage extends from bottom to top, so that U-shaped bypassing is avoided, the overall length of the air draft passage is shortened, and the workload of the air draft valve is reduced; the air draft valve only acts on the vertical air exhaust channel, so that the air draft range is concentrated, and the working efficiency is higher; pressure difference is generated between the interior and the exterior of the vertical exhaust channel, and the extraction effect is more uniform in the space.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the technical field of tank type wet process, specifically relates to a tank type cleaning equipment. BACKGROUND

[0002] The tank type wet process of silicon wafer includes multiple pickling and alkali washing steps in the process tank, and corresponding acidic waste gas or alkaline waste gas is accumulated in the environment around the process tank. The waste gas can contaminate the silicon wafer product and the equipment itself, so the tank type cleaning equipment needs to be equipped with an air extraction system for air exchange inside the equipment. Chinese patent CN 220160853U discloses an air extraction system of a tank type cleaning equipment, which extracts the waste gas generated by the process tank through a sealed tank base and an exhaust pipeline structure. The sealed tank base is arranged at the bottom of the process tank, and the exhaust pipeline structure includes a side air extraction pipeline on the side of the process tank and a vertical air extraction duct connected with the sealed tank base. After the waste gas is discharged from the side of the process tank, it diffuses vertically downward along the side air extraction pipeline, passes through the horizontal sealed tank base, reaches the other side of the process tank, and is finally discharged vertically upward from the vertical air extraction duct. In order to avoid other structures of the tank type cleaning equipment in space, the designed waste gas discharge path of the air extraction device is similar to a "U" type, which prolongs the length of the discharge path. This reduces the extraction efficiency of the air extraction valve, and on the other hand, increases the risk of waste gas crystallization in the pipeline. SUMMARY

[0003] Therefore, the utility model hopes to provide a tank type cleaning equipment equipped with an air extraction system, which can achieve short distance and high efficiency while avoiding other structures, and can also improve the extraction efficiency of the air extraction valve.

[0004] The utility model discloses the following technical scheme:

[0005] A tank type cleaning equipment, comprising a pipeline area and a process area, the process area comprising a process tank, the process tank being provided with a process tank exhaust; characterized in that the tank type cleaning equipment further comprises:

[0006] 1) a spacing structure arranged at the abutting portion of the process area and the pipeline area, which spatially separates the process area and the pipeline area; the spacing structure comprises a process area abutting member and a pipeline area abutting member arranged at intervals;

[0007] 2) an air extraction system, the air extraction path of the air extraction system sequentially passing through:

[0008] A) a process area air inlet, which is the starting point of the air extraction path;

[0009] B) a process area air vent arranged on the process area abutting member;

[0010] C) a vertical exhaust passage arranged between the process area abutment and the pipeline area abutment;

[0011] D) an exhaust valve in communication with the vertical exhaust passage, the exhaust valve being the terminal point of the exhaust passage;

[0012] The process area air inlet, the process tank exhaust, the process area vent, and the exhaust valve are arranged in vertical direction from bottom to top.

[0013] The exhaust passage extends from bottom to top, avoiding U-shaped detours, shortening the overall length of the exhaust passage, and reducing the working load of the exhaust valve; the exhaust valve only acts on the vertical exhaust passage, the extraction range is concentrated, and the working efficiency is higher; the gas in the vertical exhaust passage flows quickly, and the internal and external parts of the process area abutment generate a pressure difference, so that the exhaust gas dispersed at different heights above the process tank can be introduced into the vertical exhaust passage under the action of air pressure, and the extraction effect is more uniform.

[0014] As a preferred, the spacing structure is internally provided with a plurality of exhaust passage side plates, which cooperate with the process area abutment and the pipeline area abutment to form a limiting structure for the cross-sectional area of the vertical exhaust passage.

[0015] As a preferred, the exhaust system comprises a top exhaust passage; the top exhaust passage forms a communication structure between the exhaust valve and a plurality of the vertical exhaust passages.

[0016] The setting of the exhaust passage side plate limits and narrows the cross-sectional area of the vertical exhaust passage, divides a relatively large vertical exhaust passage into a plurality of narrowed vertical exhaust passages, so that the exhaust valve can concentrate and improve the extraction efficiency; in addition, the setting of the exhaust passage side plate saves the volume ratio of the vertical exhaust passage inside the spacing structure, and the spacing structure can be divided into a chamber that is not in communication with the exhaust gas environment, thereby expanding the available space of the spacing structure.

[0017] As a preferred, the exhaust system comprises a process area adjusting plate and a pair of adjusting rails;

[0018] The process area adjusting plate is clamped between the pair of adjusting rails and has a sliding track along the extending direction of the adjusting rails;

[0019] The process area adjusting plate forms different degrees of shielding states for the process area vent at different sliding positions.

[0020] As a preferred, the process area adjusting plate and the adjusting rail are arranged on the surface of the process area abutment on the side facing the pipeline area.

[0021] In order to strengthen the air volume control of the air draft system, the air volume adjusting device is arranged at the process area vent hole. Since a large number of process area vent holes are arranged on the process area abutment, the structural strength of the process area abutment may be reduced. The adjusting track is arranged to control the process area adjusting plate, which can strengthen the structure around the process area vent hole while limiting the path of the process area adjusting plate. The adjusting position is arranged on the side facing the pipeline area, so that the operator can clean and maintain the process area vent hole on the side of the pipeline area, thereby ensuring the operation safety.

[0022] Preferably, a plurality of detachable process area vent plates are arranged on the process area abutment, and the process area vent hole is arranged on the process area vent plate.

[0023] Preferably, the process area abutment is detachably connected to the spacing structure.

[0024] The vent holes are arranged on the process area vent plate, and the process area vent plate and the process area abutment are designed to be detachable. The hierarchical structure design allows the operator to selectively disassemble, clean and maintain the local area or the whole area where the process area vent hole is located according to the actual situation.

[0025] Preferably, the air draft system further comprises a pipeline area inlet and a pipeline area vent hole. The pipeline area inlet and the pipeline area vent hole are arranged from bottom to top in the vertical direction, and the pipeline area vent hole is arranged on the pipeline area abutment.

[0026] Preferably, the air draft system further comprises a pipeline area adjusting plate, which constitutes an adjusting structure for the ventilation area of the pipeline area vent hole.

[0027] Preferably, the air draft system further comprises a supplementary inlet arranged in the process area, and the position of the supplementary inlet is higher than the exhaust position of the process tank.

[0028] The utility model discloses a kind of tank cleaning equipment with high-efficiency air draft passage. Compared with prior art, the air draft passage of the utility model is arranged from bottom to top, shortens overall length, and the working efficiency of air draft valve is generally improved by the arrangement of vertical exhaust passage. The air draft passage of the utility model can be expanded into double-line design of process area and pipeline area, not only can extract process area exhaust gas but also can extract pipeline area exhaust gas, to prevent exhaust gas from leaking. The air draft passage of process area and pipeline area can be adjusted ventilation volume respectively. In addition, the utility model also has the design of easy maintenance and cleaning. Operator can adjust the air volume of process area vent hole in pipeline area, to ensure operation safety;Air draft structure is detachable, easy to clean clogged vent hole. BRIEF DESCRIPTION OF DRAWINGS

[0029] Figure 1Fig. 1 is a schematic diagram of an air extraction passage of a tank cleaning device;

[0030] Figure 2 Fig. 2 is a schematic diagram of the whole tank cleaning device from the perspective of a process zone abutment;

[0031] Figure 3a 、 Figure 3b Fig. 3 is a schematic diagram of a process zone abutment;

[0032] Figure 4 Fig. 4 is a schematic diagram of the whole tank cleaning device from the perspective of a piping zone abutment

[0033] Figure 5 Fig. 5 is a schematic diagram of a piping zone abutment. Figure 4 Fig. 6 is an enlarged schematic diagram of the spacing structure 1 shown in Fig. 5;

[0034] Figure 6 Fig. 7 is a schematic diagram of a piping zone abutment.

[0035] Legend:

[0036] 1 spacing structure, 101 process zone abutment, 102 piping zone abutment, 103 detachable connecting piece;

[0037] 210 process zone air inlet, 220 process zone air vent, 221 process zone air vent plate, 222 process zone adjusting plate, 223 adjusting rail, 230 air exhaust passage, 230 vertical air exhaust passage, 231 air exhaust passage side plate, 240 top air exhaust passage, 250 supplementary air inlet;

[0038] 310 piping zone air inlet, 320 piping zone air vent, 321 piping zone adjusting piece;

[0039] 4 air extraction valve;

[0040] 5 functional zone, 501 functional zone panel;

[0041] 6 process tank, 601 process tank air exhaust; DETAILED DESCRIPTION

[0042] The present utility model will be further described below in conjunction with the drawings and specific embodiments. Those skilled in the art will be able to realize the present utility model based on these descriptions. In addition, the embodiments of the present utility model involved in the following description are generally only a part of the embodiments of the present utility model, not all the embodiments. Therefore, based on the embodiments in the present utility model, all other embodiments obtained by those skilled in the art without creative labor shall belong to the scope of protection of the present utility model. EMBODIMENT

[0043] The embodiment first plans the space area of the tank cleaning equipment based on the device function.

[0044] Please refer to Figure 1 , the internal space of the tank cleaning equipment is divided into the pipeline area on the right side of the figure and the process area on the left side of the figure. The pipeline area mainly undertakes the functions of interaction, control, maintenance, etc., and is arranged with valves, pipelines, lines, etc. for adjusting process parameters. The process area mainly undertakes the function of wafer processing, and is mainly arranged with process tanks 6 loaded with working liquid required by specific processes. The working liquid will generate acidic or alkaline waste gas during storage or work, which is discharged from the process tank 6 through the process tank exhaust 601. Common waste gas such as HF has a density less than air and has a tendency to gather in the space above the process tank 6.

[0045] On the basis of the foregoing space division, the embodiment sets a physical spacing structure 1 to spatially separate the process area and the pipeline area.

[0046] Please refer to Figure 4 and Figure 5 , the spacing structure 1 includes a process area abutment 101 and a pipeline area abutment 102, the overall form of the process area abutment 101 and the pipeline area abutment 102 is similar to that of a partition, and the local form is deformed and adjusted. The process area abutment 101 and the pipeline area abutment 102 are arranged at intervals, and there is a buffer area between them.

[0047] After the process area and the pipeline area are clearly planned, the air extraction system of the process area is designed for air extraction path (hereinafter referred to as "air path"). Since the waste gas itself has the characteristics of low density and upward diffusion, the design first considers a straight air path from bottom to top.

[0048] Please refer to Figure 1 and 2 , the starting point of the air path is the process area air inlet 210, the process tank exhaust 601 is passed through in the middle, and the end point is the air extraction valve 4. The process area air inlet 210, the process tank exhaust 601, and the air extraction valve 4 are arranged in the vertical height direction in turn from bottom to top. The process area air inlet 210 is arranged at a position close to the bottom of the sidewall of the process area, and the air extraction valve 4 is arranged at the top of the tank cleaning equipment. The process tank 6 is designed with an open top, and the entire top surface is used as the process tank exhaust 601; in order to make the air path smooth, the height of the top surface of the process tank 6 is designed in the middle height area of the process area, at this time the tank body of the process tank 6 is also correspondingly in the lower area of the process area.

[0049] In the straight air path, the air extraction valve 4 directly extracts the waste gas in the process area, and the action area of the air extraction valve 4 is large, which will exist two problems: 1) the efficiency of extracting waste gas is low; 2) the effect of extracting waste gas is not uniform in space. Therefore, the air path planning needs to be further improved.

[0050] Referring to Figure 2 , Figure 3a and Figure 3b , the process area vent hole 220 is arranged on the process area abutting piece 101 of the spacing structure 1, and the vertical exhaust channel 230 is constructed by using the buffer area inside the spacing structure 1. The exhaust gas first passes through the vertical exhaust channel 230 and then is discharged from the exhaust valve 4. A plurality of process area vent holes 220 are distributed at different height positions, and the arrangement height of each process area vent hole 220 is higher than the height of the process tank exhaust position 601, so as to ensure that the process area vent hole 220 is located in the subsequent position of the process tank exhaust position 601 in the air path. At this time, the exhaust valve 4 only acts on the vertical exhaust channel 230, the extraction range is concentrated, and the efficiency is higher; the gas in the vertical exhaust channel 230 flows quickly, and the internal and external of the process area abutting piece 101 generates a pressure difference, so that the exhaust gas dispersed at different heights above the process tank 6 can be introduced into the vertical exhaust channel 230 under the action of air pressure, and the extraction effect is more uniform in space.

[0051] Referring to Figure 1 , the process area air inlet 210 is arranged in the region on the side of the process tank exhaust position 601 away from the process area vent hole 220, and the air path from the process area air inlet 210 to the process area vent hole 220 can fully pass through the process tank exhaust position 601, thereby improving the efficiency of exhaust gas transfer.

[0052] The optimized air path can fully utilize the gap or chamber structure originally existing in the tank cleaning equipment, and improve the extraction effect of the exhaust valve 4 on the exhaust gas.

[0053] In order to further improve the exhaust gas extraction efficiency, the number of process area vent holes 220 should be increased; but more process area vent holes 220 need to be matched with process area abutting pieces 101 with larger area, which leads to the increase of the width and internal space of the vertical exhaust channel 230, and reduces the working efficiency of the exhaust valve 4. The structure of the vertical exhaust channel 230 needs to be further optimized.

[0054] Referring to Figure 3a , Figure 3b, the process area vent holes 220 are divided into multiple groups, and the process area vent holes 220 in each group are arranged from dense to sparse from bottom to top, and the process area vent holes 220 in each group are arranged with intervals. The spacing structure 1 is additionally provided with an exhaust channel side plate 231, the exhaust channel side plate 231 is arranged with intervals according to the width of the process area vent holes 220 in each group, the space inside the spacing structure 1 is split, so that each group of process area vent holes 220 can cooperate with the exhaust channel side plate 231 to form a vertical exhaust channel 230 with a smaller cross-sectional area. The multiple vertical exhaust channels 230 are connected to the top exhaust channel 240 arranged at the top, and the top exhaust channel 240 is connected to the exhaust valve 4. The action area of the exhaust valve 4 is the top exhaust channel 240 and the multiple dispersed vertical exhaust channels 230.

[0055] Further, due to the existence of the inter-group spacing area between each group of process area vent holes 220, there is also a spacing space between the adjacent two vertical exhaust channels 230, and the side wall of the spacing space is formed by the exhaust channel side plate 231, the non-hole area of the process area abutting member 101 and the pipeline area abutting member 102. The spacing space is a chamber not polluted by exhaust gas, which can be used as a functional area 5.

[0056] In summary, the arrangement of the exhaust channel side plate 231 narrows the width of the vertical exhaust channel 230 on the one hand, so that the exhaust valve 4 can concentrate on the action and improve the extraction efficiency, and on the other hand, the space inside the spacing structure 1 is fully utilized, saving device space.

[0057] In order to strengthen the control of air volume, an air volume adjusting device is added at the process area vent hole 220.

[0058] Please refer to Figure 3b and Figure 5 , the process area adjusting plate 222 and the adjusting track 223 are additionally arranged in the vertical exhaust channel 230, and the process area adjusting plate 222 and the adjusting track 223 are arranged on the surface of the process area abutting member 101 facing the pipeline area. The adjusting track is arranged in pairs, the two ends of the process area adjusting plate are clamped between the adjusting tracks, and can slide back and forth along the direction of the adjusting track. When the process area adjusting plate slides to different positions, it will block the process area vent hole 220 to different degrees, and adjust the ventilation area and the ventilation volume of the process area vent hole. In this embodiment, the blocking degree of the process area adjusting plate 222 to the process area vent hole 220 is realized by the up-down sliding action of the process area adjusting plate 222, and the corresponding sliding track is controlled by the adjusting track 223. The adjusting track 223 is arranged vertically and is fixedly connected with the process area abutting member 101, and can also strengthen the structure of the process area abutting member 101.

[0059] After the required air volume is determined, the relative position of the process area adjusting plate 222 and the process area abutment 101 is fixed by fasteners or other detachable connection methods.

[0060] After the exhaust system runs for a long time, exhaust gas may crystallize and deposit on the surface of the process area vent hole 220. To facilitate cleaning and maintenance, the process area vent hole 220 can be provided on a modular device.

[0061] Please refer to Figure 3a and Figure 3b Each group of process area vent holes 220 is integrated into a process area vent plate 221. The process area abutment 101 is divided into several detachable units, which are connected to other parts of the spacing structure 1 through detachable connectors 103 at the bottom.

[0062] To further cover the entire area of the process area with the air path, a supplementary air inlet 250 is added to the process area. The supplementary air inlet 250 is arranged higher than the process tank exhaust 601, and a wind path is formed through the supplementary air inlet 250, the process area vent hole 220, the vertical exhaust channel 230, and the exhaust valve 4 in sequence. This wind path is mainly for exhaust gas that accumulates above the outside of the process tank 6, and the height difference between this part of exhaust gas and the process area vent hole 220 is small, so the cleaning effect of the air path from bottom to top is limited. In the preferred embodiment, the supplementary air inlet 250 is arranged at the top of the process area and away from the process area vent hole 220, and the wind path formed at this time and the air path from bottom to top complement each other in space, covering the entire area of the process area and improving the cleaning effect of the exhaust gas.

[0063] Since the vertical exhaust channel 230 is arranged between the process area abutment 101 and the pipeline area abutment 102, the exhaust valve 4 and the vertical exhaust channel 230 have the structural basis for simultaneously extracting the process area gas and the pipeline area gas.

[0064] Please refer to Figure 4 and Figure 6 The pipeline area abutment 102 is provided with a pipeline area vent hole 320, and the opposite side of the pipeline area vent hole 320 is provided with a pipeline area air inlet 310. A wind path from bottom to top is also formed in the pipeline area. Further, a ventilation volume adjusting structure is added at the pipeline area vent hole 320, which can adjust the opening degree of the pipeline area vent hole 320. In this embodiment, the pipeline area vent hole 320 is a longitudinally extending strip-shaped hole, and the pipeline area adjusting plate is attached to the side surface of the pipeline area abutment 102 facing the inside of the spacing structure. The pipeline area adjusting plate can slide left and right to form different degrees of shielding for the pipeline area vent hole 320, thereby adjusting the ventilation area of the pipeline area vent hole 320.

Claims

1. A slot cleaning device, comprising a pipeline area and a process area, a process tank (6) is arranged in the process area, the process tank (6) is provided with a process tank exhaust (601); characterized in that, The trough cleaning device further comprises: 1) a partition structure (1) arranged at the joint of the process area and the pipeline area, which spatially separates the process area and the pipeline area; the partition structure (1) comprises a process area joint part (101) and a pipeline area joint part (102) arranged in a spaced manner; 2) an air extraction system, the air extraction passage of the air extraction system sequentially passes through: A) a process area air inlet (210), which is the starting point of the air extraction passage; B) a process area vent hole (220) arranged on the process area joint part (101); C) a vertical exhaust passage (230) arranged between the process area joint part (101) and the pipeline area joint part (102); D) an air extraction valve (4) which is in communication with the vertical exhaust passage (230) and is the terminal point of the air extraction passage; The process area air inlet (210), the process tank exhaust port (601), the process area vent hole (220) and the air extraction valve (4) are arranged in a vertical direction from bottom to top.

2. The tank cleaning apparatus according to claim 1, characterized in that The partition structure (1) is internally provided with a plurality of exhaust passage side plates (231), which cooperate with the process area joint part (101) and the pipeline area joint part (102) to form a limiting structure for the cross-sectional area of the vertical exhaust passage (230).

3. The tank cleaning apparatus according to claim 2, characterized in that The air extraction system comprises a top exhaust passage (240); the top exhaust passage (240) forms a communication structure between the air extraction valve (4) and a plurality of vertical exhaust passages (230).

4. The tank cleaning apparatus of claim 1, wherein The air extraction system comprises a process area adjusting plate (222) and a pair of adjusting tracks (223); The process area adjusting plate (222) is clamped between the pair of adjusting tracks (223) and has a sliding track along the extending direction of the adjusting tracks (223); The process area adjusting plate (222) at different sliding positions constitutes different degrees of shielding state of the process area vent hole (220).

5. The tank cleaning apparatus according to claim 4, characterized in that The process area adjusting plate (222) and the adjusting track (223) are arranged on the surface of the process area joint part (101) towards the pipeline area.

6. The tank cleaning apparatus of claim 1, wherein A plurality of detachable process area vent plates (221) are arranged on the process area joint part (101), and the process area vent hole (220) is arranged on the process area vent plate (221).

7. The tank cleaning apparatus of claim 1, wherein The process area joint part (101) is detachably connected to the partition structure (1).

8. The tank cleaning apparatus of claim 1, wherein, The air extraction system further comprises a pipeline area air inlet (310) and a pipeline area vent hole (320); the pipeline area air inlet (310) and the pipeline area vent hole (320) are arranged in a vertical direction from bottom to top, and the pipeline area vent hole (320) is arranged on the pipeline area joint part (102).

9. The tank cleaning apparatus according to claim 8, characterized in that The air extraction system further comprises a pipeline area adjusting piece, which constitutes an adjusting structure for the ventilation area of the pipeline area vent hole (320).

10. The tank cleaning apparatus of claim 1, wherein, The air exhaust system further comprises a supplementary air inlet (250) arranged at the process area, and the supplementary air inlet (250) is arranged at a position higher than the position of the process tank exhaust (601).

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