Silicon carbide boat and processing device

Abstract

The utility model provides a silicon carbide boat and a processing device, and relates to the technical field of silicon carbide boats, the silicon carbide boat comprises a boat body, the inner wall of the boat body is provided with a plurality of slots, and the boat body is formed by cutting a silicon carbide pipe. The boat body is arranged, the boat body is formed by cutting the silicon carbide pipe, and the silicon carbide pipe can be directly purchased, so that compared with the prior art, the processing flow can be greatly simplified, the dependence on the high-temperature sintering condition is reduced, the energy consumption and the equipment investment are reduced, the processing flow is simplified, and the production period is shortened.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of silicon carbide boat, specifically, a kind of silicon carbide boat and processing device. BACKGROUND

[0002] In the traditional field of silicon carbide boat processing, the common manufacturing method is to mix silicon carbide powder with a specific adhesive, and then form it by high-temperature sintering process. This traditional silicon carbide boat processing requires sintering temperature to reach above 2000 degrees Celsius to ensure that the silicon carbide powder can fully fuse and form a dense boat body structure. However, such high-temperature sintering conditions cannot be met by all processing environments, as it has high requirements on equipment, energy consumption and operation technology. Therefore, we improve it and propose a silicon carbide boat and processing device. SUMMARY

[0003] The utility model aims at: the existing silicon carbide boat processing requires sintering temperature to reach above 2000 degrees Celsius to ensure that the silicon carbide powder can fully fuse and form a dense boat body structure, which has high requirements on equipment, energy consumption and operation technology.

[0004] In order to achieve the above-mentioned purpose of the invention, the utility model provides a silicon carbide boat and processing device to improve the above-mentioned problems.

[0005] The present application is as follows:

[0006] A silicon carbide boat, comprising a boat body, a plurality of slots are formed in the inner wall of the boat body, and the boat body is cut from a silicon carbide tube.

[0007] As a preferred technical solution of the present application, the outer surface of the boat body and the inner wall of the slot are provided with a protective coating,

[0008] As a preferred technical solution of the present application, the protective coating is aluminum oxide, yttrium oxide, silicon nitride or boron carbide, which is used to improve the wear resistance, corrosion resistance of the boat body, reduce the friction between the sample and the boat body, and optimize the heat conduction performance.

[0009] A silicon carbide boat processing device is used to process a silicon carbide boat, which comprises a support and a diamond sand grinding head for processing slots. The top of the support is provided with two sets of limiting molds, and a positioning mold is arranged between the two sets of limiting molds. The limiting mold and the positioning mold cooperate to limit the boat body during processing.

[0010] As a preferred technical solution of the present application, the limiting mold and the positioning mold are pasted on the support by glue wax.

[0011] As a preferred technical scheme of the present application, the limiting mold is provided with a limiting groove on the side close to the positioning mold.

[0012] As a preferred technical scheme of the present application, the limiting groove is matched with the outer contour of the boat body, so as to ensure that the boat body can be accurately aligned and fixed during processing.

[0013] As a preferred technical scheme of the present application, the support member comprises a first support plate connected between the bottom of the limiting mold and the positioning mold.

[0014] As a preferred technical scheme of the present application, the support member further comprises a workbench, and a support strip is installed on the top of the workbench and the bottom of the first support plate.

[0015] As a preferred technical scheme of the present application, the number of the support strips is multiple, and they are uniformly distributed on the bottom of the first support plate, so as to improve the stability of the first support plate and the limiting mold and the positioning mold arranged thereon.

[0016] Compared with the prior art, the present application has the following beneficial effects:

[0017] In the scheme of the present application:

[0018] In order to solve the problem in the prior art that the sintering temperature must reach above 2000 degrees Celsius to ensure that the silicon carbide powder can be fully fused and form a dense boat body structure, the device, energy consumption and operation technology are high, the present application sets the boat body which is cut from a silicon carbide pipe, and the silicon carbide pipe can be directly purchased, so compared with the prior art, the present application can greatly simplify the processing flow, reduce the dependence on high-temperature sintering conditions, reduce energy consumption and equipment investment, simplify the processing flow, and shorten the production cycle. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 The structure schematic view of the silicon carbide boat provided by the present application is provided.

[0020] Figure 2 The bottom structure schematic view of the silicon carbide boat provided by the present application is provided.

[0021] Figure 3 The structure schematic view of the silicon carbide boat processing device provided by the present application is provided.

[0022] Figure 4 The structure schematic view of the boat body processing provided by the present application is provided.

[0023] Indicated in the figure:

[0024] 1, boat body; 101, slot; 2, workbench; 201, support strip; 202, first support plate; 203, limiting die; 204, limiting groove; 205, positioning die; 3, diamond grinding head. DETAILED DESCRIPTION

[0025] In order to make the person skilled in the art better understand the technical scheme of the present application, the technical scheme in the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, not all. Based on the embodiments in the present application, all other embodiments obtained by the person skilled in the art without creative labor should belong to the scope of protection of the present application.

[0026] As described in the background, the traditional silicon carbide boat processing requires that the sintering temperature must reach more than 2000 degrees Celsius to ensure that the silicon carbide powder can be fully fused and form a dense boat body structure. However, such high-temperature sintering conditions cannot be met by all processing environments, which has high requirements on equipment, energy consumption and operation technology.

[0027] In order to solve this technical problem, the present application provides a silicon carbide boat and processing device.

[0028] Specifically, please refer to Figures 1-2 , the silicon carbide boat specifically comprises:

[0029] The boat body 1 is provided with a plurality of slots 101 on the inner wall of the boat body 1, and the boat body 1 is cut from a silicon carbide pipe.

[0030] The silicon carbide boat and processing device provided by the present application can greatly simplify the processing flow, reduce the dependence on high-temperature sintering conditions, reduce energy consumption and equipment investment, simplify the processing flow, and shorten the production cycle.

[0031] In order to make the person skilled in the art better understand the technical scheme of the present application, the technical scheme in the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, not all. Based on the embodiments in the present application, all other embodiments obtained by the person skilled in the art without creative labor should belong to the scope of protection of the present application.

[0032] It should be noted that the embodiments in the present application and the features and technical solutions in the embodiments can be combined with each other without conflict.

[0033] It should be noted that: similar reference numbers and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings.

[0034] Embodiment 1, please refer to Figures 1-2 A silicon carbide boat, comprising a boat body 1, a plurality of insertion slots 101 are arranged on the inner wall of the boat body 1, and the boat body 1 is cut from a silicon carbide pipe; the boat body 1 is cut from a silicon carbide pipe, and the silicon carbide pipe can be directly purchased, so compared with the prior art, the processing flow can be greatly simplified, the dependence on high-temperature sintering conditions is reduced, energy consumption and equipment investment are reduced, the processing flow is simplified, and the production cycle is shortened.

[0035] Embodiment 2, the silicon carbide boat provided in Embodiment 1 is further optimized, specifically, the outer surface of the boat body 1 and the inner wall of the insertion slot 101 are provided with a protective coating,

[0036] Further, the protective coating is alumina, yttrium oxide, silicon nitride or boron carbide, which is used to improve the wear resistance, corrosion resistance of the boat body 1, reduce the friction between the sample and the boat body, and optimize the heat conduction performance, because the materials such as alumina, yttrium oxide, silicon nitride or boron carbide have good wear resistance and corrosion resistance, they can protect the boat body 1 from being easily worn and corroded during use, reduce friction to reduce damage to the sample in the boat body, and at the same time, these materials can also improve the heat conduction to a certain extent, which is conducive to the stable process.

[0037] Embodiment 3, please refer to Figure 3 and Figure 4 A silicon carbide boat processing device for processing a silicon carbide boat, comprising a support and a diamond abrasive head 3 for processing the insertion slot 101, the top of the support is provided with two sets of limiting molds 203, and the two sets of limiting molds 203 are provided with a positioning mold 205, the limiting mold 203 and the positioning mold 205 cooperate to limit the boat body 1 during processing, through the cooperation of the limiting mold 203 and the positioning mold 205, the boat body 1 can be accurately positioned during processing, the processing precision is guaranteed, and the processing error is reduced, because the limiting mold 203 and the positioning mold 205 play a stable fixing and positioning role on the boat body 1, so that the boat body 1 is not easy to deviate or shake during the processing of the insertion slot 101, thereby ensuring the accurate position of the processed insertion slot 101.

[0038] Further, the limiting mold 203 and the positioning mold 205 are pasted on the support through glue wax, the glue wax pasting mode is convenient for installation and disassembly of the limiting mold 203 and the positioning mold 205, the position of the limiting mold 203 and the positioning mold 205 can be flexibly adjusted or the limiting mold 203 and the positioning mold 205 can be replaced, and the cost is relatively low, the glue wax has viscosity, can stably limit the limiting mold 203 and the positioning mold 205 during processing, and when adjustment or replacement is needed, the limiting mold 203 and the positioning mold 205 can be easily removed through appropriate heating and the like, without causing damage to the support and the like, compared with some complex fixing modes, the mode is more convenient and economical.

[0039] Further, as shown in Figure 3 The limiting die 203 is provided with a limiting groove 204 on the side close to the positioning die 205.

[0040] Further, the shape of the limiting groove 204 matches the outer contour of the boat body 1, so that the boat body 1 can be accurately aligned and fixed during processing, further improving the positioning accuracy of the boat body 1, reducing the slight displacement deviation of the boat body 1 during processing, and ensuring the processing quality.

[0041] Further, as shown in Figure 3 And Figure 4 The support member includes a first support plate 202 connected between the bottom of the limiting die 203 and the positioning die 205, and the first support plate 202 provides a stable support base for the limiting die 203 and the positioning die 205, enhances the structural stability of the entire processing device, and is beneficial to ensure the smooth progress of the processing process.

[0042] Further, as shown in Figure 3 The support member further includes a workbench 2, and the top of the workbench 2 is provided with a support strip 201 installed at the bottom of the first support plate 202, and the support strip 201 can support the first support plate 202, so that the entire processing device is more reliable during operation.

[0043] Further, as shown in Figure 3 The number of support strips 201 is multiple, and they are uniformly distributed at the bottom of the first support plate 202, so as to improve the stability of the first support plate 202 and the limiting die 203 and the positioning die 205 arranged thereon.

[0044] The use process of the silicon carbide boat and the processing device is as follows:

[0045] The silicon carbide pipe of the corresponding size is ordered, and the silicon carbide pipe is cut in half by a wire cutting machine to form two boat bodies 1, the two boat bodies 1 are inserted into the two limiting grooves 204 respectively, then the boat body 1, the limiting die 203 and the positioning die 205 are bonded together with the first support plate 202 by using wax, and then the plug-in groove 101 is processed on the inner wall of the boat body 1 by using the diamond grinding head 3.

[0046] In the utility model, unless another definite provision and limitation, the term "mount", "link", "connect", "fix" and so on term should do broad sense understanding, for example, can be fixed connection, also can be detachable connection, or be integrated;Can be mechanical connection, also can be electric connection or each other can communicate;Can be direct connection, also can indirectly connect through intermediate medium, can be two element internal communication or two element mutual action relation, unless another definite limitation.For ordinary skilled person in the art, can understand the above-mentioned term in the utility model concrete meaning according to specific circumstances.

[0047] Obviously, the above-described embodiments are only a part of the embodiments of the utility model, and not all the embodiments, the preferred embodiments of the utility model are given in the drawings, but do not limit the patent range of the utility model.The utility model can be realized in many different forms, and contrary, the purpose of providing these embodiments is to make the understanding of the disclosure of the utility model more thorough and comprehensive.Although the utility model is described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions recorded in the foregoing specific embodiments, or make equivalent replacement to part of the technical features.For equivalent structure made by using the contents of the utility model specification and drawings, directly or indirectly used in other related technical fields, are also within the patent protection scope of the utility model.

Claims

1. A silicon carbide boat, characterized by, The boat body (1) is cut from a silicon carbide pipe, and a plurality of insertion slots (101) are formed in the inner wall of the boat body (1); the outer surface of the boat body (1) and the inner wall of the insertion slot (101) are provided with a protective coating; the protective coating is alumina, yttrium oxide, silicon nitride or boron carbide.

2. A silicon carbide boat processing apparatus for processing a silicon carbide boat as claimed in claim 1, characterized by, The support is provided with two sets of limiting molds (203) on the top, and a positioning mold (205) is arranged between the two sets of limiting molds (203), and the limiting mold (203) and the positioning mold (205) are matched to limit the boat body (1) during processing.

3. The apparatus of claim 2, wherein the carbonized silicon boat is a carbonized silicon boat having a thickness of about 0.5 mm to about 2 mm. The limiting mold (203) and the positioning mold (205) are adhered to the support by glue wax.

4. The apparatus of claim 3, wherein the carbonized silicon boat is a carbonized silicon boat having a thickness of 0.5 mm or less. The limiting mold (203) is provided with a limiting groove (204) on the side close to the positioning mold (205).

5. The apparatus of claim 4 wherein, The shape of the limiting groove (204) matches the outer contour of the boat body (1).

6. A silicon carbide boat processing apparatus according to claim 4 or 5, wherein The support includes a first support plate (202), and the first support plate (202) is connected between the bottom of the limiting mold (203) and the positioning mold (205).

7. The apparatus of claim 6 wherein, The support further includes a workbench (2), and the top of the workbench (2) is provided with a support strip (201), and the support strip (201) is installed at the bottom of the first support plate (202).

8. The apparatus of claim 7, wherein the carbonized silicon boat is a carbonized silicon boat having a thickness of about 0.5 mm to about 2 mm. The number of the support strip (201) is plural, and the support strip (201) is uniformly distributed at the bottom of the first support plate (202).

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