Gas flow control valve and gas flow control device

Abstract

The utility model provides a gas flow control valve and a gas flow control device. The gas flow control valve comprises a piezoelectric actuator, a displacement amplification mechanism and a push rod which are coaxially arranged in sequence, the displacement amplification mechanism comprises a lever seat which is movably connected with the output end of the piezoelectric actuator and is used for receiving the displacement of the piezoelectric actuator and transmitting the displacement to a plurality of levers; the plurality of levers are arranged between the lever seat and the push rod around the central axis of the push rod, each lever is fixedly connected with the lever seat through a springback piece, and the connecting point of the springback piece and the lever is formed between the moving end of the lever and the rotating end of the lever. The lever is used for amplifying the displacement of the piezoelectric actuator and transmitting the displacement to the push rod. According to the gas flow control valve and device, the small displacement of the piezoelectric actuator can be remarkably amplified through the displacement amplifying mechanism, and therefore finer control is achieved.

Description

Technical Field

[0001] This application belongs to the field of gas control technology, and in particular relates to a gas flow control valve and a gas flow control device. Background Technology

[0002] A gas flow meter is an instrument used to measure the flow rate of gas. In existing technology, piezoelectric valves are used for flow control. Piezoelectric valves are mainly composed of piezoelectric ceramics and metal materials. When a voltage is applied, the piezoelectric ceramics deform, causing a change in the size of the fluid channel. By controlling the magnitude of the voltage, the degree of opening and closing of the channel can be adjusted, thereby controlling the fluid flow rate. However, because the stroke of a piezoelectric valve is fixed, the flow control accuracy is low. Summary of the Invention

[0003] In view of the above-mentioned problems in the prior art, the purpose of this paper is to provide a gas flow control valve and a gas flow control device to solve the problem of low flow control accuracy in the prior art.

[0004] To solve the above-mentioned technical problems, the specific technical solution presented in this paper is as follows:

[0005] On the one hand, this article provides a gas flow control valve, including:

[0006] The piezoelectric actuator, displacement amplification mechanism, and push rod are arranged coaxially in sequence.

[0007] The displacement amplification mechanism includes:

[0008] A lever seat, movably connected to the output end of the piezoelectric actuator, is used to receive the displacement of the piezoelectric actuator and transmit it to multiple levers;

[0009] The multiple levers are arranged around the central axis of the push rod between the lever seat and the push rod. Each lever is fixedly connected to the lever seat through a spring-loaded member. The connection point between the spring-loaded member and the lever is formed between the moving end and the rotating end of the lever. The lever is used to amplify the displacement of the piezoelectric actuator and transmit it to the push rod.

[0010] The movable end is the end of the lever that contacts the push rod, and the distance between the movable end and the spring-loaded component is greater than the distance between the rotating end and the spring-loaded component.

[0011] Optionally, the connection point between the spring-loaded element and the lever seat is located on the outer periphery of the lever seat.

[0012] Optionally, the central axis of the spring-loaded element is approximately parallel to the central axis of the push rod.

[0013] Optionally, the resilient member is formed with an arc-shaped slot on both sides close to the lever end, and the opening of the arc-shaped slot faces the rotating end or the moving end.

[0014] Optionally, the distance between the moving end of the lever and the resilient member is more than twice the distance between the rotating end and the fixed column.

[0015] Optionally, the number of levers is an even number greater than or equal to 4.

[0016] Optionally, the moving end is one end close to the central axis of the push rod.

[0017] Optionally, the top surface of the push rod close to the lever is not higher than the bottom surface of the rotating end close to the push rod.

[0018] In another aspect, the present application provides a gas flow control device, comprising:

[0019] The gas flow control valve described above;

[0020] A flow sensor arranged on the upstream side or downstream side of the gas flow control valve;

[0021] And

[0022] A valve control unit that controls the gas flow control valve based on the output of the flow sensor.

[0023] With the above technical solution, the gas flow control valve and device of the present application can significantly amplify the small displacement of the piezoelectric driver through the displacement amplification mechanism (including the lever seat and multiple levers), thereby achieving more precise control. At the same time, the design of the levers enables the push rod to achieve high-resolution flow control, which is suitable for application scenarios that require precise adjustment. In addition, the combined design of the lever seat and the levers makes full use of the principle of levers, ensuring that the small displacement of the piezoelectric driver can be efficiently transmitted to the push rod, reducing energy loss. Furthermore, the design of the connection point position of the resilient member and the lever (the distance from the moving end to the connection point is more than twice the distance from the rotating end to the connection point) further enhances the force transmission efficiency. The multiple levers are arranged circumferentially at intervals, providing more uniform force distribution, reducing the load on individual levers, and improving the reliability and life of the system.

[0024] In order to make the above and other purposes, features and advantages of the present application more obvious and easy to understand, the following describes a preferred embodiment in detail, with reference to the accompanying drawings. BRIEF DESCRIPTION OF DRAWINGS

[0025] In order to more clearly illustrate the technical solutions in the embodiments or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or the prior art description. Obviously, the drawings in the following description only represent some of the embodiments of the present document, and those skilled in the art can obtain other drawings according to these drawings without any creative effort.

[0026] Figure 1 A structural schematic diagram of a gas flow control valve according to an embodiment of the present document is shown;

[0027] Figure 2 A partial enlarged view of a gas flow control valve before moving according to an embodiment of the present document is shown;

[0028] Figure 3 A schematic diagram of a displacement amplification mechanism according to an embodiment of the present document is shown;

[0029] Figure 4 A partial enlarged view of a gas flow control valve after moving according to an embodiment of the present document is shown;

[0030] 1-piezoelectric driver, 11-housing, 12-piezoelectric stack;

[0031] 21-lever seat, 22-lever, 23-spring;

[0032] 3-push rod;

[0033] 4-fixed support seat;

[0034] 5-valve body;

[0035] 6-base, 61-gas flow channel;

[0036] 7-elastic component;

[0037] 8-septum; DETAILED DESCRIPTION

[0038] The technical solutions in the embodiments of the present document will be described clearly and completely in the following with reference to the drawings in the embodiments of the present document. Obviously, the described embodiments only represent some of the embodiments of the present document, rather than all the embodiments. Based on the embodiments in the present document, all other embodiments obtained by those skilled in the art without any creative effort fall within the scope of protection of the present document.

[0039] It is to be understood that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting, unless the context clearly indicates otherwise. It will be further understood that the use of relational terms such as first and second, and the like are used solely to distinguish one from another entity without necessarily implying a relationship or order between such entities. Much of the detail of the embodiments described in this detailed description is therefore "optional".

[0040] To solve the above problems, the embodiments of the present application provide a gas flow control valve, which realizes the stroke amplification of the piezoelectric driver 1 through the displacement amplification mechanism, can improve the accuracy and sensitivity of the push rod 3 control, and reduce the volume of the whole gas flow control valve. Figure 1 The structure of the gas flow control valve is shown in the embodiments of the present application, but more or less operating components can be included based on conventional or non-creative labor. Specifically, as shown in the figure, the present application provides a gas flow control valve, which comprises: Figures 1 to 4 The structure of the gas flow control valve is shown in the embodiments of the present application, but more or less operating components can be included based on conventional or non-creative labor. Specifically, as shown in the figure, the present application provides a gas flow control valve, which comprises:

[0041] The piezoelectric driver 1, the displacement amplification mechanism and the push rod 3 are coaxially arranged in sequence.

[0042] The displacement amplification mechanism comprises:

[0043] The lever seat 21 is movably connected with the output end of the piezoelectric driver 1, and is used for receiving the displacement of the piezoelectric driver 1 and transmitting it to the plurality of levers 22.

[0044] The plurality of levers 22 are arranged around the central axis of the push rod 3 between the lever seat 21 and the push rod 3. Each lever 22 is fixedly connected with the lever seat 21 through a resilient member 23. The connection point of the resilient member 23 and the lever 22 is formed between the moving end of the lever 22 and the rotating end of the lever 22. The lever 22 is used for amplifying the displacement of the piezoelectric driver 1 and transmitting it to the push rod 3.

[0045] The moving end is one end of the lever 22 in contact with the push rod 3, and the distance between the moving end and the resilient member 23 is greater than the distance between the rotating end and the resilient member 23.

[0046] Specifically, the piezoelectric actuator 1, the displacement amplification mechanism, and the push rod 3 can all be cylindrical structures, and their central axes can be the same. Furthermore, the piezoelectric actuator 1, the displacement amplification mechanism, and the push rod 3 can be arranged sequentially from top to bottom. It is understood that the arrangement direction of the piezoelectric actuator 1, the displacement amplification mechanism, and the push rod 3 is not specifically limited in this specification and can be set as needed, such as arranging them left and right sequentially. For better understanding, this application describes a top-to-bottom stacked arrangement, where the piezoelectric actuator 1 is located above the displacement amplification mechanism, and the displacement amplification mechanism is located above the push rod 3.

[0047] The piezoelectric actuator 1 comprises one or more piezoelectric stacks 12 with alternating layers of piezoelectric ceramic layers and electrode layers. Furthermore, the piezoelectric actuator 1 includes a housing 11, in which the upper end of the piezoelectric actuator 1 (the end opposite to the push rod 3) is fixed. That is, by extending or retracting the piezoelectric actuator 1, the lower end of the piezoelectric actuator 1 (the end on the push rod 3 side) is displaced. Due to the displacement of the lower end of the piezoelectric actuator 1, the push rod 3 moves by means of a displacement amplification mechanism.

[0048] It is understandable that the piezoelectric actuator 1, the displacement amplification mechanism, and the push rod 3 can be radially limited by the external fixed support 4, so as to enable the piezoelectric actuator 1, the displacement amplification mechanism, and the push rod 3 to move within the fixed support 4.

[0049] Specifically, the displacement amplification mechanism may include a lever seat 21 and multiple levers 22 fixedly connected to the bottom surface of the lever seat 21 (the end face away from the piezoelectric actuator 1).

[0050] Among them, such as Figure 3 As shown, the lever seat 21 can be a cylindrical structure to ensure its stability and uniformity when transmitting axial displacement. The top surface of the lever seat 21 (near the end face of the piezoelectric actuator 1) is in contact with the lower end of the piezoelectric actuator 1, ensuring that even small displacements of the piezoelectric actuator 1 can be efficiently transmitted to the lever seat 21. The outer periphery of the lever seat 21 can contact the fixed support 4 to limit the radial movement of the lever seat 21, ensuring that it moves only along the axial direction, which helps to improve the stability and accuracy of the entire system.

[0051] The lever seat 21 and the lever 22 are fixedly connected by a spring-loaded member 23, wherein the central axis of the spring-loaded member 23 is approximately parallel to the central axis of the push rod 3, ensuring that the displacement transmitted by the lever seat 21 is not lost. This alignment design ensures efficient force transmission, reduces energy loss, and improves the system's response speed and control accuracy.

[0052] In an optional embodiment, a certain gap can be provided between the outer periphery of the lever seat 21 and the fixed support seat 4. This gap not only facilitates viewing the installation position of the lever 22 and the fixed support seat 4, but also allows necessary assembly and adjustment space, thereby simplifying maintenance and inspection work. In this case, the connection point between the spring member 23 and the lever seat 21 can be formed on the outer periphery or extension of the lever seat 21.

[0053] To ensure that the force transmitted from the lever seat 21 to the lever 22 is approximately parallel to the central axis of the push rod 3, arc-shaped grooves can be formed on both sides of the spring member 23 near the end of the lever 22, with the openings of the arc-shaped grooves facing the rotating end or the moving end.

[0054] Specifically, the opening size of the arc-shaped groove can be set as needed. The end of the arc-shaped groove near the lever seat 21 can directly contact and connect with the lever seat 21 to reduce the volume of the displacement amplification mechanism. In addition, in order to ensure the strength of the spring-loaded component 23, the end of the arc-shaped groove near the lever seat 21 can be connected to the lever seat 21 through a straight section.

[0055] It should be noted that when the spring return element 23 is displaced by the lever seat 21, the opening of the arc-shaped groove facing the rotating end restricts the axial movement of the spring return element 23, forcing the deformation to mainly occur radially, i.e., towards the central axis of the push rod 3. This ensures that the deformation direction of the spring return element 23 is more concentrated towards the push rod 3, improving control accuracy. Simultaneously, it reduces unnecessary axial movement of the spring return element 23, avoiding the influence of lateral forces on the lever 22. Furthermore, when the spring return element 23 is displaced by the lever seat 21, the opening of the arc-shaped groove facing the moving end guides the deformation of the spring return element 23 to be concentrated radially, while allowing for some axial adjustment. This allows the spring return element 23 to be finely adjusted axially within a certain range to adapt to different assembly errors or working conditions. At the same time, it ensures that the force on the spring return element 23 is more uniform during deformation, reducing stress concentration points and extending its service life.

[0056] like Figure 3 As shown, lever 22 can be a cuboid structure. The rotating end of lever 22 (the end away from the central axis of push rod 3) can abut against the fixed support 4, and the moving end of lever 22 (the end near the central axis of push rod 3) abuts against the top surface of push rod 3 (the end face of push rod 3 near piezoelectric actuator 1). Multiple levers 22 can be fixed circumferentially at intervals on the bottom surface of lever seat 21. The number of levers 22 is not specifically limited in this embodiment and can be set as needed. Preferably, the number of levers 22 is an even number greater than or equal to 4. Compared with an odd number of levers 22, an even number of levers 22 is easier to manufacture and can provide a more uniform force distribution, improving the stability and response consistency of the system.

[0057] The lever 22 and the lever seat 21 are connected through the resilient member 23. The resilient member 23 can produce slight deflection deformation towards the center axis of the push rod 3 after being subjected to the displacement of the lever seat 21, thereby pushing the lever 22 to rotate the end as the shaft, and moving the moving end to the direction of the push rod 3. The connection point of the resilient member 23 and the lever 22 is located between the moving end and the rotating end of the lever 22, and the distance from the moving end to the connection point is greater than or equal to twice the distance from the rotating end to the connection point. This design effectively amplifies the slight displacement of the lever seat 21, realizes the control range of the larger opening of the push rod 3 and higher precision.

[0058] After receiving the displacement of the lever seat 21, the moving end of the lever 22 can rotate with the inner side of the fixed support seat 4 as the shaft in the axial direction of the push rod 3, while the moving end of the lever 22 transmits the displacement of the lever seat 21 to the push rod 3 after amplification, thereby realizing the displacement of the push rod 3, and realizing the adjustment of the opening of the gas passage in the gas flow control device through the movement of the push rod 3 at different positions.

[0059] In some possible embodiments, the plurality of levers 22 are symmetrically arranged two by two. In addition, the length of the lever 22 can be less than the radius of the lever seat 21, so that a gap is formed between the rotating ends of the levers 22, thereby ensuring that the moving end of the lever 22 does not contact during the movement of the lever 22.

[0060] Specifically, the area where the rotating end of the lever 22 contacts the inner side bottom surface of the fixed support seat 4 can be formed with an arc-shaped rotating part. When the lever 22 rotates, the arc-shaped surface of the arc-shaped rotating part close to the push rod 3 can sequentially contact the inner side bottom surface of the fixed support seat 4, and the arc-shaped rotating part can be a semi-cylindrical shape. The area where the rotating end of the lever 22 contacts the inner side surface of the fixed support seat 4 can be a shape suitable for the inner side surface of the fixed support seat 4, such as a cylindrical shape.

[0061] The area where the moving end of the lever 22 contacts the surface of the push rod 3 can be formed with an arc-shaped moving part. When the lever 22 rotates, the arc-shaped surface of the arc-shaped moving part close to the center axis of the push rod 3 can sequentially contact the inner side bottom surface of the fixed support seat 4, and the arc-shaped moving part can be a semi-cylindrical shape. The length of the arc-shaped moving part is less than that of the arc-shaped rotating part, and the radii of the arc-shaped rotating part and the arc-shaped moving part can be equal, so as to ensure that the lever 22 does not deviate from the push rod 3 during movement.

[0062] After the lever 22 moves, in order to avoid interference between different levers 22, the moving end of the lever 22 can be arranged in a trapezoidal structure, so that the projection of the moving end of the lever 22 on the top surface of the push rod 3 is a trapezoid, that is, the end surface of the moving end of the lever 22 close to the center axis of the push rod 3 to the section of the connection segment between the resilient member 23 and the lever 22 presents a gradually increasing trend. It can be understood that after each lever 22 moves, each lever 22 does not contact.

[0063] It should be noted that when the piezoelectric actuator 1 is not moving, the central axis of the lever 22 is approximately perpendicular to the central axis of the push rod 3, that is, the lever 22 is in a horizontal state, thereby avoiding reducing the amplification ratio of the displacement amplification mechanism.

[0064] It should be noted that in this application, the top surface of the push rod 3 is lower than the bottom surface of the fixed support 4, thereby ensuring a large distance between the moving end of the lever 22 and the connection point between the spring element 23 and the lever 22, thus ensuring a sufficient amplification ratio of the displacement amplification mechanism. Furthermore, in this application, since the lever seat 21 and the lever 22 are fixedly connected, the contact point between the lever seat 21 and the lever 22 is prevented from moving towards the central axis of the push rod 3 during the movement of the lever seat 21, thereby ensuring a constant amplification ratio of the displacement amplification mechanism and facilitating better control of the displacement of the push rod 3.

[0065] Furthermore, the top surface of the push rod near the lever is not higher than the bottom surface of the rotating end near the push rod, which can effectively extend the stroke length of the lever and reduce the overall space of the control valve.

[0066] To better understand this application, the implementation process of this application is now explained: (e.g.) Figure 2 As shown, when the piezoelectric actuator 1 is not subjected to voltage, the lower end of the piezoelectric actuator 1 contacts the top surface of the lever seat 21. The lever seat 21 is fixedly connected to the lever 22 via the spring-loaded member 23. The rotating end of the lever 22 abuts against the inner side of the fixed support 4, and the moving end of the lever 22 contacts the top surface of the push rod 3. Figure 4 As shown, when voltage is applied to the piezoelectric actuator 1, the piezoelectric actuator 1 moves a distance toward the push rod 3. Since the piezoelectric actuator 1 is in direct contact with the lever seat 21, the lever seat 21 drives the spring member 23 to move toward the push rod 3. The spring member 23 pushes the lever 22, so that the lever 22 moves toward the push rod 3 with its moving end as the axis of rotation. This pushes the push rod 3 to move away from the piezoelectric actuator 1, and then the push rod 3 pushes the valve body 5, so that a gap is formed between the valve body 5 and the sealing structure above it, allowing gas to pass through (e.g., Figure 4 (As indicated by the middle arrow), thus achieving control of gas flow. Since the displacement amplification ratio of the displacement amplification mechanism in this application is greater than or equal to 2, a large-scale amplification of the movement distance of the piezoelectric actuator 1 is achieved. When the piezoelectric actuator 1 is de-energized, because the end of the push rod 3 away from the piezoelectric actuator 1 is provided with an elastic component 7, the push rod 3 can be springed back to a position where no displacement occurs.

[0067] The gas flow control valve provided by the embodiments of the present specification can significantly amplify the small displacement of the piezoelectric driver 1 through the displacement amplification mechanism (including the lever seat 21 and the plurality of levers 22), thereby achieving more precise control. At the same time, the design of the levers 22 enables the push rod 3 to achieve high-resolution flow control, which is suitable for application scenarios that require precise adjustment. In addition, the combined design of the lever seat 21 and the lever 22 fully utilizes the principle of the lever 22, ensuring that the small displacement of the piezoelectric driver 1 can be efficiently transmitted to the push rod 3, reducing energy loss. Furthermore, the position design of the connection point of the spring 23 and the lever 22 (the distance from the moving end to the connection point is more than twice the distance from the rotating end to the connection point) further enhances the force transmission efficiency. The circumferentially spaced plurality of levers 22 provides more uniform force distribution, reduces the load of individual levers 22, and improves the reliability and service life of the system.

[0068] In another aspect, the embodiments of the present specification also provide a gas flow control device, comprising:

[0069] The gas flow control valve described above;

[0070] A flow sensor arranged on the upstream side or downstream side of the gas flow control valve;

[0071] And

[0072] A valve control unit that controls the gas flow control valve based on the output of the flow sensor.

[0073] Specifically, as shown in Figure 1 The gas flow control device can include the above-mentioned gas flow control valve, the valve body 5 controlled by the gas flow control valve, the base 6, the gas flow passage 61 formed in the base 6, the push rod 3 in the gas flow control valve arranged inside the gas flow passage 61, and the flow sensor to control the gas flow through the opening of the push rod 3.

[0074] In actual application, the gas flow control valve can control the opening of the valve body 5 by moving the push rod 3 up and down, thereby achieving the flow control of the gas in the gas flow passage 61 in the gas flow control device.

[0075] It can be understood that the side of the valve body 5 away from the push rod 3 can be provided with an elastic component 7, which can release the compression force and restore the axis of the lever 22 to a position substantially perpendicular to the center axis of the push rod 3 when the piezoelectric driver 1 is not powered.

[0076] Among them, the push rod 3 can form a diaphragm 8 on one side of the lever 22, which is used to improve the airtightness.

[0077] Specifically, the flow sensor can be arranged on the upstream side of the push rod 3 to detect the gas flow on the upstream side.

[0078] The gas flow control device provided by the embodiments of the present disclosure comprises a gas flow control valve, and therefore has all the technical effects of the gas flow control valve.

[0079] It should also be understood that, in the embodiments herein, the term "and / or" merely describes an association relationship of associated objects, and can represent three relationships. For example, A and / or B can represent three cases of A existing alone, A and B existing together, and B existing alone. In addition, the character " / " herein generally represents an "or" relationship between the front and rear associated objects.

[0080] Those skilled in the art can realize that the units and algorithm steps of each example described in combination with the embodiments disclosed herein can be realized by electronic hardware, computer software or a combination of both. In order to clearly illustrate the interchangeability of hardware and software, the components and steps of each example have been described in a general manner in the foregoing description. Whether the functions are performed in hardware or software depends on the specific application and design constraints of the technical solution. A person skilled in the art can use different methods to implement the described functions for each specific application, but such implementation should not be considered beyond the scope of the present disclosure.

[0081] Those skilled in the art can clearly understand that, for the convenience and brevity of description, the specific working processes of the above-described system, device and unit can refer to the corresponding processes in the foregoing method embodiments, which will not be described here.

[0082] In several embodiments provided herein, it should be understood that the disclosed system, device and method can be implemented in other ways. For example, the above-described device embodiments are only schematic, and the division of units is only a logical function division, and actual implementation can have another division manner, for example, a plurality of units or components can be combined or integrated into another system, or some features can be omitted or not executed. In addition, the coupling or direct coupling or communication connection between the displayed or discussed objects can be indirect coupling or communication connection through some interfaces, devices or units, and can also be electrical, mechanical or other forms of connection.

[0083] The units described as separate components can or can not be physically separate, and the components shown as units can or can not be physical units, i.e. can be located in one place, or can be distributed on a plurality of network units. Part or all of the units can be selected according to actual needs to achieve the purpose of the embodiments of the present disclosure.

[0084] The principles and implementations of the present application are described in detail in the specific examples, and the above examples are only used to help understand the method and its core idea; meanwhile, for those skilled in the art, according to the idea of the present application, the specific implementation and application range will be changed, and the above description should not be understood as a limitation of the present application.

Claims

1. A gas flow control valve characterized by, The application relates to a piezoelectric driving device. The piezoelectric driving device comprises a piezoelectric driver, a displacement amplification mechanism and a push rod arranged coaxially in sequence. The displacement amplification mechanism comprises a lever base, a plurality of levers and a resilient member. The lever base is movably connected with an output end of the piezoelectric driver and is used for receiving displacement of the piezoelectric driver and transmitting the displacement to the plurality of levers. The plurality of levers are arranged around a central axis of the push rod between the lever base and the push rod. Each lever is fixedly connected with the lever base through the resilient member.

2. The gas flow control valve of claim 1, wherein The connection point of the resilient member and the lever is formed between a moving end of the lever and a rotating end of the lever.

3. The gas flow control valve of claim 1, wherein The moving end is one end of the lever in contact with the push rod.

4. The gas flow control valve of claim 1, wherein The distance between the moving end and the resilient member is greater than the distance between the rotating end and the resilient member.

5. The gas flow control valve of claim 1, wherein The connection point of the resilient member and the lever base is located on the outer periphery of the lever base.

6. The gas flow control valve of claim 1, wherein The central axis of the resilient member is substantially parallel to the central axis of the push rod.

7. The gas flow control valve of claim 1, wherein Arc-shaped grooves are formed on both sides of the resilient member close to the lever end.

8. The gas flow control valve of claim 1, wherein, The opening of the arc-shaped groove faces the rotating end or the moving end. The distance between the moving end of the lever and the resilient member is more than twice the distance between the rotating end and the resilient member. The number of the levers is an even number greater than or equal to 4. The moving end is one end close to the central axis of the push rod. The top surface of the push rod close to the lever is not higher than the bottom surface of the rotating end close to the push rod. The application relates to a gas flow control device. The gas flow control device comprises: The gas flow control valve according to any one of claims 1 to 8; A flow sensor arranged on the upstream side or the downstream side of the gas flow control valve; and A valve control unit configured to control the gas flow control valve based on an output of the flow sensor.

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