Novel multipoint online film thickness measuring instrument

Abstract

The utility model provides a novel multi-point on-line film thickness measuring instrument which comprises a machine body. Brackets for lifting are arranged on two sides of the lower end of the machine body; the test sample is placed at a corresponding position of the lower end of the machine body; the machine body comprises a bottom plate and an adjusting frame installed on the bottom plate, measuring modules are installed in the middle and on the periphery of the adjusting frame respectively, the measuring modules on the periphery of the adjusting frame are adjustably installed on the adjusting frame so as to adjust the positions according to requirements, and corresponding through holes are formed in the bottom plate and correspond to the measuring modules respectively. And the measuring module passes through the through hole to detect the test sample. The utility model designs a multi-point online measurement film thickness gauge, which can realize automatic multi-point measurement of the sample to be measured, improves the measurement efficiency and the measurement precision, and can be used for analyzing a large-size film layer and monitoring the quality of the film layer on a production line in real time.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of film thickness gauge, specifically to a novel multi -point on -line measurement film thickness gauge. BACKGROUND

[0002] The film thickness gauge for film thickness detection is single -point measurement mode, and the film thickness of the center point of the table top can be measured when the sample is placed on the table top. The single measurement point of the film thickness gauge is easily affected by the uneven surface or local defects of the sample, resulting in inaccurate results. In addition, the single -point measurement result cannot reflect the overall condition of the whole film layer, and cannot provide comprehensive film layer information. To judge the uniformity of the sample piece, the sample surface needs to be tested at multiple points. The current technology usually measures by manually moving the sample multiple times to realize multi -point testing of a single sample. However, the manual method not only affects the work efficiency, but also increases the number of personnel and sample contact, which may cause sample contamination or damage. In addition, the measurement point of the manual multi -point test is not fixed, which affects the accurate analysis and judgment of the test results. SUMMARY

[0003] The utility model solves the technical problem in the prior art, and provides a novel multi -point on -line measurement film thickness gauge to solve the problems in the prior art.

[0004] The utility model solves the technical problem by adopting the following technical scheme: a novel multi -point on -line measurement film thickness gauge, comprising:

[0005] A machine body is provided with a support on both sides of the lower end for lifting, and a test sample is placed on the corresponding position of the lower end of the machine body.

[0006] The machine body comprises a bottom plate and an adjusting frame mounted on the bottom plate, and a measurement module is mounted on the middle and periphery of the adjusting frame. The measurement modules on the periphery of the adjusting frame can be adjusted and installed on the adjusting frame to adjust the position according to the requirements. The bottom plate is provided with corresponding through holes corresponding to the measurement modules, so that the measurement modules can detect the test sample by passing through the through holes.

[0007] As a further scheme of the utility model:

[0008] The adjusting frame is X-shaped, and the periphery of the adjusting frame is installed on the bottom plate through a T-shaped support plate, so that the adjusting frame is suspended on the upper end of the bottom plate. Five groups of measurement modules are respectively installed on the adjusting frame, wherein one group of measurement modules is fixedly arranged on the middle of the adjusting frame, and four groups of measurement modules are respectively arranged on the periphery of the adjusting frame.

[0009] As a further scheme of the utility model:

[0010] The middle part of the adjusting frame is provided with a circular hole corresponding to the measuring module, and the periphery of the adjusting frame is provided with a first waist-shaped hole corresponding to the measuring module, so that the upper end of the measuring module passes through the first waist-shaped hole, and the two sides of the adjusting frame are respectively provided with a second waist-shaped hole at the positions of the second waist-shaped holes, the two sides of the measuring module are installed on the second waist-shaped holes of the adjusting frame through bolts, the position of the measuring module can be adjusted by loosening the bolts, the distance between different measuring modules can be adjusted, and the testing requirements of different testing points and different size sample pieces can be met.

[0011] As a further scheme of the utility model:

[0012] The through hole around the bottom plate is also a waist-shaped hole structure, and the through hole around the bottom plate is arranged in cooperation with the first waist-shaped hole.

[0013] As a further scheme of the utility model:

[0014] The machine body comprises a back plate and a front plate vertically installed on the bottom plate, the back plate and the front plate are enclosed around the bottom plate, and the upper end of the back plate and the front plate is further provided with a top plate, the bottom plate, the back plate, the front plate and the top plate form a frame support structure of the machine body, and a support piece for strengthening the connection stability is arranged between the back plate and the bottom plate; the support piece is a right-angle frame, one side of the right-angle frame is arranged against the back plate, the other side is arranged against the bottom plate, and the right-angle frame is fixedly connected with the back plate and the bottom plate through bolts.

[0015] As a further scheme of the utility model:

[0016] The machine body is further provided with a power input module, a voltage control module, a communication circuit module, a spectrum analysis module and a distance sensor module, the power input module, the voltage control module, the communication circuit module and the spectrum analysis module are installed at corresponding positions of the back plate, the voltage control module is provided with two groups, and the distance sensor module is fixedly installed on the bottom plate; the communication circuit module transmits various measurement data to the computer control software and simultaneously forwards control signals from the computer software, so that the data of the equipment and the computer are centrally interacted; the power input module and the two groups of voltage control modules are used for meeting the power consumption requirements of various electrical appliances in the equipment and guaranteeing the stability of the voltage; the distance sensor module is fixed on the bottom plate of the equipment, so that the distance between the test sample and the measuring module meets the corresponding test standard; the measuring module emits test light lines perpendicular to the test sample and receives reflected light lines, the spectrum analysis module receives and analyzes the reflected light lines received by the measuring module, and the analysis results are fed back to the computer control software.

[0017] As a further scheme of the utility model:

[0018] The support frame comprises support horizontal plates fixedly installed on the two sides of the bottom plate, the outer ends of the support horizontal plates are fixedly connected with support side plates, and the lower ends of the support side plates are fixedly installed on the base.

[0019] Compared with the prior art, the film thickness gauge has the beneficial effects that:

[0020] The film thickness gauge for multi-point online measurement is designed, and can realize automatic multi-point measurement of a sample sheet, improve measurement efficiency and measurement accuracy, and can be used for large-size film layer analysis and real-time monitoring of film layer quality on a production line.

[0021] The film thickness gauge for multi-point online measurement is designed, and can efficiently and quickly measure the uniformity of a test sheet, is suitable for large-area film layer analysis, greatly improves the test capacity of the film thickness gauge, simplifies the operation steps of a user, realizes one-key multi-point testing, the test points can be freely set, different sizes and film layers with large thickness changes can be tested, and various test requirements can be met, the appearance design is optimized, the equipment is not only beautiful but also durable, and has high reliability. BRIEF DESCRIPTION OF DRAWINGS

[0022] Fig. 1 is a schematic view of a three-dimensional structure of the utility model;

[0023] Fig. 2 is a schematic view of an internal structure of a machine body of the utility model;

[0024] Fig. 3 is a schematic view of a bottom plate mounting structure of the utility model;

[0025] In the figure, 1 is a machine body, 2 is a support, 3 is an adjusting frame, 4 is a measurement module, 5 is a power input module, 6 is a voltage control module, 7 is a communication circuit module, 8 is a spectrum analysis module, 9 is a distance sensor module, 11 is a bottom plate, 12 is a through hole, 13 is a back plate, 14 is a front panel, 15 is a top plate, 16 is a support piece, 21 is a support horizontal plate, 22 is a support side plate, 23 is a base, 31 is a support plate, 32 is a first waist-shaped hole, and 33 is a second waist-shaped hole. DETAILED DESCRIPTION

[0026] In order to make the technical means, creative features, purposes and effects of the utility model easy to understand, the utility model is further described below in combination with specific drawings.

[0027] As shown in Figs. 1-3 ,

[0028] The embodiment provides a novel multi-point online measurement film thickness gauge, which comprises:

[0029] Body 1; the body 1 lower end both sides are provided with the support 2 for lifting, test sample is placed in the corresponding position of the body 1 lower end;

[0030] The body 1 includes the bottom plate 11 and the adjusting frame 3 installed on the bottom plate 11, the middle and the four around of the adjusting frame 3 are respectively installed with the measurement module 4, the measurement module 4 around the adjusting frame 3 can be adjusted and installed on the adjusting frame 3, to adjust the position according to the demand, the bottom plate 11 is respectively provided with corresponding through hole 12 corresponding to the measurement module 4, to make the measurement module 4 pass through the through hole 12 and detect the test sample.

[0031] In this embodiment, the adjusting frame 3 is X-shaped, the adjusting frame 3 is installed on the bottom plate 11 through the T-shaped support plate 31 around, so that the adjusting frame 3 is suspended on the upper end of the bottom plate 11, and five groups of measurement modules 4 are respectively installed on the adjusting frame 3, wherein one group of measurement modules 4 is fixedly arranged on the middle of the adjusting frame 3, and four groups of measurement modules 4 are respectively arranged around the adjusting frame 3.

[0032] The middle of the adjusting frame 3 is provided with a round hole corresponding to the measurement module 4, and the four around of the adjusting frame 3 are respectively provided with the first waist type hole 32 corresponding to the measurement module 4, so that the upper end of the measurement module 4 passes through the first waist type hole 32, the adjusting frame 3 is respectively provided with the second waist type hole 33 on the two sides of the first waist type hole 32, the two sides of the measurement module 4 are installed on the second waist type hole 33 of the adjusting frame 3 through bolts, and the position of the measurement module 4 can be adjusted by loosening the bolt, the spacing between different measurement modules 4 can be adjusted, and the test requirements of different test points and different size samples can be met.

[0033] The through hole 12 around the bottom plate 11 corresponding to the measurement module 4 is also a waist hole structure, and the through hole 12 around the bottom plate 11 is matched with the first waist type hole 32.

[0034] In this embodiment, the body 1 includes the back plate 13 and the front plate 14 vertically installed on the bottom plate 11, the back plate 13 and the front plate 14 are enclosed around the bottom plate 11, and the upper end of the back plate 13 and the front plate 14 is also provided with the top plate 15, the bottom plate 11, the back plate 13, the front plate 14 and the top plate 15 constitute the frame support structure of the body 1, the back plate 13 and the bottom plate 11 are provided with the support 16 for strengthening the connection stability; the support 16 is a right angle frame, one side of the right angle frame is arranged on the back plate 13, the other side is arranged on the bottom plate 11, and is fixedly connected with the back plate 13 and the bottom plate 11 through bolts.

[0035] In this embodiment, the body 1 is also provided with a power input module 5, a voltage control module 6, a communication circuit module 7, a spectrum analysis module 8 and a distance sensor module 9, the power input module 5, the voltage control module 6, the communication circuit module 7 and the spectrum analysis module 8 are respectively installed at the corresponding positions of the back plate 13, and the voltage control module 6 is provided with two groups, and the distance sensor module 9 is fixedly installed on the bottom plate 11; wherein the communication circuit module 7 transmits various measurement data to the computer control software, and simultaneously forwards the control signals from the computer software, so as to realize the centralized interaction between the device and the computer; the power input module 5 and the two groups of voltage control modules 6 are used to meet the power demand of various electrical appliances in the device, and ensure the stability of the voltage; the distance sensor module 9 is fixed on the bottom plate 11 of the device, so as to ensure that the distance between the test sample and the measurement module 4 meets the corresponding test standard; the measurement module 4 emits test light perpendicular to the test sample, and receives reflected light, the spectrum analysis module 8 receives and analyzes the reflected light received by the measurement module 4, and feeds back the analysis result to the computer control software.

[0036] In this embodiment, the support 2 includes support cross plates 21 fixedly installed on both sides of the bottom plate 11, outer ends of the support cross plates 21 are fixedly connected with support side plates 22, and lower ends of the support side plates 22 are fixedly installed on the base 23.

[0037] Specifically, the device is provided with five groups of measurement modules 4 distributed and installed on the adjusting frame 3, so as to perform multi-point detection on the test sample, improve the measurement efficiency and the measurement accuracy, and the measurement modules 4 around the adjusting frame 3 can be adjusted in position according to the demand, so as to meet the test demand of different test points and different size samples.

[0038] The film thickness meter for multi-point online measurement is designed, the uniformity of the test sample can be measured efficiently and quickly, is suitable for film layer analysis of a larger area, greatly improves the test capacity of the film thickness meter, simplifies the operation steps of the user, realizes one-key multi-point test, the test points can be freely set, different sizes and film layers with large thickness changes can be tested, a variety of test demands can be met, the appearance design is optimized, the device is not only beautiful but also durable, and has high reliability.

[0039] The basic principle and main features of the present application and the advantages of the present application are shown and described above. It should be understood by those skilled in the art that the present application is not limited by the above examples, and the above examples and descriptions in the specification are only to illustrate the principles of the present application. Without departing from the spirit and scope of the present application, various changes and improvements can be made to the present application, and these changes and improvements all fall within the scope of the claimed present application. The scope of protection of the present application is defined by the appended claims and their equivalents. It should be noted that in this document, if there are relationship terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between the entities or operations. Moreover, the terms "include", "contain" or any other variants thereof are intended to cover non-exclusive inclusion, so that the process, method, article or device including a series of elements not only includes those elements, but also includes other elements not explicitly listed or inherent to such process, method, article or device. Without further limitation, the element defined by the statement "including a" does not exclude the presence of additional identical elements in the process, method, article or device including the element.

Claims

1. A novel multi-point on-line measuring film thickness gauge characterized by: Include: Machine body (1); the lower end of the machine body (1) is provided with a support (2) for lifting on both sides, and the test sample is placed in the corresponding position of the lower end of the machine body (1); The machine body (1) includes a bottom plate (11) and an adjusting frame (3) mounted on the bottom plate (11), and a measurement module (4) is respectively mounted on the middle and periphery of the adjusting frame (3). The measurement module (4) around the adjusting frame (3) can be adjustably mounted on the adjusting frame (3) to adjust the position according to the needs, and the bottom plate (11) is provided with corresponding through holes (12) corresponding to the measurement module (4) to enable the measurement module (4) to pass through the through hole (12) to detect the test sample.

2. A novel multi-point on-line measuring film thickness meter according to claim 1, characterized in that: The adjusting frame (3) is X-shaped, and the adjusting frame (3) is installed on the bottom plate (11) through a T-shaped support plate (31) around the adjusting frame (3) to make the adjusting frame (3) suspended on the upper end of the bottom plate (11). Five groups of measurement modules (4) are respectively mounted on the adjusting frame (3), wherein one group of measurement modules (4) is fixedly arranged on the middle of the adjusting frame (3), and four groups of measurement modules (4) are respectively arranged around the adjusting frame (3).

3. A novel multi-point on-line measuring film thickness meter according to claim 2, characterized in that: The middle of the adjusting frame (3) is provided with a circular hole corresponding to the measurement module (4), and the periphery of the adjusting frame (3) is provided with a first waist-shaped hole (32) corresponding to the measurement module (4). The upper end of the measurement module (4) passes through the first waist-shaped hole (32), and the adjusting frame (3) is provided with a second waist-shaped hole (33) on both sides of the first waist-shaped hole (32). The two sides of the measurement module (4) are installed on the second waist-shaped hole (33) of the adjusting frame (3) through bolts, and the position of the measurement module (4) can be adjusted by loosening the bolts.

4. The novel multi-point on-line measuring film thickness meter according to claim 3, characterized in that: The through hole (12) around the bottom plate (11) is also a waist-shaped hole structure corresponding to the measurement module (4), and the through hole (12) around the bottom plate (11) is cooperatively arranged with the first waist-shaped hole (32).

5. The novel multi-point on-line measuring film thickness meter according to claim 1, characterized in that: The machine body (1) includes a back plate (13) and a front plate (14) vertically mounted on the bottom plate (11), the back plate (13) and the front plate (14) are enclosed around the bottom plate (11), and the upper end of the back plate (13) and the front plate (14) is also provided with a top plate (15). The bottom plate (11), the back plate (13), the front plate (14) and the top plate (15) constitute the frame support structure of the machine body (1), and the back plate (13) and the bottom plate (11) are provided with a support (16) for strengthening the connection stability; the support (16) is a right-angle frame, one side of the right-angle frame abuts against the back plate (13), the other side abuts against the bottom plate (11), and the right-angle frame is fixedly connected with the back plate (13) and the bottom plate (11) through bolts.

6. The novel multi-point on-line measuring film thickness meter according to claim 5, characterized in that: The machine body (1) is also provided with a power input module (5), a voltage control module (6), a communication circuit module (7), a spectrum analysis module (8) and a distance sensor module (9). The power input module (5), the voltage control module (6), the communication circuit module (7), the spectrum analysis module (8) are respectively installed on the corresponding position of the back plate (13), and the voltage control module (6) is provided with two groups, and the distance sensor module (9) is fixedly installed on the bottom plate (11).

7. The novel multi-point on-line measuring film thickness meter according to claim 1, characterized in that: The support (2) comprises support horizontal plates (21) fixedly installed on both sides of a bottom plate (11), outer ends of the support horizontal plates (21) are fixedly connected with support side plates (22), and lower ends of the support side plates (22) are fixedly installed on a base (23).

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