Crystal ingot conveying device

Abstract

The utility model discloses a crystal ingot conveying device. The crystal ingot conveying device comprises a supporting piece, a synchronous plate, a jacking assembly and a conveying assembly. A cavity is formed in the supporting piece, and a plurality of positioning rings used for containing crystal ingots are evenly arranged on the upper end face of the supporting piece in the front-back direction. And the synchronous plate is slidably arranged in the cavity. The jacking assembly is at least partially arranged on the synchronous plate and can jack up the crystal ingot on the positioning ring. The conveying assembly is at least partially arranged at the bottom of the supporting piece and connected with the synchronous plate. Through the arrangement, when the crystal ingot on any positioning ring on the conveying device is taken away, the jacking assembly can be matched with the conveying assembly, the crystal ingots on all the positioning rings on the front side of the positioning ring are integrally moved backwards, the vacant positioning ring is supplemented, the continuity and timeliness of crystal ingot conveying are improved, and the loss of human resources is reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor manufacturing, especially to a crystal ingot conveying device. BACKGROUND

[0002] Wafer is the basis of semiconductor integrated circuit, and the manufacturing process includes crystal pulling, slicing, grinding and the like, and the crystal ingot is frequently handled and conveyed within and between each manufacturing procedure. In order to ensure the smooth progress of wafer manufacturing, the feeding and discharging of the crystal ingot need to be timely and stable.

[0003] In the prior art, when feeding and discharging the crystal ingot, the crystal ingot is usually placed in the feeding port of the crystal ingot conveying device by manual placement, so as to ensure the accuracy and timeliness of the placement of the crystal ingot. However, this feeding method needs to consume a large amount of human resources, and manual operation errors can easily cause delay in conveying the crystal ingot and damage to the crystal ingot and equipment. UTILITY MODEL CONTENTS

[0004] In order to solve the problems of the prior art, the utility model aims to provide a crystal ingot conveying device with higher conveying efficiency.

[0005] In order to achieve the above purpose, the utility model adopts the following technical scheme:

[0006] The crystal ingot conveying device comprises a support, a synchronous plate, a jacking assembly and a conveying assembly. The support is internally provided with a cavity, and a plurality of positioning rings for placing the crystal ingot are uniformly arranged on the upper end face in the front-rear direction. The synchronous plate is slidingly arranged in the cavity. The jacking assembly is at least partially arranged on the synchronous plate and can jack up the crystal ingot on the positioning ring. The conveying assembly is at least partially arranged at the bottom of the support and connected with the synchronous plate.

[0007] Further, the jacking assembly comprises a cylinder, a jacking plate and a coarse positioning block. The cylinder is at least partially arranged at the bottom of the synchronous plate and connected with the synchronous plate. The jacking plate is horizontally arranged at the top of the cylinder and connected with the cylinder. The coarse positioning block is arranged at the top of the jacking plate and connected with the jacking plate.

[0008] Further, the top surface of the support is provided with a sliding groove along the front-rear direction, which can accommodate the jacking plate and the coarse positioning block.

[0009] Further, the length between the centers of the adjacent positioning rings is a preset length. When no crystal ingot is placed on the positioning ring, the jacking assembly jacks up the crystal ingot on all the positioning rings arranged on the front side of the positioning ring. The conveying assembly drives the synchronous plate to slide backward by the preset length. The jacking assembly is reset, so that the crystal ingot falls into the positioning ring. The conveying assembly drives the synchronous plate to slide forward by the preset length to the original position.

[0010] Further, the left and right ends of the positioning ring are provided with detection members for detecting whether there is a crystal ingot above.

[0011] Further, the left and right ends of the cavity bottom are provided with sliding rails extending in the front-rear direction, and the left and right ends of the bottom surface of the synchronous plate are provided with sliding blocks corresponding to the sliding rails.

[0012] Further, the transmission device further comprises a clamp; the clamp is arranged at the bottom of the crystal ingot and can be placed in the positioning ring.

[0013] Further, the transmission assembly comprises a driving member and a connecting member; the driving member is arranged at the bottom surface of the support member; and the connecting member is connected with the driving member and the synchronous plate.

[0014] The utility model provides a kind of crystal ingot transmission device.The crystal ingot on the positioning ring of the transmission device is taken away, and the jacking assembly can lift the crystal ingot on all positioning rings of the front side of the positioning ring, and the crystal ingot is transmitted backwards by transmission assembly, and the crystal ingot is supplemented to vacant positioning ring, guarantee the timeliness and accuracy of crystal ingot transmission, reduce the input of human resources. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 It is the structural diagram of transmission device according to the utility model provides;

[0016] Figure 2 It is the sectional view of transmission device according to the utility model provides. DETAILED DESCRIPTION

[0017] The technical solutions in the embodiments will be described clearly and completely below, and obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor belong to the protection scope of the utility model.

[0018] At the same time, in order to clearly illustrate the technical solutions of the present application, as shown in Figure 1 The upper side, lower side, left side, right side, front side and rear side are defined.

[0019] As shown in Figure 1 And Figure 2 The utility model provides a kind of crystal ingot transmission device, and the transmission device can more efficiently transmit crystal ingot.The transmission device includes support member 11, synchronous plate 12, jacking assembly 13 and transmission assembly 14.

[0020] Specifically, support member 11 is provided with cavity 111, and a plurality of positioning rings 112 are evenly arranged on the upper end face in the front-rear direction, and the positioning ring 112 is used to place crystal ingot.Synchronous plate 12 is slidably arranged in cavity 111.Jacking assembly 13 is at least partially arranged on synchronous plate 12.Transmission assembly 14 is at least partially arranged at the bottom of support member 11 and connected with synchronous plate 12.

[0021] More specifically, the distance between the centers of the adjacent positioning rings 112 is a preset length L1. When the ingot on any positioning ring 112 is removed, the lifting assembly 13 lifts up the ingots on all the positioning rings 112 in front of the positioning ring 112. The conveying assembly 14 drives the synchronous plate 12 to slide the lifting assembly 13 and the ingots backward by the preset length L1. The lifting assembly 13 is reset, and the ingots are dropped into the positioning ring 112. The conveying assembly 14 drives the synchronous plate 12 to slide forward by the preset length L1 to the original position.

[0022] Through the above arrangement, when the ingot on any positioning ring 112 is removed, the lifting assembly 13 and the conveying assembly 14 can convey the ingots on all the positioning rings 112 in front of the positioning ring 112 backward to fill the vacancy, thereby ensuring the continuity of the conveying device for the ingots, improving the conveying efficiency of the ingots, and saving human resources.

[0023] As shown in Figure 1 , the conveying device further comprises a clamp 15. The clamp 15 is arranged at the bottom of the ingot and is substantially consistent with the profile of the bottom surface of the ingot. The clamp 15 can be placed in the positioning ring 112.

[0024] As shown in Figure 2 , the lifting assembly 13 comprises a cylinder 131, a lifting plate 132, and a coarse positioning block 133. The cylinder 131 is at least partially arranged at the bottom of the synchronous plate 12 and is connected with the synchronous plate 12. The cylinder 131 is used to lift up the lifting plate 132. The lifting plate 132 is horizontally arranged at the top of the cylinder 131 and is connected with the cylinder 131. The coarse positioning block 133 is arranged at the top of the lifting plate 132 and is connected with the lifting plate 132. Specifically, the coarse positioning block 133 corresponds to the positioning ring 112 and is used to roughly position the ingot, so as to facilitate the placement of the ingot and the clamp 15 on the positioning ring 112.

[0025] More specifically, the top surface of the support 11 is provided with a sliding groove 113 along the front-rear direction, which can accommodate the lifting plate 132 and the coarse positioning block 133. When the lifting assembly 13 lifts up the ingot and the conveying assembly 14 drives the synchronous plate 12 to move backward, the lifting plate 132 can move backward in the sliding groove 113. When the lifting assembly 13 is reset and the conveying assembly 14 drives the synchronous plate 12 to move forward, the coarse positioning block 133 can move forward in the sliding groove 113.

[0026] Further, the left and right ends of the bottom of the cavity 111 are provided with sliding rails 114 extending along the front-rear direction, and the left and right ends of the bottom surface of the synchronous plate 12 are provided with sliding blocks 121 corresponding to the sliding rails 114, so that the synchronous plate 12 is slidingly connected to the bottom of the cavity 111.

[0027] The conveying assembly 14 comprises a driving member 141 and a connecting member 142. The driving member 141 is arranged on the bottom surface of the support member 11. The connecting member 142 is connected with the driving member 141 and the synchronous plate 12. The driving member 141 can drive the synchronous plate 12 to slide in the cavity 111 through the connecting member 142.

[0028] The left and right ends of the positioning ring 112 are provided with detection members 16 for detecting whether there is a crystal ingot above. The detection members 16 are used to detect whether there is a crystal ingot on the positioning ring 112, so as to determine whether the driving member 141 and the lifting assembly 13 need to operate. The detection members 16 can be arranged as a pair of optical sensors, so as to reduce the influence on the crystal ingot.

[0029] In summary, the present application provides a crystal ingot conveying device. When there is no crystal ingot on the positioning ring 112, the lifting assembly 13 lifts all the crystal ingots on the front side of the positioning ring 112, and the conveying assembly 14 drives the synchronous plate 12 to drive the lifting assembly 13 and the crystal ingots to move backward by a preset length L1, so as to convey the crystal ingots to the vacant position, so that when the external crystal ingot clamping device reaches the feeding port, the crystal ingots are conveyed to the feeding port by the conveying device. The crystal ingot conveying efficiency is improved, and the consumption of human resources is reduced.

[0030] The above is the description of the embodiments of the present application. Through the above description of the disclosed embodiments, the person skilled in the art can realize or use the present application. Various modifications to these embodiments will be apparent to those skilled in the art. The general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present application. Therefore, the present application will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A crystal ingot transport device, characterized in that, The device comprises a support (11), a synchronous plate (12), a jacking assembly (13) and a conveying assembly (14); the support (11) is internally provided with a cavity (111), and a plurality of positioning rings (112) for placing ingots are uniformly arranged on the upper end face in the front-rear direction; the synchronous plate (12) is slidingly arranged in the cavity (111); the jacking assembly (13) is at least partially arranged on the synchronous plate (12) and can jack up the ingots on the positioning rings (112); and the conveying assembly (14) is at least partially arranged at the bottom of the support (11) and connected with the synchronous plate (12). The jacking assembly (13) comprises a gas cylinder (131), a jacking plate (132) and a coarse positioning block (133); the gas cylinder (131) is at least partially arranged at the bottom of the synchronous plate (12) and connected with the synchronous plate (12); the jacking plate (132) is horizontally arranged at the top of the gas cylinder (131) and connected with the gas cylinder (131); and the coarse positioning block (133) is arranged at the top of the jacking plate (132) and connected with the jacking plate (132).

2. The crystal ingot transfer apparatus according to claim 1, wherein The top surface of the support (11) is provided with a sliding groove (113) in the front-rear direction, which can accommodate the jacking plate (132) and the coarse positioning block (133).

3. The crystal ingot transfer apparatus according to claim 2, wherein The length between the centers of adjacent positioning rings (112) is a preset length L1; when no ingot is placed on the positioning ring (112), the jacking assembly (13) jacks up the ingots on all the positioning rings (112) arranged in front of the positioning ring (112); the conveying assembly (14) drives the synchronous plate (12) to slide backward by the preset length L1; the jacking assembly (13) is reset so that the ingots fall into the positioning ring (112); and the conveying assembly (14) drives the synchronous plate (12) to slide forward by the preset length L1 to the original position.

4. The crystal ingot transfer apparatus according to claim 1, wherein The left and right ends of the positioning ring (112) are provided with detection members (16) for detecting whether there is an ingot above.

5. The crystal ingot transfer apparatus according to claim 1, wherein The left and right ends of the bottom of the cavity (111) are provided with sliding rails (114) extending in the front-rear direction, and the left and right ends of the bottom surface of the synchronous plate (12) are provided with sliding blocks (121) corresponding to the sliding rails (114).

6. The crystal ingot transport apparatus according to claim 1, wherein The conveying device further comprises a clamp (15); the clamp (15) is arranged at the bottom of the ingot and can be placed in the positioning ring (112).

7. The crystal ingot transport apparatus according to claim 1, wherein The conveying assembly (14) comprises a driving member (141) and a connecting member (142); the driving member (141) is arranged at the bottom surface of the support (11); and the connecting member (142) is connected with the driving member (141) and the synchronous plate (12).

8. The crystal ingot transport apparatus according to claim 1, wherein ​

Images