Vacuum gate valve sealing structure

Abstract

The utility model relates to the field of semiconductors, and discloses a vacuum gate valve sealing structure, which is provided with a metal substrate and a groove formed on the metal substrate, a sealing ring is arranged in the groove, and extension parts are formed on two sides of the sealing ring; the fixed connection through holes are uniformly formed in the extension part along the length direction of the groove; the metal connecting piece penetrates through the fixed connecting through hole, the lower part is fixedly connected to the metal substrate on the bottom wall of the groove, and the upper part is used for applying pressure towards the metal substrate to the extension part; the plane where the top wall of the metal connecting piece is located is lower than or flush with the plane where the groove opening is located, at least part of the sealing ring protrudes out of the plane where the groove opening is located, and the protruding part of the sealing ring is higher than the plane where the top wall of the metal connecting piece is located. The sealing ring is not easy to fall off, the service life is long, degumming is not easy to occur during production and forming, the yield is high, and the production cost can be reduced.

Description

Technical Field

[0001] This utility model relates to the semiconductor field, and in particular to a vacuum valve sealing structure for semiconductor equipment. Background Technology

[0002] In semiconductor manufacturing, many processes require a clean and high-vacuum environment, such as photolithography, thin-film deposition, ion implantation plating, and plasma etching. High-vacuum manufacturing processes necessitate maintaining a high vacuum level, thus requiring a sealed production environment. Some of these processes, such as ion implantation plating and plasma etching, utilize corrosive or reactive gases. These processes, employing corrosive or reactive gases, place even stricter requirements on the sealing of the production environment.

[0003] In semiconductor manufacturing, valves that can be opened and closed are required at the workpiece inlet and outlet, and these valves must have a sealing function. In existing technology, valves are designed by creating grooves (such as dovetail grooves) on a metal substrate such as an aluminum or stainless steel plate, and then installing a fluororubber or perfluoroether sealing ring on the metal substrate to form a combined valve. However, because the sealing ring is prone to detaching from the metal substrate during use, this has been improved to a one-piece valve design. The one-piece valve design involves bonding the metal substrate and the fluororubber or perfluoroether sealing ring together to form a single unit.

[0004] As mentioned above, due to the stringent requirements of vacuum environments in semiconductor manufacturing, most sealing rings used in semiconductor production are made of perfluoroether (PFEA). However, due to the inherent properties of PFEA, there are no suitable adhesives for bonding PFEA to metal in the current technology. The PFEA adhesives used in the current technology have poor bonding strength with metal substrates, and the frequent opening and closing of valves during use makes it very easy for the PFEA sealing ring to detach from the metal substrate, resulting in a short service life and high cost for vacuum valves.

[0005] Furthermore, in actual semiconductor manufacturing, vacuum valves in semiconductor equipment are consumables. Due to the high cost of semiconductor device production, vacuum valves are not replaced only when they are at risk of failure; rather, they are proactively replaced after a period of use, even if no failure has occurred. In this context, the lifespan of the vacuum valves has a significant impact on the cost of semiconductor production. Additionally, currently, vacuum valves are mainly produced by foreign manufacturers, resulting in high procurement costs, highlighting the urgent need for domestic alternatives.

[0006] To prevent the perfluoroether seal from detaching from the metal base and extend the service life of the vacuum valve, the mainstream solutions currently used include:

[0007] 1. A combined valve is formed through structural design, referencing... Figure 1As shown, grooves are designed on the metal base, and corresponding sealing rings are designed. For example, the sealing rings are secured by the grooves, and the two units are then combined to form a modular valve. However, this solution is not ideal because it is a separate assembly. Regardless of the material of the sealing rings, the products are prone to delamination during manufacturing, resulting in a low yield rate. Furthermore, the sealing rings are also very easy to fall off during use, leading to a short lifespan.

[0008] 2. An integrated valve is formed through structural design, using adhesive to bond the sealing ring to the metal substrate. Due to the diversity of semiconductor wafer types, sizes, and manufacturing methods, different equipment is used, resulting in different valves. The grooves for bonding the sealing ring also vary between different valves. The three most common groove types are: double-sided grooves, single-sided grooves, and edgeless grooves. (See reference...) Figures 2 to 4 As shown. However, this solution is not ideal because there is no suitable adhesive for perfluoroether materials, resulting in poor bonding strength, easy detachment during use, and short lifespan.

[0009] Therefore, there is an urgent need for a vacuum valve sealing structure to improve the above problems. Utility Model Content

[0010] The utility model description section introduces a series of simplified concepts, all of which are simplifications of existing technologies in the field, and will be further explained in detail in the detailed description section. This utility model description section is not intended to limit the key features and essential technical features of the claimed technical solution, nor is it intended to determine the scope of protection of the claimed technical solution.

[0011] The technical problem to be solved by this utility model is to provide a sealing structure that provides a strong connection between the metal base and the sealing ring, making it difficult to detach and extending the service life of vacuum valves for semiconductor equipment.

[0012] To solve the above-mentioned technical problems, the present invention provides a vacuum valve sealing structure, which has a metal base and a groove formed on the metal base, and a sealing ring is arranged in the groove.

[0013] Extensions are formed on both sides of the sealing ring;

[0014] Fixed connection through holes are uniformly formed on the extension along the length of the groove;

[0015] A metal connector that passes through a fixed connection through hole, its lower part is fixedly connected to a metal base at the bottom wall of the trench, and its upper part is used to apply pressure toward the metal base to the extension;

[0016] Wherein, the plane on which the top wall of the metal connector is located is lower than or level with the plane on which the groove opening is located, the sealing ring protrudes at least partially from the plane on which the groove opening is located, and the protruding part of the sealing ring is higher than the plane on which the top wall of the metal connector is located.

[0017] Preferably, the vacuum valve sealing structure is further improved such that the distance between the plane of the top wall of the extension and the plane of the groove opening is greater than 1 mm.

[0018] Preferably, the vacuum valve sealing structure is further improved such that the middle position of the sealing ring protrudes from the plane where the groove opening is located.

[0019] Preferably, the vacuum valve sealing structure is further improved by forming a sub-groove on the bottom wall of the sealing ring. The length direction of the sub-groove is preferably not perpendicular to the length direction of the main groove, and the number of sub-grooves can be one or more.

[0020] Preferably, the vacuum valve sealing structure is further improved by forming a variable diameter hole with a larger upper diameter and a smaller lower diameter, such as a tapered hole.

[0021] Preferably, the vacuum valve sealing structure is further improved such that the shape of the upper end of the metal connector is adapted to the shape of the fixed connection through hole, and the upper end of the metal connector fills the fixed connection through hole.

[0022] Preferably, the vacuum valve sealing structure is further improved by connecting the metal connector to the metal base at the bottom wall of the groove via threaded connection, snap-fit ​​connection, or interference fit connection.

[0023] This utility model features an extension on both sides of the sealing ring, forming a "wing"-shaped sealing ring. A metal connector passes through the sealing ring to fix the sealing ring and the metal base together. The metal connector presses and fixes the sealing ring in the groove. Generally speaking, the above-mentioned structural design of this utility model can achieve at least the following technical effects:

[0024] 1. The metal connector of this utility model passes through the sealing ring and can fix the sealing ring in the groove, even without glue, it can firmly fix the sealing ring. This solves the technical problems of existing sealing rings being easy to fall off, having a short service life, and having poor adhesive strength.

[0025] 2. The metal connector of this utility model can be connected and fixed to the metal base through threads, snaps, or interference fits, which is easy to manufacture, does not easily delaminate during production, and has a high yield rate. This utility model allows for direct replacement of the sealing ring after it is corroded or damaged, eliminating the need to replace the valve, thereby reducing production costs. Attached Figure Description

[0026] The accompanying drawings are intended to illustrate the general characteristics of the methods, structures, and / or materials used in specific exemplary embodiments of the present invention, supplementing the description in the specification. However, these drawings are schematic diagrams not drawn to scale and may not accurately reflect the precise structural or performance characteristics of any of the given embodiments. The drawings should not be construed as limiting or restricting the range of numerical values ​​or properties covered by the exemplary embodiments of the present invention. The present invention will now be described in further detail with reference to the accompanying drawings and specific embodiments:

[0027] Figure 1 This is a cross-sectional schematic diagram of an existing combined valve sealing structure.

[0028] Figure 2 This is a cross-sectional schematic diagram of an existing double-groove sealing ring arrangement.

[0029] Figure 3 This is a cross-sectional schematic diagram of an existing single-sided grooved sealing ring arrangement.

[0030] Figure 4 This is a cross-sectional schematic diagram of an existing sealing ring without a border groove arrangement.

[0031] Figure 5 This is a partial view of the second embodiment of the present invention. Figure 1 This indicates a case where the top wall of the sealing ring extension is located in a double-sided groove, and the plane of the top wall is lower than the plane of the groove opening.

[0032] Figure 6 This is a partial view of the second embodiment of the present invention. Figure 2 It shows the case where the plane of the top wall of the sealing ring extension, the plane of the top wall of the metal connector, and the plane of the groove opening are the same plane when used for double-sided grooves.

[0033] Figure 7 This is a partial view of the second embodiment of the present invention. Figure 3 This indicates the case where the plane of the top wall of the sealing ring extension and the plane of the top wall of the metal connector are the same plane when the groove is not bordered.

[0034] Figure 8 This is a partial view of the second embodiment of the present invention. Figure 4 This indicates a situation where the plane of the top wall of the sealing ring extension and the plane of the top wall of the metal connector are different planes when the groove is not bordered.

[0035] Explanation of reference numerals in the attached figures:

[0036] Metal base 1;

[0037] Trench 2;

[0038] Sealing ring 3;

[0039] Extension 4;

[0040] Fixed connection through hole 5;

[0041] Metal connector 6;

[0042] Sub-groove 7. Detailed Implementation

[0043] The following specific embodiments illustrate the implementation of this utility model. Those skilled in the art can fully understand other advantages and technical effects of this utility model from the content disclosed in this specification. This utility model can also be implemented or applied through different specific embodiments, and various details in this specification can also be applied based on different viewpoints, with various modifications or changes made without departing from the overall design concept of the utility model. It should be noted that, in the absence of conflict, the following embodiments and features in the embodiments can be combined with each other. The following exemplary embodiments of this utility model can be implemented in many different forms and should not be construed as limited to the specific embodiments set forth herein. It should be understood that these embodiments are provided to make the disclosure of this utility model thorough and complete, and to fully convey the technical solutions of these exemplary embodiments to those skilled in the art. It should be understood that when an element is referred to as "connected" or "combined" to another element, the element can be directly connected or combined to the other element, or there may be intermediate elements. The difference is that when an element is referred to as "directly connected" or "directly combined" to another element, there are no intermediate elements. Throughout the drawings, the same reference numerals always denote the same elements.

[0044] In the first embodiment, the present invention provides a vacuum valve sealing structure, which has a metal base 1 and a groove 2 formed on the metal base 1, and a sealing ring 3 is arranged in the groove 2.

[0045] The sealing ring 3 has extensions 4 on both sides;

[0046] The fixed connection through hole 5 is uniformly formed on the extension 4 along the length direction of the groove 2;

[0047] It passes through the fixed connection through hole 5, and its lower part is fixedly connected to the metal base 1 at the bottom wall of the trench 2. Its upper part is used to apply pressure toward the metal base 1 to the extension 4.

[0048] The plane of the top wall of the metal connector 6 is lower than or level with the plane of the opening of the groove 2, and the sealing ring 3 protrudes at least partially from the plane of the opening of the groove 2, with the protruding part of the sealing ring 3 being higher than the plane of the top wall of the metal connector 6.

[0049] Preferably, the distance between the plane of the top wall of the extension 4 and the plane of the opening of the groove 2 is greater than 1 mm.

[0050] Preferably, the middle position of the sealing ring 3 protrudes from the plane where the opening of the groove 2 is located.

[0051] In the second embodiment, the present invention provides a vacuum valve sealing structure, which is a further improvement based on the first embodiment described above. The same parts will not be described again.

[0052] The bottom wall of the sealing ring 3 has a sub-groove 7, which is preferably a rectangular groove or a dovetail groove arranged along the length of the groove 2.

[0053] Preferably, in a further improvement of the second embodiment, the fixed connection through hole 5 is formed as a variable diameter hole with a larger upper diameter and a smaller lower diameter, such as a tapered hole.

[0054] The shape of the upper end of the metal connector 6 is adapted to the shape of the fixed connection through hole 5, and the upper end of the metal connector 6 fills the fixed connection through hole 5.

[0055] Optionally, the metal connector 6 is fixedly connected to the metal base 1 at the bottom wall of the groove 2 by means of threaded connection, snap-fit ​​connection or interference fit.

[0056] refer to Figure 5 As shown, the second embodiment of this utility model is used for a double-sided groove, where the plane of the top wall of the sealing ring extension is lower than the plane of the groove opening, and the plane of the top wall of the metal connector and the plane of the top wall of the sealing ring extension are the same plane.

[0057] refer to Figure 6 As shown, the second embodiment of this utility model is used for a double-sided groove, where the plane where the top wall of the sealing ring extension is located, the plane where the top wall of the metal connector is located, and the plane where the groove opening is located are the same plane. The top of the metal connector is formed as a cover, which presses against the top wall of the sealing ring extension. The plane where the top wall of the cover is located is the same as the plane where the top wall of the metal connector is located.

[0058] refer to Figure 7 As shown, the second embodiment of this utility model is used for the case where there is no edge groove and the plane where the top wall of the sealing ring extension is located and the plane where the top wall of the metal connector is located are the same plane.

[0059] refer to Figure 8 As shown, the second embodiment of this utility model is used for edgeless grooves. The plane where the top wall of the sealing ring extension is located and the plane where the top wall of the metal connector is located are different planes. The top of the metal connector is formed as a cover. The cover is pressed on the top wall of the sealing ring extension, and the plane where the top wall of the cover is located is lower than the plane where the highest position of the sealing ring is located.

[0060] In a third embodiment, the present invention provides a method for manufacturing a vacuum valve sealing structure, which, when used to manufacture the vacuum valve sealing structure described in any one of the first or second embodiments, includes the following steps:

[0061] S1 provides an upper mold, which is formed into a molding cavity mold of the shape and size of the sealing ring 3;

[0062] A middle mold is provided, which is formed into a molding cavity mold to accommodate the metal base 1;

[0063] A lower mold is provided to support the middle mold;

[0064] A metal base 1 and a metal connector 6 are provided; the metal base 1 and the metal connector 6 can be manufactured using existing machining processes;

[0065] S2, place the middle mold on the lower mold, and put the specified rubber material into the groove 2;

[0066] S3, cover with the upper mold, and enter the vulcanization molding equipment for vulcanization molding;

[0067] S4, remove the upper mold, middle mold and lower mold;

[0068] S5, connect and fix the metal connector 6 and the metal base 1.

[0069] Unless otherwise defined, all terms used herein (including technical and scientific terms) shall have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. It will also be understood that, unless expressly defined herein, terms such as those defined in a general dictionary shall be interpreted as having the meaning consistent with their meaning in the relevant field context, and not as having an idealized or overly formal meaning.

[0070] The present invention has been described in detail above through specific embodiments and examples, but these are not intended to limit the present invention. Many modifications and improvements can be made by those skilled in the art without departing from the principles of the present invention, and these should also be considered within the scope of protection of the present invention.

Claims

1. A vacuum gate valve sealing structure, having a metal base (1) and a groove (2) formed on the metal base (1), and a sealing ring (3) arranged in the groove (2), characterized in that: an extension (4) is formed on both sides of the sealing ring (3); a fixed connection through hole (5) is uniformly formed on the extension (4) along the length direction of the groove (2); a metal connecting piece (6) passes through the fixed connection through hole (5), and the lower part of the metal connecting piece (6) is fixedly connected to the metal base (1) at the bottom wall of the groove (2), and the upper part of the metal connecting piece (6) is used to apply pressure to the extension (4) towards the metal base (1); wherein the plane where the top wall of the metal connecting piece (6) is located is lower than or flush with the plane where the opening of the groove (2) is located, the sealing ring (3) at least partially protrudes from the plane where the opening of the groove (2) is located, and the protruding part of the sealing ring (3) is higher than the plane where the top wall of the metal connecting piece (6) is located. The distance between the plane where the top wall of the extension (4) is located and the plane where the opening of the groove (2) is located is greater than 1mm. The middle position of the sealing ring (3) protrudes from the plane where the opening of the groove (2) is located. The bottom wall of the sealing ring (3) is formed with a sub-groove (7). The fixed connection through hole (5) is formed as a variable diameter hole with a large upper hole diameter and a small lower hole diameter.

2. The vacuum gate valve seal of claim 1, wherein: The upper end of the metal connecting piece (6) is shaped to adapt to the shape of the fixed connection through hole (5), and the upper end of the metal connecting piece (6) fills the fixed connection through hole (5).

3. The vacuum gate valve seal of claim 1, wherein: The metal connecting piece (6) is fixedly connected to the metal base (1) at the bottom wall of the groove (2) by screw connection, buckle connection or interference fit.

4. The vacuum gate valve seal of claim 1, wherein: ​ 5. The vacuum gate valve seal of claim 1, wherein: ​ 6. The vacuum gate valve seal of claim 5, wherein: ​ 7. The vacuum gate valve seal of claim 5, wherein: ​

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