Purging module, vacuum system and processing equipment

Abstract

The embodiment of the utility model relates to the technical field of vacuum pump manufacturing, in particular to a purging module, a vacuum system and machining equipment. The purging module comprises a main pipeline and at least one branch pipeline. The main pipeline is used for being communicated with a purging air source. The branch pipeline is used for connecting the main pipeline with at least one component of the vacuum pump so as to purge the at least one component of the vacuum pump. At least one component of the vacuum pump comprises at least one of an air inlet of the vacuum pump, a shaft seal cavity of a backing pump of the vacuum pump, a shaft seal cavity of a post-stage pump of the vacuum pump, a cavity of the backing pump of the vacuum pump, a cavity of the post-stage pump of the vacuum pump and a tail exhaust pipeline of the vacuum pump. Wherein each branch pipeline comprises a pressure regulating valve, a pressure gauge, a flow controller and an electromagnetic valve which are sequentially connected between the main pipeline and at least one corresponding component. The purging module is beneficial to reducing waste of purging gas.

Description

Technical Field

[0001] This application relates to the field of vacuum pump manufacturing technology, and more specifically, to a purging module, a vacuum system, and processing equipment. Background Technology

[0002] In industries such as semiconductors, microelectronics, and solar cells, vacuum pumps are the core material for obtaining a vacuum environment. They are widely used in processing equipment for thin film deposition, doping, passivation, and crystal pulling to achieve the appropriate process vacuum level. However, with the continuous innovation of various processes in recent years, the requirements for vacuum pumps have become increasingly stringent. If the vacuum pump's anti-interference capability is weak, it can affect the vacuum system, leading to a decrease in product yield, or even damage the vacuum pump itself.

[0003] Although existing vacuum pumps have a protective gas path for adding purge gas (such as inert gas), there is a problem of wasting purge gas in actual production. Utility Model Content

[0004] This application provides a purging module. The purging module includes a main pipeline and at least one branch pipeline. The main pipeline is connected to a purging gas source. The branch pipeline connects the main pipeline to at least one component of a vacuum pump for purging at least one component of the vacuum pump. At least one component of the vacuum pump includes at least one of the following: a vacuum pump inlet, a shaft seal chamber of a pre-pump, a shaft seal chamber of a post-pump, a chamber of the pre-pump, a chamber of the post-pump, and a tailpipe of the vacuum pump. Each branch pipeline includes a pressure regulating valve, a pressure gauge, a flow controller, and a solenoid valve sequentially connected between the main pipeline and the corresponding at least one component.

[0005] The purging module of the first aspect of this application includes a main pipeline connected to a purging gas source and at least one branch pipeline connected to the main pipeline and at least one component of a vacuum pump (including an inlet, pre- and post-stage pump shaft seal chambers, pre- and post-stage pump chambers, and an exhaust pipe). Each branch pipeline includes a pressure regulating valve, a pressure gauge, a flow controller, and a solenoid valve connected in sequence. Therefore, this purging module is versatile and can be applied to different parts of a vacuum pump. The pressure regulating valve, pressure gauge, and flow controller in each branch pipeline facilitate precise control of the gas pressure and flow rate in each branch pipeline. Furthermore, the solenoid valve in each branch pipeline allows for independent on / off control of each branch pipeline, enabling on-demand purging and avoiding waste.

[0006] In some embodiments, at least one branch line includes a first branch line, a second branch line, a third branch line, and a fourth branch line. The first branch line is configured to connect between the main pipeline and the inlet of the vacuum pump, and includes a first pressure regulating valve, a first pressure gauge, a first flow controller, and a first solenoid valve sequentially connected between the main pipeline and the inlet of the vacuum pump. The second branch line is configured to connect between the main pipeline and the shaft seal chamber of the pre-pump and the shaft seal chamber of the vacuum pump, and includes a second pressure regulating valve, a second pressure gauge, and a second flow controller sequentially connected between the main pipeline and the shaft seal chambers of the pre-pump and the vacuum pump. The third branch line is configured to connect between the main pipeline and the chambers of the pre-pump and the vacuum pump, and includes a third pressure regulating valve, a third pressure gauge, and a third flow controller sequentially connected between the main pipeline and the chambers of the pre-pump and the vacuum pump. The fourth branch line is configured to connect between the main pipeline and the exhaust pipe of the vacuum pump. The fourth branch line includes a fourth pressure regulating valve, a fourth pressure gauge and a fourth flow controller for sequentially connecting between the main pipeline and the exhaust pipe of the vacuum pump.

[0007] In some embodiments, the second branch line further includes a second solenoid valve and a third solenoid valve. The second solenoid valve is configured to connect between the second flow controller and the shaft seal chamber of the pre-pump of the vacuum pump. The third solenoid valve is configured to connect between the second flow controller and the shaft seal chamber of the post-pump of the vacuum pump.

[0008] In some embodiments, the third branch line further includes a fourth solenoid valve and a fifth solenoid valve. The fourth solenoid valve is configured to connect between the third flow controller and the chamber of the pre-pump of the vacuum pump, and the fifth solenoid valve is configured to connect between the third flow controller and the chamber of the post-pump of the vacuum pump.

[0009] In some embodiments, the fourth branch line also includes a special gas dilution line and a power failure protection line. The special gas dilution line and the power failure protection line are connected in parallel between the fourth flow controller and the exhaust pipe of the vacuum pump. The special gas dilution line connects the main line and the exhaust pipe of the vacuum pump when the vacuum pump is evacuating the special gas, and the power failure protection line connects the main line and the exhaust pipe of the vacuum pump when the vacuum pump is powered off.

[0010] In some embodiments, the special gas dilution line includes a speed control valve and a sixth solenoid valve, with the speed control valve connected between the fourth flow controller and the sixth solenoid valve.

[0011] In some embodiments, the power failure protection circuit includes a seventh solenoid valve, which is used to open when the vacuum pump is powered off to connect the main pipeline to the exhaust pipe of the vacuum pump, and to close when the vacuum pump is powered on to shut off the main pipeline to the exhaust pipe of the vacuum pump.

[0012] A second aspect of this application provides a vacuum system. The vacuum system includes a vacuum pump and a purging module connected to the vacuum pump, the purging module being the same as the purging module described in the first aspect of this application.

[0013] The vacuum system of the second aspect of this application has at least the same advantages as the purging module of the first aspect, which will not be elaborated further.

[0014] In some embodiments, the vacuum system also includes a purge gas source connected to the main pipeline.

[0015] A third aspect of this application provides a processing apparatus. The processing apparatus includes a reaction chamber and a vacuum system connected to the reaction chamber, which is the vacuum system described in the second aspect of this application.

[0016] The processing equipment of the third aspect of this application has at least the same advantages as the vacuum system of the second aspect of this application, which will not be elaborated further. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the structure of a vacuum system according to an embodiment of this application.

[0018] Figure 2 This is a schematic diagram of the structure of a processing device according to an embodiment of this application.

[0019] Key component symbols: Vacuum system - 100; Purge gas source - 10; Purge module - 20; Main pipeline - A; Branch pipeline - B; First branch pipeline - B1; Second branch pipeline - B2; Third branch pipeline - B3; Fourth branch pipeline - B4; Special gas dilution pipeline - B41; Power failure protection pipeline - B42; Pressure regulating valve - 21; First pressure regulating valve - 21a; Second pressure regulating valve - 21b; Third pressure regulating valve - 21c; Fourth pressure regulating valve - 21d; Pressure gauge - 22; First pressure gauge - 22a; Second pressure gauge - 22b; Third pressure gauge - 22c; Fourth pressure gauge - 22d; Flow controller - 23; First flow... Controller-23a; Second flow controller-23b; Third flow controller-23c; Fourth flow controller-23d; Solenoid valve-24; First solenoid valve-24a; Second solenoid valve-24b; Third solenoid valve-24c; Fourth solenoid valve-24d; Fifth solenoid valve-24e; Sixth solenoid valve-24f; Seventh solenoid valve-24g; Speed ​​control valve-25; Vacuum pump-30; Air inlet-31; Shaft seal chamber of the pre-pump-32; Shaft seal chamber of the post-pump-33; Chamber of the pre-pump-34; Chamber of the post-pump-35; Tail exhaust pipe-36; Reaction chamber-200; Processing equipment-1000.

[0020] The following detailed description, in conjunction with the accompanying drawings, will further illustrate this application. Detailed Implementation

[0021] The embodiments of this application are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the embodiments of this application, and should not be construed as limiting this application.

[0022] In the description of the embodiments of this application, the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the implementation methods of this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0023] In the description of the embodiments of this application, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, features defined with "first" and "second" may explicitly or implicitly include one or more of the stated features.

[0024] In the description of the embodiments of this application, unless otherwise stated, "a plurality of" means two or more.

[0025] In the description of the embodiments of this application, unless otherwise stated, the terms "installation", "connection" and "linking" should be interpreted broadly. For example, they can be fixed connections, detachable connections, or integral connections; they can be mechanical connections, electrical connections, or connections that can communicate with each other; they can be direct connections or indirect connections through an intermediate medium; they can be internal connections between two components or interactive relationships between two components.

[0026] Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0027] Although existing vacuum pumps have a protective gas path for adding purge gases (including nitrogen, argon, etc.), in actual production processes, in order to save costs, the purge gas is only pressure-regulated once at the inlet of the vacuum pump before being delivered to the corresponding location, resulting in great waste. Secondly, the pressure and flow rate requirements of inert gas vary for components in different locations. Thirdly, the secondary distribution costs of vacuum pumps are also gradually attracting attention. Reasonable use of inert gas is conducive to cost reduction and efficiency improvement.

[0028] Specifically, the inventors of this application discovered in the process of realizing this application that in the related technology, the function of purging gas at the inlet of the vacuum pump is missing or cannot be adjusted, while the amount of purging gas used at the pump inlet is large and the pressure required is higher than that used by the pump itself. If the internal gas pressure and flow rate of the vacuum pump are used, the effect of adding gas to the pump inlet for purging will be greatly reduced.

[0029] Furthermore, in related technologies, the purge gas shaft seal function for the bearings of the backing and backing pumps of vacuum pumps is either missing or cannot be adjusted. Using purge gas shaft seals can reduce the entry of dust particles into the bearings of the vacuum pump, lowering the bearing friction coefficient. However, this requires relatively low gas flow rate and pressure. Excessive pressure and flow rate lead to waste of purge gas, increasing the cost of purge gas. Moreover, in related technologies, while purge gas is generally used for the backing and backing pump chambers and rotors of vacuum pumps, the gas flow rates differ. The amount of purge gas used is closely related to the process parameters of the vacuum system and needs to be adjusted according to the specific circumstances.

[0030] Furthermore, the purging gas for the vacuum pump exhaust pipe is typically placed on an external pipeline, increasing costs and failing to clean the pipeline from the exhaust port of the downstream pump to the pump tail outlet, leading to dust accumulation. Moreover, in related technologies, the purging gas for the vacuum pump is always performed upon pump startup, resulting in wasted purging gas.

[0031] In response, this application provides a purging module, a vacuum system, and a processing device to solve the problem of wasted purging gas in related technologies.

[0032] Figure 1 This is a schematic diagram of the structure of a vacuum system according to an embodiment of this application. Figure 1 As shown, the vacuum system 100 includes a purge gas source 10, a purge module 20, and a vacuum pump 30. The purge module 20 is connected between the purge gas source 10 and the vacuum pump 30. The purge module 20 is used to deliver the purge gas in the purge gas source 10 to different components of the vacuum pump 30 to protect the vacuum pump 30.

[0033] In some embodiments, the purge gas in the purge gas source 10 may be, but is not limited to, nitrogen or an inert gas (such as argon).

[0034] Specifically, the purging module 20 includes a main pipeline A and at least one branch pipeline B. The main pipeline A is connected to the purging air source 10. The branch pipeline B is used to connect the main pipeline A and at least one component of the vacuum pump 30 to purge at least one component of the vacuum pump 30. At least one component of the vacuum pump 30 includes at least one of the following: an air inlet 31 of the vacuum pump 30, a shaft seal chamber 32 of the pre-pump of the vacuum pump 30, a shaft seal chamber 33 of the post-pump of the vacuum pump 30, a chamber 34 of the pre-pump of the vacuum pump 30, a chamber 35 of the post-pump of the vacuum pump 30, and an exhaust pipe 36 of the vacuum pump 30. Each branch pipeline B includes a pressure regulating valve 21, a pressure gauge 22, a flow controller 23, and a solenoid valve 24 connected sequentially between the main pipeline A and the corresponding at least one component.

[0035] Therefore, the purging module 20 is versatile and can be applied to different parts of the vacuum pump 30. The pressure regulating valve 21, pressure gauge 22, and flow controller 23 in each branch pipe B facilitate precise control of the gas pressure and flow rate in each branch pipe B. Furthermore, the solenoid valve 24 in each branch pipe B allows for independent on / off control of each branch pipe B, enabling purging on demand and avoiding waste.

[0036] In some embodiments, at least one branch pipe B includes a first branch pipe B1, a second branch pipe B2, a third branch pipe B3, and a fourth branch pipe B4.

[0037] The first branch line B1 is configured to connect the main line A and the air inlet 31 of the vacuum pump 30. The first branch line B1 includes a first pressure regulating valve 21a, a first pressure gauge 22a, a first flow controller 23a and a first solenoid valve 24a for sequentially connecting the main line A and the air inlet 31 of the vacuum pump 30.

[0038] The second branch line B2 is configured to connect the main line A between the shaft seal chamber 32 of the pre-pump and the shaft seal chamber 33 of the post-pump of the vacuum pump 30. The second branch line B2 includes a second pressure regulating valve 21b, a second pressure gauge 22b, and a second flow controller 23b, which are sequentially connected between the main line A and the shaft seal chamber 32 of the pre-pump and the shaft seal chamber 33 of the vacuum pump 30.

[0039] The third branch line B3 is configured to connect the main line A to the chamber 34 of the pre-pump of the vacuum pump 30 and the chamber 35 of the post-pump of the vacuum pump 30. The third branch line B3 includes a third pressure regulating valve 21c, a third pressure gauge 22c, and a third flow controller 23c for sequentially connecting the main line A to the chamber 34 of the pre-pump of the vacuum pump 30 and the chamber 35 of the post-pump of the vacuum pump 30.

[0040] The fourth branch line B4 is configured to connect between the main line A and the tailpipe 36 of the vacuum pump 30. The fourth branch line B4 includes a fourth pressure regulating valve 21d, a fourth pressure gauge 22d, and a fourth flow controller 23d for sequentially connecting between the main line A and the tailpipe 36 of the vacuum pump 30.

[0041] Therefore, the purging module 20 can purge and protect the key components of the vacuum pump 30.

[0042] In some embodiments, the second branch line B2 further includes a second solenoid valve 24b and a third solenoid valve 24c. The second solenoid valve 24b is configured to connect between the second flow controller 23b and the shaft seal chamber 32 of the pre-pump of the vacuum pump 30. The third solenoid valve 24c is configured to connect between the second flow controller 23b and the shaft seal chamber 33 of the post-pump of the vacuum pump 30.

[0043] Therefore, the purging module 20 can achieve independent purging control of the shaft sealing chamber 32 of the front pump and the shaft sealing chamber 33 of the rear pump of the vacuum pump 30, and can select to purge individually or simultaneously as needed, which is more flexible; and can avoid unnecessary purging and save purging gas.

[0044] In some embodiments, the third branch line B3 further includes a fourth solenoid valve 24d and a fifth solenoid valve 24e. The fourth solenoid valve 24d is configured to connect between the third flow controller 23c and the chamber 34 of the pre-pump of the vacuum pump 30, and the fifth solenoid valve 24e is configured to connect between the third flow controller 23c and the chamber 35 of the post-pump of the vacuum pump 30.

[0045] Therefore, the purging module 20 can achieve independent purging control of the chamber 34 of the front pump and the chamber 35 of the back pump of the vacuum pump 30, and can select to purge individually or simultaneously as needed, which is more flexible; and can avoid unnecessary purging and save purging gas.

[0046] In some embodiments, the fourth branch line B4 further includes a special gas dilution line B41 and a power failure protection line B42. The special gas dilution line B41 and the power failure protection line B42 are connected in parallel between the fourth flow controller 23d and the exhaust pipe 36 of the vacuum pump 30. The special gas dilution line B41 connects the main line A and the exhaust pipe 36 of the vacuum pump 30 when the vacuum pump 30 is evacuating the special gas; the power failure protection line B42 connects the main line A and the exhaust pipe 36 of the vacuum pump 30 when the vacuum pump 30 is de-energized.

[0047] Therefore, when extracting special gases, the concentration of special gases in the tailpipe 36 is reduced through the special gas dilution pipeline B41, thus reducing safety risks. In the event of a power outage, the tailpipe 36 is quickly purged through the power failure protection pipeline B42 to prevent waste gas backflow and protect equipment and personnel.

[0048] In some embodiments, the special gas dilution line B41 includes a speed control valve 25 and a sixth solenoid valve 24f. The speed control valve 25 is connected between the fourth flow controller 23d and the sixth solenoid valve 24f.

[0049] Therefore, the flow rate of the special gas dilution pipeline B41 can be controlled by the speed control valve 25, allowing for more precise dilution. The on / off state of the dilution pipeline can be controlled by the sixth solenoid valve 24f, avoiding unnecessary dilution.

[0050] In some embodiments, the power failure protection line B42 includes a seventh solenoid valve 24g. The seventh solenoid valve 24g is used to open when the vacuum pump 30 is de-energized to connect the main line A with the exhaust pipe 36 of the vacuum pump 30, and to close when the vacuum pump 30 is energized to disconnect the main line A from the exhaust pipe 36 of the vacuum pump 30.

[0051] This facilitates the automatic control of the power failure protection pipeline B42 without manual intervention; and it also helps ensure timely purging of the tailpipe 36 during power failure.

[0052] Specifically, the process by which the purging module 20 of this application purifies the vacuum pump 30 is as follows.

[0053] The purge gas from the purge gas source 10 is connected to the inlet 31 of the vacuum pump 30. Therefore, no other purge gas interface is required around the vacuum pump 30, saving on the cost of external components.

[0054] The purge gas is divided into four branches via the gas distribution block of main pipeline A: branch B1, branch B2, branch B3, and branch B4. The gas distribution block is small in size and low in cost.

[0055] The purging gas in the first branch pipeline B1 passes sequentially through the first pressure regulating valve 21a, the first pressure gauge 22a, the first flow controller 23a, and the first solenoid valve 24a before entering the inlet 31 of the vacuum pump 30. The pressure and flow rate of the purging gas can be adjusted according to actual operating conditions, and the actual purging gas flow rate can be transmitted and the usage statistics fed back to the main unit. The first solenoid valve 24a controls the on / off state, rationally allocating the purging gas supply and cut-off, thus saving on purging gas consumption costs.

[0056] The purge gas from the second branch pipeline B2 passes sequentially through the second pressure regulating valve 21b, the second pressure gauge 22b, and the second flow controller 23b before splitting into two paths. One path passes through the second solenoid valve 24b and enters the shaft seal chamber 32 of the pre-pump of the vacuum pump 30. The other path passes through the third solenoid valve 24c and enters the shaft seal chamber 33 of the post-pump of the vacuum pump 30. Thus, the purge gas flow is controlled separately, allowing for selective purging of the shaft seal chamber 32 of the pre-pump alone, the shaft seal chamber 33 of the post-pump alone, or both shaft seal chambers 32 and 33 of the post-pump simultaneously, depending on the specific process.

[0057] The purging gas in the third branch pipeline B3 passes sequentially through the third pressure regulating valve 21c, the third pressure gauge 22c, and the third flow controller 23c before splitting into two paths. One path flows through the fourth solenoid valve 24d into the chamber 34 of the pre-pump, and the other path flows through the fifth solenoid valve 24e into the chamber 35 of the post-pump. This allows for separate control of the purging gas flow, enabling the selection of purging chamber 34 of the pre-pump alone, chamber 35 of the post-pump alone, or both chambers 34 and 35 of the post-pump simultaneously, depending on the specific process.

[0058] The purging gas from the fourth branch pipe B4 passes sequentially through the fourth pressure regulating valve 21d, the fourth pressure gauge 22d, and the fourth flow controller 23d before splitting into two paths. One path passes through the speed regulating valve 25 and the sixth solenoid valve 24f before entering the exhaust pipe 36 (also known as the stage pump outlet) of the vacuum pump 30. The other path passes through the seventh solenoid valve 24g before merging into the exhaust pipe 36 of the vacuum pump 30. This allows for separate control of the purging gas flow. When the vacuum pump 30 is operating normally, the seventh solenoid valve 24g is closed, and the sixth solenoid valve 24f is controlled according to different processes, reducing the amount of purging gas used and achieving cost reduction. When the vacuum pump 30 jams or experiences a sudden power outage, both the seventh and sixth solenoid valves 24g and 24f open simultaneously, allowing a large amount of purging gas to enter and blow the exhaust gas out of the exhaust pipe 36 of the vacuum pump 30, protecting equipment and personnel safety.

[0059] This application also provides a processing device. For example... Figure 2 As shown, the processing equipment 1000 includes a reaction chamber 200 and a vacuum system 100 connected to the reaction chamber 200. The processing equipment 1000 can be, but is not limited to, vacuum coating equipment for thin film deposition, doping, passivation, etc.

[0060] The above embodiments are only used to illustrate the technical solutions of this application and are not intended to limit it. Although this application has been described in detail with reference to the above preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions to the technical solutions of this application should not depart from the spirit and scope of the technical solutions of this application.

Claims

1. A purge module, characterized by, The system comprises: a main pipeline for communicating with a purge gas source; and at least one branch pipeline for connecting the main pipeline and at least one component of a vacuum pump to purge the at least one component of the vacuum pump, the at least one component of the vacuum pump comprising at least one of an intake port of the vacuum pump, a shaft seal cavity of a backing pump of the vacuum pump, a shaft seal cavity of a roughing pump of the vacuum pump, a chamber of the backing pump of the vacuum pump, a chamber of the roughing pump of the vacuum pump, and a tail pipe of the vacuum pump; wherein each of the branch pipelines comprises, in sequence, a pressure regulating valve, a pressure gauge, a flow controller, and a solenoid valve connected between the main pipeline and the corresponding at least one component.

2. The purge module of claim 1, wherein, The at least one branch pipeline comprises a first branch pipeline, a second branch pipeline, a third branch pipeline, and a fourth branch pipeline. The first branch pipeline is configured to be connected between the main pipeline and the intake port of the vacuum pump, and comprises, in sequence, a first pressure regulating valve, a first pressure gauge, a first flow controller, and a first solenoid valve connected between the main pipeline and the intake port of the vacuum pump. The second branch pipeline is configured to be connected between the main pipeline and the shaft seal cavities of the backing pump and the roughing pump of the vacuum pump, and comprises, in sequence, a second pressure regulating valve, a second pressure gauge, and a second flow controller connected between the main pipeline and the shaft seal cavities of the backing pump and the roughing pump of the vacuum pump. The third branch pipeline is configured to be connected between the main pipeline and the chambers of the backing pump and the roughing pump of the vacuum pump, and comprises, in sequence, a third pressure regulating valve, a third pressure gauge, and a third flow controller connected between the main pipeline and the chambers of the backing pump and the roughing pump of the vacuum pump. The fourth branch pipeline is configured to be connected between the main pipeline and the tail pipe of the vacuum pump, and comprises, in sequence, a fourth pressure regulating valve, a fourth pressure gauge, and a fourth flow controller connected between the main pipeline and the tail pipe of the vacuum pump.

3. The purge module of claim 2, wherein, The second branch pipeline further comprises a second solenoid valve and a third solenoid valve, the second solenoid valve being configured to be connected between the second flow controller and the shaft seal cavity of the backing pump of the vacuum pump, and the third solenoid valve being configured to be connected between the second flow controller and the shaft seal cavity of the roughing pump of the vacuum pump.

4. The purge module of claim 2, wherein, The third branch pipeline further comprises a fourth solenoid valve and a fifth solenoid valve, the fourth solenoid valve being configured to be connected between the third flow controller and the chamber of the backing pump of the vacuum pump, and the fifth solenoid valve being configured to be connected between the third flow controller and the chamber of the roughing pump of the vacuum pump.

5. The purge module of claim 2, wherein, The fourth branch pipeline further comprises a special gas dilution pipeline and a power-off protection pipeline, the special gas dilution pipeline and the power-off protection pipeline are used to be connected in parallel between the fourth flow controller and the tail exhaust pipeline of the vacuum pump, the special gas dilution pipeline is connected between the main pipeline and the tail exhaust pipeline of the vacuum pump when the vacuum pump is pumping special gas, and the power-off protection pipeline is connected between the main pipeline and the tail exhaust pipeline of the vacuum pump when the vacuum pump is powered off.

6. The purge module of claim 5, wherein, The special gas dilution pipeline comprises a speed regulating valve and a sixth electromagnetic valve, and the speed regulating valve is connected between the fourth flow controller and the sixth electromagnetic valve.

7. The purge module of claim 5, wherein, The power-off protection pipeline comprises a seventh electromagnetic valve, the seventh electromagnetic valve is used to be opened when the vacuum pump is powered off to connect the main pipeline and the tail exhaust pipeline of the vacuum pump, and the seventh electromagnetic valve is used to be closed when the vacuum pump is powered on to shut off the main pipeline and the tail exhaust pipeline of the vacuum pump.

8. A vacuum system, characterized by The vacuum system further comprises a purge gas source connected with the main pipeline.

9. The vacuum system of claim 8, wherein, The vacuum system further comprises a purge gas source connected with the main pipeline.

10. A processing apparatus characterized by comprising: The vacuum system further comprises a purge gas source connected with the main pipeline.

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