Vacuum heat treatment system for high-purity silicon carbide ceramic part

By introducing automatic push-pull and disassembly components into the vacuum heat treatment system, the problem of the difficulty in quickly removing silicon carbide ceramic parts has been solved, enabling rapid removal and convenient operation of silicon carbide ceramic parts.

CN223769249UActive Publication Date: 2026-01-06HANGZHOU HERUI SEMICONDUCTOR TECHNOLOGY CO LTD
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Patent Information

Application Number
CN202520299235.9
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-02-24
Publication Date
2026-01-06
Estimated Expiration
2035-02-24

AI Technical Summary

Technical Problem

Existing vacuum heat treatment systems have difficulty quickly removing silicon carbide ceramic components, resulting in a high risk of burns to operators' hands and reducing the system's convenience.

Method used

An automatic push-pull assembly was designed, which uses a motor to drive a screw to move the placement plate, and is equipped with a disassembly and assembly component to facilitate the quick separation of the placement plate from the docking block, thereby realizing the automated removal of the placement plate.

Benefits of technology

It enables the rapid removal of silicon carbide ceramic components, avoiding burns to the operator's hands and improving the system's convenience and assembly/disassembly efficiency.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model belongs to the technical field of vacuum heat treatment, and discloses a high-purity silicon carbide ceramic part vacuum heat treatment system which comprises a furnace body, the bottom of the furnace body is connected with supporting legs, one side of the furnace body is rotationally connected with a furnace door, one side of the furnace door is provided with a quenching motor, and the top of the furnace body is provided with a vacuum pump and a safety valve; the automatic push-pull assembly is arranged in the furnace body, the motor is started to drive the screw rod to rotate through the bearing, the screw rod is in threaded connection with the sliding block, and the automatic push-pull assembly is arranged in the furnace body. A screw rod drives a placing plate to move on two connecting blocks through a sliding block and a butt joint block, so that the placing plate moves to the outside of the furnace body, an operator does not need to pull out the placing plate manually, the hand of the operator is prevented from being scalded, the silicon carbide ceramic part can be taken out quickly, and the working efficiency is improved. And the convenience of the vacuum heat treatment system is improved.
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Description

Technical Field

[0001] This utility model belongs to the field of vacuum heat treatment technology, specifically relating to a vacuum heat treatment system for high-purity silicon carbide ceramic components. Background Technology

[0002] Silicon carbide ceramics are advanced ceramic materials containing silicon and carbon, possessing excellent mechanical properties at both room temperature and high temperature. In the process of processing silicon carbide ceramics, in order to improve their performance and structure, it is usually necessary to perform heat treatment on the ceramic parts, which involves the use of a vacuum heat treatment system.

[0003] Currently, after heat treatment of silicon carbide ceramic components, operators usually need to manually remove the placement plate containing the ceramic components from the heat treatment furnace. However, due to the high temperature inside the furnace, the conductive furnace body can easily burn the operator's hands, which is detrimental to the operator's health. Furthermore, it is difficult to quickly remove the silicon carbide ceramic components, reducing the convenience of the vacuum heat treatment system. Utility Model Content

[0004] The purpose of this invention is to provide a vacuum heat treatment system for high-purity silicon carbide ceramic components, in order to solve the problem that existing vacuum heat treatment systems are difficult to remove silicon carbide ceramic components quickly, thus reducing the convenience of the vacuum heat treatment system.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a vacuum heat treatment system for high-purity silicon carbide ceramic components, comprising: a furnace body, with support legs connected to the bottom of the furnace body and a furnace door rotatably connected to one side of the furnace body, a quenching motor installed on one side of the furnace door, and a vacuum pump and a safety valve installed on the top of the furnace body; an automatic push-pull assembly, the automatic push-pull assembly being disposed inside the furnace body, the automatic push-pull assembly including connecting blocks, two connecting blocks symmetrically connected to the inner wall of the furnace body, a baffle provided on the inner wall of the furnace body, one side of each of the two connecting blocks being connected to one side of the baffle, and a sliding groove being opened on the top of each of the two connecting blocks, a screw being rotatably connected to one side of the inner wall of one of the sliding grooves via a bearing, one end of the screw penetrating through one side of the baffle, a motor being installed on one side of the baffle, the output ends of the motors being interconnected, sliders being slidably connected inside each of the two sliding grooves, the screw and the slider being threadedly connected, a mating block being connected to the top of each of the two sliders, and a placement plate being connected between the two mating blocks.

[0006] Preferably, a disassembly assembly is provided between the placement plate and the docking block. The disassembly assembly includes a docking block, two docking blocks are respectively connected to both sides of the placement plate, a docking groove matching the docking block is opened on one side of the top of the docking block, an insertion hole is opened on one side of the inner wall of the docking groove, and an insertion rod matching the insertion hole passes through the docking plate.

[0007] Preferably, the top of the placement plate has a groove, and one side of the inner wall of the groove has multiple through holes.

[0008] Preferably, each of the two connecting blocks has a support block connected to one side of its opposite side.

[0009] Preferably, a guide rod is connected between the inner walls of the two sides of one of the grooves, and the guide rod passes through the slider.

[0010] Preferably, a pull ring is connected to the top end of the insertion rod.

[0011] Compared with the prior art, this utility model has the following advantages:

[0012] (1) By setting up an automatic push-pull assembly, the motor is turned on, and the motor drives the screw to rotate through the bearing. Since the screw and the slider are connected by threads, the screw drives the placement plate to move on the two connecting blocks through the slider and the docking block, so that the placement plate moves to the outside of the furnace body. There is no need for the operator to manually pull out the placement plate, which avoids burns to the operator's hands and allows for quick removal of silicon carbide ceramic parts, thus improving the convenience of the vacuum heat treatment system.

[0013] (2) By setting up a disassembly and assembly component, when it is necessary to separate the placement plate from the docking block, the insertion rod is pulled upward to move the insertion rod upward and make one end of the insertion rod disengage from the insertion hole, so that the docking plate is released from the limit on the docking groove and the placement plate is pulled outward to separate the placement plate from the docking block. This realizes the rapid separation of the placement plate from the docking block, improves the disassembly and assembly efficiency of the placement plate, facilitates the uniform removal of ceramic parts on the placement plate, and is beneficial to the operator. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the structure of this utility model;

[0015] Figure 2 for Figure 1 Enlarged view of point A;

[0016] Figure 3 This is a top sectional view of the furnace body of this utility model (excluding the furnace door);

[0017] In the diagram: 1. Furnace body; 2. Support leg; 3. Furnace door; 4. Quenching motor; 5. Vacuum pump; 6. Safety valve; 7. Baffle; 8. Connecting block; 9. Slide groove; 10. Slider; 11. Screw; 12. Guide rod; 13. Motor; 14. Connecting block; 15. Connecting plate; 16. Placement plate; 17. Groove; 18. Through hole; 19. Connecting groove; 20. Insertion hole; 21. Insertion rod; 22. Pull ring; 23. Support block. Detailed Implementation

[0018] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0019] Reference Figures 1-3 As shown, this utility model provides the following technical solution: a vacuum heat treatment system for high-purity silicon carbide ceramic components, comprising: a furnace body 1, with support legs 2 connected to the bottom of the furnace body 1, and a furnace door 3 rotatably connected to one side of the furnace body 1, a quenching motor 4 installed on one side of the furnace door 3, and a vacuum pump 5 and a safety valve 6 installed on the top of the furnace body 1; an automatic push-pull assembly, which is disposed inside the furnace body 1, and includes connecting blocks 8, two connecting blocks 8 symmetrically connected to the inner wall of the furnace body 1, and a baffle 7 provided on the inner wall of the furnace body 1. One side of each block 8 is connected to one side of each baffle 7, and each of the two connecting blocks 8 has a groove 9 on its top. One side of the inner wall of one of the grooves 9 is rotatably connected to a screw 11 via a bearing. One end of the screw 11 passes through one side of the baffle 7. A motor 13 is installed on one side of the baffle 7. The output ends of the motor 13 are connected to each other. A slider 10 is slidably connected inside each of the two grooves 9. The screw 11 and the slider 10 are threaded together. A docking block 14 is connected to the top of each of the two sliders 10. A placement plate 16 is connected between the two docking blocks 14.

[0020] Through the above technical solution:

[0021] Specifically, when it is necessary to remove the ceramic component from inside the furnace body 1, the motor 13 is turned on, so that the motor 13 drives the screw 11 to rotate through the bearing. Since the screw 11 is threadedly connected to the slider 10, the screw 11 drives the placement plate 16 to move on the two connecting blocks 8 through the slider 10 and the docking block 14, so that the placement plate 16 moves to the outside of the furnace body 1, thus eliminating the need for the operator to manually pull out the placement plate.

[0022] Further embodiments are provided in this utility model, see below. Figures 1-3A disassembly assembly is provided between the placement plate 16 and the docking block 14. The disassembly assembly includes a docking plate 15. Two docking plates 15 are respectively connected to the two sides of the placement plate 16. A docking groove 19 matching the docking plate 15 is provided on one side of the top of the docking block 14. An insertion hole 20 is provided on one side of the inner wall of the docking groove 19. An insertion rod 21 matching the insertion hole 20 passes through the docking plate 15.

[0023] Through the above technical solution:

[0024] Specifically, when it is necessary to separate the placement plate 16 from the docking block 14, the insertion rod 21 is pulled upward, causing the insertion rod 21 to move upward and one end of the insertion rod 21 to disengage from the insertion hole 20, thereby releasing the docking plate 15 from the docking groove 19. The placement plate 16 is then pulled outward, causing the placement plate 16 to disengage from the docking block 15.

[0025] Reference Figures 1-3 The top of the placement plate 16 is provided with a groove 17, and a plurality of through holes 18 are provided on one side of the inner wall of the groove 17. Support blocks 23 are connected to the opposite sides of the two connecting blocks 8. A guide rod 12 is connected between the inner walls of the two sides of one of the sliding grooves 9. The guide rod 12 passes through the slider 10. A pull ring 22 is connected to the top of the insertion rod 21.

[0026] Through the above technical solution:

[0027] Specifically, multiple through holes 18 are provided on the inner wall of the groove 17 to ensure uniform heating of the ceramic components inside the groove; support blocks 23 are provided to support the placement plate 16 during movement; guide rods 12 are provided to improve the stability of the placement plate 16 during movement; and pull rings 22 are provided to facilitate pulling the insertion rod 21 upwards.

[0028] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0029] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A vacuum heat treatment system for high purity silicon carbide ceramic parts, characterized in that, Include: The furnace body (1), the bottom of the furnace body (1) is connected with the supporting leg (2), and one side of the furnace body (1) is rotatably connected with the furnace door (3), one side of the furnace door (3) is provided with a quenching motor (4), the top of the furnace body (1) is provided with a vacuum pump (5) and a safety valve (6); The automatic push-pull assembly is arranged in the inside of the furnace body (1), the automatic push-pull assembly comprises two connecting blocks (8), the two connecting blocks (8) are symmetrically connected to the inner wall of the furnace body (1), the inner wall of the furnace body (1) is provided with a baffle (7), one side of the two connecting blocks (8) is connected with one side of the baffle (7), and the top of the two connecting blocks (8) is provided with a chute (9), one side of the inner wall of one of the chutes (9) is rotatably connected with a screw rod (11) through a bearing, one end of the screw rod (11) penetrates one side of the baffle (7), one side of the baffle (7) is provided with a motor (13), the output ends of the motor (13) are connected with each other, the interiors of the two chutes (9) are slidably connected with a sliding block (10), the screw rod (11) and the sliding block (10) are threadedly connected, and the tops of the two sliding blocks (10) are connected with a butt block (14). The two butt blocks (14) are connected with a placing plate (16).

2. The vacuum heat treatment system for high purity silicon carbide ceramic components of claim 1, wherein: The placing plate (16) and the butt block (14) are provided with a dismounting assembly, the dismounting assembly comprises two butt plates (15), the two butt plates (15) are connected to the two sides of the placing plate (16), respectively, a butt groove (19) matched with the butt plate (15) is formed in one side of the top of the butt block (14), a bushing (20) is formed in one side of the inner wall of the butt groove (19), and the butt plate (15) penetrates the plug rod (21) matched with the bushing (20).

3. The vacuum heat treatment system for high purity silicon carbide ceramic components of claim 1, wherein: The top of the placing plate (16) is provided with a groove (17), and a plurality of through holes (18) are formed in one side of the inner wall of the groove (17).

4. The vacuum heat treatment system for high purity silicon carbide ceramic components of claim 1, wherein: The opposite sides of the two connecting blocks (8) are connected with supporting blocks (23).

5. The vacuum heat treatment system for high purity silicon carbide ceramic components of claim 1, wherein: The two sides of the inner wall of one of the chutes (9) are connected with a guide rod (12), and the guide rod (12) penetrates the sliding block (10).

6. The vacuum heat treatment system for high purity silicon carbide ceramic components of claim 2, wherein: The top end of the plug rod (21) is connected with a pull ring (22).