Inner hole grinding equipment

Abstract

The utility model belongs to the technical field of semiconductor processing, and particularly relates to inner hole grinding equipment which comprises a rack, an electric box and a shell, the electric box is fixedly connected with the interior of the rack, the shell is fixedly connected with the top of the rack, one side of the shell is fixedly connected with a control panel, the top of the rack is fixedly connected with a bracket, and the bracket is fixedly connected with a motor. An auxiliary spindle is fixedly connected to the top of the bracket, a sliding rail is fixedly connected to the end, away from the auxiliary spindle, of the bracket, a mounting seat is slidably connected to the sliding rail, a grinding spindle is fixedly connected to the top of the mounting seat, an air cylinder is fixedly connected to the end, away from the auxiliary spindle, of the bracket, and the output end of the air cylinder is connected with the input end of the mounting seat. Through the arrangement of the auxiliary main shaft and the movable grinding main shaft structure, fine holes of vacuum screws can be effectively ground, the smoothness of inner holes is improved, and the yield is increased.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor processing, especially to an inner hole grinding equipment. BACKGROUND

[0002] With the rapid development of the semiconductor industry, the processing procedure of wafer is more and more complex, in the wafer production link, the fixing screw used in the vacuum cavity is vacuum screw, the vacuum screw has very high requirement to the fine hole, needs to be ground to reach higher clean requirement, the cleanliness will seriously affect the wafer product quality.

[0003] But the existing grinding equipment cannot effectively grind the fine hole of the vacuum screw, thereby affecting the inner hole smoothness of the vacuum screw. UTILITY MODEL CONTENTS

[0004] The utility model discloses a kind of inner hole grinding equipment to solve the problem that the grinding equipment cannot effectively grind the fine hole of the vacuum screw in the background technology proposed above.

[0005] To achieve the above object, the utility model adopts the following technical scheme:

[0006] An inner hole grinding equipment, including frame, electric box and shell, the electric box is fixedly connected with the inside of frame, the shell is fixedly connected with the top of frame, the one side of shell is fixedly connected with control panel, the top of frame is fixedly connected with bracket, the top of bracket is fixedly connected with auxiliary main shaft, the end away from auxiliary main shaft of bracket is fixedly connected with slide rail, the slide rail is slidably connected with mounting seat, the top of mounting seat is fixedly connected with grinding spindle, the end away from auxiliary main shaft of bracket is fixedly connected with cylinder, and the output end of cylinder is connected with the input end of mounting seat.

[0007] Preferably, the bottom of the frame is screw-threadedly inserted with a plurality of supporting feet.

[0008] Preferably, the output end of the electric box is connected with the input end of the control panel, and the output end of the control panel is connected with the input end of the grinding spindle and the cylinder.

[0009] Preferably, the bracket is fixedly connected with a mounting rack corresponding to the auxiliary main shaft.

[0010] Preferably, the top of the grinding spindle and the mounting seat are fixedly connected through a fastening block.

[0011] Compared with the prior art, the utility model has the following beneficial effects:

[0012] The utility model discloses a movable grinding main shaft structure is set up through the vice main shaft, can carry out effective grinding to the fine hole of vacuum screw, improves the hole finish, promotes the yield. BRIEF DESCRIPTION OF DRAWINGS

[0013] Figure 1 A three-dimensional structure schematic diagram of the inner hole grinding equipment is provided in the utility model.

[0014] In the drawing: 1 frame, 2 electric box, 3 shell, 4 control panel, 5 bracket, 6 vice main shaft, 7 slide rail, 8 mounting seat, 9 grinding main shaft, 10 cylinder, 11 support foot, 12 mounting frame, 13 fastening block. DETAILED DESCRIPTION

[0015] The technical scheme in the utility model embodiments will be clearly and completely described below with reference to the drawings in the utility model embodiments. Obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments.

[0016] REFERENCE Figure 1 An inner hole grinding equipment includes frame 1, electric box 2 and shell 3, electric box 2 is fixedly connected with the inside of frame 1, the bottom of frame 1 is screw-plugged with a plurality of support feet 11, for adjusting the height of frame 1, shell 3 is fixedly connected with the top of frame 1;

[0017] In the embodiment, the side of shell 3 is fixedly connected with control panel 4, for inputting control instructions, the top of frame 1 is fixedly connected with bracket 5, for installing vice main shaft 6, the top of bracket 5 is fixedly connected with vice main shaft 6, for clamping and fixing vacuum screw, bracket 5 is fixedly connected with mounting frame 12 corresponding with vice main shaft 6, for conveniently installing vice main shaft 6;

[0018] In the embodiment, the end of bracket 5 away from vice main shaft 6 is fixedly connected with slide rail 7, slide rail 7 is slidingly connected with mounting seat 8, the top of mounting seat 8 is fixedly connected with grinding main shaft 9, for grinding vacuum screw, grinding main shaft 9 is fixedly connected with the top of mounting seat 8 through fastening block 13, the end of bracket 5 away from vice main shaft 6 is fixedly connected with cylinder 10, for driving mounting seat 8 to slide;

[0019] In the embodiment, the output end of cylinder 10 is connected with the input end of mounting seat 8, the output end of electric box 2 is connected with the input end of control panel 4, the output end of control panel 4 is connected with the input end of grinding main shaft 9 and cylinder 10.

[0020] In the embodiment, the mounting seat 8 moves forward to a working coordinate point by pneumatic clamping screw of the secondary spindle 6, the grinding spindle 9 is started at the working coordinate point (arbitrary position can be set), the secondary spindle 6 is operated, and the cooling motor is operated; the mounting seat 8 slowly moves forward to the set position, the grinding spindle 9 is operated at high speed, the mounting seat 8 moves in the backward direction to the specified position, the mounting seat 8 is quickly moved (the speed of the mounting seat 8 can be adjusted); the grinding time is controlled, the grinding spindle 9, the secondary spindle 6 and the cooling water pump are stopped after the time, the mounting seat 8 returns to the original point, the manual stop is pressed, the equipment is stopped, the mounting seat 8 returns to the original point, the grating is triggered, and the equipment is immediately stopped, and the mounting seat 8 is not moved.

[0021] In the embodiment, the secondary spindle 6 and the movable grinding spindle 9 are arranged, the fine hole of the vacuum screw can be effectively ground, the inner hole smoothness is improved, and the yield is improved.

[0022] The above merely describes a preferred specific embodiment of the utility model, but the protection scope of the utility model is not limited to this, any skilled person in the art can make equivalent replacement or change according to the technical scheme and the utility model concept of the utility model within the technical range disclosed by the utility model, which should be covered in the protection scope of the utility model.

Claims

1. An internal bore lapping apparatus comprising a frame (1), an electrical cabinet (2) and a housing (3), characterised in that: The electric box (2) is fixedly connected with the inside of the rack (1), the shell (3) is fixedly connected with the top of the rack (1), one side of the shell (3) is fixedly connected with the control panel (4), the top of the rack (1) is fixedly connected with the bracket (5), the top of the bracket (5) is fixedly connected with the auxiliary main shaft (6), the end, away from the auxiliary main shaft (6), of the bracket (5) is fixedly connected with the sliding rail (7), the sliding rail (7) is slidably connected with the mounting seat (8), the top of the mounting seat (8) is fixedly connected with the grinding main shaft (9), the end, away from the auxiliary main shaft (6), of the bracket (5) is fixedly connected with the air cylinder (10), and the output end of the air cylinder (10) is connected with the input end of the mounting seat (8).

2. An internal bore lapping apparatus according to claim 1, wherein: The bottom of the rack (1) is screwedly provided with a plurality of supporting legs (11).

3. An internal bore lapping apparatus according to claim 1, wherein: The output end of the electric box (2) is connected with the input end of the control panel (4), and the output end of the control panel (4) is connected with the input ends of the grinding main shaft (9) and the air cylinder (10).

4. An apparatus as claimed in claim 1, wherein: The bracket (5) is fixedly connected with the mounting frame (12) corresponding to the auxiliary main shaft (6).

5. An apparatus for honing an internal bore as defined in claim 1, wherein: The grinding main shaft (9) is fixedly connected with the top of the mounting seat (8) through the fastening block (13).

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