Gas spray header, spray header assembly and chemical vapor deposition device

Abstract

The utility model provides a gas spray header, a spray header assembly and a chemical vapor deposition device. The gas spray header comprises a spray header body, a gas inlet pipe and a gas outlet pipe, wherein a containing groove is formed in the spray header body; the heater is accommodated at the bottom of the accommodating groove; the blocking block is located at the top of the containing groove, fixedly connected with the spray header body and used for sealing the top opening of the containing groove, and the blocking block is embedded into the containing groove by a certain depth till the heater is pressed to make contact with the bottom face of the containing groove. The gas spray head is used for improving the heat transfer efficiency and the temperature rise speed of the gas spray head and improving the throughput of a machine.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, and in particular to a gas spray head, a spray head assembly, and a deposition apparatus. Background Technology

[0002] Chemical vapor deposition (CVD) is a process technology that uses gaseous reactants to produce solid materials by depositing them onto the surface of a heated solid substrate. This process is achieved using a CVD apparatus. Specifically, the CVD apparatus introduces reactant gases into a reaction chamber through gas spray nozzles and controls the pressure, temperature, and other reaction conditions within the chamber to induce a reaction, thereby completing the deposition process.

[0003] During the process, the gas spray head needs to be heated to a specific temperature. The commonly used heating method is to open a receiving groove in the spray head that is slightly larger than the heater, and then press the heater into contact with the gas spray head by a cover plate, so that the heat from the heater is transferred to the gas spray head through heat conduction.

[0004] However, the heater does not make good contact with the gas spray head after being pressed into the tank, resulting in a large gap between them, which leads to poor heat transfer efficiency and reduces the throughput of the machine. Utility Model Content

[0005] The purpose of this invention is to provide a gas spray head, a spray head assembly, and a chemical vapor deposition device to improve the heat transfer efficiency and heating rate of the gas spray head, thereby increasing the throughput of the machine.

[0006] To achieve the above objectives, this utility model is implemented through the following technical solution:

[0007] A gas spray head, comprising:

[0008] The spray head body has a receiving groove on it;

[0009] A heater is housed at the bottom of the receiving tank;

[0010] A sealing block, located at the top of the receiving tank and fixedly connected to the spray head body, is used to seal the top opening of the receiving tank. The sealing block is embedded in the receiving tank to a certain depth until it presses the heater into contact with the bottom surface of the receiving tank.

[0011] Optionally, the shape of the bottom of the receiving tank matches the shape of the heater.

[0012] Optionally, a gap is provided between the side of the receiving groove and the heater, and the gap is filled with a thermally conductive material.

[0013] Optionally, the thermally conductive material is an epoxy resin material.

[0014] Optionally, the sealing block is made of the same material as the spray head body.

[0015] Optionally, the shape of the bottom of the sealing block matches the shape of the heater.

[0016] Optionally, the sealing block is fixed to the spray head body by welding.

[0017] Optionally, the edge region of the spray head body has a first surface facing upwards, and the receiving groove is located on the first surface.

[0018] A spray head assembly, comprising:

[0019] Gas spray head as described in any of the above;

[0020] A cover plate located above the gas spray head is connected to the gas spray head.

[0021] Optionally, the central region of the gas spray head has a downward recess, forming a gas diffusion cavity between it and the cover plate. The edge region of the gas spray head has a first step structure, and the edge region of the cover plate has a second step structure that cooperates with the first step structure. The second step structure overlaps the first step structure.

[0022] Optionally, the first step structure and the second step structure have surfaces that are opposite each other in the horizontal direction and surfaces that are opposite each other in the vertical direction, and there is a gap between the opposing surfaces, the gap being greater than the thermal expansion of the gas spray head and the cover plate.

[0023] Optionally, several pads may be provided between opposing surfaces in the horizontal direction.

[0024] Optionally, the lower surface of the pad is provided with a groove.

[0025] Optionally, the pad is made of stainless steel.

[0026] A chemical vapor deposition apparatus, comprising:

[0027] reaction chamber;

[0028] The base located at the bottom of the reaction chamber has its upper surface used to place the substrate;

[0029] As described in any of the above descriptions, the lower surface of the spray head assembly is opposite to the upper surface of the base.

[0030] Compared with the prior art, the present invention has the following advantages:

[0031] This invention provides a gas spray head, a spray head assembly, and a chemical vapor deposition apparatus. A heater and a sealing block are placed within the receiving groove of the gas spray head. The sealing block presses the heater into the receiving groove to a certain depth, ensuring contact between the heater and the gas spray head. This improves the efficiency of heat conduction between the heater and the gas spray head and increases the heat conduction path between the heater and the cover plate. The heat from the heater is more concentrated on the gas spray head, thereby increasing the heating rate of the gas spray head and thus increasing the throughput of the machine. Furthermore, the sealing block can seal the top opening of the receiving groove, preventing particles from overflowing and contaminating the reaction chamber. Attached Figure Description

[0032] To more clearly illustrate the technical solution of this utility model, the drawings used in the description will be briefly introduced below. Obviously, the drawings in the following description are one embodiment of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort:

[0033] Figure 1 A schematic diagram of a chemical vapor deposition apparatus;

[0034] Figure 2 This is a schematic diagram of an existing sprinkler head assembly;

[0035] Figure 3 A schematic diagram of a spray head assembly provided in an embodiment of the present invention;

[0036] Figure 4 for Figure 3 A magnified view of a portion of the image;

[0037] Figure 5 Temperature rise curve of the gas spray head provided by this utility model;

[0038] Figure 6 This is a comparison chart of the heating time of the gas spray head of this utility model and the heating time of the gas spray head of the prior art. Detailed Implementation

[0039] The following detailed description, in conjunction with the accompanying drawings and specific embodiments, further illustrates the proposed solution of this utility model. The advantages and features of this utility model will become clearer from the following description. It should be noted that the drawings are in a very simplified form and use non-precise proportions, intended only to facilitate and clearly illustrate the embodiments of this utility model. Please refer to the drawings to make the objectives, features, and advantages of this utility model more apparent and understandable. It should be understood that the structures, proportions, sizes, etc., depicted in the accompanying drawings are only for illustrative purposes to aid those skilled in the art and are not intended to limit the implementation conditions of this utility model. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in proportions, or adjustments to the size, without affecting the effects and objectives achieved by this utility model, should still fall within the scope of the technical content disclosed in this utility model.

[0040] Figure 1 This is a schematic diagram of a chemical vapor deposition (CVD) apparatus. The apparatus includes a reaction chamber 100 for processing one or more substrates W, including forming a thin film on the surface of the substrates W. A base 110 is located at the bottom of the reaction chamber 100, the upper surface of which is used to hold the substrates W. A spray head assembly 120 is located at the top of the reaction chamber 100, the lower surface of which faces the upper surface of the base 110. This spray head assembly 120 is used to introduce reactive gases into the reaction chamber 100 and react them on the surface of the substrates W, thereby generating the desired thin film on the surface of the substrates W.

[0041] like Figure 2 As shown, the spray head assembly 120 includes a gas spray head 121 and a cover plate 122 above the gas spray head 121. A gas diffusion chamber A is formed between the cover plate 122 and the gas spray head 121. The reaction gas enters the gas diffusion chamber A through the air inlet on the cover plate 122 and diffuses evenly, and then enters the reaction chamber evenly through the spray hole on the gas spray head 121.

[0042] During the process, the gas spray head 121 needs to be heated to a predetermined temperature to control the temperature of the reaction gas introduced into the reaction chamber 100. Existing technology involves creating a receiving groove in the edge region of the gas spray head 121, placing a heater 1212 in the receiving groove, and then pressing the heater 1212 into the receiving groove after the cover plate 122 is fixedly connected to the gas spray head 121. Figure 2As shown, the heater 1212 is usually annular, and its longitudinal section can be circular, for example. After being pressed into the receiving groove by the cover plate 122, only the lower half of it contacts the gas spray head 121. In some cases, only the bottom of the heater 1212 contacts the gas spray head 121, resulting in poor heat transfer efficiency between the heater 1212 and the gas spray head. A lot of heat is lost through the gap between the heater 1212 and the gas spray head 121.

[0043] Although existing technologies can also fill the gap between the heater 1212 and the gas spray head 121 with thermally conductive adhesive, this method can improve the heat transfer efficiency to a certain extent. However, the improvement effect on the heating rate of the gas spray head 121 is not obvious, and the filled thermally conductive adhesive may volatilize and cause organic pollution at high temperatures, or crack and produce particulate matter.

[0044] Based on this, the present invention provides a gas spray head, in which a heater and a sealing block are placed in a receiving tank. The sealing block presses the heater into the receiving tank to a certain depth, making the heater contact the bottom surface of the receiving tank. This ensures full contact between the heater and the gas spray head, improving heat conduction efficiency and increasing the heat conduction path between the heater and the cover plate. The heat from the heater is more concentrated on the gas spray head, thereby increasing the heating rate of the gas spray head. Furthermore, the sealing block can also seal the top opening of the receiving tank, thus preventing particles from overflowing and contaminating the reaction chamber.

[0045] like Figure 3 , Figure 4 As shown, a gas spray head 121 provided in one embodiment of this utility model includes: a spray head body 1211, on which a receiving groove is provided; a heater 1212, housed at the bottom of the receiving groove; and a sealing block 1213, located at the top of the receiving groove and fixedly connected to the spray head body 1211, for sealing the top opening of the receiving groove. The sealing block is embedded to a certain depth in the receiving groove until the heater 1212 is pressed into contact with the bottom surface of the receiving groove. Compared with pressing the heater 1212 by the cover plate 122, the sealing block 1213 is pressed in to a deeper depth and is not limited by the overall position of the cover plate 122. The pressing depth can be adjusted independently, and the sealing block 1213 does not need to be disassembled with the cover plate 122, improving the stability of the position of the heater 1212.

[0046] To maximize the contact area between the heater 1212 and the spray head body 1211, the shape of the bottom of the receiving groove matches the shape of the heater 1212. For example, if the longitudinal section of the heater 1212 is circular or elliptical, then the bottom of the receiving groove is also set to be circular or elliptical with the same curvature when viewed along the longitudinal section of the spray head body 1211; if the longitudinal section of the heater 1212 is square, then the bottom of the receiving groove is also set to be square when viewed along the longitudinal section of the spray head body 1211.

[0047] It is understood that the heater 1212 is pressed into the receiving groove by the sealing block 1213. Because the sealing block 1213 presses its top and bottom downwards, the heater 1212 can slightly squeeze laterally to fill the gaps in the receiving groove. Furthermore, during operation, the heater 1213 expands laterally due to heat, thus enabling more comprehensive contact between the receiving groove and the heater 1212, improving the heat transfer efficiency of the heater 1213. Further, the space of the receiving groove can be set slightly larger than the heater 1212, artificially increasing the gap, and filling the gap with thermally conductive material to improve the heat conduction between the heater 1212 and the sides of the receiving groove. Optionally, the thermally conductive material can be an epoxy resin material (AREMCO570 or AREMCO805), which has good thermal conductivity and can elastically deform to accommodate the thermal expansion of the heater 1212. Other thermally conductive metals or non-metals can also be selected as the thermally conductive material.

[0048] In this embodiment, the shape of the bottom of the sealing block 1213 matches the shape of the heater 1212 to increase the contact area between the heater 1212 and the sealing block 1213, thereby improving heat conduction between them. Since the sealing block 1213 is also housed within the receiving groove and fixedly connected to the spray head body 1211, heat can also be conducted to the cover plate 122 through the sealing block 1213. Therefore, while meeting the strength requirements of the spray head body 1211, the receiving groove can be made deeper compared to existing receiving grooves (such as...). Figure 2 As shown, this design allows for a longer heat conduction path between the heater 1212 and the cover plate 122, thereby reducing the heat conduction efficiency from the heater 1212 to the cover plate 122. This concentrates the heat generated by the heater 1212 onto the spray head body 1211, thus increasing the heating rate of the spray head body 1211. The upper shape of the sealing block 1213 can be adapted to the plane of the spray head body 1211 in this area, without obstructing the assembly of the cover plate 122.

[0049] The sealing block 1213 is fixed to the spray head body 1211 by welding, such as by electron beam welding or friction stir welding, so that the sealing block 1213 seals the top opening of the receiving groove. The material of the sealing block 1213 is the same as that of the spray head body 1211 to improve the welding quality, so that the sealing block 1213 and the spray head body 1211 are integrated, thereby further improving the heat conduction efficiency between the sealing block 1213 and the spray head body 1211.

[0050] The spray head body 1211 includes a central region X and a peripheral edge region Y. The central region X has a downward indentation, forming a gas diffusion cavity A between itself and the cover plate 122. The central region X of the spray head body 1211 is also provided with spray holes to allow the reaction gas in the gas diffusion cavity A to enter the reaction chamber 100. To avoid affecting the gas flow into the reaction chamber 100, the heater 1212 is typically located in the edge region Y of the spray head body 1211. For example, the receiving groove can be provided on the upper surface, lower surface, and side surface of the edge region Y of the spray head body 1211. In one embodiment, to facilitate the placement of the annular heater 1212 within the receiving groove, the receiving groove can be provided on the upward-facing surface of the edge region Y of the spray head body 1211, such as... Figure 3 As shown, the receiving tank is disposed on the first surface a near the central region X, so that the heat of the heater 1212 is conducted more evenly to the central region X, thereby improving the uniformity of heating the reaction gas and reducing the heat transfer gradient caused by distance.

[0051] Based on the same inventive concept, one embodiment of this utility model also provides a spray head assembly 120, such as... Figure 3 As shown, it includes: the gas spray head 121 mentioned above and a cover plate 122 located above the gas spray head 121, the cover plate 122 being connected to the gas spray head 121.

[0052] Optionally, the edge region Y of the gas spray head 121 has a first stepped structure, and the edge region Y of the cover plate 122 has a second stepped structure corresponding to the first stepped structure, the second stepped structure overlapping the first stepped structure. Figure 3 As shown, along the radial direction of the gas spray head 121, the first step structure includes an outer first step B and an inner second step C. At the first step B, the cover plate 122 is fixedly connected to the gas spray head 121 by a plurality of bolts 124 evenly distributed along the circumference.

[0053] In this embodiment, the first step structure and the second step structure have surfaces that are opposite each other in the horizontal direction and surfaces that are opposite each other in the vertical direction, and there are gaps between the opposite surfaces (e.g., Figure 4 (As shown by the dashed line), the gap is greater than the thermal expansion of the gas spray head 121 and the cover plate 122. That is, when the gas spray head 121 and the cover plate 122 expand due to heat, a certain gap is still maintained between the first step structure and the second step structure. This gap can act as air insulation, reducing the heat conduction between the gas spray head 121 and the cover plate 122, so that the heat generated by the heater 1212 is concentrated on the gas spray head 121, thereby further increasing the heating rate of the gas spray head 121.

[0054] In this embodiment, several pads 123 are horizontally arranged between opposing surfaces in the circumferential direction around the central region X to maintain the vertical gap between the gas spray head 121 and the cover plate 122. Figure 3 As shown, the pads 123 are disposed at the second step C and are evenly distributed circumferentially. The lower surface of each pad 123 has a groove to avoid direct contact with the sealing block 1213, thereby reducing the heat conducted from the gas spray head 121 to the pads 123. The pads 123 can be made of stainless steel, ensuring sufficient strength to support the cover plate 122.

[0055] Based on the same inventive concept, an embodiment of this utility model also provides a chemical vapor deposition apparatus, including a reaction chamber, a base located at the bottom of the reaction chamber, and the aforementioned spray head assembly, wherein the lower surface of the spray head assembly is opposite to the upper surface of the base.

[0056] like Figure 5 and Figure 6 As shown, compared with the existing gas spray head, this solution can heat the gas spray head from 25°C to 160°C in 5-20 minutes, while the existing technology requires 45-60 minutes. This solution increases the heating rate of the gas spray head by 3 times compared with the existing technology, and there is no slowdown trend when it continues to rise to 180°C. Therefore, the gas spray head provided by this solution has better heat conduction efficiency and heating efficiency.

[0057] In summary, the gas spray head, spray head assembly, and chemical vapor deposition apparatus provided by this utility model place a heater and a sealing block within the receiving groove of the gas spray head. The sealing block presses the heater into the receiving groove to a certain depth, ensuring the heater contacts the bottom surface of the receiving groove. This allows for full contact between the heater and the gas spray head, improving the efficiency of heat conduction between them and increasing the heat conduction path between the heater and the cover plate. The heat from the heater is more concentrated on the gas spray head, thereby increasing the heating rate of the gas spray head and ultimately improving the throughput of the machine. Furthermore, the sealing block can also seal the top opening of the receiving groove, preventing particles from overflowing and contaminating the reaction chamber.

[0058] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0059] Although the present invention has been described in detail through the above preferred embodiments, it should be understood that the above description should not be considered as a limitation of the present invention. Various modifications and substitutions to the present invention will be apparent to those skilled in the art after reading the above content. Therefore, the scope of protection of the present invention should be defined by the appended claims.

Claims

1. A gas spray head, characterized in that, include: The spray head body has a receiving groove on it; A heater is housed at the bottom of the receiving tank; A sealing block, located at the top of the receiving tank and fixedly connected to the spray head body, is used to seal the top opening of the receiving tank. The sealing block is embedded in the receiving tank to a certain depth until it presses the heater into contact with the bottom surface of the receiving tank.

2. The gas spray head as described in claim 1, characterized in that, The shape of the bottom of the receiving tank matches the shape of the heater.

3. The gas spray head as described in claim 1, characterized in that, The side of the receiving tank has a gap with the heater, and the gap is filled with a thermally conductive material.

4. The gas spray head as described in claim 3, characterized in that, The thermally conductive material is epoxy resin.

5. The gas spray head as described in claim 1, characterized in that, The sealing block is made of the same material as the spray head body.

6. The gas spray head as described in claim 1, characterized in that, The shape of the bottom of the sealing block matches the shape of the heater.

7. The gas spray head as described in claim 1, characterized in that, The sealing block is fixed to the spray head body by welding.

8. The gas spray head as described in claim 1, characterized in that, The edge region of the spray head body has a first surface facing upwards, and the receiving groove is located on the first surface.

9. A spray head assembly, characterized in that, include: The gas spray head as described in any one of claims 1 to 8; A cover plate located above the gas spray head is connected to the gas spray head.

10. The spray head assembly as claimed in claim 9, characterized in that, The central region of the gas spray head has a downward indentation, forming a gas diffusion cavity between it and the cover plate. The edge region of the gas spray head has a first step structure, and the edge region of the cover plate has a second step structure that cooperates with the first step structure. The second step structure overlaps the first step structure.

11. The spray head assembly as claimed in claim 10, characterized in that, The first step structure and the second step structure have opposing surfaces in the horizontal direction and opposing surfaces in the vertical direction, and there is a gap between the opposing surfaces, the gap being greater than the thermal expansion of the gas spray head and the cover plate.

12. The spray head assembly as claimed in claim 11, characterized in that, Several pads are placed between opposite surfaces along the horizontal direction.

13. The spray head assembly as claimed in claim 12, characterized in that, The lower surface of the pad is provided with a groove.

14. The spray head assembly as claimed in claim 12, characterized in that, The pad is made of stainless steel.

15. A chemical vapor deposition apparatus, characterized in that, include: reaction chamber; A base located at the bottom of the reaction chamber, the upper surface of which is used to place the substrate; The spray head assembly as claimed in any one of claims 9 to 14, wherein the lower surface of the spray head assembly is opposite to the upper surface of the base.

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