Disc repairing device of single crystal silicon carbide polishing machine

Abstract

The utility model discloses a disc repairing device of a single crystal silicon carbide polishing machine, and relates to the technical field of polishing machines. The device comprises a sliding frame, a sliding column, a driving mechanism, a fixing seat and an adjusting frame, the sliding frame comprises a square sliding sleeve, one end of the square sliding sleeve is fixedly provided with a transmission chamber through a group of side plates, the driving mechanism is arranged at the position of the transmission chamber, and one side, close to the square sliding sleeve, of the transmission chamber is connected with a lead screw. Through the design of the fixing base, the sliding frame can be made to turn over, the buffering effect can be achieved through the design of the adjusting frame, the cushion base, the vertical rod and the spring, meanwhile, the supporting and adjusting effects can be achieved through the design of the cushion rod and the supporting ball, and the fixing effect can be achieved through the design of the fixing lug and the fastening screw; and meanwhile, the angle and the height of the turning tool can be adjusted, so that the application range is widened, and the position stability and the installation accuracy of the disc repairing device are improved.

Description

Technical Field

[0001] This utility model belongs to the field of polishing machine technology, and in particular relates to a dressing device for a single crystal silicon carbide polishing machine. Background Technology

[0002] Polishing machines use a spindle mechanism to drive the grinding disc to rotate and polish the workpiece. After a certain period of continuous processing, the grinding disc will wear out, resulting in an uneven surface. Therefore, it is necessary to correct the surface to improve the surface quality and increase the efficiency and effectiveness of subsequent polishing work.

[0003] The existing dressing device is installed on the outside of the machine body and controls the extension and retraction of the cutting tool through a translation mechanism. The structure is simple and the adjustable directional distance is relatively narrow, which affects the scope of use. Furthermore, the presence of the polishing head device inside the polishing machine occupies a large space, thus limiting the installation space provided for the dressing device. Consequently, its precision is limited, and poor installation stability or accuracy will lead to reduced dressing efficiency and poor results. Summary of the Invention

[0004] The purpose of this utility model is to provide a dressing device for a single-crystal silicon carbide polishing machine. The design of the fixed base enables the slide to rotate. The design of the adjusting frame and pad, the vertical rod and spring provide a buffering effect. The design of the pad and support ball provides support and adjustment. The design of the fixing ear and fastening screw provides a fixing effect, which facilitates the installation and positioning of the dressing device. At the same time, the angle and height of the cutting tool can be adjusted, thereby increasing the scope of use and improving the positional stability and installation accuracy of the dressing device.

[0005] To solve the above-mentioned technical problems, this utility model is achieved through the following technical solution:

[0006] This utility model is a dressing device for a single crystal silicon carbide polishing machine, including a slide, a slide column, a drive mechanism, a fixed base and an adjustment frame;

[0007] The slide includes a square slide sleeve. One end of the square slide sleeve is fixed to a transmission chamber via a set of side plates. The drive mechanism is located at the transmission chamber. A lead screw is connected to the transmission chamber near the square slide sleeve. One end of the slide column is sleeved on the outside of the lead screw and threadedly connected to the lead screw. The other end of the slide column passes through the square slide sleeve and is fixed to a tool holder disc.

[0008] A base is fixed to the outer surface of the tool holder, a lifting seat is slidably connected to the outside of the base, a cutting tool is fixed to the outside of the lifting seat via the tool holder, a lifting cylinder is fixed to one side of the base via a bracket, and a stop block connected to the lifting cylinder is fixed to the outside of the lifting seat.

[0009] A side plate is fixed to the other side of the base, and a strip groove is provided on the side plate. A sliding screw that slides along the strip groove is provided on the other side of the lifting seat.

[0010] The fixed base is fixed to the bottom of the square sliding sleeve at the end away from the transmission chamber, and both ends of the fixed base are rotatably connected to hinge seats;

[0011] The bottom of the square sliding sleeve is fixed with a pad, and the adjustment frame includes a body connecting seat. The body connecting seat is located directly below the pad. A pad rod is threadedly connected to the middle of the top plate of the body connecting seat. The top of the pad rod is provided with a support ball that contacts the bottom surface of the pad.

[0012] The bottom of the pad is fixed with several vertical rods, each with a head at the bottom. The body connecting seat is provided with several slots, through which the vertical rods pass. A spring is fixed to the outside of the vertical rods at a position between the head and the body connecting seat.

[0013] The top two sides of the body connecting seat are fixed with fixing ears, and the two fixing ears are respectively set on both sides of the pad. Both ends of the pad are provided with fastening screws that pass through the fixing ears.

[0014] Furthermore, an end plate is fixed to the end of the square sliding sleeve away from the transmission chamber, and a square telescopic sleeve is fixed between the tool holder disc and the end plate, the telescopic sleeve being fitted over the outside of the sliding column.

[0015] Furthermore, the drive mechanism includes a motor, a set of gears is provided in the transmission chamber, the motor is fixed on one side of the transmission chamber and connected to the shaft of one gear, the other gear is connected to the end of the lead screw, and the two gears are connected by a toothed chain.

[0016] Furthermore, the sliding column is a square column structure, with a limit position fixed at one end of the sliding column, and micro switches fixed at both ends of the side plate, which are opposite to the limit position.

[0017] Furthermore, the square sliding sleeve is composed of four sub-plates, the inner wall of each sub-plate is fixed with a wear-resistant plate by fasteners, and the outer surface of the sliding column slides along the wear-resistant plate.

[0018] Furthermore, the fixing ear is provided with a vertical groove, the fastening screw passes through the vertical groove on the fixing ear, and the outer diameter of the screw head end of the fastening screw is greater than the width of the vertical groove.

[0019] This utility model has the following beneficial effects:

[0020] 1. This utility model, through the design of the fixed base, enables the slide to rotate. Through the design of the adjustment frame and pad, the design of the vertical rod and spring provides a buffering effect. At the same time, through the design of the pad rod and support ball, it provides support and adjustment. Through the design of the fixed ear and fastening screw, it provides a fixing effect, which facilitates the installation and positioning of the dressing device. It can also adjust the angle and height of the cutting tool, thereby increasing the scope of use and improving the positional stability and installation accuracy of the dressing device.

[0021] 2. This utility model, through the design of the lifting cylinder, can adjust the height of the cutting tool. Through the design of the side plate, the strip groove and the sliding screw, it can play a limiting and guiding role, thereby improving the stability of the cutting tool adjustment.

[0022] Of course, any product implementing this utility model does not necessarily need to achieve all of the advantages described above at the same time. Attached Figure Description

[0023] To more clearly illustrate the technical solutions of the embodiments of this utility model, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0024] Figure 1 This is a schematic diagram of the dressing device of a single-crystal silicon carbide polishing machine according to the present invention.

[0025] Figure 2 for Figure 1 A magnified view of a section at point A in the middle;

[0026] Figure 3 This is a structural schematic diagram of the present invention viewed from below;

[0027] Figure 4 This is a schematic diagram of the connection between the adjustment frame and the pad of this utility model;

[0028] The attached diagram lists the components represented by each number as follows:

[0029] 1-Slide, 2-Slide column, 3-Drive mechanism, 4-Fixed seat, 5-Adjusting frame, 6-Telescopic sleeve, 101-Square slide sleeve, 102-Side plate, 103-Transmission chamber, 104-Lead screw, 105-Support, 106-Vertical rod, 107-End, 108-Fasting screw, 109-End plate, 110-Micro switch, 201-Limit, 202-Base, 203-Lifting seat, 204-Tool holder, 205-Lathe tool, 206-Bracket, 207-Lifting cylinder, 208-Stop block, 209-Side plate, 210-Strip groove, 211-Sliding screw, 401-Hinge, 501-Machine body connecting seat, 502-Support rod, 503-Support ball, 504-Fixed ear, 505-Strip opening, 506-Spring. Detailed Implementation

[0030] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0031] Please see Figure 1-4 As shown, this utility model is a dressing device for a single crystal silicon carbide polishing machine, including a slide 1, a slide column 2, a drive mechanism 3, a fixed base 4, and an adjustment frame 5;

[0032] The slide 1 includes a square slide sleeve 101. One end of the square slide sleeve 101 is fixed to a transmission chamber 103 via a set of side plates 102. The drive mechanism 3 is located at the position of the transmission chamber 103. A lead screw 104 is connected to the side of the transmission chamber 103 near the square slide sleeve 101. One end of the slide column 2 is sleeved on the outside of the lead screw 104 and threadedly connected to the lead screw 104. The other end of the slide column 2 passes through the square slide sleeve 101 and is fixed to a tool holder disc.

[0033] A base 202 is fixed on the outer surface of the tool holder disk. A lifting seat 203 is slidably connected to the outside of the base 202. A cutting tool 205 is fixed to the outside of the lifting seat 203 via a tool holder 204. A lifting cylinder 207 is fixed to one side of the base 202 via a bracket 206. A stop block 208 connected to the lifting cylinder 207 is fixed to the outside of the lifting seat 203.

[0034] A side plate 209 is fixed on the other side of the base 202. A strip groove 210 is provided on the side plate 209. A sliding screw 211 that slides along the strip groove 210 is provided on the other side of the lifting seat 203.

[0035] The fixed base 4 is fixed to the bottom of the square sliding sleeve 101 at the end away from the transmission chamber 103, and both ends of the fixed base 4 are rotatably connected to the hinge base 401;

[0036] The bottom of the square sliding sleeve 101 is fixed with a pad 105. The adjustment frame 5 includes a body connecting seat 501. The body connecting seat 501 is located directly below the pad 105. A pad rod 502 is threadedly connected to the middle of the top plate of the body connecting seat 501. The top of the pad rod 502 is provided with a support ball 503 that contacts the bottom surface of the pad 105.

[0037] A number of vertical rods 106 are fixed at the bottom of the pad 105. The bottom end of the vertical rod 106 is provided with an end 107. The body connecting seat 501 is provided with a number of strip-shaped openings 505. The vertical rod 106 passes through the strip-shaped openings 505. A spring 506 is fixed outside the vertical rod 106 and at the position between the end 107 and the body connecting seat 501.

[0038] The top two sides of the body connecting seat 501 are fixed with fixing ears 504. The two fixing ears 504 are respectively set on both sides of the pad 105. Both ends of the pad 105 are provided with fastening screws 108 that pass through the fixing ears 504.

[0039] Among them, such as Figure 1 and Figure 3 As shown, an end plate 109 is fixed to the end of the square sliding sleeve 101 away from the transmission chamber 103, and a square telescopic sleeve 6 is fixed between the tool holder disc and the end plate 109. The telescopic sleeve 6 is sleeved on the outside of the sliding column 2.

[0040] The drive mechanism 3 includes a motor, and a set of gears is provided in the transmission chamber 103. The motor is fixed on one side of the transmission chamber 103 and connected to the shaft of one gear. The other gear is connected to the end of the lead screw 104. The two gears are connected by a toothed chain.

[0041] Among them, such as Figure 1 and Figure 3-4 As shown, the slide column 2 is a square column structure. A limit 201 is fixed at one end of the bottom of the slide column 2, and micro switches 110 are fixed at both ends of the side plate 102, which are opposite to the position of the limit 201.

[0042] The square sliding sleeve 101 is composed of four sub-plates. The inner wall of each sub-plate is fixed with a wear-resistant plate by fasteners, and the outer surface of the sliding column 2 slides along the wear-resistant plate.

[0043] Among them, such as Figure 1 and Figure 3-4 As shown, the fixing ear 504 is provided with a vertical groove, and the fastening screw 108 passes through the vertical groove on the fixing ear 504. The outer diameter of the screw head end of the fastening screw 108 is greater than the width of the vertical groove.

[0044] In the description of this specification, references to terms such as "an embodiment," "example," "specific example," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0045] The preferred embodiments of this utility model disclosed above are merely illustrative of the present utility model. These preferred embodiments do not exhaustively describe all details, nor do they limit the utility model to the specific implementations described. Clearly, many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of this utility model, thereby enabling those skilled in the art to better understand and utilize it. This utility model is limited only by the claims and their full scope and equivalents.

Claims

1. A dressing device for a single-crystal silicon carbide polishing machine, characterized in that: Including slide (1), slide column (2), drive mechanism (3), fixed seat (4) and adjustment frame (5); The slide (1) includes a square slide sleeve (101), one end of the square slide sleeve (101) is fixed with a transmission chamber (103) through a group of side plates (102), the drive mechanism (3) is arranged at the position of the transmission chamber (103), the transmission chamber (103) is connected with a lead screw (104) near one side of the square slide sleeve (101), one end of the slide column (2) is sleeved outside the lead screw (104) and is threadedly connected with the lead screw (104), the other end of the slide column (2) penetrates through the square slide sleeve (101) and is fixed with a tool holder disc; The outer surface of the tool holder disc is fixed with a base (202), the outer side of the base (202) is slidably connected with a lifting seat (203), the outer side of the lifting seat (203) is fixed with a tool holder (204), the outer side of the base (202) is fixed with a lifting cylinder (207) through a support (206), and the outer side of the lifting seat (203) is fixed with a stop block (208) connected with the lifting cylinder (207); The other side of the base (202) is fixed with a side plate (209), the side plate (209) is provided with a strip-shaped groove (210), and the other side of the lifting seat (203) is provided with a sliding screw (211) sliding along the strip-shaped groove (210); The fixed seat (4) is fixed at the bottom of the end of the square slide sleeve (101) away from the transmission chamber (103), and the fixed seat (4) is rotatably connected with a hinge seat (401) at both ends; The bottom of the square slide sleeve (101) is fixed with a pad seat (105), the adjustment frame (5) includes a machine body connecting seat (501), the machine body connecting seat (501) is located directly below the pad seat (105), a pad rod (502) is threadedly connected to the middle of the top plate of the machine body connecting seat (501), and a supporting ball (503) in contact with the bottom surface of the pad seat (105) is arranged at the top end of the pad rod (502); The bottom of the pad seat (105) is fixed with a plurality of vertical rods (106), the bottom end of the vertical rod (106) is provided with an end head (107), a plurality of strip-shaped openings (505) are arranged on the machine body connecting seat (501), the vertical rod (106) penetrates through the strip-shaped opening (505), and a spring (506) is fixed outside the vertical rod (106) and at a position between the end head (107) and the machine body connecting seat (501); The top of the machine body connecting seat (501) is fixed with a fixed lug (504) on both sides, the two fixed lugs (504) are arranged on both sides of the pad seat (105) respectively, and the pad seat (105) is provided with a fastening screw (108) penetrating through the fixed lug (504) at both ends.

2. The apparatus according to claim 1, wherein The end plate (109) is fixed at the end of the square slide sleeve (101) away from the transmission chamber (103), the square telescopic protective sleeve (6) is fixed between the tool holder disc and the end plate (109), and the telescopic protective sleeve (6) is sleeved outside the slide column (2).

3. The apparatus of claim 1, wherein the apparatus further comprises a polishing head for polishing the single crystal silicon carbide wafer. The driving mechanism (3) comprises a motor, a set of gears are arranged in the transmission chamber (103), the motor is fixed on one side of the transmission chamber (103) and connected with a gear shaft, the other gear is connected with the end of the lead screw (104), and the two gears are connected through a gear chain.

4. The apparatus of claim 1, wherein the apparatus further comprises a polishing head for polishing the single crystal silicon carbide wafer. The slide column (2) is a square column structure, one end of the slide column (2) is fixed with a limit (201) at the bottom, and the side plate (102) is fixed with a micro switch (110) at both ends and opposite to the limit (201).

5. The apparatus of claim 1, wherein the apparatus further comprises a polishing head for polishing the single crystal silicon carbide wafer. The square slide sleeve (101) is composed of four split plate parts, the inner wall of the split plate part is fixed with a wear plate through a fastener, and the outer surface of the slide column (2) slides along the wear plate.

6. The apparatus of claim 1, wherein the apparatus further comprises a polishing head for polishing the single crystal silicon carbide wafer. The fixing lug (504) is provided with a vertical groove, the fastening screw (108) penetrates the vertical groove on the fixing lug (504), and the outer diameter of the screw head end of the fastening screw (108) is greater than the width of the vertical groove.

Images