Dehydrating and drying device for cleaned wafer

Abstract

The utility model discloses a dehydrating and drying device for cleaned wafers, which relates to the technical field of wafer drying and comprises two support frames, a conveyor belt arranged between the two support frames, a collecting frame fixedly mounted between the two support frames, and a U-shaped frame fixedly mounted at the tops of the two support frames. According to the dehydrating and drying device for the cleaned wafers, the two sealing door plates are driven by the first motor to move upwards so that the U-shaped frame can be in an opening and closing state, and at the moment, subsequent wet wafers can enter the U-shaped frame from one side of the U-shaped frame to be dried; the dried wafers can be conveyed out from the other side of the U-shaped frame and then enter the collecting frame to be collected in a unified mode, so that continuous operation of the device is achieved, workers do not need to place the wafers in the device and then manually recycle the wafers each time, the device can be continuously automated, and the use convenience of the device is effectively improved.

Description

Technical Field

[0001] This utility model relates to the field of wafer drying technology, specifically a wafer cleaning and dehydration drying device. Background Technology

[0002] A chip, usually referring to a semiconductor integrated circuit, is a core component of modern electronic devices. The basic concept of a chip is to integrate multiple electronic components (such as transistors, resistors, and capacitors) onto a small silicon chip to achieve a specific function. This high degree of integration and miniaturization makes chips an indispensable foundation for electronic devices.

[0003] During the production process, wafers typically require cleaning through processes such as potassium dichromate solution, pure water ultrasonication, and alcohol ultrasonication. After cleaning, the wafers need to be dried. The usual method for drying wafers is to place them in a drying chamber and blow them dry with a drying fan before removing them. In actual use, workers need to place the wafers one by one onto the drying rack, and then remove them after drying. This operation is quite cumbersome and the effect is not very good. Utility Model Content

[0004] The purpose of this invention is to provide a wafer cleaning and dehydration drying device to solve the problem in the prior art that, in actual use, workers need to place the wafers one by one on the drying rack, and then take them out after drying, which is cumbersome and the effect is not very good.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a wafer cleaning and dehydration drying device, comprising two support frames, a conveyor belt between the two support frames, a collection frame fixedly installed between the two support frames, a U-shaped frame fixedly installed on the top of the two support frames, two drying fans fixedly installed on the top of the U-shaped frame, the bottom ends of the two drying fans penetrating through the U-shaped frame and fixedly connected to the U-shaped frame, and an opening and closing structure provided on the top of the U-shaped frame, the opening and closing structure comprising four No. 1 fixed seats, the four No. 1 fixed seats being in pairs, and a rotating shaft being rotatably installed between the two pairs of No. 1 fixed seats.

[0006] Preferably, a first gear is fixedly installed on the outer side of each of the two rotating shafts near both ends, and racks are meshed on the outer side of each of the four first gears. The top of the U-shaped frame has four first sliding grooves, and the four racks are respectively disposed in the four sliding grooves and slide in contact with the U-shaped frame. The first sliding grooves can effectively limit the racks and prevent the racks from disengaging from the first gears.

[0007] Preferably, the four racks are arranged in pairs, and a closed door panel is fixedly installed between the two groups of racks. The four first slide grooves are arranged in pairs, and a second slide groove is formed between the two groups of first slide grooves. The two closed door panels are respectively disposed inside the two second slide grooves and slide in contact with the U-shaped frame.

[0008] Preferably, a motor is fixedly installed on one side of one of the first fixing seats, and the output end of the motor passes through one of the first fixing seats and is fixedly connected to one of the rotating shafts.

[0009] Preferably, a second fixing seat is fixedly installed on the top of the U-shaped frame, a first sprocket is fixedly installed on the outer side of each of the two rotating shafts, and two second sprockets are rotatably installed on one side of the second fixing seat. A chain is sleeved on the outer side of each of the two first sprockets and the two second sprockets respectively.

[0010] Preferably, two No. 2 gears are rotatably mounted on the other side of the No. 2 fixed base. The two No. 2 gears mesh with each other. A connecting shaft is fixedly mounted on one side of each of the two No. 2 gears. One end of each of the two connecting shafts passes through the No. 2 fixed base and is rotatably connected to the No. 2 fixed base. One end of each of the two connecting shafts is fixedly connected to two No. 2 sprockets respectively.

[0011] Preferably, the inner side of the U-shaped frame is provided with a flipping structure, which includes two rotating columns. The two rotating columns are rotatably installed on the inner sides of the U-shaped frame, and a flipping frame is fixedly installed between the two rotating columns. A second motor is fixedly installed on one side of the U-shaped frame. The output end of the second motor passes through one side of the U-shaped frame and is fixedly connected to one of the rotating columns. The flipping frame is provided with several circular slots to ensure that water stains will not remain on the flipping frame due to moisture on the other side of the wafer.

[0012] Compared with the prior art, the beneficial effects of this utility model are:

[0013] 1. This application uses a No. 1 motor to drive two closed door panels to move upward, thereby opening and closing the U-shaped frame. At this time, the subsequently damp wafers will enter the U-shaped frame from one side for drying, while the previously dried wafers will be conveyed out from the other side of the U-shaped frame and then enter the collection box for unified collection. This enables continuous operation of the device, eliminating the need for staff to manually put the wafers in and then manually retrieve them each time. This allows the device to be continuously automated, effectively improving the convenience of using the device.

[0014] 2. This application uses a second motor to drive one of the rotating columns to rotate, which in turn drives the flipping frame to rotate, causing the wafers inside the flipping frame to flip over so that the wafers are set up with their reverse side facing up. Then, the wafers will slide from the inside of the flipping frame to the top of the conveyor belt and be transported to the bottom of another drying fan for drying on the other side, thereby completing the full drying of the wafers and preventing the wafers from being not dried and still damp and needing to be dried again, thus ensuring the effectiveness of the device. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the overall structure of a wafer cleaning and dehydration drying device according to the present invention.

[0016] Figure 2 This is a demonstration diagram showing the open state of a wafer cleaning and dehydration drying device according to this utility model;

[0017] Figure 3 This is a schematic diagram of the opening and closing structure of a wafer cleaning and dehydration drying device according to the present invention;

[0018] Figure 4 This is a rear view of the opening and closing structure of a wafer cleaning and dehydration drying device according to this utility model;

[0019] Figure 5 This is a cross-sectional view of a U-shaped frame of a wafer cleaning and dehydration drying device according to the present invention;

[0020] Figure 6 This is a schematic diagram of the flipping structure of a wafer cleaning and dehydration drying device according to the present invention.

[0021] The following are labeled in the diagram: 1. Support frame; 2. Conveyor belt; 3. Collection frame; 4. U-shaped frame; 5. Drying fan; 6. Fixed seat No. 1; 7. Rotating shaft; 8. Gear No. 1; 9. Rack; 10. Enclosed door panel; 11. Motor No. 1; 12. Fixed seat No. 2; 13. Sprocket No. 1; 14. Sprocket No. 2; 15. Chain; 16. Gear No. 2; 17. Rotating column; 18. Tilting frame; 19. Motor No. 2. Detailed Implementation

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0023] Example: Figure 1 - Figure 6As shown, this utility model provides a technical solution for a wafer cleaning and dehydration drying device, including two support frames 1, a conveyor belt 2 between the two support frames 1, a collection frame 3 fixedly installed between the two support frames 1, a U-shaped frame 4 fixedly installed on the top of the two support frames 1, two drying fans 5 fixedly installed on the top of the U-shaped frame 4, the bottom ends of the two drying fans 5 passing through the U-shaped frame 4 and fixedly connected to the U-shaped frame 4, and an opening and closing structure provided on the top of the U-shaped frame 4, the opening and closing structure including four No. 1 fixed seats 6, the four No. 1 fixed seats 6 are in pairs, and a rotating shaft 7 is rotatably installed between the two pairs of No. 1 fixed seats 6.

[0024] Two rotating shafts 7 are fixedly installed with a first gear 8 near both ends on their outer sides. The outer sides of the four first gears 8 are meshed with racks 9. The top of the U-shaped frame 4 has four first sliding grooves. The four racks 9 are respectively set in the four sliding grooves and slide in contact with the U-shaped frame 4.

[0025] Four racks 9 are arranged in pairs, and a closed door panel 10 is fixedly installed between the two sets of racks 9. Four first slide grooves are arranged in pairs, and a second slide groove is formed between the two sets of first slide grooves. The two closed door panels 10 are respectively set inside the two second slide grooves and slide in contact with the U-shaped frame 4.

[0026] One of the fixed bases 6 has a motor 11 fixedly installed on one side. The output end of the motor 11 passes through one of the fixed bases 6 and is fixedly connected to one of the rotating shafts 7.

[0027] The top of the U-shaped frame 4 is fixedly installed with a second fixed seat 12, and the outer sides of the two rotating shafts 7 are fixedly installed with a first sprocket 13. Two second sprockets 14 are rotatably installed on one side of the second fixed seat 12. The outer sides of the two first sprockets 13 and the two second sprockets 14 are respectively fitted with chains 15.

[0028] Two No. 2 gears 16 are rotatably mounted on the other side of the No. 2 fixed base 12. The two No. 2 gears 16 mesh with each other. A connecting shaft is fixedly mounted on one side of each of the two No. 2 gears 16. One end of each connecting shaft passes through the No. 2 fixed base 12 and is rotatably connected to the No. 2 fixed base 12. One end of each connecting shaft is fixedly connected to two No. 2 sprockets 14 respectively.

[0029] The inner side of the U-shaped frame 4 is provided with a flipping structure, which includes two rotating columns 17. The two rotating columns 17 are rotatably installed on both sides of the inner side of the U-shaped frame 4. A flipping frame 18 is fixedly installed between the two rotating columns 17. A second motor 19 is fixedly installed on one side of the U-shaped frame 4. The output end of the second motor 19 passes through one side of the U-shaped frame 4 and is fixedly connected to one of the rotating columns 17.

[0030] It should be noted that this utility model is a wafer cleaning and dehydration drying device. In use, the cleaned wafers are placed on conveyor belt 2, and then transported to the U-shaped frame 4 via conveyor belt 2. Once the wafers are inside the U-shaped frame 4, two drying fans 5 are activated, supplying hot drying air to the inside of the U-shaped frame 4. Then, motor 11 is activated. The specific model of motor 11 is not described here, but depends on the compatible equipment. Motor 11 drives one of the rotating shafts 7 to rotate, thereby driving one of the first sprockets 13 to rotate, which in turn drives one of the second sprockets 13 via a chain 15. The rotation of sprocket 14 drives one of the second gears 16 to rotate via one of the connecting shafts, which in turn drives another second gear 16 to mesh and rotate. This drives another second sprocket 14 to rotate via another connecting shaft, which in turn drives another first sprocket 13 to rotate via another chain 15. This causes another rotating shaft 7 to rotate. As the two rotating shafts 7 rotate, they drive the four first gears 8 to rotate, which in turn drives the four racks 9 to mesh and move. This causes the two enclosed door plates 10 to close the U-shaped frame 4, ensuring that the temperature inside the U-shaped frame 4 does not dissipate when drying the wafer, thus ensuring the drying effect of the wafer.

[0031] When the wafer is conveyed to the bottom of one of the drying fans 5, one side of the wafer is dried. Then the wafer continues to be conveyed and moves. When it moves to the position of the flipping frame 18, it is conveyed to the inside of the flipping frame 18 by the conveyor belt 2. Then the second motor 19 is started. The model of the second motor 19 is not specifically described, but depends on the compatible equipment. The second motor 19 drives one of the rotating columns 17 to rotate, thereby driving the flipping frame 18 to rotate as well. This causes the wafer inside the flipping frame 18 to flip with the flipping frame 18, so that the wafer is set up with the reverse side. Then the wafer slides from the inside of the flipping frame 18 to the top of the conveyor belt 2 and is conveyed to the bottom position of the other drying fan 5 for drying on the other side. This completes the drying of the wafer and prevents the wafer from being not dried and still damp, requiring re-drying. This ensures the effectiveness of the device.

[0032] Once drying is complete, motor 11 will drive the two closed door panels 10 to move upwards, thereby opening and closing the U-shaped frame 4. At this time, the subsequently damp wafers will enter the U-shaped frame 4 from one side for drying, while the previously dried wafers will be conveyed out from the other side of the U-shaped frame 4 and then enter the collection box 3 for unified collection. This enables continuous operation of the device, eliminating the need for staff to manually collect the wafers each time, allowing the device to be continuously automated and effectively improving the ease of use of the device.

[0033] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A post-wafer cleaning dehydration oven apparatus, characterized by: The utility model relates to a kind of drying device for conveying belt, including two support frames (1), conveying belt (2) is provided between two the support frames (1), collecting frame (3) is fixedly installed between two the support frames (1), the top of two the support frames (1) is fixedly installed with U-shaped frame (4), the top of U-shaped frame (4) is fixedly installed with two drying fan (5), the bottom of two drying fan (5) is all through U-shaped frame (4) and is fixedly connected with U-shaped frame (4), the top of U-shaped frame (4) is provided with open-close structure, the open-close structure includes four one fixed seat (6), four the one fixed seat (6) is a group, rotatingly installed with shaft (7) between two groups the one fixed seat (6).

2. A post-wafer cleaning dehydration oven apparatus as set forth in claim 1, wherein: The outer side of two the shaft (7) is fixedly installed with one gear (8) near both ends, the outer side of four the one gear (8) is all engaged with rack (9), the top of U-shaped frame (4) is opened with four first sliding slot, four the rack (9) is respectively arranged in four sliding slot and with U-shaped frame (4) sliding contact.

3. A post-wafer cleaning dehydration oven as set forth in claim 2, wherein: Four the rack (9) is a group, closed door plate (10) is fixedly installed between two groups the rack (9), four the first sliding slot is a group, second sliding slot is formed between two groups the first sliding slot, two the closed door plate (10) is respectively arranged in two second sliding slot and with U-shaped frame (4) sliding contact.

4. The wafer post cleaning dehydration and baking apparatus as set forth in claim 1, wherein: The side of one the one fixed seat (6) is fixedly installed with one motor (11), the output of one motor (11) is through one one fixed seat (6) and is fixedly connected with one shaft (7).

5. The post-wafer cleaning dehydration oven of claim 1, wherein: The top of U-shaped frame (4) is fixedly installed with two fixed seat (12), the outer side of two the shaft (7) is fixedly installed with one chain wheel (13), the side of two fixed seat (12) is rotatably installed with two second chain wheel (14), the outer side of two the one chain wheel (13) is respectively with two second chain wheel (14) all set with chain (15).

6. A post-wafer cleaning dehydration oven as set forth in claim 5, wherein: The other side of two fixed seat (12) is rotatably installed with two second gear (16), two the second gear (16) are engaged with each other, the side of two the second gear (16) is fixedly installed with connecting shaft, the one end of two the connecting shaft is all through two fixed seat (12) and is rotatably connected with two fixed seat (12), the one end of two the connecting shaft is respectively fixedly connected with two second chain wheel (14).

7. The post-wafer cleaning dehydration oven of claim 1, wherein: The inner side of U-shaped frame (4) is provided with turnover structure, the turnover structure includes two rotating column (17), two the rotating column (17) are rotatably installed in the inside two sides of U-shaped frame (4), two the rotating column (17) are fixedly installed with turnover frame (18), the side of U-shaped frame (4) is fixedly installed with second motor (19), the output of second motor (19) is through the side of U-shaped frame (4) and is fixedly connected with one rotating column (17).

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