Semiconductor spraying disc convenient to install

Abstract

The utility model discloses a semiconductor spray disc convenient to install, which relates to the field of semiconductors and comprises a spray disc main body, an O-shaped sealing ring is abutted against the upper end of the spray disc main body, a metal sealing gasket is abutted against the upper end of the O-shaped sealing ring, and a connecting seat is abutted against the upper end of the metal sealing gasket. According to the utility model, the O-shaped sealing ring is tightly attached to the metal sealing gasket, so that when the device is used, the wedge-shaped sleeve can be conveniently inserted and fixed through the structural arrangement of the O-shaped sealing ring and the metal sealing gasket, the spraying disc can be conveniently connected, sealed and prevented from shifting, the usability of the device is improved, and the service life of the device is prolonged. And the wedge-shaped sleeve is arranged to move the wedge-shaped rod, when the device is used, the wedge-shaped sleeve and the wedge-shaped rod are arranged to be conveniently inserted into the connecting sleeve, the spring abuts against the wedge-shaped rod, the rotating ball is made to abut outwards towards the two sides, the connecting sleeve is rapidly fixed, and the spraying disc is conveniently and rapidly disassembled or fixedly installed.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of semiconductor, concretely is a kind of semiconductor spray tray of being convenient for installation. BACKGROUND

[0002] In the conventional semiconductor manufacturing equipment, spray tray is usually fixed by mechanical connecting pieces such as bolt and nut. This installation method requires the operator to use tools for accurate tightening operation in a small space. For example, in some high-precision reaction chambers, the space is very limited, and it is difficult for the installer to use tools, and the number of bolts and nuts is large, the installation process is complicated, and a lot of time and manpower are consumed. Therefore, a semiconductor spray tray that is easy to install is needed.

[0003] The existing semiconductor spray tray is not convenient for quick disassembly or fixed installation of the spray tray, and is not convenient for connecting, sealing and preventing displacement of the spray tray. Therefore, a semiconductor spray tray that is easy to install is urgently needed. SUMMARY

[0004] Therefore, the utility model aims at providing a semiconductor spray tray that is easy to install to solve the problem that the existing semiconductor spray tray that is easy to install is not convenient for quick disassembly or fixed installation of the spray tray, and is not convenient for connecting, sealing and preventing displacement of the spray tray.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical scheme: a semiconductor spray tray that is easy to install, comprising a spray tray body, an O-ring is in contact with the upper end of the spray tray body, a metal sealing gasket is in contact with the upper end of the O-ring, and a connecting seat is in contact with the upper end of the metal sealing gasket.

[0006] The inner wall of the connecting seat is fixedly connected with a connecting sleeve, the inner wall of the spray tray body is fixedly connected with a wedge-shaped sleeve, the inner wall of the wedge-shaped sleeve is welded with a spring, one end of the spring is welded with a wedge-shaped rod, and the other end of the wedge-shaped rod is in contact with a rotating ball.

[0007] Preferably, the outer wall of the spray tray body is tightly attached to the outer wall of the O-ring, and the inner wall of the O-ring is designed as a hole.

[0008] Preferably, the outer wall of the O-ring is tightly attached to the outer wall of the metal sealing gasket, and the outer wall diameter of the O-ring is the same as the outer wall diameter of the metal sealing gasket.

[0009] Preferably, the connecting seat and the connecting sleeve are threadedly connected, and the outer wall of the connecting sleeve is provided with threads.

[0010] Preferably, the wedge-shaped sleeve and the spray tray body are threadedly connected, and the outer wall of the wedge-shaped sleeve is provided with threads.

[0011] Preferably, the wedge-shaped sleeve is movably connected with the wedge-shaped rod, and the inner wall of the wedge-shaped sleeve is designed as a hole.

[0012] Compared with the prior art, the utility model has the beneficial effects that:

[0013] 1、The utility model discloses a tight effect of O type sealing washer to metal sealing gasket, the structure of O type sealing washer and metal sealing gasket is convenient for the insertion and fixation of the wedge-shaped sleeve, and the spraying disc is connected, sealed and prevented from displacement, and the use of the device is increased.

[0014] 2、The utility model discloses a wedge-shaped sleeve for the wedge-shaped rod, and the structure of the wedge-shaped sleeve and the wedge-shaped rod is convenient for being inserted into the connecting sleeve, and the spring is in contact with the wedge-shaped rod, so that the ball is pushed to the two sides, the connecting sleeve is quickly fixed, and the spraying disc is quickly disassembled or fixed. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 It is the elevation appearance view of the utility model;

[0016] Figure 2 It is the structure schematic diagram of the utility model elevation split;

[0017] Figure 3 It is the structure schematic diagram of the utility model part of parts section;

[0018] Figure 4 It is the structure schematic diagram of the utility model connecting sleeve section.

[0019] In the drawing: 1, spraying disc main body;2, O type sealing washer;3, metal sealing gasket;4, connecting seat;5, connecting sleeve;6, wedge-shaped sleeve;7, spring;8, wedge-shaped rod;9, ball. DETAILED DESCRIPTION

[0020] The technical scheme in the embodiments of the utility model will be described clearly and completely in combination with the drawings in the embodiments of the utility model. The embodiments described in the following with reference to the drawings are exemplary and are used for explaining the utility model, and cannot be understood as limiting the utility model.

[0021] The embodiments of the utility model will be described according to the overall structure of the utility model.

[0022] Please refer to Figures 1-4The utility model provides a kind of semiconductor spray tray convenient to install, including spray tray main body 1, the upper end of spray tray main body 1 is in contact with O type sealing ring 2, the outer wall of spray tray main body 1 is closely combined with the outer wall of O type sealing ring 2, and the inner wall of O type sealing ring 2 is designed as open hole, the upper end of O type sealing ring 2 is in contact with metal sealing gasket 3, the outer wall of O type sealing ring 2 is closely combined with the outer wall of metal sealing gasket 3, and the outer wall diameter of O type sealing ring 2 is same with the outer wall diameter of metal sealing gasket 3, the upper end of metal sealing gasket 3 is in contact with connecting seat 4, by setting O type sealing ring 2, metal sealing gasket 3 is closely combined, when using device, the structure of O type sealing ring 2 and metal sealing gasket 3 is convenient to insert and fix wedge-shaped sleeve 6, it is convenient to connect sealing and prevent displacement for spray tray, increase the usability of device.

[0023] Please refer to Figures 1-4 A kind of semiconductor spray tray convenient to install, the inner wall of connecting seat 4 is fixedly connected with connecting sleeve 5, connecting seat 4 is threadedly connected with connecting sleeve 5, and the outer wall of connecting sleeve 5 is threadedly arranged, the inner wall of spray tray main body 1 is fixedly connected with wedge-shaped sleeve 6, wedge-shaped sleeve 6 is threadedly connected with spray tray main body 1, and the outer wall of wedge-shaped sleeve 6 is threadedly arranged, the inner wall of wedge-shaped sleeve 6 is welded with spring 7, one end of spring 7 is welded with wedge-shaped rod 8, wedge-shaped sleeve 6 is movably connected with wedge-shaped rod 8, and the inner wall of wedge-shaped sleeve 6 is designed as open hole, one end of wedge-shaped rod 8 is in contact with rotating ball 9, by setting wedge-shaped sleeve 6, wedge-shaped rod 8 is movably arranged, when using device, wedge-shaped sleeve 6 and wedge-shaped rod 8 are inserted into connecting sleeve 5, spring 7 is in contact with wedge-shaped rod 8, so that rotating ball 9 is pushed to both sides, connecting sleeve 5 is quickly fixed, it is convenient to quickly disassemble or fixed installation for spray tray.

[0024] Working principle: when using, connecting seat 4 is installed in specified position, then connecting sleeve 5 is threadedly fixed by connecting seat 4, then wedge-shaped sleeve 6 is threadedly fixed to spray tray main body 1, then O type sealing ring 2 and metal sealing gasket 3 are clamped and fixed to wedge-shaped sleeve 6, then wedge-shaped rod 8 is extruded to spring 7, one end of wedge-shaped sleeve 6 and wedge-shaped rod 8 is enlarged chamber, spray tray main body 1 is inserted into connecting seat 4, finally spring 7 is in contact with wedge-shaped rod 8, wedge-shaped rod 8 is pushed out to rotating ball 9, rotating ball 9 is in contact with connecting sleeve 5, and spray tray main body 1 is quickly installed and fixed, so that the use process of the device is completed, the contents not described in detail in the specification belong to the prior art known to the person skilled in the art.

[0025] Although the utility model has been explained in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions recorded in the foregoing embodiments or make equivalent replacement to part of the technical features, and any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A semiconductor spray tray for easy installation comprising a spray tray body (1), characterized in that: The upper end of the spray disc body (1) is in contact with an O-shaped sealing ring (2), the upper end of the O-shaped sealing ring (2) is in contact with a metal sealing gasket (3), and the upper end of the metal sealing gasket (3) is in contact with a connecting seat (4); The inner wall of the connecting seat (4) is fixedly connected with a connecting sleeve (5), the inner wall of the spray disc body (1) is fixedly connected with a wedge-shaped sleeve (6), the inner wall of the wedge-shaped sleeve (6) is welded with a spring (7), one end of the spring (7) is welded with a wedge-shaped rod (8), and one end of the wedge-shaped rod (8) is in contact with a rotating ball (9).

2. A semiconductor spray plate for easy installation according to claim 1, characterized in that: The outer wall of the spray disc body (1) is tightly combined with the outer wall of the O-shaped sealing ring (2), and the inner wall of the O-shaped sealing ring (2) is designed as a hole type.

3. A semiconductor spray plate for easy installation according to claim 1, characterized in that: The outer wall of the O-shaped sealing ring (2) is tightly combined with the outer wall of the metal sealing gasket (3), and the outer wall diameter of the O-shaped sealing ring (2) is the same as the outer wall diameter of the metal sealing gasket (3).

4. A semiconductor spray plate for easy installation according to claim 1, wherein: The connecting seat (4) is threadedly connected with the connecting sleeve (5), and the outer wall of the connecting sleeve (5) is provided in a threaded manner.

5. A semiconductor spray plate for easy installation according to claim 1, wherein: The wedge-shaped sleeve (6) is threadedly connected with the spray disc body (1), and the outer wall of the wedge-shaped sleeve (6) is provided in a threaded manner.

6. A semiconductor spray plate for easy installation according to claim 1, wherein: The wedge-shaped sleeve (6) is movably connected with the wedge-shaped rod (8), and the inner wall of the wedge-shaped sleeve (6) is designed as a hole type.

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