Sealing assembly and assembling structure

Abstract

The utility model discloses a sealing assembly and an assembling structure, and relates to the field of semiconductor processing equipment, the sealing assembly comprises a sealing member, the sealing member comprises a body and a buckle arranged on the peripheral wall of the body, and the buckle is arranged around the body along the peripheral direction of the body; the support is provided with a containing cavity, the sealing piece is arranged in the containing cavity, the support comprises an elastic part, the buckle abuts against the elastic part, and the elastic part tends to move in the direction of the central axis of the containing cavity in the radial direction. According to the technical scheme, the sealing assembly and the assembling structure are easy to assemble, the rejection rate is reduced, and parts and assembling cost are saved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor processing equipment, especially relates to a sealing assembly and assembly structure. BACKGROUND

[0002] IGS comprehensive gas circuit is the core component of semiconductor equipment ultra-pure gas delivery, and its structure comprises a flow controller MFC, a gas passage flow channel block, a metal sealing gasket, different types of valve body, screws and a base, and is combined into an integrated system. The IGS flow channel can deliver corrosive gas such as HBr and Cl2. According to the SEMI F-0812 industry standard, the leakage integrity specification of high-purity gas pipeline system and components, the built-in system or components are tested for leakage rate by using helium (Helium) and the leakage rate is less than 1x10 - 9 atm / cc / sec.

[0003] In the gas circuit system, the valve body and the flow channel block base are generally assembled by setting a sealing structure with a C-shaped spring to realize sealing and meet the leakage rate requirement. However, the current sealing structure assembly relies on manual experience assembly, has a high scrap rate, and is prone to cause leakage of the gas circuit system. UTILITY MODEL CONTENTS

[0004] The main purpose of the utility model is to provide a sealing assembly, which aims to solve the technical problems of high scrap rate of the current sealing structure assembly and easy leakage.

[0005] To achieve the above purpose, the sealing assembly provided by the utility model comprises:

[0006] a sealing element, a bracket, and a spring.

[0007] The bracket is provided with a cavity, and the sealing element is arranged in the cavity. The bracket comprises an elastic portion, and the buckle and the elastic portion are in contact, so that the elastic portion has a tendency to move along the radial direction towards the central axis of the cavity.

[0008] In an embodiment, the bracket is arranged in a spiral shape.

[0009] In an embodiment, the buckle protrudes from the outer wall of the body.

[0010] In an embodiment, the buckle comprises a first outer wall, a second outer wall and a third outer wall, the first outer wall and the second outer wall are connected with the body respectively, the third outer wall is arranged on the side of the buckle away from the body, and the third outer wall is connected with the first outer wall and the second outer wall respectively.

[0011] In an embodiment, the buckle further comprises a first guide surface and a second guide surface, the first guide surface is connected to the first outer wall and the third outer wall respectively, and the second guide surface is connected to the second outer wall and the third outer wall respectively.

[0012] In an embodiment, the first guide surface and the second guide surface are configured as inclined surfaces.

[0013] In an embodiment, the first guide surface and the second guide surface are configured as arc surfaces.

[0014] In an embodiment, the body is provided with a channel, the channel penetrates through the body in the axial direction.

[0015] The utility model discloses still provide an assembly structure, including valve body, base and sealing assembly, wherein, the valve body with base is connected and surrounds and has installation cavity, sealing assembly is located in the installation cavity, and the sealing assembly is as above described sealing assembly.

[0016] In an embodiment, the valve body and the base are respectively provided with flow channels, the top surface of the sealing element in the sealing assembly is in sealing contact with the valve body, the bottom surface of the sealing element is in sealing contact with the base, and the valve body and the base further respectively extrude the bracket in the sealing assembly, so that the elastic part of the bracket is in contact with the outer wall of the buckle, and the center line of the sealing element body coincides with the center line of the flow channel.

[0017] The utility model technical scheme adopts the container cavity in the bracket, and the sealing element is placed in the container cavity, so that the buckle of the sealing element is in contact with the elastic part of the container cavity, and then the elastic part drives the sealing element to have a reverse movement trend by relying on its own elasticity. The buckle is arranged around the outer periphery of the body, so that the elastic part can automatically center the body by cooperating with the buckle, and the sealing effect of the body is guaranteed. The sealing assembly provided by the utility model technical scheme is simple to assemble, and compared with the prior art, it can also save parts and assembly cost, thereby avoiding part scrapping and poor sealing caused by assembly, solving the instability of the sealing structure in the prior art, improving the stability and yield of product assembly quality, and providing more stable quality guarantee for the sealing property and flow channel tightness of the semiconductor IGS metal base. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to more clearly illustrate the technical scheme in the embodiments of the utility model or the prior art, the drawings needed to be used in the embodiment or the prior art description will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the utility model, and those skilled in the art can obtain other drawings from the structures shown in these drawings without creating any creative labor.

[0019] Figure 1 Structure schematic view of the sealing assembly provided by the utility model;

[0020] Figure 2 Structure schematic view of the sealing assembly provided by the utility model Structure schematic view of the sealing assembly provided by the utility model;

[0021] Figure 3 Structure schematic view of the sealing assembly provided by the utility model Structure schematic view of the sealing assembly provided by the utility model;

[0022] Figure 4 Structure schematic view of the sealing assembly provided by the utility model Structure schematic view of the sealing assembly provided by the utility model;

[0023] Figure 5 Structure schematic view of the sealing assembly provided by the utility model Structure schematic view of the sealing assembly provided by the utility model;

[0024] Figure 6 Structure schematic view of the sealing assembly provided by the utility model Structure schematic view of the sealing assembly provided by the utility model;

[0025] Figure 7 Structure schematic view of the sealing assembly provided by the utility model Structure schematic view of the sealing assembly provided by the utility model;

[0026] Figure 8 Structure schematic view of the sealing assembly provided by the utility model Structure schematic view of the sealing assembly provided by the utility model.

[0027] Explanation of the reference signs:

[0028] 100, sealing piece; 110, body; 120, buckle; 121, first outer wall; 122, second outer wall; 123, third outer wall; 124, first guide surface; 125, second guide surface; 126, channel;

[0029] 200, support; 210, cavity;

[0030] 10, valve body; 20, base; 30, flow channel; 40, mounting cavity.

[0031] The utility model discloses the realization, functional characteristics and advantages will be combined with example, reference to the further description of the drawings. DETAILED DESCRIPTION

[0032] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor belong to the protection scope of the utility model.

[0033] It should be noted that if the embodiment of the utility model has directionality indication (such as up, down, left, right, front, back, etc.), the directionality indication is only used to explain the relative position relationship, movement condition, etc. between components in a certain posture, if the certain posture changes, the directionality indication also changes accordingly.

[0034] In addition, if the embodiment of the utility model has the description of "first", "second" and the like, the description of "first", "second" and the like is only for the purpose of description, and cannot be understood as indicating or implying the relative importance of the indicated technical features or implicitly indicating the number of indicated technical features. Therefore, the features limited by "first", "second" can be explicitly or implicitly included at least one of the features. In addition, "and / or" or "and / or" appears throughout the text, which means that the three parallel schemes are included, for example, "A and / or B" includes A scheme, or B scheme, or A and B scheme. In addition, the technical solutions of each embodiment can be combined with each other, but it must be based on the realization of ordinary skilled in the art, when the combination of technical solutions appears contradictory or unachievable, it should be considered that the combination of technical solutions does not exist, and is not within the protection scope required by the utility model.

[0035] In the prior art, the valve body and the flow channel block base of the gas circuit system are generally assembled by setting a sealing structure to realize sealing and meet the leakage rate requirement. However, the sealing structure assembly currently relies on manual experience assembly, has a high scrap rate, and is prone to cause leakage of the gas circuit system.

[0036] The utility model provides a kind of sealing assembly.

[0037] Please refer to Figures 1 to 6 In an embodiment of the utility model, the sealing assembly includes: a sealing member 100 and a bracket 200, wherein the sealing member 100 includes a body 110 and a buckle 120 provided on the peripheral wall of the body 110, the buckle 120 is arranged around the body 110 along the circumferential direction of the body 110;The bracket 200 is provided with a cavity 210, and the sealing member 100 is arranged in the cavity 210, the bracket 200 includes an elastic part, and the buckle 120 is in contact with the elastic part, so that the elastic part has a tendency to move along the radial direction towards the central axis of the cavity 210.

[0038] It should be noted that the bracket 200 is used to protect the sealing member 100, prevent external force from affecting the body 110 of the sealing member 100, and thus ensure good sealing performance. In the specific implementation process, the bracket 200 is made of metal material and has certain strength and elasticity, and also cooperates with the buckle 120 of the sealing member 100, so that the body 110 maintains a certain sealing position and ensures the sealing effect.

[0039] In the embodiment, the body 110 of the sealing member 100 is a cylindrical structure, and the buckle 120 is located on the outer sidewall of the body 110 and surrounds the body 110 along the circumference of the body 110. In the specific implementation process, the buckle 120 protrudes from the outer wall of the body 110 and has a suitable outer diameter size to match the bracket 200. In order to improve the strength of the sealing member 100, the body 110 and the buckle 120 are integrally formed.

[0040] In the specific implementation process, the bracket 200 is used to be sleeved on the outer periphery of the body 110, and the bracket 200 includes an elastic part, which is used to abut against the buckle 120, so as to drive the body 110 to be automatically centered through the buckle 120, so that the sealing member 100 can be tightly matched with the external device, and a good sealing effect is ensured. The elastic part can be a structure made of elastic material, or the bracket 200 can be made of elastic material, which can have a reverse movement trend when abutting against the buckle 120.

[0041] The technical scheme of the utility model provides that the cavity 210 is arranged on the bracket 200, and the sealing member 100 is placed in the cavity 210, so that the buckle 120 of the sealing member 100 abuts against the elastic part of the cavity 210, and then the elastic part drives the sealing member 100 to have a reverse movement trend by relying on the elasticity of the elastic part. The buckle 120 is arranged around the outer periphery of the body 110, so that the elastic part can automatically center the body 110 by cooperating with the buckle 120, and the sealing effect of the body 110 is ensured. The sealing assembly provided by the technical scheme of the utility model is simple to assemble, and compared with the prior art, the sealing assembly can also save parts and assembly costs, so that the parts are not scrapped and the sealing is not poor due to assembly, the instability of the sealing structure in the prior art is solved, the stability and yield of the product assembly quality are improved, and the stability of the sealing performance and the tightness of the flow channel 30 of the semiconductor IGS metal base 20 are ensured.

[0042] Reference Figure 4As shown, in an embodiment, the support 200 is arranged in a spiral shape. Specifically, the support 200 is formed by winding a wire into a spring, which can provide axial and radial elastic functions. When the sealing element 100 is located in the cavity 210, and the spiral layer spacing of the support 200 is greater than the axial thickness of the buckle 120, the buckle 120 is located in the spiral layer spacing, and after being assembled to the external device, the spring is compressed to extrude the buckle 120 so that the buckle 120 is in contact with the inner wall of the support 200, and the support 200 provides radial elasticity so that the body 110 and the central axis coincide with the central axis of the support 200; when the spiral layer spacing of the support 200 is less than the axial thickness of the buckle 120, the buckle 120 directly contacts the inner wall of the support 200, and the support 200 provides radial elasticity so that the body 110 and the central axis coincide with the central axis of the support 200. The material of the support 200 uses a soft metal wire material, such as a special SUS304L treated to reduce the hardness from the standard Hv180 to Hv100-150. During assembly, the metal spring structure of the support 200 automatically adjusts the centering, and improves the stability of the core degree of the sealing element 100.

[0043] Reference Figure 2 and Figure 3 As shown, in an embodiment, the buckle 120 includes a first outer wall 121, a second outer wall 122, and a third outer wall 123. The first outer wall 121 and the second outer wall 122 are respectively connected to the body 110, and the third outer wall 123 is arranged on the side of the buckle 120 away from the body 110, and the third outer wall 123 is connected to the first outer wall 121 and the second outer wall 122, respectively.

[0044] In a specific implementation process, the first outer wall 121 and the second outer wall 122 are respectively located at both ends in the axial direction and are respectively connected to the outer wall of the body 110, and the edges of the third outer wall 123 are respectively connected to the first outer wall 121 and the second outer wall 122. In order to facilitate the pressing of the buckle 120 into the cavity 210 of the support 200 and in contact with the inner wall of the cavity 210, further, the buckle 120 further includes a first guide surface 124 and a second guide surface 125. The first guide surface 124 is connected to the first outer wall 121 and the third outer wall 123, respectively, and the second guide surface 125 is connected to the second outer wall 122 and the third outer wall 123, respectively.

[0045] It can be understood that the first guide surface 124 and the second guide surface 125 play a guiding role. When the sealing element 100 is located in the cavity 210, and the support 200 is compressed, the first guide surface 124 and the second guide surface 125 can facilitate the buckle 120 to enter the cavity 210 from the spiral gap of the support 200 and be in contact with the inner wall of the support 200.

[0046] Reference Figure 2 and Figure 5As shown in the drawings, in an embodiment, the first guide surface 124 and the second guide surface 125 are configured as inclined surfaces. Specifically, the first guide surface 124 and the second guide surface 125 are inclined planes, and the edges of the first guide surface 124 and the second guide surface 125 connected with the third outer wall 123 are close to each other.

[0047] Referring to Figure 3 and Figure 6 As shown in the drawings, in another embodiment, the first guide surface 124 and the second guide surface 125 are configured as arc surfaces. Specifically, the first guide surface 124 and the second guide surface 125 are convex in the direction away from the buckle 120, so that the edges of the buckle 120 form a rounded structure, and the first outer wall 121 to the third outer wall 123 and the second outer wall 122 to the third outer wall 123 are smoothly transitioned.

[0048] In an embodiment, the body 110 is provided with a channel 126 which penetrates the body 110 in the axial direction. The channel 126 is arranged in the middle of the body 110 and cooperates with external equipment to realize the functions of air flow circulation and the like.

[0049] Referring to Figure 7 and Figure 8 The utility model also proposes an assembly structure, including valve body 10, base 20 and sealing assembly, the specific structure of this sealing assembly refers to the above-mentioned embodiment, because the assembly structure adopts all the technical schemes of the above-mentioned embodiment, therefore at least has all the beneficial effects brought by the technical scheme of the above-mentioned embodiment, here will not be repeated. Among them, valve body 10 and base 20 are connected and enclose installation cavity 40, and the sealing assembly is arranged in installation cavity 40.

[0050] Specifically, the valve body 10 is connected with the base 20 and is in communication, and sealing is realized by the sealing assembly, so that gas leakage can be avoided and smooth gas circulation and safety can be ensured.

[0051] Further, the valve body 10 and the base 20 are respectively provided with flow channels 30, the top surface of the sealing element 100 in the sealing assembly is in sealing abutment with the valve body 10, the bottom surface of the sealing element 100 is in sealing abutment with the base 20, and the valve body 10 and the base 20 further extrude the bracket 200 in the sealing assembly, so that the elastic part of the bracket 200 is in abutment with the outer wall of the buckle 120, and the center line of the sealing element 100 body 110 coincides with the center line of the flow channel 30.

[0052] In the specific implementation process, the flow channel 30 is used for conveying gas, the passage 126 of the sealing element 100 is communicated with the flow channel 30, and the two ends of the sealing element 100 are respectively sealed against the valve body 10 and the base 20 to ensure the sealing performance of the gas flow channel 30 and avoid gas leakage. It should be noted that the sealing assembly is installed in the mounting cavity 40, the bracket 200 is compressed by the valve body 10 and the base 20, further extrudes the buckle 120 to make the buckle 120 enter the cavity 210 and abut against the bracket 200, and then the part of the bracket 200 abutting against the buckle 120 protrudes in the radial direction, and further under the limitation of the inner wall of the mounting cavity 40 and the action of the elastic force of the bracket 200, the bracket 200 drives the buckle 120 to have the reverse movement trend, and under the premise that the buckle 120 is arranged around the body 110, the body 110 is automatically centered, and then the two ends of the body 110 can be effectively sealed against the valve body 10 and the base 20 to ensure good sealing performance, and the sealing assembly is convenient to install, the product assembly quality is high in stability, and the yield is high.

[0053] The above merely describes the exemplary embodiments of the present application, and does not limit the patent scope of the present application, and any equivalent structural transformation, direct / indirect application in other related technical fields under the inventive concept of the present application, and the contents of the present application specification and drawings are included in the patent protection scope of the present application.

Claims

1. A seal assembly characterized by, The sealing assembly comprises: a sealing member comprising a body and a clasp provided on a peripheral wall of the body, the clasp being arranged around the body in a circumferential direction of the body; and a holder provided with a receiving cavity, the sealing member being arranged in the receiving cavity, the holder comprising an elastic portion, and the clasp being in contact with the elastic portion, so that the elastic portion has a tendency to move in a radial direction towards a central axis of the receiving cavity. The holder is arranged in a spiral shape.

2. The seal assembly of claim 1, wherein, The clasp protrudes from the outer wall of the body.

3. The seal assembly of claim 2, wherein, The clasp comprises a first outer wall, a second outer wall and a third outer wall, the first outer wall and the second outer wall being connected to the body respectively, and the third outer wall being provided on a side of the clasp away from the body, and the third outer wall being connected to the first outer wall and the second outer wall respectively.

4. The seal assembly of claim 1, wherein, The clasp further comprises a first guide surface and a second guide surface, the first guide surface being connected to the first outer wall and the third outer wall respectively, and the second guide surface being connected to the second outer wall and the third outer wall respectively.

5. The seal assembly of claim 4 wherein, The first guide surface and the second guide surface are configured as inclined surfaces.

6. The seal assembly of claim 5, wherein, The first guide surface and the second guide surface are configured as arc surfaces.

7. The seal assembly of claim 5 wherein, The body is provided with a passage, the passage penetrating the body in an axial direction.

8. The seal assembly of claim 1, wherein, The valve body and the base are connected and surround a mounting cavity, and the sealing assembly is arranged in the mounting cavity, the sealing assembly being the sealing assembly according to any one of claims 1-8.

9. An assembly structure characterized by, The valve body and the base are respectively provided with flow channels, a top surface of the sealing member in the sealing assembly is in sealing contact with the valve body, a bottom surface of the sealing member is in sealing contact with the base, and the valve body and the base further respectively press the holder in the sealing assembly, so that an elastic portion of the holder is in contact with an outer wall of the clasp, and then the center line of the body of the sealing member coincides with the center line of the flow channel.

10. The assembly of claim 9, wherein, ​

Images