Fixture for universal high-pressure cleaning jig for gas uniformizing disc parts

Abstract

The utility model relates to the technical field of part cleaning in the semiconductor industry, in particular to a clamp for a universal high-pressure cleaning jig for gas uniformizing disc parts, which comprises a basic working plate, a positioning V-shaped block and a clamping V-shaped block, and the top of the basic working plate is provided with the positioning V-shaped block and the clamping V-shaped block which are oppositely arranged and used for clamping the parts. The positioning V-shaped block is fixedly connected to the basic working plate, the clamping V-shaped block can be linearly and movably mounted on the basic working plate in the horizontal direction, and a driving device used for driving the clamping V-shaped block to move is arranged on the basic working plate. The clamp for the universal high-pressure cleaning jig for the gas uniformizing disc parts has the remarkable technical effects of being easy to operate, rapid in clamping, stable in clamping, high in universality, low in cost, easy to maintain and the like, the requirements of the semiconductor industry for efficient and accurate production can be met, and the cleanliness and the production efficiency of small holes of the gas uniformizing disc parts are effectively improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor industry parts cleaning, and specifically relates to a clamp for a general high-pressure cleaning jig of a gas blending disc part. BACKGROUND

[0002] In the semiconductor industry, the semiconductor gas blending disc (Semiconductor Gas Blending System) as a key gas mixing system component is widely used in the production and research and development process of the microelectronic field such as semiconductor and liquid crystal display. The system controls the mixing ratio of the gas accurately, not only ensures the accuracy and stability of the production process, but also significantly reduces the waste and pollution of the gas, thereby improving the production efficiency and reducing the production cost. What is particularly important is that the small holes on the semiconductor gas blending disc as the key channel for gas circulation, the cleanliness directly relates to the performance and reliability of the whole system. Therefore, how to effectively clean and maintain the high cleanliness of these small holes has become an important technical challenge in the semiconductor manufacturing process.

[0003] The traditional cleaning method is often difficult to ensure the cleaning effect while effectively preventing the parts from moving in the high-pressure cleaning process, which not only affects the cleaning efficiency, but also may cause damage to the parts, and further affects the overall performance of the semiconductor gas blending disc. In view of this, a special jig capable of stably clamping the gas blending disc parts and facilitating high-pressure cleaning is needed to solve the problems existing in the prior art.

[0004] The utility model is proposed in this background, aiming at designing a clamp for a general high-pressure cleaning jig of a gas blending disc part, realizing effective clamping and fixing of disc type parts, ensuring that the parts will not move in the high-pressure cleaning process, and thus guaranteeing the cleaning effect and part quality. UTILITY MODEL CONTENTS

[0005] In order to solve the above problems, the utility model provides a clamp for a general high-pressure cleaning jig of a gas blending disc part, which has the advantages of simple operation, quick clamping, stable clamping, strong universality, low cost, easy maintenance, etc., can meet the demand of the semiconductor industry for efficient and accurate production, and effectively improve the cleanliness and production efficiency of the small holes of the gas blending disc part.

[0006] The technical scheme of the utility model is as follows:

[0007] The utility model provides a kind of fixture for general high-pressure cleaning jig of air distribution plate parts, including basic work plate, positioning V-block and clamping V-block, positioning V-block and clamping V-block for clamping parts are installed on the top of basic work plate, positioning V-block is fixedly connected on basic work plate, clamping V-block is installed on basic work plate and can move linearly in horizontal direction, driving device for driving clamping V-block to move is provided on basic work plate;By the design of basic work plate, positioning V-block and clamping V-block, the stable clamping of air distribution plate parts is realized;Positioning V-block and clamping V-block are oppositely arranged, can adapt to the shape of disc type parts, ensure clamping effect;Clamping V-block can move linearly in horizontal direction, it is convenient to quickly clamp and release parts, and operation efficiency is improved.

[0008] Driving device is fixedly installed on the quick clamp of basic work plate, and clamping V-block is fixedly connected on the push rod of quick clamp;Quick clamp is used as driving device, which not only simplifies the structure of jig, but also greatly improves the speed of clamping and releasing parts.

[0009] Limiting guide device for linearly moving guiding of clamping V-block is installed on basic work plate;The setting of limiting guide device provides accurate guidance for the linear movement of clamping V-block, avoids deviation and shaking in the movement process, so as to ensure the accuracy and stability of clamping.

[0010] Limiting guide device is two limiting guide blocks arranged on the two sides of clamping V-block respectively, and limiting guide block is fixedly connected on basic work plate.

[0011] Step I and step II are arranged on the two sides of clamping V-block and two limiting guide blocks respectively;The steps arranged on clamping V-block and limiting guide block not only increase the structural strength of jig, but also further improve the stability and accuracy of the movement of clamping V-block through the biting effect of steps.

[0012] High support column is installed on the bottom of basic work plate;The setting of high support column improves the overall height of jig, so that cleaning fluid can flow more smoothly on the surface of parts, and improves cleaning effect;At the same time, high support column also enhances the stability of jig, avoids shaking and tilting in the cleaning process.

[0013] The position of positioning V-block on basic work plate is adjustable;Make the jig can adapt to different size and shape of air distribution plate parts, enhance the versatility and flexibility of jig.

[0014] The waist-shaped counterbore hole II is arranged on the positioning V-shaped block, the threaded hole I corresponding to the counterbore hole II is arranged on the base workboard, and the positioning V-shaped block is fixed on the base workboard through the threaded connection of the screw I passing through the counterbore hole II and the threaded hole I; the adjustable fixing of the positioning V-shaped block on the base workboard is realized through the cooperation of the waist-shaped counterbore hole and the threaded hole and the fastening effect of the screw; and the connecting mode is not only simple and easy to operate, but also stable and reliable, and is convenient for adjusting according to the size of the part.

[0015] The through hole is arranged at the position of installing the part on the base workboard; the cleaning liquid can directly flow through the surface of the part, the thoroughness and efficiency of cleaning are improved; meanwhile, the design of the through hole is convenient for discharging and collecting the liquid after cleaning, and the cleaning of the working environment is maintained.

[0016] The material of the base workboard is AL6061; the base workboard has good corrosion resistance, lightness and mechanical properties; the selection of the material not only prolongs the service life of the jig, but also is convenient for carrying and moving the jig, and the working efficiency is improved.

[0017] The utility model discloses the beneficial effect lies in:

[0018] 1. The utility model discloses a kind of clamp for uniform air disc part general high-pressure cleaning jig, the clamp for uniform air disc part general high-pressure cleaning jig is combined using by positioning V-shaped block and clamping V-shaped block, realizes the efficient stable clamping of disc type part;The design of V-shaped block structure makes that jig has the advantages of strong universality, two-point positioning clamping stability, can ensure that part does not move in high-pressure cleaning process, to ensure cleaning effect and part quality.

[0019] 2. The utility model discloses a kind of clamp for uniform air disc part general high-pressure cleaning jig, clamping V-shaped block of the clamp for uniform air disc part general high-pressure cleaning jig is driven by quick clamp, realizes quick clamping and release, greatly improves operating efficiency and clamping speed;Quick clamp is standard part, with the characteristics of stable clamping force, easy to operate, reduces operating difficulty and labor intensity.

[0020] 3. The utility model discloses a kind of clamp for uniform air disc part general high-pressure cleaning jig, the setting of the limiting guide device of the clamp for uniform air disc part general high-pressure cleaning jig, such as limiting guide block and corresponding step structure, ensures the stability and accuracy of clamping V-shaped block in moving process, avoids the clamping inefficiency or part damage due to position deviation.

[0021] 4. The utility model discloses a kind of general high-pressure cleaning jigs of air distribution disc part clamp, the position of the positioning V-shaped block of the general high-pressure cleaning jigs of air distribution disc part clamp on base work plate is adjustable, so that jig can adapt to different size and shape parts, further enhance the versatility and flexibility of jig;Positioning adjustment is realized by screw connection, convenient and reliable. BRIEF DESCRIPTION OF DRAWINGS

[0022] The solutions and advantages of the present application will become clear to those ordinarily skilled in the art from the following detailed description of the preferred embodiments. The drawings are merely provided for the purpose of illustrating the preferred embodiments, and are not considered as limiting the present utility model.

[0023] In the drawings:

[0024] Figure 1 It is a kind of general high-pressure cleaning jigs of air distribution disc part clamp of the utility model embodiment stereogram structure schematic diagram;

[0025] Figure 2 It is a kind of general high-pressure cleaning jigs of air distribution disc part clamp when clamping part stereogram structure schematic diagram of the utility model embodiment;

[0026] Figure 3 It is a kind of general high-pressure cleaning jigs of air distribution disc part clamp base work plate stereogram structure schematic diagram of the utility model embodiment;

[0027] Figure 4 It is a kind of general high-pressure cleaning jigs of air distribution disc part clamp heightening support column stereogram structure schematic diagram of the utility model embodiment;

[0028] Figure 5 It is a kind of general high-pressure cleaning jigs of air distribution disc part clamp positioning V-shaped block stereogram structure schematic diagram of the utility model embodiment;

[0029] Figure 6 It is a kind of general high-pressure cleaning jigs of air distribution disc part clamp clamping V-shaped block stereogram structure schematic diagram of the utility model embodiment;

[0030] Figure 7 It is a kind of general high-pressure cleaning jigs of air distribution disc part clamp limit guide block stereogram structure schematic diagram of the utility model embodiment;

[0031] Figure 8 It is a kind of general high-pressure cleaning jigs of air distribution disc part clamp quick clamp in clamping state stereogram structure schematic diagram of the utility model embodiment;

[0032] Figure 9The utility model discloses a kind of quick clamps of general high-pressure cleaning jig for uniform gas disc parts of the utility model embodiment, and the stereoscopic structure schematic diagram in relaxed state is as shown in the figure.

[0033] The components represented by the reference numerals in the drawings are:

[0034] The utility model discloses:1, basic work plate, 11, threaded hole I, 12, threaded hole II, 13, threaded hole III, 14, countersunk hole I, 2, heightening support column, 21, threaded hole IV, 3, positioning V-shaped block, 31, countersunk hole II, 4, clamping V-shaped block, 41, countersunk hole III, 42, step I, 5, limit guide block, 51, through hole, 52, step II, 6, quick clamp, 61, threaded hole V, 7, part, 8, screw I, 9, screw II, 10, screw III, 101, screw IV, 102, screw V. DETAILED DESCRIPTION

[0035] As Figure 1 And Figure 2 The general high-pressure cleaning jig for uniform gas disc parts is mainly composed of basic work plate 1, heightening support column 2, positioning V-shaped block 3, clamping V-shaped block 4, limit guide block 5 and quick clamp 6.

[0036] The basic work plate 1 is used as the base of the jig, is made of AL6061 material, and has a cuboid structure, as Figure 3 The threaded hole I 11, the threaded hole II 12, the threaded hole III 13, the countersunk hole I 14 and the through hole in the center are designed to facilitate the connection with other components and the discharge of cleaning fluid.

[0037] The heightening support column 2 is located below the basic work plate, as Figure 4 The threaded hole IV 21 is designed, the screw IV 101 is passed through the countersunk hole I 14 and connected with the basic work plate 1, plays the role of cushioning and supporting the whole jig, and is also made of AL6061 material.

[0038] The positioning V-shaped block 3 is used for positioning the part, is made of 304 stainless steel, has a V-shaped structure, as Figure 5 The countersunk hole II 31 is designed, the screw I 8 can be used to finely adjust the position of the basic work plate 1 to adapt to parts of different sizes; the V-shaped positioning surface has a roughness of Ra1.6, prevents scratching the part, and plays the role of positioning the outer circle of the part.

[0039] The clamping V-shaped block 4 is matched with the positioning V-shaped block, is used for clamping the part, and is also made of 304 stainless steel, has a stepped V-shaped structure, as Figure 6 The countersunk hole III 41 and the step I 42 are designed, and are matched with the limit guide block 5 to play the role of guiding and preventing floating; the V-shaped clamping surface has a roughness of Ra1.6, prevents scratching the part.

[0040] The limit guide block 5 is made of CrWMn tool steel, and the overall quenching treatment increases the wear resistance, as shown in Figure 7 The design of the through hole 51 and the step Ⅱ 52 is used to fix the base workboard by screws, to limit the floating of the clamping V-shaped block and ensure its linear movement.

[0041] The quick clamp 6 (vertical or push-pull) is a mechanical standard part, as shown in Figure 8 and Figure 9 It has a threaded hole V 61 feature, and is connected to the clamping V-shaped block 4 by screws. The up and down movement of the handle realizes the quick clamping and loosening of the parts.

[0042] The high-pressure water gun is used to flush the upper surface of the part 7. The water flow passes through the part 7 and flows out from the center large hole of the base workbench 1, so that there is no impurity inside the small hole of the part 7.

[0043] As shown in Figure 1 It also includes various screws I 8, screws II 9, screws III 10, screws IV 101 and screws V 102 for fixed connection.

[0044] The uniform gas disc part general high-pressure cleaning jig clamp single piece is a plate or rotary structure, which can be completed by using three-axis machine tools and lathes, realizing low cost and high efficiency; the quick clamp standard part is made of stainless steel, which is easy to operate and has stable clamping force; each accessory is connected by screws, which is low in cost and reliable in locking and fastening; the overall structure adopts rust-proof material, which is convenient for maintenance; it is light in weight and convenient for on-site taking; the V-shaped positioning and clamping structure has linear contact principle, which can be applied to different sizes of parts and has strong universality.

Claims

1. A fixture for a universal high-pressure cleaning jig for air distribution disc parts, characterized in that, Includes a base working plate (1), a positioning V-block (3) and a clamping V-block (4). The positioning V-block (3) and the clamping V-block (4) are installed on the top of the base working plate (1) and are arranged opposite to each other for clamping the parts (7). The positioning V-block (3) is fixedly connected to the base working plate (1). The clamping V-block (4) is installed on the base working plate (1) and can be moved linearly in the horizontal direction. A drive device for driving the clamping V-block (4) to move is provided on the base working plate (1).

2. The fixture for a universal high-pressure cleaning jig for a gas distribution disc part according to claim 1, characterized in that, The driving device is a quick clamp (6) fixedly installed on the base working plate (1), and the clamping V-block (4) is fixedly connected to the push rod of the quick clamp (6).

3. The fixture for a universal high-pressure cleaning jig for a gas distribution disc part according to claim 1, characterized in that, A limiting guide device is installed on the base working plate (1) to guide the linear movement of the clamping V-block (4).

4. The fixture for a universal high-pressure cleaning jig for a gas distribution disc part according to claim 3, characterized in that, The limiting guide device consists of two limiting guide blocks (5) respectively set on both sides of the clamping V-shaped block (4), and the limiting guide blocks (5) are fixedly connected to the base working plate (1).

5. The fixture for a universal high-pressure cleaning jig for a gas distribution disc part according to claim 4, characterized in that, Steps I (42) and step II (52) are respectively provided on both sides of the clamping V-block (4) and the two limiting guide blocks (5).

6. The fixture for a universal high-pressure cleaning jig for a gas distribution disc part according to claim 1, characterized in that, A heightening support column (2) is installed at the bottom of the base working plate (1).

7. The fixture for a universal high-pressure cleaning jig for a gas distribution disc part according to claim 1, characterized in that, The position of the positioning V-block (3) on the base working plate (1) is adjustable.

8. The fixture for a universal high-pressure cleaning jig for a gas distribution disc part according to claim 7, characterized in that, A countersunk hole II (31) of waist shape is provided on the positioning V-block (3), and a threaded hole I (11) corresponding to the countersunk hole II (31) is provided on the base working plate (1). The positioning V-block (3) is fixed on the base working plate (1) by screw I (8) passing through the countersunk hole II (31) and threadedly connecting with the threaded hole I (11).

9. The fixture for a universal high-pressure cleaning jig for a gas distribution disc part according to claim 1, characterized in that, A through hole is provided at the position where the part (7) is installed on the base working plate (1).

10. A fixture for a universal high-pressure cleaning jig for a gas distribution disc part according to claim 1, characterized in that, The material of the basic working board (1) is AL6061.

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