Gas supply device for magnetron sputtering coating process gas

Abstract

The utility model discloses a magnetron sputtering coating process gas supply device which comprises a cabinet body, a gas supply assembly is fixedly installed on the upper surface of the cabinet body, a supporting frame plate is fixedly connected to the upper surface of the cabinet body, a gas leakage detector is fixedly connected to the bottom face of the supporting frame plate, an opening is formed in the upper surface of the cabinet body, and the gas leakage detector is fixedly connected to the bottom face of the supporting frame plate. The inner wall of the cabinet body is fixedly connected with a partition plate. Through cooperation of the cabinet body, the gas supply assembly, the supporting frame plate and the gas leakage detector, gas leaked during gas supply of the gas supply pipeline can be detected, and through cooperation of the first electric push rod, the lifting plate, the fixing plate, the second electric push rod, the first sliding groove, the first sliding block, the supporting base, the gas suction pump and the gas inlet pipe, gas leakage can be detected; and the first electric push rod drives the getter pump above to ascend and descend, and the second electric push rod drives the getter pump to move front and back, so that the position of the getter pump is adjusted, and the getter pump quickly sucks leaked gas.

Description

Technical Field

[0001] This utility model relates to the field of magnetron sputtering coating technology, and in particular to a gas supply device for magnetron sputtering coating process. Background Technology

[0002] Magnetron sputtering coating is a coating technology that uses the coating material as the target cathode and bombards the target material with argon ions to generate cathode sputtering, sputtering the target material atoms onto the workpiece to form a deposited layer. Magnetron sputtering coating, abbreviated as PVD coating, is an important method of vacuum coating. The magnetron sputtering coating machine is an advanced surface treatment equipment with high efficiency. By using a magnetic field to control the trajectory of the ion beam, it achieves sputtering adhesion to the material surface, thereby obtaining a high-quality thin film coating. The main function of the magnetron sputtering coating machine is to form a uniform, dense, and well-adhesive thin film layer on the surface of different materials to improve the hardness, wear resistance, and corrosion resistance of the materials. At the same time, it can also be used to change the optical properties, electrical properties, and thermal conductivity of materials to meet the needs of different fields.

[0003] Currently, in magnetron sputtering coating, gas supply devices are prone to leakage at the connection points of the gas supply pipes. The leaked gas affects the surrounding air, thereby affecting the breathing of personnel and endangering their life and health. To address this issue, we propose a gas supply device for magnetron sputtering coating processes. Utility Model Content

[0004] The purpose of this invention is to provide a gas supply device for magnetron sputtering coating process to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] A gas supply device for magnetron sputtering coating process includes a cabinet. A gas supply component is fixedly installed on the upper surface of the cabinet. A support frame is fixedly connected to the upper surface of the cabinet. A gas leak detector is fixedly connected to the bottom surface of the support frame. An opening is provided on the upper surface of the cabinet. A partition is fixedly connected to the inner wall of the cabinet. Two first electric push rods are fixedly connected to the inner bottom wall of the cabinet. The output ends of the two first electric push rods are jointly fixedly connected to a lifting plate. A fixing plate is fixedly connected to the upper surface of the lifting plate. A second electric push rod is fixedly connected to the front of the fixing plate. A first sliding groove is formed on the upper surface of the lifting plate. A first slider is slidably connected to the inner wall of the first sliding groove. A support base is fixedly connected to the upper surface of the first slider. The output end of the second electric push rod is fixedly connected to the back of the support base. An air intake pump is fixedly connected to the inner wall of the support base. An air intake pipe is fixedly connected to the input end of the air intake pump.

[0007] In a further embodiment, the front of the cabinet is hinged to a sealed door, and an electronic lock is fixedly installed on the front of the sealed door.

[0008] In a further embodiment, a filter screen is fixedly connected to the inner wall of the air intake pipe, and two second sliding grooves are provided on the inner wall of the cabinet.

[0009] In a further embodiment, a second slider is slidably connected to the inner wall of each of the second slide grooves, and the sides of the two second sliders that are close to each other are fixedly connected to the outer surface of the lifting plate.

[0010] In a further embodiment, an alarm is fixedly connected to the upper surface of the support frame plate, and a limit plate is fixedly connected to the upper surface of the lifting plate.

[0011] In a further embodiment, four support legs are fixedly connected to the bottom surface of the cabinet, and an exhaust pipe is fixedly connected to the output end of the air pump.

[0012] Compared with the prior art, the beneficial effects of this utility model are:

[0013] This utility model utilizes a cabinet, a gas supply assembly, a support frame, and a gas leak detector. The gas supply assembly uses a gas supply pipe to supply gas, while the gas leak detector detects leaked gas, enabling the detection and handling of leaked gas during gas supply. Through the cooperation of a first electric push rod, a lifting plate, a fixed plate, a second electric push rod, a first slide groove, a first slider, a support base, an air pump, and an air inlet pipe, the first electric push rod drives the upper air pump to rise and fall, and the second electric push rod drives the air pump to move back and forth, thereby adjusting the position of the air pump to facilitate the rapid absorption of leaked gas. Attached Figure Description

[0014] Figure 1 A front view schematic diagram of a gas supply device for a magnetron sputtering coating process;

[0015] Figure 2 A side view schematic diagram of a gas supply device for a magnetron sputtering coating process;

[0016] Figure 3 A side sectional view of a gas supply device for a magnetron sputtering coating process;

[0017] Figure 4 This is a top view schematic diagram of a gas supply device for a magnetron sputtering coating process.

[0018] In the diagram: 1. Cabinet; 2. Gas supply assembly; 3. Support frame; 4. Gas leak detector; 5. Opening; 6. Partition; 7. First electric push rod; 8. Lifting plate; 9. Fixing plate; 10. Second electric push rod; 11. First slide rail; 12. First slider; 13. Support base; 14. Air pump; 15. Air inlet pipe; 16. Sealing door; 17. Electronic lock; 18. Filter screen; 19. Second slide rail; 20. Second slider; 21. Alarm; 22. Limit plate; 23. Support leg; 24. Exhaust pipe. Detailed Implementation

[0019] In the description of this utility model, it should be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, features defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0020] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0022] Please see Figure 1-4In this utility model, a gas supply device for magnetron sputtering coating process includes a cabinet 1. A gas supply component 2 is fixedly installed on the upper surface of the cabinet 1. A support frame plate 3 is fixedly connected to the upper surface of the cabinet 1. A gas leak detector 4 is fixedly connected to the bottom surface of the support frame plate 3. An opening 5 is provided on the upper surface of the cabinet 1. A partition plate 6 is fixedly connected to the inner wall of the cabinet 1. Two first electric push rods 7 are fixedly connected to the inner bottom wall of the cabinet 1. The output ends of the two first electric push rods 7 are jointly fixedly connected to a lifting plate 8. A fixing plate 9 is fixedly connected to the upper surface of the lifting plate 8. A second electric push rod 10 is fixedly connected to the front of the fixing plate 9. A first sliding groove 11 is opened on the upper surface of the lifting plate 8. A first slider 12 is slidably connected to the inner wall of the first sliding groove 11. A support base 13 is fixedly connected to the upper surface of 12. The output end of the second electric push rod 10 is fixedly connected to the back of the support base 13. An air suction pump 14 is fixedly connected to the inner wall of the support base 13. An air inlet pipe 15 is fixedly connected to the input end of the air suction pump 14. The air supply component 2 is an air supply device to help with the coating. The gas leak detector 4 is existing technology and can quickly detect leaked gas during air supply. The first electric push rod 7 drives the air suction pump 14 to rise and fall. When the air suction pump 14 is not in use, it is lowered into the cabinet 1 to avoid affecting other operations. When sucking up leaked gas, it rises above the cabinet 1. The second electric push rod 10 drives the air suction pump 14 to move back and forth, which can suck up the gas around the air supply component 2 and increase the range of gas leakage.

[0023] The front of the cabinet 1 is hinged with a sealing door 16, and an electronic lock 17 is fixedly installed on the front of the sealing door 16. A filter screen 18 is fixedly connected to the inner wall of the air inlet pipe 15. Two second slide grooves 19 are opened on the inner wall of the cabinet 1. A second slider 20 is slidably connected to the inner wall of each second slide groove 19. The two second sliders 20 are fixedly connected to the outer surface of the lifting plate 8 on their adjacent sides. The sealing door 16 seals the cabinet 1 to prevent leaked gas from escaping from the sealing door 16, so that it only exits from the air supply component 2 above the cabinet 1, which facilitates the suction pump 14 to absorb the leaked gas. The filter screen 18 filters the gas absorbed by the suction pump 14 to prevent impurities from clogging or damaging the suction pump 14. When the first electric push rod 7 drives the suction pump 14 on the lifting plate 8 to rise and fall, the lifting plate 8 will drive the second slider 20 to slide in the second slide groove 19 to ensure the stability of the lifting of the suction pump 14.

[0024] An alarm 21 is fixedly connected to the upper surface of the support frame plate 3, a limit plate 22 is fixedly connected to the upper surface of the lifting plate 8, four support legs 23 are fixedly connected to the bottom surface of the cabinet 1, and an exhaust pipe 24 is fixedly connected to the output end of the suction pump 14. When a gas leak occurs, the alarm 21 will sound an alarm to remind personnel to quickly move away from the area. The limit plate 22 restricts the sliding range of the suction pump 14 on the lifting plate 8 to prevent it from detaching from the lifting plate 8. The exhaust pipe 24 is connected to an external pipe to discharge the gas sucked by the suction pump 14 to the outside.

[0025] The working principle of this utility model is as follows:

[0026] First, the gas leak detector 4 is used to detect the leaked gas when the gas supply component 2 is supplying gas. When the leaked gas is detected, the controller controls the alarm 21 to trigger an alarm. Then, the first electric push rod 7 is controlled to drive the suction pump 14 to rise. Subsequently, the second electric push rod 10 is controlled to drive the suction pump 14 to move back and forth continuously. Finally, the suction pump 14 is controlled to suck in the leaked gas through the air inlet pipe 15 and then discharge it through the exhaust pipe 24. This allows for the rapid absorption and discharge of the leaked gas, preventing harm to personnel's life and health.

[0027] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0028] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A gas supply device for magnetron sputtering coating process, characterized in that: The system includes a cabinet (1), on the upper surface of which a gas supply assembly (2) is fixedly installed. A support frame plate (3) is fixedly connected to the upper surface of the cabinet (1). A gas leak detector (4) is fixedly connected to the bottom surface of the support frame plate (3). An opening (5) is provided on the upper surface of the cabinet (1). A partition plate (6) is fixedly connected to the inner wall of the cabinet (1). Two first electric push rods (7) are fixedly connected to the inner bottom wall of the cabinet (1). The output ends of the two first electric push rods (7) are jointly fixedly connected to a lifting plate (8). The upper surface of the lifting plate (8) is fixedly... A fixed plate (9) is connected, and a second electric push rod (10) is fixedly connected to the front of the fixed plate (9). A first sliding groove (11) is opened on the upper surface of the lifting plate (8). A first slider (12) is slidably connected to the inner wall of the first sliding groove (11). A support seat (13) is fixedly connected to the upper surface of the first slider (12). The output end of the second electric push rod (10) is fixedly connected to the back of the support seat (13). An air pump (14) is fixedly connected to the inner wall of the support seat (13). An air inlet pipe (15) is fixedly connected to the input end of the air pump (14).

2. The gas supply device for magnetron sputtering coating process according to claim 1, characterized in that: The front of the cabinet (1) is hinged to a sealed door (16), and an electronic lock (17) is fixedly installed on the front of the sealed door (16).

3. The gas supply device for magnetron sputtering coating process according to claim 1, characterized in that: The inner wall of the air intake pipe (15) is fixedly connected with a filter screen (18), and the inner wall of the cabinet (1) has two second sliding grooves (19).

4. A gas supply device for magnetron sputtering coating process according to claim 3, characterized in that: Each of the second slide grooves (19) has a second slider (20) slidably connected to its inner wall, and the two second sliders (20) are fixedly connected to the outer surface of the lifting plate (8) on their sides that are close to each other.

5. A gas supply device for magnetron sputtering coating process according to claim 1, characterized in that: An alarm (21) is fixedly connected to the upper surface of the support frame plate (3), and a limit plate (22) is fixedly connected to the upper surface of the lifting plate (8).

6. The gas supply device for magnetron sputtering coating process according to claim 1, characterized in that: The bottom surface of the cabinet (1) is fixedly connected to four support legs (23), and the output end of the air pump (14) is fixedly connected to an exhaust pipe (24).

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