Cavity and reaction furnace
By using a rectangular inner and outer cavity structure and a heating and insulation design, the problem of low space utilization in circular cavities is solved, achieving greater load capacity, more efficient heat utilization, and stable temperature control.
Patent Information
- Application Number
- CN202520445655.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-13
- Publication Date
- 2026-01-27
- Estimated Expiration
- 2035-03-13
AI Technical Summary
The circular cavities in existing photovoltaic and semiconductor manufacturing equipment occupy a large space and have low space utilization, resulting in a small load capacity.
It adopts a rectangular inner and outer cavity structure, with heating and insulation components set between the outer and inner cavities. The rectangular cavity design reduces space occupation and increases load-bearing space. Heat is reflected by the mirror panel, and the support and limiting components stabilize the inner cavity. The adapter plate optimizes the air intake pipe layout, and thermocouples detect the temperature.
It improves the space utilization of the cavity, increases the load-bearing capacity, enhances the insulation effect and heating efficiency, reduces heat loss, and stabilizes product position and temperature control.
Smart Images
Figure CN223840921U_ABST
Abstract
Description
Technical Field
[0001] This disclosure relates to the fields of photovoltaic and semiconductor technology, and more specifically to a cavity and a reactor. Background Technology
[0002] Currently, in the manufacturing equipment of the photovoltaic and semiconductor industries, the most common shape of the cavity cross-section is circular, commonly known as a circular cavity. Circular cavities occupy a large area but have a small load-bearing space, resulting in a small load capacity for the product and low space utilization. Utility Model Content
[0003] In view of this, the present disclosure provides a cavity and a reactor, which solves the problems of large footprint and low space utilization of the cavity.
[0004] In a first aspect, embodiments of this disclosure provide a cavity, comprising: an inner cavity extending along a first direction and configured to accommodate a product, the cross-sectional shape of the inner cavity including a rectangular ring; an outer cavity extending along the first direction and configured to accommodate the inner cavity, the cross-sectional shape of the outer cavity including a rectangular ring; at least one heating element disposed between the outer cavity and the inner cavity and configured to heat the space within the cavity; and at least one heat-insulating element disposed between the heating element and the outer cavity and configured to insulate the cavity.
[0005] In some embodiments, both the heating element and the heat insulation element extend along the first direction, and there are multiple heating elements; wherein, the heating element is disposed between all sidewalls of the outer cavity and all sidewalls of the corresponding inner cavity, and at least one layer of the heat insulation element is disposed between all heating elements and all sidewalls of the corresponding outer cavity.
[0006] In some embodiments, the heat-insulating member includes a mirror panel disposed between the heating member and the outer cavity, wherein the side of the mirror panel near the heating member has a mirror surface, and the mirror surface extends along the first direction.
[0007] In some embodiments, the cavity further includes at least one support member disposed at the bottom of the outer cavity near the inner cavity and configured to support the inner cavity, the support member extending along the first direction.
[0008] In some embodiments, the cavity further includes: at least two first limiting members disposed opposite each other in a second direction, the first end of the first limiting member being connected to the side wall of the outer cavity, and the second end of the first limiting member abutting against the side wall of the inner cavity, wherein the second direction is perpendicular to the first direction.
[0009] In some embodiments, the cavity further includes: at least two second limiting members disposed opposite each other in a third direction, the first end of the second limiting member being connected to the side wall of the outer cavity, and the second end of the second limiting member abutting against the side wall of the inner cavity, wherein the third direction is perpendicular to the first direction and the second direction, respectively.
[0010] In some embodiments, the outer cavity has a first opening and a second opening disposed opposite to each other in the first direction, and the inner cavity can enter and exit the outer cavity through the first opening; wherein, the cavity further includes: at least one third limiting member disposed along the third direction and close to the first opening, the third limiting member being connected to a first end of the outer cavity and abutting against a first end face of the inner cavity; a cover plate being connected to a second end of the outer cavity to close the second opening, wherein the second end face of the inner cavity abuts against the cover plate.
[0011] In some embodiments, the cavity further includes: a transition plate connected to the side wall of the outer cavity; a plurality of air inlet pipes respectively sealed to the transition plate, wherein the first end of the air inlet pipe is located on the side of the transition plate away from the outer cavity and is connected to the air supply device, and the second end of the air inlet pipe passes through the transition plate and the side wall of the outer cavity and is connected to the inner cavity.
[0012] In some embodiments, the outer cavity is provided with a plurality of thermocouple mounting ports; wherein, the cavity further includes: a plurality of thermocouples, respectively disposed at the plurality of thermocouple mounting ports, and all of which are sealed to the sidewall of the outer cavity, the thermocouples being configured to detect the temperature of the inner cavity; wherein, the end of the thermocouple passes through the corresponding thermocouple mounting port and contacts the sidewall of the inner cavity near the outer cavity.
[0013] In a second aspect, embodiments of this disclosure provide a reactor, comprising: a cavity as described in the first aspect, configured to contain a product, wherein an outer cavity of the cavity has a first opening and a second opening disposed opposite to each other in the extending direction of the outer cavity, and an inner cavity of the cavity is capable of entering and exiting the outer cavity through the first opening; and a furnace door connected to the outer cavity to open or close the first opening.
[0014] The cross-sectional shape of both the inner and outer cavities of the cavity provided in this embodiment includes rectangles, commonly known as rectangular cavities. Therefore, the cavity of this disclosure occupies less space and has a larger carrying capacity compared to a circular cavity, enabling the cavity of this disclosure to carry more products and improving the space utilization rate of the cavity of this disclosure.
[0015] Furthermore, the heating element is positioned between the outer and inner cavities, while the insulation element is positioned between the heating element and the outer cavity. This allows the insulation element to provide better heat preservation, preventing rapid heat loss from the cavity and improving its overall insulation performance. Additionally, because the insulation element is located on the side of the heating element furthest from the inner cavity, the heat generated by the heating element can be fully utilized by the inner cavity, further preventing rapid heat loss and enhancing the overall insulation effect of the inner cavity. Attached Figure Description
[0016] Figure 1 The diagram shown is a structural schematic of a cavity provided in an embodiment of this disclosure.
[0017] Figure 2 As shown Figure 1 The cavity shown is a cross-sectional view perpendicular to the direction of its extension.
[0018] Figure 3 As shown Figure 2 The cavity shown is a magnified view of a portion of region A.
[0019] Figure 4 As shown Figure 3 The cavity shown is a magnified view of a portion of region B.
[0020] Figure 5 The diagram shown is a structural schematic of a plurality of mirror panels provided in an embodiment of this disclosure.
[0021] Figure 6 The diagram shown is a structural schematic of a cavity with an inner cavity removed according to an embodiment of this disclosure.
[0022] Figure 7 As shown Figure 6 The image shows a magnified view of the cavity with the inner cavity removed in region C.
[0023] Figure 8 The diagram shown is a structural schematic of a cavity with an inner cavity removed, according to another embodiment of this disclosure.
[0024] Figure 9 As shown Figure 8 The image shows a magnified view of the cavity with the inner cavity removed in region D.
[0025] Figure 10 The image shown is a cross-sectional view of a cavity with its inner cavity removed, provided in an embodiment of this disclosure, in a direction perpendicular to the extension of the cavity.
[0026] Figure 11 The image shown is a front view of a cavity provided in an embodiment of this disclosure.
[0027] Figure 12 As shown Figure 11The cavity shown is a magnified view of a portion of region E.
[0028] Figure 13 The image shown is a front view of a cavity with the inner cavity removed, according to an embodiment of this disclosure.
[0029] Figure 14 The diagram shown is a structural schematic of an adapter plate and an intake pipe provided in an embodiment of this disclosure.
[0030] Figure 15 The image shown is a side view of a reactor provided in an embodiment of this disclosure.
[0031] Figure label:
[0032] 1. Reactor; 10. Cavity; 100. Inner cavity; 110. Side wall of the inner cavity; 1001. First end face of the inner cavity; 200. Outer cavity; 210. Side wall of the outer cavity; 201. First opening; 202. Second opening; 203. Third opening; 204. Thermocouple mounting port; 2001. First end of the outer cavity; 2002. Second end of the outer cavity; 300. Heating element; 400. Insulation element; 410. Mirror panel; 4101. Mirror image; 500. Support element; 600. First limiting element; 601. First end of the first limiting element; 602. Second end of the limiting element; 610. First sub-connector; 620. First sub-connector Positioning component; 630, First locking component; 700, Second limiting component; 701, First end of the second limiting component; 702, Second end of the second limiting component; 800, Third limiting component; 8001, Long groove; 900, Cover plate; 1000, Adapter plate; 1100, Air inlet pipe; 1101, First end of the air inlet pipe; 1102, Second end of the air inlet pipe; 1200, First heating element support; 1300, Second heating element support; 1400, First insulation element support; 1500, Second insulation element support; 1600, Reinforcing rib; 1700, Thermocouple; X1, First direction; X2, Second direction; X3, Third direction; 20, Furnace door. Detailed Implementation
[0033] The technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this disclosure, and not all embodiments. Based on the embodiments of this disclosure, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this disclosure.
[0034] Figure 1 The diagram shown is a structural schematic of a cavity provided in an embodiment of this disclosure. Figure 2 As shown Figure 1 The cavity shown is a cross-sectional view perpendicular to the direction of its extension. Figure 3 As shown Figure 2 The image shows a magnified view of a portion of the cavity in region A. Figures 1 to 3 As shown, the cavity 10 includes an inner cavity 100, an outer cavity 200, at least one heating element 300, and at least one insulation element 400. The inner cavity 100 extends along a first direction X1 and is configured to accommodate a product; the cross-sectional shape of the inner cavity 100 includes a rectangular ring. The outer cavity 200 extends along the first direction X1 and is configured to accommodate the inner cavity 100; the cross-sectional shape of the outer cavity 200 also includes a rectangular ring. At least one heating element 300 is disposed between the outer cavity 200 and the inner cavity 100, and is configured to heat the space within the cavity 10, which is the same space as the space within the outer cavity 200. At least one insulation element 400 is disposed between the heating element 300 and the outer cavity 200, and is configured to insulate the cavity 10.
[0035] The cross-sectional shape of both the inner cavity 100 and the outer cavity 200 of the cavity 10 includes a rectangle, commonly known as a rectangular cavity. Therefore, the rectangular cavity 10 occupies less space and has a larger load-bearing space than a circular cavity, so that the cavity 10 can carry more products and improve the space utilization of the cavity 10.
[0036] Furthermore, the heating element 300 is disposed between the outer cavity 200 and the inner cavity 100, and the heat insulation element 400 is disposed between the heating element 300 and the outer cavity 200. This allows the heat insulation element 400 to achieve a better heat insulation effect, preventing rapid heat loss from the cavity 10 and improving the heat insulation effect of the cavity 10. Additionally, since the heat insulation element 400 is disposed on the side of the heating element 300 away from the inner cavity 100, the heat generated by the heating element 300 can be fully utilized by the inner cavity 100, and rapid heat loss from the inner cavity 100 can be prevented, thus improving the heat insulation effect of the inner cavity 100.
[0037] For example, there is one heating element 300 and one heat insulation element 400. The heating element 300 is disposed between one side wall of the outer cavity 200 and one side wall of the corresponding inner cavity 100, and the heat insulation element 400 is disposed between the heating element 300 and one side wall of the corresponding outer cavity 200. For example, there are multiple heating elements 300 and multiple heat insulation elements 400. Multiple heating elements 300 are respectively disposed between a portion of the side wall of the outer cavity 200 and a portion of the side wall of the corresponding inner cavity 100, and multiple heat insulation elements 400 are respectively disposed between multiple heating elements 300 and a portion of the side wall of the corresponding outer cavity 200, and the multiple heat insulation elements 400 are all disposed in a single layer.
[0038] For example, the heating element 300 is placed between the outer cavity 200 and the inner cavity 100, or the heating element 300 is disposed between the outer cavity 200 and the inner cavity 100 and connected to the side wall 210 of the outer cavity.
[0039] For example, the heat insulation element 400 is placed between the heating element 300 and the outer cavity 200, or the heat insulation element 400 is disposed between the heating element 300 and the outer cavity 200 and connected to the side wall 210 of the outer cavity.
[0040] For example, the heating element 300 may be a heating rod, a heating plate, etc. For example, the insulation element 400 may be insulation cotton, a ceramic plate, etc.
[0041] For example, such as Figure 1 As shown, the first direction X1 is the first horizontal direction.
[0042] In some embodiments, both the heating element 300 and the heat insulation element 400 extend along the first direction X1, and there are multiple heating elements 300. Heating elements 300 are provided between all sidewalls of the outer cavity 200 and all sidewalls of the corresponding inner cavity 100, and at least one layer of heat insulation element 400 is provided between all heating elements 300 and all sidewalls of the corresponding outer cavity 200.
[0043] By providing heating elements 300 between all sidewalls of the outer cavity 200 and all sidewalls of the corresponding inner cavity 100, the coverage area of the heating elements 300 is further increased, thereby further improving the heating efficiency and heating uniformity of the cavity 10. Furthermore, by providing at least one layer of insulation 400 between all heating elements 300 and all sidewalls of the corresponding outer cavity 200, the coverage area of the insulation 400 is further increased. During the process, when the outer cavity 200 is under low pressure, the insulation effect on the inner cavity 100 is further improved under the low pressure conditions and the insulation effect of the insulation 400.
[0044] For example, there are four heating elements 300 and four heat insulation elements 400. The four heating elements 300 are respectively disposed between the four side walls of the outer cavity 200 and the four side walls of the corresponding inner cavity 100, and the four heat insulation elements 400 are respectively disposed between the four heating elements 300 and the four side walls of the corresponding outer cavity 200.
[0045] In some embodiments, at least two layers of insulation 400 are provided between the heating element 300 and the corresponding side wall 210 of the outer cavity. The use of at least two layers of insulation 400 for insulation further improves the insulation effect of the cavity 10.
[0046] For example, such as Figures 2 to 4As shown, two layers of insulation 400 are provided between the heating element 300 and the corresponding outer cavity sidewall 210, and the two layers of insulation 400 are interconnected. Exemplarily, multiple insulation elements 400 disposed opposite each other in the second direction X2 are all disposed along the third direction X3 and all extend along the first direction X1. Exemplarily, multiple insulation elements 400 disposed opposite each other in the third direction X3 are all disposed along the second direction X2 and all extend along the first direction X1.
[0047] In some embodiments, such as Figures 2 to 5 As shown, the heat preservation member 400 includes a mirror panel 410, which is disposed between the heating member 300 and the outer cavity 200. The side of the mirror panel 410 closest to the heating member 300 has a mirror surface 4101, which extends along the first direction X1.
[0048] By using the mirror panel 4101 to reflect the heat emitted by the heating element 300 toward the mirror panel 4101, the heat is reflected to the inner cavity 100, thereby minimizing heat loss and making fuller use of the heat provided by the heating element 300.
[0049] In some embodiments, the cavity 10 further includes at least one support member 500, which is disposed at the bottom of the outer cavity 200 on the side near the inner cavity 100, and is configured to support the inner cavity 100. The support member 500 extends along a first direction X1.
[0050] By using the support member 500 to support the inner cavity 100, most of the force applied by the product is borne by the support member 500 when the inner cavity 100 is accommodating the product. This reduces the stress on the inner cavity 100 and minimizes the wall thickness of the side wall 110 of the inner cavity, thereby further improving the heating efficiency of the heating member 300 on the inner cavity 100.
[0051] For example, such as Figure 4 , Figures 6 to 10 As shown, there are four support members 500. Two support members 500 are located at the bottom of the outer cavity 200 near the inner cavity 100 and are positioned opposite each other in the second direction X2. These two support members 500 support the two sides of the bottom of the inner cavity 100 respectively, so as to achieve stable support of the inner cavity 100. The other two support members 500 are positioned opposite the two support members 500 at the bottom of the outer cavity 200 in the third direction X3, and are connected to the side wall 210 of the outer cavity.
[0052] In some embodiments, such as Figure 6 , Figure 7 , Figures 11 to 13As shown, the cavity 10 also includes at least two first limiting members 600 disposed opposite each other in the second direction X2. The first end 601 of the first limiting member is connected to the side wall 210 of the outer cavity, and the second end 602 of the first limiting member abuts against the side wall 110 of the inner cavity. The second direction X2 is perpendicular to the first direction X1.
[0053] By using two first limiting members 600 that are respectively arranged opposite to each other in the second direction X2 to abut against two side walls of the inner cavity that are respectively arranged opposite to each other in the second direction X2, the position of the inner cavity 100 in the second direction X2 can be adjusted and limited.
[0054] For example, such as Figure 13 As shown, there are multiple first limiting members 600, and every two first limiting members 600 are arranged opposite each other in the second direction X2. This arrangement enables the multiple first limiting members 600 to symmetrically adjust and limit the position of the inner cavity 100 in the second direction X2, ensuring the stability of the adjustment and limiting. For example, the second direction X2 is a second horizontal direction.
[0055] In some embodiments, such as Figure 6 , Figure 7 , Figures 11 to 13 As shown, the cavity 10 also includes at least two second limiting members 700 disposed opposite each other in the third direction X3. The first end 701 of the second limiting member is connected to the side wall 210 of the outer cavity, and the second end 702 of the second limiting member abuts against the side wall 110 of the inner cavity. The third direction X3 is perpendicular to the first direction X1 and the second direction X2, respectively.
[0056] Two second limiting members 700, which are respectively arranged opposite to each other on the third direction X3, abut against the two side walls of the inner cavity arranged opposite to each other on the third direction X3, so as to limit the position of the inner cavity 100 on the third direction X3.
[0057] For example, such as Figure 13 As shown, there are multiple second limiting members 700, with each pair of second limiting members 700 positioned opposite each other in the third direction X3. This arrangement enables the multiple second limiting members 700 to symmetrically limit the inner cavity 100 in the third direction X3, ensuring the stability of the limiting. For example, the third direction X3 is the vertical direction.
[0058] In some embodiments, such as Figures 6 to 8 , Figures 11 to 13As shown, the outer cavity 200 has a first opening 201 and a second opening 202 disposed opposite each other in a first direction X1, and the inner cavity 100 can enter and exit the outer cavity 200 through the first opening 201. The cavity 10 also includes at least one third limiting member 800 and a cover plate 900. The third limiting member 800 is disposed along a third direction X3 and is close to the first opening 201. The third limiting member 800 is connected to the first end 2001 of the outer cavity and abuts against the first end face 1001 of the inner cavity. The cover plate 900 is connected to the second end 2002 of the outer cavity to close the second opening 202. The second end face of the inner cavity abuts against the cover plate 900.
[0059] For example, such as Figure 11 and Figure 13 As shown, there are two third limiting members 800, which are arranged opposite each other in the second direction X2. This arrangement enables the two third limiting members 800 to symmetrically limit the inner cavity 100 in the first direction X1, thereby ensuring the stability of the limiting.
[0060] For example, such as Figure 7 As shown, the first limiting member 600 includes a first sub-connector 610, a first sub-limiting member 620, and a first sub-locking member 630. The first sub-connector 610 extends along the second direction X2. One end of the first sub-connector 610 is connected to the side wall 210 of the outer cavity, and the other end of the first sub-connector 610 is threadedly connected to the first sub-limiting member 620. The first sub-limiting member 620 abuts against the side wall 110 of the inner cavity. The first sub-locking member 630 is sleeved on the first sub-connector 610, which can lock the position of the first sub-limiting member 620. The distance between the first sub-limiting member 620 and the side wall 210 of the outer cavity can be adjusted by rotating the first sub-limiting member 620. Exemplarily, the structure and adjustment method of the second limiting member 700 are the same as those of the first limiting member 600, only the installation direction is different. The specific structure of the second limiting member 700 will not be described in detail here.
[0061] For example, such as Figure 7 As shown, the third limiting member 800 has an elongated groove 8001 that extends along the first direction X1. The elongated groove 8001 facilitates the adjustment of the position of the third limiting member 800 in the first direction X1, so as to achieve the abutment of the third limiting member 800 with the first end face 1001 of the inner cavity.
[0062] In some embodiments, such as Figure 1 , Figure 6 , Figure 11 and Figure 14As shown, the cavity 10 also includes a transition plate 1000 and multiple air inlet pipes 1100. The transition plate 1000 is connected to the side wall 210 of the outer cavity. The multiple air inlet pipes 1100 are respectively sealed to the transition plate 1000. The first end 1101 of the air inlet pipe is located on the side of the transition plate 1000 away from the outer cavity 200 and is connected to the air supply device. The second end 1102 of the air inlet pipe passes through the transition plate 1000 and the side wall 210 of the outer cavity and is connected to the inner cavity 100.
[0063] By using an adapter plate 1000 to arrange multiple air intake pipes 1100 together, the space occupied by the air intake pipes 1100 is saved, thereby minimizing the size of the cavity 10, further reducing the space occupied by the cavity 10, and further improving the heating efficiency of the cavity 10. In addition, the multiple air intake pipes 1100 are sealed to the adapter plate 1000 so that when the adapter plate 1000 is installed or removed, the adapter plate 1000 can simultaneously carry away multiple air intake pipes 1100, improving the installation and removal efficiency of multiple air intake pipes 1100.
[0064] For example, such as Figure 6 and Figure 11 As shown, the outer cavity 200 has a third opening 203, and the adapter plate 1000 is sealed to the side wall 210 of the outer cavity to close the third opening 203.
[0065] For example, such as Figures 2 to 10 As shown, the cavity 10 also includes a plurality of first heating element support seats 1200 and a plurality of second heating element support seats 1300. The first heating element support seats 1200 are connected to adjacent support members 500 and extend along a first direction X1. Two first heating element support seats 1200s arranged opposite each other in a second direction X2 jointly support one heating element 300. The second heating element support seats 1300 are connected to adjacent support members 500 and extend along the first direction X1. Two second heating element support seats 1300s arranged opposite each other in a third direction X3 jointly support and limit one heating element 300.
[0066] For example, such as Figures 2 to 10 As shown, the cavity 10 also includes multiple first insulation support seats 1400 and multiple second insulation support seats 1500. The first insulation support seats 1400 are located below the first heating element support seat 1200 and are connected to adjacent support members 500. Multiple first insulation support seats 1400 arranged opposite each other in the second direction X2 jointly support one insulation member 400. The second insulation support seats 1500 are connected to the side wall 210 of the outer cavity. Two second insulation support seats 1500 arranged opposite each other in the third direction X3 jointly support and limit one insulation member 400.
[0067] For example, the cavity 10 also includes multiple reinforcing ribs 1600, which are connected to the side of the outer cavity 200 away from the inner cavity 100. The reinforcing ribs 1600 are used to strengthen the mechanical strength of the outer cavity 200, thereby increasing the atmospheric pressure that the outer cavity 200 can withstand in a vacuum environment and reducing the deformation of the outer cavity 200.
[0068] In some embodiments, the outer cavity 200 is provided with a plurality of thermocouple mounting ports 204, and the cavity 10 also includes a plurality of thermocouples 1700. The plurality of thermocouples 1700 are respectively disposed at the plurality of thermocouple mounting ports 204 and are all sealed to the sidewall 210 of the outer cavity. The thermocouples 1700 are configured to detect the temperature of the inner cavity 100. The end of the thermocouple 1700 passes through the corresponding thermocouple mounting port 204 and contacts the side of the sidewall 110 of the inner cavity near the outer cavity 200.
[0069] By setting thermocouple 1700, the actual temperature of the inner cavity 100 can be detected in real time, so as to control the start and stop of the heating element 300 in a timely manner, so as to keep the actual temperature of the inner cavity 100 within the required process temperature range.
[0070] For example, when a heating element 300 and a heat insulation element 400 are provided between the side wall of the outer cavity 200 where the thermocouple 1700 is provided and the side wall 110 of the corresponding inner cavity, the end of the thermocouple 1700 passes through the heat insulation element 400 and the heating element 300 and then contacts the side wall 110 of the corresponding inner cavity.
[0071] For example, such as Figure 6 As shown, multiple thermocouple mounting ports 204 are arranged in multiple rows and columns along the first direction X1 and the width direction of the side wall 210 of the outer cavity.
[0072] Figure 15 The image shown is a side view of a reactor provided according to an embodiment of this disclosure. Figure 1 , Figure 6 , Figure 8 and Figure 15 As shown, the reactor 1 includes the cavity 10 and furnace door 20 mentioned in the above embodiments. The cavity 10 is configured to contain products, and the outer cavity 200 of the cavity 10 has a first opening 201 and a second opening 202 disposed opposite to each other in the extending direction of the outer cavity 200. The inner cavity 100 of the cavity 10 can enter and exit the outer cavity 200 through the first opening 201. The furnace door 20 is connected to the outer cavity 200 to open or close the first opening 201.
[0073] For example, the working process of the reactor 1 is as follows: the product is placed in the inner cavity 100, the furnace door 20 is closed, and the reactor 1 is evacuated using a vacuum pump. The heating element 300 heats the temperature of the inner cavity 100 to a preset temperature, and the reactor 1 performs processing on the product.
[0074] Since the reactor 1 includes a cavity 10, all the technical features and effects of the reactor 1 including the cavity 10 will not be described in detail here.
[0075] In the embodiments of this disclosure, unless otherwise specified, the connection can be a detachable connection using bolts, nuts, screws, clips, magnets, etc. In some connections where there is no particular requirement for a detachable fit, a non-detachable connection can be achieved through welding, bonding, etc.
[0076] The terms "an embodiment" or "embodiment" used in this specification indicate that the described embodiment may include a specific feature, structure, or characteristic, but not every embodiment necessarily includes that specific feature, structure, or characteristic. Furthermore, such phrases do not necessarily refer to the same embodiment. Additionally, when a specific feature, structure, or characteristic is described in connection with an embodiment, implementing such a feature, structure, or characteristic in conjunction with other embodiments, whether explicitly described or not, is within the knowledge scope of those skilled in the art.
[0077] It should be understood that “on,” “above,” and “on top of” in this disclosure should be interpreted in the broadest manner, such that “on” means not only “directly on something” but also “on something” with an intermediate feature or layer therebetween, and that “above” or “on top of” means not only “on top of something” but also “on top of something” without an intermediate feature or layer therebetween (i.e., directly on something).
[0078] Furthermore, for ease of explanation, spatial relative terms such as "below," "below," "under," "above," and "above" may be used to describe the relationship of a component or feature relative to other components or features as shown in the figures. Spatial relative terms are intended to encompass different orientations of components in use or operation other than those shown in the figures. Devices may have other orientations (rotated 90 degrees or in other orientations), and the spatial relative descriptive terms used herein may be interpreted accordingly.
[0079] It should be noted that, in this document, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Unless otherwise specified, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.
[0080] The above description is merely a preferred embodiment of this disclosure and is not intended to limit this disclosure. Any modifications or equivalent substitutions made within the spirit and principles of this disclosure should be included within the scope of protection of this disclosure.
Claims
1. A cavity, characterized in that, include: An inner cavity, extending along a first direction, is configured to accommodate a product, the cross-sectional shape of the inner cavity comprising a rectangular ring; An outer cavity, extending along the first direction, is configured to accommodate the inner cavity, the cross-sectional shape of the outer cavity comprising a rectangular ring; At least one heating element is disposed between the outer cavity and the inner cavity and is configured to heat the space within the cavity; At least one layer of insulation is disposed between the heating element and the outer cavity, and is configured to insulate the cavity.
2. The cavity according to claim 1, characterized in that, Both the heating element and the heat insulation element extend along the first direction, and there are multiple heating elements. The heating element is provided between all side walls of the outer cavity and all side walls of the corresponding inner cavity, and at least one layer of the heat insulation element is provided between all heating elements and all side walls of the corresponding outer cavity.
3. The cavity according to claim 1, characterized in that, The insulation component includes: A mirror panel is disposed between the heating element and the outer cavity, wherein the side of the mirror panel closest to the heating element has a mirror surface, and the mirror surface extends along the first direction.
4. The cavity according to claim 1, characterized in that, Also includes: At least one support member is disposed at the bottom of the outer cavity near the inner cavity and configured to support the inner cavity, the support member extending along the first direction.
5. The cavity according to claim 4, characterized in that, Also includes: At least two first limiting members are arranged opposite each other in a second direction. The first end of the first limiting member is connected to the side wall of the outer cavity, and the second end of the first limiting member abuts against the side wall of the inner cavity. The second direction is perpendicular to the first direction.
6. The cavity according to claim 5, characterized in that, Also includes: At least two second limiting members are arranged opposite each other in a third direction. The first end of the second limiting member is connected to the side wall of the outer cavity, and the second end of the second limiting member abuts against the side wall of the inner cavity. The third direction is perpendicular to the first direction and the second direction, respectively.
7. The cavity according to claim 6, characterized in that, The outer cavity has a first opening and a second opening that are disposed opposite to each other in the first direction, and the inner cavity can enter and exit the outer cavity through the first opening; The cavity further includes: At least one third limiting member is disposed along the third direction and close to the first opening. The third limiting member is connected to the first end of the outer cavity and abuts against the first end face of the inner cavity. A cover plate is connected to the second end of the outer cavity to close the second opening, wherein the second end face of the inner cavity abuts against the cover plate.
8. The cavity according to any one of claims 1 to 7, characterized in that, Also includes: The adapter plate is connected to the side wall of the outer cavity. Multiple air intake pipes are respectively sealed and connected to the adapter plate. The first end of the air intake pipe is located on the side of the adapter plate away from the outer cavity and is connected to the air supply device. The second end of the air intake pipe passes through the adapter plate and the side wall of the outer cavity and is connected to the inner cavity.
9. The cavity according to claim 8, characterized in that, The outer cavity is provided with multiple thermocouple mounting ports; The cavity further includes: Multiple thermocouples are respectively disposed at multiple thermocouple mounting ports and are all sealed to the side wall of the outer cavity. The thermocouples are configured to detect the temperature of the inner cavity. The end of the thermocouple passes through the corresponding thermocouple mounting port and contacts the side wall of the inner cavity near the outer cavity.
10. A reactor, characterized in that, include: The cavity according to any one of claims 1 to 9 is configured to receive a product, wherein the outer cavity of the cavity has a first opening and a second opening disposed opposite to each other in the extending direction of the outer cavity, and the inner cavity of the cavity is capable of entering and exiting the outer cavity through the first opening; The furnace door is connected to the outer cavity to open or close the first opening.