Sample fixing device for back scattering electron diffraction analysis
By designing a sample fixation device for backscattered electron diffraction analysis, the problem of inaccurate sample positioning in a vacuum environment was solved, achieving stable fixation of samples on the electron microscope stage and rapid clamping of multiple sample types, thus improving the accuracy of analytical results.
Patent Information
- Application Number
- CN202422673706.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-04
- Publication Date
- 2026-01-27
- Estimated Expiration
- 2034-11-04
AI Technical Summary
In existing scanning electron microscopes, backscattered electron diffraction analysis results in inaccurate sample positioning due to changes in the thickness of the conductive adhesive in a vacuum environment. Furthermore, traditional fixation methods are not suitable for cross-sectional and thin film samples, making the operation inconvenient.
A sample fixation device for backscattered electron diffraction analysis was designed, including a main mounting component, an auxiliary mounting ramp, a sample limiting component, and an elastic fixing component. The auxiliary mounting ramp and limiting groove structure, combined with the elastic fixing component, are used to achieve stable fixation of the sample.
It enables rapid and stable fixation of samples on the electron microscope stage, avoids the use of conductive adhesive, improves the accuracy and stability of sample analysis, and is suitable for clamping various sample types.
Smart Images
Figure CN223841818U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of sample fixation technology, and in particular to a sample fixation device for backscattered electron diffraction analysis. Background Technology
[0002] Backscattered electron diffraction (BSED) is a technique that uses diffracted electron beams to identify the crystallographic orientation of a sample. Mounted on a scanning electron microscope at approximately 70 degrees, the accelerated electron beam enters the sample, producing backscattered electrons. These backscattered electrons, after being diffracted through the surface crystal structure, carry crystallographic information about the sample surface and enter the detector, allowing the determination of the orientation of each grain. Knowing the orientation of each grain enables analytical methods for determining grain boundaries, phase identification, grain orientation, texture, and strain.
[0003] Currently, electron backscatter diffraction analysis in scanning electron microscopy (SEM) requires a 70-degree sample tilt, which is achieved using two types of pre-tilt stages. However, this requires the sample to be fixed to the pre-tilt stage with conductive adhesive. When the sample is placed in the SEM, a vacuum is drawn, and the air adsorbed in the conductive adhesive gradually dissipates, causing thickness changes and constantly shifting the sample's position, leading to inaccurate analytical results. Furthermore, existing pre-tilt stages can only hold one sample at a time, and traditional methods lack effective fixation for cross-sectional and thin film samples, making fixation very inconvenient. Therefore, a sample fixation device for backscatter electron diffraction analysis was designed. Utility Model Content
[0004] The purpose of this invention is to solve the above-mentioned problems by designing a sample fixing device for backscattered electron diffraction analysis.
[0005] To achieve the above objectives, the technical solution of this utility model is a sample fixing device for backscattered electron diffraction analysis, comprising a main mounting assembly, an auxiliary mounting inclined surface on the main mounting assembly, a sample limiting assembly on the auxiliary mounting inclined surface, a first auxiliary plate on the inner side of the sample limiting assembly, a plurality of first sample pressing plates on the first auxiliary plate, a second auxiliary plate on the outer side of the main mounting assembly, and a plurality of second sample fixing plates on the second auxiliary plate.
[0006] As a further description of this technical solution, the main mounting component includes a main mounting base, a guide groove, and an auxiliary mounting ramp.
[0007] As a further description of this technical solution, the sample limiting component includes a sample limiting block, a sample limiting groove is provided on the top surface of the sample limiting block, and a first auxiliary plate is provided on the side of the sample limiting block.
[0008] As a further description of this technical solution, an auxiliary guide block is provided on the sample limiting block below the first auxiliary plate, and the auxiliary guide block is disposed in the guide groove.
[0009] As a further description of this technical solution, an elastic fixing component is provided in the guide groove.
[0010] As a further description of this technical solution, the elastic fixing component includes an auxiliary spring sheet disposed in a guide groove, a connecting plate bent on the side of the auxiliary spring sheet, the connecting plate being fixed to the main mounting base by a fixing member, and the auxiliary spring sheet contacting the auxiliary guide block.
[0011] As a further description of this technical solution, the first auxiliary plate is fixed to the sample limiting assembly by a fastener.
[0012] As a further description of this technical solution, the second auxiliary plate is fixed to the main mounting assembly by a fastener.
[0013] Its beneficial effects are that the sample fixing device of this technical solution has a clever structural design, strong practicality, and is easy to operate. When in use, it can quickly fix the sample on the electron microscope stage, avoiding the use of conductive glue, silver glue, or other substances to fix the sample. Moreover, the sample fixing stability is high. Using this sample fixing device effectively improves the stability of sample clamping and also effectively improves the accuracy of sample analysis and testing results. Attached Figure Description
[0014] Figure 1 This is a schematic diagram of the overall structure of this utility model;
[0015] Figure 2 This is a schematic diagram of the overall structure of this utility model from another perspective;
[0016] Figure 3 This is a structural schematic diagram of the elastic fixing component of this utility model.
[0017] In the figure, 1. Main mounting component; 2. Auxiliary mounting ramp; 3. Sample limiting component; 4. First auxiliary plate; 5. First sample pressing plate; 6. Second auxiliary plate; 7. Second sample fixing plate; 8. Main mounting base; 9. Guide groove; 10. Sample limiting block; 11. Sample limiting groove; 12. Auxiliary guide block; 13. Elastic fixing component; 14. Auxiliary spring; 15. Connecting plate; 16. Fixing component. Detailed Implementation
[0018] The present invention will now be described in detail with reference to the accompanying drawings, such as... Figures 1-3As shown, a sample fixing device for backscattered electron diffraction analysis includes a main mounting component 1, which includes a main mounting base 8, a guide groove 9, and an auxiliary mounting inclined surface 2.
[0019] To facilitate the installation of the sample limiting component 3, an auxiliary mounting ramp 2 is provided on the main mounting component 1. To facilitate the limiting of the sample, a sample limiting component 3 is provided on the auxiliary mounting ramp 2. The sample limiting component 3 will be described in detail below. The sample limiting component 3 includes a sample limiting block 10. A sample limiting groove 11 is provided on the top surface of the sample limiting block 10, and a first auxiliary plate 4 is provided on the side of the sample limiting block 10.
[0020] To facilitate sample fixation, a first auxiliary plate 4 is provided inside the sample limiting component 3, and a plurality of first sample pressing plates 5 are provided on the first auxiliary plate 4. The first auxiliary plate 4 is fixed to the sample limiting component 3 by a fixing member 16.
[0021] A second auxiliary plate 6 is provided on the outside of the main mounting component 1. A plurality of second sample fixing plates 7 are provided on the second auxiliary plate 6. The second auxiliary plate 6 is fixed to the main mounting component 1 by a fastener 16.
[0022] To facilitate the movement and guidance of the sample limiting block 10, an auxiliary guide block 12 is provided on the sample limiting block 10 below the first auxiliary plate 4, and the auxiliary guide block 12 is disposed in the guide groove 9.
[0023] In order to control the locking of the auxiliary guide block 12 in the guide groove 9, an elastic fixing component 13 is provided in the guide groove 9. The elastic fixing component 13 will be described in detail below. The elastic fixing component 13 includes an auxiliary spring piece 14 disposed in the guide groove 9. A connecting plate 15 is bent on the side of the auxiliary spring piece 14. The connecting plate 15 is fixed to the main mounting base 8 by a fastener 16. The auxiliary spring piece 14 is in contact with the auxiliary guide block 12.
[0024] The specific structure of this utility model has been described in detail above. The working principle of this utility model will be explained below: In use, under the elastic force of the auxiliary spring 14, the position of the auxiliary guide block 12 can be adjusted, thereby adjusting the position of the sample limiting block 10. The position of the sample limiting block 10 is adjusted according to the sample thickness. When clamping a cross-sectional sample, the cross-sectional sample is placed in the sample limiting groove 11 on the sample limiting block 10, and the cross-sectional sample is pressed by the first sample pressing plate 5. When clamping a block sample or a thin sheet sample, the block sample or thin sheet sample is placed on the side of the sample limiting block 10, and the block sample or thin sheet sample is quickly fixed by the second sample fixing plate 7. The sample fixing device of this technical solution can clamp multiple samples to be tested and analyzed at one time, and is suitable for the rapid and stable clamping of cross-sectional samples, block samples, and thin sheet samples.
[0025] The sample fixing device of this technical solution has a clever structural design, is highly practical, and is easy to operate. During use, it can quickly fix the sample on the electron microscope stage, avoiding the need to use conductive glue, silver paste, or other materials to fix the sample. Moreover, the sample fixing stability is high. Using this sample fixing device effectively improves the stability of sample clamping and also effectively improves the accuracy of sample analysis and testing results.
[0026] The above technical solution only embodies the preferred technical solution of this utility model. Any changes that may be made by those skilled in the art to certain parts of it embody the principle of this utility model and fall within the protection scope of this utility model.
Claims
1. A sample fixing device for backscattered electron diffraction analysis, characterized in that, The system includes a main mounting assembly (1), an auxiliary mounting ramp (2) on the main mounting assembly (1), a sample limiting assembly (3) on the auxiliary mounting ramp (2), a first auxiliary plate (4) on the inner side of the sample limiting assembly (3), a plurality of first sample pressing plates (5) on the first auxiliary plate (4), a second auxiliary plate (6) on the outer side of the main mounting assembly (1), and a plurality of second sample fixing plates (7) on the second auxiliary plate (6).
2. The sample fixing device for backscattered electron diffraction analysis according to claim 1, characterized in that, The main mounting assembly (1) includes a main mounting base (8), a guide groove (9) is provided on the main mounting base (8), and an auxiliary mounting ramp (2) is provided on the main mounting base (8).
3. The sample fixing device for backscattered electron diffraction analysis according to claim 2, characterized in that, The sample limiting component (3) includes a sample limiting block (10), the top surface of which is provided with a sample limiting groove (11), and the side surface of which is provided with a first auxiliary plate (4).
4. The sample fixing device for backscattered electron diffraction analysis according to claim 3, characterized in that, An auxiliary guide block (12) is provided on the sample limiting block (10) below the first auxiliary plate (4), and the auxiliary guide block (12) is provided in the guide groove (9).
5. The sample fixing device for backscattered electron diffraction analysis according to claim 4, characterized in that, An elastic fixing component (13) is provided inside the guide groove (9).
6. The sample fixing device for backscattered electron diffraction analysis according to claim 5, characterized in that, The elastic fixing component (13) includes an auxiliary spring piece (14) disposed in the guide groove (9). A connecting plate (15) is bent on the side of the auxiliary spring piece (14). The connecting plate (15) is fixed on the main mounting base (8) by a fastener (16). The auxiliary spring piece (14) is in contact with the auxiliary guide block (12).
7. The sample fixing device for backscattered electron diffraction analysis according to claim 1, characterized in that, The first auxiliary plate (4) is fixed to the sample limiting assembly (3) by a fastener (16).
8. The sample fixing device for backscattered electron diffraction analysis according to claim 1, characterized in that, The second auxiliary plate (6) is fixed to the main mounting assembly (1) by a fastener (16).