Clamping device and photoetching machine

Abstract

The utility model belongs to the technical field of microelectronics, and particularly relates to a clamping device and a photoetching machine. Two clamping assemblies are oppositely arranged on a supporting base of the clamping device, the two clamping assemblies are arranged on the supporting base in a sliding mode and can be matched to clamp a workpiece, a driving mechanism installed on the supporting base comprises a driving part, a cam and a follow-up assembly, the driving part is in transmission connection with the cam, and a threaded groove is formed in the surface of the cam; one end of the follow-up assembly is movably matched with the threaded groove, and the other end of the follow-up assembly is connected to the clamping assembly. Rotation of the cam is converted into movement of the clamping assembly, so that the clamping assembly is gentle and smooth in the moving process and not prone to being blocked, the clamping assembly is linear in the moving process and not prone to impacting a workpiece, and therefore the stability of the clamping assembly when the clamping assembly clamps the workpiece is improved. According to the photoetching machine provided by the utility model, the clamping device is arranged, so that the phenomena of blockage and impact are difficult to occur when the clamping assembly moves, and the stability of the clamping assembly for clamping a workpiece is improved.

Description

Technical Field

[0001] This utility model relates to the field of microelectronics technology, and in particular to a clamping device and a photolithography machine. Background Technology

[0002] Photolithography is the most complex and critical process in semiconductor chip manufacturing, characterized by its long processing time and high cost. A photomask is a thin film of metal or photoresist with patterns, text, or other information printed on its surface. It serves as the master pattern used in the photolithography process in microelectronics and integrated optoelectronics manufacturing, making it an indispensable component of the photolithography process.

[0003] As precision components, photomasks are highly sensitive to particles and contaminants. Therefore, they are stored in specialized photomask cassettes and only removed from the cassettes and placed onto the photomask stage by a robotic arm during the exposure process. However, existing robotic arms or gripping devices are not stable enough when handling photomasks. The drive mechanism is not smooth enough when driving the robotic arm or gripping device to perform the gripping action, and it is prone to jamming. Moreover, the drive mechanism is not linear enough when driving the robotic arm or gripping device to perform the gripping action, and the robotic arm or gripping device can exert a certain impact on the photomask, which can easily lead to damage. Therefore, there is an urgent need to propose a gripping device to solve the above problems. Utility Model Content

[0004] The first objective of this invention is to provide a clamping device to solve the technical problem of poor stability when clamping photomasks in the prior art.

[0005] The second objective of this invention is to provide a lithography machine that solves the technical problem of poor stability during mask clamping in the prior art.

[0006] Based on the above concept, the technical solution adopted by this utility model is as follows:

[0007] A clamping device includes a support base with two clamping assemblies disposed opposite each other on the support base. The two clamping assemblies are slidably disposed on the support base and can cooperate to clamp a workpiece. Two driving mechanisms are also installed on the support base, and the driving mechanisms are configured one-to-one with the clamping assemblies. Each driving mechanism includes a driving component, a cam, and a follower component. The driving component is drivenly connected to the cam. The cam surface is provided with a threaded groove. One end of the follower component is movably engaged with the threaded groove, and the other end is connected to the clamping assembly. Rotation of the cam can drive the follower component to translate, so that the two sets of clamping assemblies move closer to or further away from each other.

[0008] Optionally, the end of the follower component rolls into contact with the sidewall of the threaded groove.

[0009] Optionally, the follower assembly includes a follower bracket and a roller rotatably connected to the follower bracket, wherein the roller and the sidewall of the threaded groove are in rolling engagement.

[0010] Optionally, the rotation axis of the cam is parallel to the sliding direction of the gripping assembly.

[0011] Optionally, the clamping assembly includes a mounting arm and a carrier connected to the bottom of both ends of the mounting arm. The mounting arm is slidably disposed on the support base. The follower assembly is connected to the mounting arm. The carrier has a bearing surface on its upper side, which is located below the mounting arm and can abut against the lower side of the workpiece.

[0012] Optionally, the clamping assembly further includes a connecting foot that connects between the mounting arm and the carrier.

[0013] Optionally, the support base is provided with a plurality of elongated holes, each of which corresponds to a connecting foot and extends along the sliding direction of the clamping assembly. The connecting foot can pass through the elongated hole and can move within the elongated hole along the sliding direction of the clamping assembly.

[0014] Optionally, the clamping assembly further includes a blocking member disposed on the carrier and located outside the carrier surface.

[0015] Optionally, a position sensor is provided on the upper side of the mounting arm, and a sensing element is provided on the support base. The position sensor can identify the sensing element to determine the position of the mounting arm.

[0016] A lithography machine includes a transfer device and a clamping device, the output end of which is connected to the clamping device.

[0017] The beneficial effects of this utility model are:

[0018] The present invention proposes a clamping device that sets two sliding clamping components on a support base and sets a drive mechanism corresponding to each clamping component. The drive mechanism drives a cam with a threaded groove to rotate, and the threaded groove drives a follower component to translate. In turn, the follower component can drive the clamping components to move, so that the clamping components can move closer or further apart to clamp the workpiece. That is, the rotation of the cam is converted into the movement of the clamping components, so that the movement of the clamping components is relatively smooth and easy, and it is not easy to jam. Moreover, the movement of the clamping components is linear and it is difficult to impact the workpiece, thereby improving the stability of the clamping components when clamping the workpiece.

[0019] The photolithography machine proposed in this utility model has a clamping device. The rotation of the cam is converted into the movement of the clamping component, making the movement of the clamping component smoother and less prone to jamming. Moreover, the movement of the clamping component is linear and unlikely to cause impact on the workpiece, thereby improving the stability of the clamping component when clamping the workpiece. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments of this utility model will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of this utility model and these drawings without creative effort.

[0021] Figure 1 This is a schematic diagram of the structure of a clamping device with the cover removed, provided by an embodiment of the present utility model;

[0022] Figure 2 This is a structural schematic diagram of a clamping device provided in an embodiment of the present invention from a downward angle.

[0023] Figure 3 This is a schematic diagram of a clamping device with a cover provided in an embodiment of the present invention.

[0024] In the picture:

[0025] 1. Support base; 11. Elongated hole;

[0026] 2. Clamping assembly; 21. Mounting arm; 22. Connecting foot; 221. Vertical part; 222. Inclined part; 23. Bearing member; 24. Blocking member;

[0027] 3. Drive mechanism; 31. Drive component; 32. Cam; 33. Follower assembly; 331. Roller; 332. Follower bracket;

[0028] 4. Slide rail;

[0029] 5. Slider;

[0030] 6. Pipe joints;

[0031] 7. Position sensor;

[0032] 8. Sensors;

[0033] 9. Cover; 91. Observation hole;

[0034] 10. Connecting block. Detailed Implementation

[0035] To make the technical problem solved by this utility model, the technical solution adopted, and the technical effect achieved clearer, the technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely for explaining this utility model and not for limiting it. Furthermore, it should be noted that, for ease of description, only the parts related to this utility model are shown in the accompanying drawings, not all of them.

[0036] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0037] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0038] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature. In the description of this embodiment, unless otherwise specified, "multiple" specifically refers to two or more.

[0039] In the description of this embodiment, the terms "upper," "lower," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0040] It should be noted that when a component is referred to as "fixed to" or "set on" another component, it can be directly on the other component or it can be located in between the component.

[0041] The technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.

[0042] This embodiment provides a clamping device and a photolithography machine to solve the technical problem of poor stability when clamping photomasks in the prior art.

[0043] The lithography machine in this embodiment includes a transfer device and a clamping device. The clamping device is used to clamp the workpiece. The transfer device is connected to the clamping device and can drive the clamping device to move horizontally and vertically. In this embodiment, a photomask is used as an example. Understandably, a photomask is a mold composed of a metal layer thin film or a photoresist layer thin film with graphics, text, or other information recorded on its surface, and a glass substrate made of high-purity fused silica. It is the master pattern used in the photolithography process in microelectronics and integrated optoelectronics manufacturing. The photomask is stored in a dedicated photomask box. Only during the exposure process is the photomask removed from the photomask box by the clamping device and placed on the photomask stage for exposure. In this embodiment, the clamping device can clamp the photomask, and then the transfer device drives the clamping device to move horizontally and vertically, thereby placing the photomask on the photomask stage for exposure.

[0044] like Figure 1 As shown, the clamping device includes a support base 1, on which two clamping components 2 are arranged opposite to each other. The two clamping components 2 are slidably disposed on the support base 1 and can cooperate to clamp the workpiece. Two drive mechanisms 3 are also installed on the support base 1. The drive mechanisms 3 are arranged one-to-one with the clamping components 2. The drive mechanism 3 includes a drive member 31, a cam 32 and a follower component 33. The drive member 31 is connected to the cam 32 in a transmission manner. The surface of the cam 32 is provided with a threaded groove. One end of the follower component 33 is movably engaged with the threaded groove, and the other end is connected to the clamping component 2. The rotation of the cam 32 can drive the follower component 33 to translate, so that the two sets of clamping components 2 move closer or further apart from each other.

[0045] Understandably, the two gripping components 2 are arranged opposite each other on the support base 1 and can slide on the support base 1. When the drive mechanism 3 drives the two gripping components 2 to move closer or further apart, the gripping components 2 can fix or release the mask. The drive mechanism 3 drives the cam 32 to rotate through the drive member 31. The cam 32 is provided with a threaded groove. When the cam 32 rotates, one end of the follower component 33 can slide in the threaded groove, so that the follower component 33 can move along the rotation axis of the cam 32, thereby driving the gripping components 2 to move, causing the two gripping components 2 to move closer or further apart, completing the gripping and releasing of the mask. The method of using the rotation of the cam 32 with the threaded groove to drive the follower component 33 to move and thus make the gripping components 2 slide is not only simple in structure but also linear in movement. The follower component 33 moves smoothly and is not prone to jamming or impact, improving the stability of the gripping components 2 when gripping the mask.

[0046] For example, the drive unit 31 is a servo motor. Of course, other power components can be selected in other embodiments, and no further restrictions are imposed here.

[0047] Optionally, the end of the follower component 33 rolls into contact with the sidewall of the threaded groove. This arrangement significantly reduces the friction between the follower component 33 and the threaded groove, improving the smoothness of the translation of the follower component 33, and thus improving the smoothness of the sliding of the clamping component 2.

[0048] For example, the follower assembly 33 includes a follower bracket 332 and a roller 331 rotatably connected to the follower bracket 332, with the roller 331 rollingly engaging with the sidewall of the threaded groove. This arrangement can further reduce the friction between the follower assembly 33 and the threaded groove, improving the smoothness of the sliding of the gripping assembly 2.

[0049] In order to optimize the spatial layout of the gripping device and increase the sliding distance of the gripping assembly 2, the rotation axis of the cam 32 may optionally be parallel to the sliding direction of the gripping assembly 2.

[0050] Optionally, the follower bracket 332 is L-shaped. This arrangement facilitates the connection between the follower component 33 and the mounting arm 21, optimizes the spatial layout of the gripping device, and improves the structural rationality of the gripping device.

[0051] like Figures 1-2 As shown, optionally, the clamping assembly 2 includes a mounting arm 21 and carrier members 23 connected to the bottom of both ends of the mounting arm 21. The mounting arm 21 is slidably disposed on the support base 1. The follower assembly 33 is connected to the mounting arm 21. The carrier member 23 has a bearing surface on its upper side, which is located below the mounting arm 21 and can abut against the lower side of the workpiece. Understandably, each clamping assembly 2 includes two carrier members 23. The bearing surfaces of the four carrier members 23 of the two clamping assemblies 2 can support the lower sides of the four corners of the workpiece, thereby forming a stable four-position clamping of the mask, preventing the mask from slipping, and improving the reliability of the clamping device.

[0052] To improve the smoothness and stability of the sliding of the clamping component 2, the clamping device may optionally include a slide rail 4 and a slider 5. The slide rail 4 is mounted on the support base 1 and extends along the sliding direction of the clamping component 2, and the slider 5 is mounted on the lower side of the mounting arm 21 and cooperates with the slide rail 4.

[0053] Optionally, two slide rails 4 are provided and spaced apart on both sides of the support base 1. This arrangement can further improve the sliding stability of the clamping assembly 2 and enhance the reliability of the clamping device.

[0054] Optionally, the clamping assembly 2 further includes a connecting foot 22, which connects the mounting arm 21 and the carrier 23. Understandably, the connecting foot 22 can extend the distance between the carrier 23 and the mounting arm 21, allowing the carrier 23 to have a greater bearing depth and improving its adaptability to mask thickness.

[0055] Optionally, the support base 1 is provided with multiple elongated holes 11, each corresponding to a connecting foot 22 and extending along the sliding direction of the clamping assembly 2. The connecting foot 22 can pass through the elongated holes 11 and move within them along the sliding direction of the clamping assembly 2. Understandably, the elongated holes 11 eliminate the need for the clamping assembly 2 to extend outside the support base 1; the supporting foot can directly pass through the elongated holes 11 and extend below the support base 1 to fix the mask plate with the carrier 23. This reduces the size and space occupied by the clamping device. Furthermore, the elongated holes 11, extending along the sliding direction of the clamping assembly 2, provide sliding space for the clamping assembly 2 and limit its sliding range, preventing excessive movement that could damage the mask plate or interfere with other components, thus improving the structural rationality of the clamping device.

[0056] To further enhance adaptability to different mask sizes and expand the gripping range, the connecting foot 22 may optionally include a vertical portion 221 and an inclined portion 222 connected together. The vertical portion 221 passes vertically through the elongated hole 11, and the inclined portion 222 extends obliquely to the carrier 23 in a direction away from the other gripping assembly 2. The inclined portion 222 enables the carrier 23 to grip masks of a wider range of sizes, expanding the applicable scenarios of the gripping device.

[0057] To prevent the carrier 23 from damaging the photomask, a buffer may be provided on the upper side of the carrier surface. This buffer provides cushioning to the photomask, thereby protecting it and improving the reliability of the gripping device.

[0058] For example, the buffer is a flexible rebound pad. In other embodiments, the buffer may also be other parts with cushioning capabilities, without being overly limited here.

[0059] Optionally, the clamping assembly 2 further includes a blocking member 24, which is disposed on the support member 23 and located on the outer side of the support surface. This arrangement ensures the safety of the mask and prevents the mask from slipping due to stroke error when the clamping assembly 2 slides, thereby improving the reliability of the clamping device.

[0060] like Figure 2As shown, optionally, the blocking member 24 is plate-shaped with an L-shaped cross-section. The vertical plate of the blocking member 24 is mounted on the support member 23, and the horizontal plate extends towards another clamping assembly 2. The vertical plate can block the mask and prevent it from falling off the support member 23, while the horizontal plate can prevent the mask from rubbing against the bottom surface of the support base 1, thereby protecting the mask and improving the structural rationality of the clamping device.

[0061] To further enhance the fixing strength of the carrier 23 for the workpiece, optionally, the carrier 23 is provided with an adsorption hole running vertically through it. The clamping device also includes a vacuum pipe, one end of which is connected to the lower side of the adsorption hole, and the other end is connected to a vacuum source. This arrangement allows the mask to be vacuumed by the vacuum source after it is supported on the carrier 23, thereby adsorbing the mask above the adsorption hole and preventing it from falling off during transport, thus improving the reliability of the clamping device.

[0062] To ensure the airtight connection between the adsorption pore and the vacuum pipe, a pipe joint 6 is provided between the vacuum pipe and the adsorption pore, for example.

[0063] like Figure 1 As shown, optionally, a position sensor 7 is provided on the upper side of the mounting arm 21, and a sensor 8 is provided on the support base 1. The position sensor 7 can identify the sensor 8 to determine the position of the mounting arm 21. Understandably, when the two gripping components 2 move towards each other to a preset position, the carrier 23 can grip the workpiece; when the two gripping components 2 move away from each other to a preset position, the carrier 23 can release the workpiece. By setting the sensor 8 at the preset positions for gripping and releasing the workpiece, when the position sensor 7 identifies the sensor 8 at different positions, it can know whether it is currently in the gripping or releasing position, which facilitates the control of the gripping device, improves the automation level of the gripping device, and thus improves the user experience.

[0064] For example, the position sensor 7 is a photoelectric sensor. Of course, in other embodiments it can also be a contact resistance sensor, etc., but this is not the focus of this embodiment and will not be described in detail here.

[0065] like Figure 3 As shown, optionally, the clamping device also includes a cover 9, which is mounted on the upper side of the support base 1. The cover 9 can protect the components on the support base 1, prevent damage to the clamping device, and improve the reliability of the clamping device.

[0066] To facilitate the connection between the clamping device and the transfer device, optionally, a connecting block 10 is provided on the upper side of the cover 9 for connecting the transfer device.

[0067] Optionally, an observation hole 91 is provided through the upper side of the housing 9. This feature allows maintenance personnel to easily observe the status of the internal components of the clamping device through the observation hole 91, thereby enabling them to perform maintenance as needed and extending the service life of the clamping device. In addition, the observation hole 91 can also help dissipate heat from the internal components of the clamping device, preventing damage to the clamping device and improving its reliability.

[0068] The operation process of the clamping device in this embodiment is as follows:

[0069] The drive component 31 drives the cam 32 to rotate, causing the follower component 33 to move the gripping component 2. The two gripping components 2 move away from each other until the two gripping components 2 are in the open state.

[0070] The transfer device moves the gripping device above the mask and then descends, so that the gripping device reaches the gripping position.

[0071] The driving component 31 drives the cam 32 to rotate in the opposite direction, causing the follower component 33 to move the clamping component 2. The two clamping components 2 move towards each other until the bearing surfaces of the four carriers 23 are respectively located below the four corners of the mask.

[0072] The transfer device drives the clamping device to rise, and the bearing surface of the carrier 23 abuts against the lower side of the mask. The vacuum source is activated to evacuate the adsorption holes, and the mask is adsorbed onto the upper side of the adsorption holes.

[0073] The transfer device moves the gripping device carrying the mask to the exposure stage for exposure, and one gripping stroke is completed.

[0074] Note that the above description is merely a preferred embodiment of the present invention and the technical principles employed. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and various obvious changes, readjustments, and substitutions can be made without departing from the scope of protection of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments, and may include many other equivalent embodiments without departing from the concept of the present invention. The scope of the present invention is determined by the scope of the appended claims.

Claims

1. A clamping device, comprising a support base (1), wherein two clamping components (2) are disposed opposite to each other on the support base (1), the two clamping components (2) being slidably disposed on the support base (1) and capable of cooperating to clamp a workpiece, characterized in that, Two drive mechanisms (3) are also installed on the support base (1). The drive mechanisms (3) are arranged one-to-one with the clamping components (2). The drive mechanism (3) includes a drive member (31), a cam (32) and a follower component (33). The drive member (31) is connected to the cam (32) in a transmission manner. The surface of the cam (32) is provided with a threaded groove. One end of the follower component (33) is movably engaged with the threaded groove, and the other end is connected to the clamping components (2). The rotation of the cam (32) can drive the follower component (33) to translate, so that the two sets of clamping components (2) move closer or further away from each other.

2. The clamping device according to claim 1, characterized in that, The end of the follower component (33) rolls into contact with the sidewall of the threaded groove.

3. The clamping device according to claim 2, characterized in that, The follower assembly (33) includes a follower bracket (332) and a roller (331) rotatably connected to the follower bracket (332), wherein the roller (331) and the side wall of the threaded groove are in rolling engagement.

4. The clamping device according to claim 1, characterized in that, The rotation axis of the cam (32) is parallel to the sliding direction of the clamping assembly (2).

5. The clamping device according to claim 1, characterized in that, The clamping assembly (2) includes a mounting arm (21) and a carrier (23) connected to the bottom of both ends of the mounting arm (21). The mounting arm (21) is slidably disposed on the support base (1). The follower assembly (33) is connected to the mounting arm (21). The carrier (23) has a bearing surface on its upper side. The bearing surface is located below the mounting arm (21) and can abut against the lower side of the workpiece.

6. The clamping device according to claim 5, characterized in that, The clamping assembly (2) further includes a connecting foot (22) which is connected between the mounting arm (21) and the carrier (23).

7. The clamping device according to claim 6, characterized in that, The support base (1) is provided with a plurality of elongated holes (11), the elongated holes (11) are provided one-to-one with the connecting feet (22) and extend along the sliding direction of the clamping assembly (2), the connecting feet (22) can pass through the elongated holes (11) and can move in the elongated holes (11) along the sliding direction of the clamping assembly (2).

8. The clamping device according to claim 5, characterized in that, The clamping assembly (2) further includes a blocking member (24), which is disposed on the support member (23) and located on the outside of the support surface.

9. The clamping device according to claim 5, characterized in that, A position sensor (7) is provided on the upper side of the mounting arm (21), and a sensor (8) is provided on the support base (1). The position sensor (7) can identify the sensor (8) to determine the position of the mounting arm (21).

10. A lithography machine, the lithography machine comprising a transfer device, characterized in that, The lithography machine further includes a gripping device as described in any one of claims 1-9, wherein the output end of the transfer device is connected to the gripping device.

Images