Silicon wafer transmission switching device

Abstract

The utility model discloses a silicon wafer transmission switching device. The device comprises a first conveyor belt; the two groups of third conveying belts are distributed in parallel and are arranged in the conveying direction of the first conveying belt; the transmission switching mechanism is arranged between the first conveyor belt and the two groups of third conveyor belts; and the conveying guide mechanisms are arranged on the outer sides of the third conveying belt. According to the silicon wafer transmission switching device, through transmission switching, the downtime of a transmission device is greatly shortened, and the basket loading efficiency of silicon wafers is effectively improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to transmission equipment technical field especially relates to a silicon wafer transmission switching device. BACKGROUND

[0002] In the production process of silicon wafer, the silicon wafer needs to be separated and loaded into a basket after degumming. In the process of loading, the silicon wafer vertically placed in the material frame is lifted one by one by the transmission device and then transferred to horizontal, and then conveyed into the material basket. When the material basket is full, the transmission device needs to be stopped to wait for replacement of the empty material basket. The downtime of the transmission device affects the efficiency of silicon wafer loading. Therefore, a silicon wafer transmission switching device is designed to greatly reduce the downtime of the transmission device and effectively improve the efficiency of silicon wafer loading. SUMMARY

[0003] In view of the above defects or deficiencies in the prior art, it is desirable to provide a silicon wafer transmission switching device that greatly reduces the downtime of the transmission device and effectively improves the efficiency of silicon wafer loading through transmission switching.

[0004] The utility model provides a silicon wafer transmission switching device, which comprises:

[0005] A first conveyor belt;

[0006] Two groups of third conveyor belts are arranged in the transmission direction of the first conveyor belt;

[0007] A transmission switching mechanism is arranged between the first conveyor belt and the two groups of third conveyor belts for transmission switching between the first conveyor belt and the two groups of third conveyor belts;

[0008] A transmission guide mechanism is arranged on the outer side of the third conveyor belt for guiding the silicon wafer output by the transmission switching mechanism to be transmitted along the corresponding third conveyor belt.

[0009] Further, the two groups of third conveyor belts are symmetrically distributed on both sides of the transmission axis of the first conveyor belt.

[0010] Further, the transmission switching mechanism comprises a bracket arranged at the transmission end of the first conveyor belt, a vertical shaft is rotatably mounted on the bracket through a bearing seat, a first slave synchronous pulley is fixedly sleeved on the bottom end of the shaft, a first driving motor is fixedly arranged on the bracket, a first master synchronous pulley is fixedly sleeved on the output shaft of the first driving motor, the first master synchronous pulley is in transmission connection with the first slave synchronous pulley through a synchronous belt, a support plate is arranged between the transmission end of the first conveyor belt and the transmission starting end of any third conveyor belt, one end of the support plate close to the first conveyor belt is fixedly connected with the shaft, and a second conveyor belt is arranged on the support plate.

[0011] Further, the first conveyor belt, the second conveyor belt and the third conveyor belt are located on the same plane.

[0012] Further, the transmission guide mechanism comprises support beams which are arranged in parallel outside the third conveyor belt, one end of the support beam is fixedly provided with a second driving motor, a second main synchronous pulley is fixedly sleeved on an output shaft of the second driving motor, the other end of the support beam is rotatably provided with a second slave synchronous pulley, the second slave synchronous pulley is in transmission connection with the second main synchronous pulley through a guide synchronous belt, and the belt surface of the guide synchronous belt is vertically arranged and is arranged outside the top surface of the third conveyor belt.

[0013] Further, the inner side of the third conveyor belt is provided with a limiting baffle.

[0014] Compared with the prior art, the beneficial effects of the utility model are:

[0015] When the transmission switching device transmits the silicon wafer, the transmission switching device stops when the basket at the end of the third conveyor belt is full, and switches to another third conveyor belt to continue transmission, and another basket is filled with silicon wafers, without waiting for the replacement of the basket to be completed, the transmission switching greatly reduces the downtime of the transmission device, and effectively improves the efficiency of the silicon wafer filling basket.

[0016] It should be understood that the content described in the utility model content part is not intended to limit the key or important features of the embodiments of the utility model, nor is it intended to limit the scope of the utility model. Other features of the utility model will become apparent through the following description. BRIEF DESCRIPTION OF DRAWINGS

[0017] Other features, objects and advantages of the utility model will become more apparent through reading the detailed description of the non-limiting embodiments made by referring to the following drawings:

[0018] Figure 1 It is a structure schematic view of the silicon wafer transmission switching device;

[0019] Figure 2 It is a connection structure schematic view of the steering mechanism and the support plate;

[0020] Figure 3 It is a structure schematic view of the transmission guide mechanism.

[0021] Reference signs in the drawings: 1, first conveyor belt; 2, third conveyor belt; 3, transmission switching mechanism; 4, transmission guide mechanism;

[0022] 31, support; 32, bearing seat; 33, first driven synchronous pulley; 34, first driving motor; 35, synchronous belt; 36, support plate; 37, second conveying belt;

[0023] 41, support beam; 42, second driving motor; 43, second main synchronous pulley; 44, second driven synchronous pulley; 45, guide synchronous belt; 46, limiting baffle. DETAILED DESCRIPTION

[0024] The utility model will be explained in further detail below in combination with the drawings and embodiments. It can be understood that the specific embodiments described here are only used to explain the related utility model, and are not limited to the utility model. In addition, it should be noted that only the parts related to the utility model are shown in the drawings for the convenience of description.

[0025] It should be noted that the embodiments in the utility model and the features in the embodiments can be combined with each other without conflict. The utility model will be explained in detail below in combination with the drawings and embodiments.

[0026] Please refer to Figures 1-3 The embodiment of the utility model provides a silicon wafer transmission switching device, which comprises:

[0027] The first conveying belt 1;

[0028] Two groups of third conveying belts 2 are arranged in the transmission direction of the first conveying belt 1;

[0029] The transmission switching mechanism 3 is arranged between the first conveying belt 1 and the two groups of third conveying belts 2, and is used for transmission switching between the first conveying belt 1 and the two groups of third conveying belts 2;

[0030] The transmission guide mechanism 4 is arranged on the outer side of the third conveying belt 2, and is used for guiding the silicon wafer output by the transmission switching mechanism 4, so that the silicon wafer is transmitted along the corresponding third conveying belt 2.

[0031] In the embodiment, when the silicon wafer is transmitted, the transmission switching mechanism 3 connects the transmission end of the first conveying belt 1 with the transmission starting end of one group of third conveying belts 2 first, at this time, the silicon wafer is transmitted through the first conveying belt 1, then enters the third conveying belt 2 after being transmitted and guided by the transmission switching mechanism 3, and then is transmitted through the third conveying belt 2 and loaded into the basket at the end of the third conveying belt 2.

[0032] The transmission direction of the silicon wafer changes when the silicon wafer enters the third conveying belt 2 through the transmission switching mechanism 3, so the transmission guide mechanism 4 is arranged on the outer side of the third conveying belt 2 to guide the silicon wafer, so that the silicon wafer is transmitted along the third conveying belt 2 in the preset direction, and the silicon wafer is accurately inserted into the basket.

[0033] When the last wafer container of the third conveyor belt 2 is filled, the transmission switching device stops, the transmission switching mechanism 3 switches the transmission, and the transmission end of the first conveyor belt 1 is connected to the transmission starting end of another set of third conveyor belt 2. Then, the transmission switching device is started to continue the transmission of the silicon wafer, and the wafer container at the end of the second set of third conveyor belt 2 is filled. Without waiting for the first set of third conveyor belt 2 to replace the wafer container, the time required for replacing the wafer container is about 15 seconds, and the time required for stopping and completing the transmission switching is only 1-2 seconds, which greatly reduces the downtime of the transmission device and effectively improves the wafer container efficiency.

[0034] In a preferred embodiment, as shown in Figure 1 The two sets of third conveyor belts 2 are symmetrically distributed on both sides of the transmission axis of the first conveyor belt 1, so that the transmission end of the first conveyor belt 1 is the same distance from the transmission starting end of the two sets of third conveyor belts 2, which facilitates the structural arrangement of the transmission switching.

[0035] In a preferred embodiment, as shown in Figure 1 and Figure 2 The transmission switching mechanism 3 includes a bracket 31 arranged at the transmission end of the first conveyor belt 1, a vertical shaft is rotatably installed on the bracket 31 through a bearing seat 32, a first slave synchronous pulley 33 is fixedly sleeved on the bottom end of the shaft, a first driving motor 34 is fixedly arranged on the bracket 31, a first main synchronous pulley is fixedly sleeved on the output shaft of the first driving motor 34, the first main synchronous pulley is in transmission connection with the first slave synchronous pulley 33 through a synchronous belt 35, a support plate 36 is arranged between the transmission end of the first conveyor belt 1 and the transmission starting end of any third conveyor belt 2, one end of the support plate 36 close to the first conveyor belt 1 is fixedly connected with the shaft, and a second conveyor belt 37 is arranged on the support plate 36.

[0036] In this embodiment, the silicon wafer is switched by the second conveyor belt 37, and the shaft is driven to rotate by the first driving motor 34, so as to drive the transmission end of the second conveyor belt 37 to reciprocate between the transmission starting ends of the two sets of third conveyor belts 2, thereby realizing the transmission switching and greatly improving the efficiency of the wafer container.

[0037] In a preferred embodiment, as shown in Figure 1 The first conveyor belt 1, the second conveyor belt 37 and the third conveyor belt 2 are all located on the same plane, which ensures stable transmission of the silicon wafer.

[0038] In a preferred embodiment, as shown in Figure 1 and Figure 3As shown, the transmission guiding mechanism 4 includes parallel support beams 41 arranged outside the third conveying belt 2, one end of the support beam 41 is fixedly provided with a second driving motor 42, a second main synchronous pulley 43 is fixedly sleeved on the output shaft of the second driving motor 42, the other end of the support beam 41 is rotatably provided with a second slave synchronous pulley 44, the second slave synchronous pulley 44 is in transmission connection with the second main synchronous pulley 43 through a guiding synchronous belt 45, the belt surface of the guiding synchronous belt 45 is vertically arranged and placed outside the top surface of the third conveying belt 2.

[0039] In the embodiment, the guiding synchronous belt 45 is blocked outside the top surface of the third conveying belt 2, when the silicon wafer enters the third conveying belt 2 from the second conveying belt 37, the transmission direction is changed, at this time, the silicon wafer collides with the guiding synchronous belt 45 for guiding, so that the silicon wafer is transmitted along the third conveying belt 2 in the preset direction, and the silicon wafer is accurately inserted into the basket.

[0040] In a preferred embodiment, as shown, Figure 1 The inner side of the third conveying belt 2 is provided with a limiting baffle 46, the inner side of the silicon wafer transmission path is limited, and the accuracy of the silicon wafer transmission is further improved.

[0041] In the description of the specification, the terms "connection", "installation", "fixation" and the like should be understood in a broad sense, for example, "connection" can be fixed connection, can be detachable connection, or integral connection; can be directly connected, or indirectly connected through an intermediate medium. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0042] In the description of the specification, the terms "one embodiment", "some embodiments" and the like mean that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In the specification, the illustrative description of the above terms does not necessarily mean the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0043] The above is only the preferred embodiment of the present application and is not used to limit the present application. For those skilled in the art, the present application can have various changes and variations. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A silicon wafer transmission switching device, characterized in that, include: First conveyor belt (1); Two sets of parallel third conveyor belts (2) are arranged in the transmission direction of the first conveyor belt (1); A transmission switching mechanism (3) is disposed between the first conveyor belt (1) and the two sets of the third conveyor belts (2) for switching transmission between the first conveyor belt (1) and the two sets of the third conveyor belts (2); The transmission guide mechanism (4) is provided on the outer side of the third conveyor belt (2) to guide the silicon wafers output by the transmission switching mechanism (3) so that they are transmitted along the corresponding third conveyor belt (2).

2. The silicon wafer transmission switching device according to claim 1, characterized in that, The two sets of third conveyor belts (2) are symmetrically distributed on both sides of the transmission axis of the first conveyor belt (1).

3. The silicon wafer transmission switching device according to claim 1, characterized in that, The transmission switching mechanism (3) includes a bracket (31) disposed at the transmission end of the first conveyor belt (1). A vertical shaft is rotatably mounted on the bracket (31) via a bearing seat (32). A first slave synchronous pulley (33) is fixedly sleeved at the bottom end of the shaft. A first drive motor (34) is fixedly disposed on the bracket (31). A first main synchronous pulley is fixedly sleeved on the output shaft of the first drive motor (34). The first main synchronous pulley is connected to the first slave synchronous pulley (33) via a synchronous belt (35). A support plate (36) is disposed between the transmission end of the first conveyor belt (1) and the transmission start end of any of the third conveyor belts (2). The end of the support plate (36) near the first conveyor belt (1) is fixedly connected to the shaft. A second conveyor belt (37) is disposed on the support plate (36).

4. The silicon wafer transmission switching device according to claim 3, characterized in that, The first conveyor belt (1), the second conveyor belt (37) and the third conveyor belt (2) are all located on the same plane.

5. The silicon wafer transmission switching device according to claim 1, characterized in that, The transmission guide mechanism (4) includes a support beam (41) arranged parallel to the outside of the third conveyor belt (2). A second drive motor (42) is fixedly installed at one end of the support beam (41). A second main synchronous pulley (43) is fixedly sleeved on the output shaft of the second drive motor (42). A second secondary synchronous pulley (44) is rotatably installed at the other end of the support beam (41). The second secondary synchronous pulley (44) is connected to the second main synchronous pulley (43) through a guide synchronous belt (45). The belt surface of the guide synchronous belt (45) is vertically arranged and placed outside the top surface of the third conveyor belt (2).

6. The silicon wafer transmission switching device according to claim 5, characterized in that, Limiting baffles (46) are provided on the inner side of the third conveyor belt (2).

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