Heat preservation vacuum cavity and vacuum equipment
By designing a multi-layer insulation structure with low thermal conductivity in the vacuum thin film deposition equipment, the problem of poor insulation performance of existing equipment has been solved, achieving significant energy-saving effects and reducing energy consumption and costs.
Patent Information
- Application Number
- CN202520515410.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-24
- Publication Date
- 2026-02-03
- Estimated Expiration
- 2035-03-24
AI Technical Summary
Existing vacuum thin film deposition equipment has poor heat preservation performance, resulting in serious heat loss, increased energy consumption costs, and failure to meet the requirements of energy conservation and carbon reduction.
Design a thermally insulated vacuum cavity with a thermal conductivity of no more than 1.0 W/(m·K). The cavity is installed on the inner or outer wall and includes multiple insulation layers such as fumed silicon insulation and porous alumina ceramic components. These layers are formed through processes such as spraying and electroplating to ensure good thermal insulation performance.
It improves the insulation effect of the vacuum chamber, reduces heat loss, saves energy, reduces power consumption per hour by 20%, and saves costs.
Smart Images
Figure CN223866742U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of vacuum equipment technology, and in particular to a heat-insulated vacuum cavity and vacuum equipment. Background Technology
[0002] Against the backdrop of the global push for energy conservation and carbon reduction, and my country's all-out effort to achieve carbon peaking and carbon neutrality, various industries are actively exploring effective ways to conserve energy and reduce emissions. Efficient energy utilization in industrial production has become a key element. The photovoltaic, semiconductor, and display industries, as representatives of high-tech industries, play a vital role in promoting technological progress and social development. The energy efficiency of vacuum thin-film deposition equipment, widely used in these industries, has a significant impact on achieving energy conservation and carbon reduction goals.
[0003] Vacuum thin-film deposition equipment, commonly used in the photovoltaic, semiconductor, and display industries, typically has strict temperature requirements, necessitating preheating of the substrate to be deposited. This serves two purposes: firstly, it removes moisture carried by the carrier plate from the outside environment; secondly, it ensures the substrate reaches the required process temperature, preparing it for the deposition process.
[0004] Existing vacuum thin film deposition equipment includes an internal heating device to heat the carrier plate and ensure it remains at a suitable temperature. However, existing vacuum thin film deposition equipment has poor thermal insulation performance. The heat generated by the heating device reaches the inner wall of the cavity cover and body through conduction, radiation, and convection, and is then conducted to the outer wall through the cavity cover and body. This results in most of the heat being conducted outside the vacuum thin film deposition equipment, which contradicts the national strategy of energy conservation and carbon reduction. Furthermore, this forces the heating device to consume more energy to maintain the process temperature, significantly increasing energy costs.
[0005] Therefore, there is an urgent need to design a thermally insulated vacuum cavity and vacuum equipment to solve the above technical problems. Utility Model Content
[0006] The primary objective of this invention is to provide a heat-insulating vacuum cavity that improves heat insulation, reduces heat loss, saves energy, and reduces costs.
[0007] To achieve this objective, the present invention adopts the following technical solution:
[0008] This utility model provides a heat-insulating vacuum cavity, comprising:
[0009] The body has an opening.
[0010] A cover that covers the opening and encloses a receiving cavity;
[0011] A thermal insulation structure is disposed within the accommodating cavity and connected to the inner wall of the accommodating cavity; and / or, the thermal insulation structure covers the outer wall of the body and the outer wall of the cover.
[0012] As an optional technical solution for a thermal insulation vacuum cavity, the thermal conductivity of the insulation structure is not higher than 1.0 W / (m·K), and the thickness of the insulation structure is not greater than 50 mm.
[0013] As an optional technical solution for a thermally insulated vacuum cavity, the thermal insulation structure includes a first thermal insulation layer and a second thermal insulation layer. The first thermal insulation layer is connected to the inner wall of the accommodating cavity, and one side of the second thermal insulation layer is connected to the side of the cover facing the accommodating cavity.
[0014] As an optional technical solution for a thermal insulation vacuum cavity, both the first insulation layer and the second insulation layer are one of the following: fumed silica insulation, porous alumina ceramic, polymethyl foam composite, glass fiber insulation, aluminosilicate fiber, aerogel insulation, high-entropy ceramic, or PTFE.
[0015] As an optional technical solution for a thermally insulated vacuum cavity, the thermal insulation structure includes a third thermal insulation layer and a fourth thermal insulation layer. The third thermal insulation layer is connected to the outer wall of the main body, and the fourth thermal insulation layer is connected to the outer wall of the cover.
[0016] As an optional technical solution for a thermal insulation vacuum cavity, the third and fourth thermal insulation layers are both made of PTFE, porous alumina ceramic, zirconia, polymethyl foam composite, glass fiber insulation, aluminum silicate fiber, high entropy ceramic, fumed silica insulation, EPDM rubber-plastic cotton, or aerogel insulation.
[0017] As an optional technical solution for a thermal insulation vacuum cavity, the thermal insulation vacuum cavity also includes multiple fixing components, and the thermal insulation structure is connected to the cover and the body through the fixing components.
[0018] As an optional technical solution for a thermal insulation vacuum cavity, the thermal insulation structure is formed by at least one of the following techniques: spraying, electroplating, vapor deposition, and anodizing; the adhesion of the thermal insulation structure is not less than 1 MPa.
[0019] As an optional technical solution for a thermally insulated vacuum cavity, the accommodating chamber can be a process chamber or a non-process chamber.
[0020] The second objective of this invention is to provide a vacuum device that has good heat insulation and heat preservation effects, can reduce heat loss, save energy, and save costs.
[0021] To achieve this objective, the present invention adopts the following technical solution:
[0022] This utility model provides a vacuum device, which includes a heating component, a vacuum pump group, a transmission component, and a heat-insulating vacuum cavity as described in any of the above technical solutions;
[0023] The heating component is connected to the heat-insulating vacuum cavity, and the heating component is configured to heat the carrier plate and substrate inside the accommodating cavity;
[0024] The vacuum pump unit is connected to the accommodating chamber, and the vacuum pump unit is configured to evacuate the accommodating chamber.
[0025] The transmission component is connected to the carrier board and is configured to transmit the carrier board.
[0026] The beneficial effects of this utility model include at least the following:
[0027] This utility model provides a heat-insulating vacuum cavity, which includes a body, a cover, and a heat-insulating structure. The body has an opening, and the cover closes to the opening to form a receiving chamber. The heat-insulating structure is disposed within the receiving chamber and connected to the inner wall of the receiving chamber; and / or, the heat-insulating structure covers the outer wall of the body and the outer wall of the cover.
[0028] In summary, by setting the insulation structure inside the accommodating chamber, or on the outer wall of the main body and the outer wall of the cover, or simultaneously setting the insulation structure inside the accommodating chamber, on the outer wall of the main body, and on the outer wall of the cover, the insulation effect of the insulated vacuum cavity is improved, heat loss inside the accommodating chamber is reduced, energy consumption is saved, and the goal of cost saving is achieved.
[0029] This utility model also provides a vacuum device that has good heat insulation and heat preservation effects, which can reduce heat loss, save energy, and save costs. Attached Figure Description
[0030] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments of this utility model will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of this utility model and these drawings without creative effort.
[0031] Figure 1 This is a cross-sectional view of the heat-insulating vacuum cavity provided in this embodiment of the utility model. Figure 1 ;
[0032] Figure 2This is a cross-sectional view of the heat-insulating vacuum cavity provided in this embodiment of the utility model. Figure 2 ;
[0033] Figure 3 This is a cross-sectional view of the heat-insulating vacuum cavity provided in this embodiment of the utility model. Figure 3 .
[0034] Figure Labels
[0035] 100, Body; 110, Receiving Chamber; 200, Cover; 300, First Insulation Layer; 400, Second Insulation Layer; 500, Third Insulation Layer; 600, Fourth Insulation Layer. Detailed Implementation
[0036] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.
[0037] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.
[0038] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.
[0039] In the description of this utility model, it should be noted that the terms "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this utility model is in use. They are used only for the convenience of describing this utility model and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.
[0040] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set" and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.
[0041] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.
[0042] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.
[0043] This embodiment provides a heat-insulating vacuum cavity, which improves the heat insulation effect, reduces heat loss, saves energy, and saves costs.
[0044] like Figures 1-3 As shown, the insulated vacuum cavity mainly includes a body 100, a cover 200, and an insulation structure. The body 100 has an opening, and the cover 200 closes to the opening, forming a receiving chamber 110. The insulation structure is disposed within the receiving chamber 110 and is connected to the inner wall of the receiving chamber 110; and / or, the insulation structure covers the outer wall of the body 100 and the outer wall of the cover 200.
[0045] Based on the above design, in this embodiment, by setting the heat insulation structure inside the accommodating chamber 110, or on the outer wall of the main body 100 and the outer wall of the cover 200, or simultaneously setting the heat insulation structure inside the accommodating chamber 110, on the outer wall of the main body 100 and the outer wall of the cover 200, the heat insulation effect of the heat-insulating vacuum cavity is improved, the heat loss in the accommodating chamber 110 is reduced, energy consumption is saved, and the purpose of saving costs is achieved.
[0046] Furthermore, the insulation structure reduces the temperature of the outer walls of the cover 200 and the body 100, eliminating the need for water pipes to cool them, as is common in existing technologies. This saves water resources and reduces costs. It also prevents water pipe ruptures and leaks caused by high temperatures, improving work efficiency.
[0047] In some alternative implementations, the thermal conductivity of the insulation structure is not higher than 1.0 W / (m·K) to ensure that the insulation vacuum cavity has a good insulation effect.
[0048] In some alternative implementations, the thickness of the insulation structure is no more than 50mm, so as to save materials and reduce costs as much as possible while ensuring good insulation performance.
[0049] like Figure 1 and Figure 3 As shown, in this embodiment, the insulation structure includes a first insulation layer 300 and a second insulation layer 400. The first insulation layer 300 is connected to the inner wall of the accommodating chamber 110. One side of the second insulation layer 400 is connected to the side of the cover 200 facing the accommodating chamber 110, and the other side of the second insulation layer 400 is in contact with the first insulation layer 300. This can avoid the problem of heat loss caused by the gap between the first insulation layer 300 and the second insulation layer 400, and improve the insulation effect.
[0050] Optionally, in this embodiment, the thermal conductivity of both the first insulation layer 300 and the second insulation layer 400 is no higher than 1 W / (m·K), ensuring that the insulated vacuum cavity has a good insulation effect. This improves the stability and reliability of the connection between the first insulation layer 300 and the inner wall of the accommodating chamber 110, as well as the stability and reliability of the connection between the second insulation layer 400 and the cover 200, reducing or avoiding detachment. The thickness of both the first insulation layer 300 and the second insulation layer 400 is no greater than 15 mm. While ensuring a good insulation effect, this saves materials and provides sufficient space in the accommodating chamber 110 for the transport of the carrier plate, preventing the carrier plate from colliding with the first insulation layer 300 or the second insulation layer 400.
[0051] like Figure 2 and Figure 3 As shown, in this embodiment, the insulation structure includes a third insulation layer 500 and a fourth insulation layer 600. The third insulation layer 500 is connected to the outer wall of the main body 100, and the fourth insulation layer 600 is connected to the outer wall of the cover 200. The third insulation layer 500 and the fourth insulation layer 600 are in contact, which can avoid the problem of heat loss caused by the gap between the third insulation layer 500 and the fourth insulation layer 600, and improve the insulation effect.
[0052] It should be noted that, in this embodiment, the insulation structure may have only the first insulation layer 300 and the second insulation layer 400; it may also have only the third insulation layer 500 and the fourth insulation layer 600; or it may have the first insulation layer 300, the second insulation layer 400, the third insulation layer 500 and the fourth insulation layer 600 simultaneously, thereby improving the flexibility and universality of the insulation structure and saving costs.
[0053] Optionally, in this embodiment, the thermal conductivity of both the third insulation layer 500 and the fourth insulation layer 600 is no higher than 1 W / (m·K), ensuring that the insulated vacuum cavity has a good insulation effect. This improves the stability and reliability of the connection between the third insulation layer 500 and the outer wall of the main body 100, and the stability and reliability of the connection between the fourth insulation layer 600 and the outer wall of the cover 200, reducing or avoiding detachment. The thickness of both the third insulation layer 500 and the fourth insulation layer 600 is no greater than 20 mm, saving materials and costs while ensuring good insulation performance.
[0054] Since the accommodating chamber 110 may be filled with process gases, this embodiment places certain requirements on the corrosion resistance of the first insulation layer 300 and the second insulation layer 400 disposed within the accommodating chamber 110. Optionally, the first insulation layer 300 and the second insulation layer 400 in this embodiment can both be configured as one of the following: PTFE (i.e., polytetrafluoroethylene), porous alumina ceramic, polymethyl foam composite, glass fiber insulation, aluminosilicate fiber, aerogel insulation, high-entropy ceramic, or fumed silica insulation.
[0055] Since the external environment of this insulated vacuum cavity is atmospheric, the material requirements for the third insulation layer 500 and the fourth insulation layer 600 are relatively low. For example, both the third insulation layer 500 and the fourth insulation layer 600 can be made of PTFE, porous alumina ceramic, zirconia, polymethyl methacrylate foam composite, glass fiber insulation, fumed silica insulation, EPDM rubber-plastic wool, aluminum silicate fiber, high-entropy ceramic, or aerogel insulation. This increases the flexibility in material selection for the third insulation layer 500 and the fourth insulation layer 600, saving costs.
[0056] Optionally, the insulation structure in this embodiment can be made of a plate-like material, and the insulation vacuum cavity also includes multiple fasteners (not shown in the figure). The insulation structure is connected to the cover 200 and the body 100 through the fasteners. Optionally, the fasteners can be common components such as bolts and screws. Of course, the insulation structure can also be connected to the cover 200 and the body 100 by conventional methods such as welding, snap-fitting, and riveting to prevent the insulation structure from falling off.
[0057] In some alternative embodiments, the thermal insulation structure can be formed by at least one of the following techniques: spraying, electroplating, vapor deposition, and anodizing; and the adhesion of the thermal insulation structure is not less than 1 MPa. It should be noted that the above-mentioned spraying, electroplating, vapor deposition, and anodizing techniques are all existing conventional technologies, therefore, their process parameters and specific processing steps will not be described in detail here.
[0058] For example, the insulation structure in this embodiment can also be set as a sprayed part. The operator grinds the surface of the cover 200 and the body 100 to remove impurities and oxide layers, and then sprays anti-rust primer. After spraying, it needs to be baked in an oven until it is completely dry. Then, the spraying material is sprayed on the anti-rust primer to form the insulation structure.
[0059] Optionally, the accommodating chamber 110 in this embodiment can be configured as a process chamber or a non-process chamber. In other words, the heat-insulating vacuum chamber can be used in a process chamber for coating, or in a transition chamber or buffer chamber for non-coating applications.
[0060] Application example:
[0061] The aforementioned thermal insulation structure is provided on the outer wall of the cover 200 and the outer wall of the body 100, both made of Al6061 aluminum alloy. The thickness of the thermal insulation structure is set to 6 mm, and the heating unit (not shown in the figure) inside the accommodating chamber 110 is set to 260°C. Testing showed that the outer wall temperature of this thermally insulated vacuum chamber was 66°C; under the same conditions, the outer wall temperature of a thermally insulated vacuum chamber without a thermal insulation structure was 115.8°C, a difference of 49.8°C. Calculations show that the hourly power consumption of the thermally insulated vacuum chamber in this embodiment is reduced by 20% compared to existing technologies.
[0062] This embodiment also provides a vacuum device, which includes a heating component, a vacuum pump assembly, a transmission component, a gas diffuser assembly, and the aforementioned heat-insulating vacuum chamber.
[0063] The heating component is connected to the insulated vacuum chamber and is configured to heat the carrier plate and substrate within the accommodating chamber 110. The vacuum pump assembly is connected to the accommodating chamber 110 and is configured to evacuate the accommodating chamber 110. The transfer component is connected to the carrier plate and is configured to transfer the carrier plate.
[0064] When the insulated vacuum chamber is used as a process chamber (i.e., the accommodating chamber 110 is the process chamber), the gas diffuser assembly is connected to the accommodating chamber 110. The gas diffuser assembly delivers process gas into the accommodating chamber 110, and an external radio frequency power supply is used to excite the process gas in the accommodating chamber 110 into plasma, so that the plasma can be used for thin film deposition, plasma etching, or other plasma treatments. The vacuum pump assembly is used to exhaust gas from the accommodating chamber 110 to maintain a high vacuum environment and to remove process waste gas.
[0065] When the insulated vacuum chamber is a non-process chamber (i.e., the accommodating chamber 110 is a non-process chamber), the heating assembly is used to preheat the carrier plate and substrate inside the accommodating chamber 110. The vacuum pump assembly is used to evacuate the accommodating chamber 110 to create a low-pressure environment that allows the valves of adjacent chambers to open and close.
[0066] The vacuum equipment also includes a protective step (not shown in the figure). The protective step is installed on the insulated vacuum cavity. The protective step can protect the outer insulation structure, prevent foreign objects from damaging the insulation structure, and extend its service life.
[0067] Optionally, the protective platform in this embodiment is made of stainless steel.
[0068] Because the vacuum equipment has the aforementioned vacuum insulation cavity, it has excellent heat insulation properties, which can reduce heat loss, save energy, and reduce costs.
[0069] Obviously, the above description is merely a preferred embodiment of the present invention and the technical principles employed. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and various obvious changes, readjustments, and substitutions can be made without departing from the protection scope of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments. Many other equivalent embodiments may be included without departing from the concept of the present invention, and the scope of the present invention is determined by the scope of the appended claims.
[0070] Note that in the description of this specification, the references to terms such as "some embodiments," "other embodiments," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this utility model. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.
Claims
1. A thermally insulated vacuum cavity, characterized in that, include: The body (100) has an opening; A cover (200) that covers the opening and encloses the receiving chamber (110); A thermal insulation structure is disposed within the accommodating chamber (110) and is connected to the inner wall of the accommodating chamber (110); and / or, the thermal insulation structure covers the outer wall of the body (100) and the outer wall of the cover (200).
2. The heat-insulating vacuum cavity according to claim 1, characterized in that, The thermal conductivity of the insulation structure is not higher than 1.0 W / (m·K), and the thickness of the insulation structure is not greater than 50 mm.
3. The heat-insulating vacuum cavity according to claim 1, characterized in that, The insulation structure includes a first insulation layer (300) and a second insulation layer (400). The first insulation layer (300) is connected to the inner wall of the accommodating chamber (110), and one side of the second insulation layer (400) is connected to the side of the cover (200) facing the accommodating chamber (110).
4. The heat-insulating vacuum cavity according to claim 3, characterized in that, The first insulation layer (300) and the second insulation layer (400) are both one of the following: fumed silica insulation, porous alumina ceramic, polymethyl foam composite, glass fiber insulation, aluminosilicate fiber, aerogel insulation, high entropy ceramic or PTFE.
5. The heat-insulating vacuum cavity according to claim 1, characterized in that, The insulation structure includes a third insulation layer (500) and a fourth insulation layer (600). The third insulation layer (500) is connected to the outer wall of the main body (100), and the fourth insulation layer (600) is connected to the outer wall of the cover (200).
6. The heat-insulating vacuum cavity according to claim 5, characterized in that, The third insulation layer (500) and the fourth insulation layer (600) are both made of PTFE, porous alumina ceramic, zirconia, polymethyl foam composite, glass fiber insulation, aluminum silicate fiber, high entropy ceramic, fumed silica insulation, EPDM rubber and plastic cotton, or aerogel insulation.
7. The heat-insulating vacuum cavity according to claim 1, characterized in that, The heat-insulating vacuum cavity also includes multiple fixing components, and the heat-insulating structure is connected to the cover (200) and the body (100) through the fixing components.
8. The heat-insulating vacuum cavity according to claim 1, characterized in that, The thermal insulation structure is formed by at least one of the following techniques: spraying, electroplating, vapor deposition, and anodizing; the adhesion of the thermal insulation structure is not less than 1 MPa.
9. The heat-insulating vacuum cavity according to claim 1, characterized in that, The accommodating chamber (110) can be a process chamber or a non-process chamber.
10. A vacuum device, characterized in that, The vacuum equipment includes a heating assembly, a vacuum pump assembly, a transmission assembly, and a thermally insulated vacuum chamber as described in any one of claims 1-9; The heating component is connected to the heat-insulating vacuum cavity, and the heating component is configured to heat the carrier plate and substrate inside the accommodating chamber (110); The vacuum pump assembly is connected to the accommodating chamber (110) and is configured to evacuate the accommodating chamber (110). The transmission component is connected to the carrier board and is configured to transmit the carrier board.