Adjusting device, magnetron sputtering coating device and coating production line

Abstract

The utility model provides an adjusting device, a magnetron sputtering coating device and a coating production line. The adjusting device comprises a bearing assembly, a blocking assembly, a driving assembly and a control assembly. The bearing assembly is provided with a mounting structure, and the mounting structure is used for being connected with a magnetron sputtering coating device body; the blocking assembly is provided with a plurality of blocking ends arranged in the first direction. The driving assembly is connected with the bearing assembly and the driving assembly, the driving assembly can drive the blocking ends of the blocking assemblies to move in the second direction so that at least part of the blocking ends can be located outside the bearing assembly in the third direction, and the first direction, the second direction and the third direction are perpendicular to one another; the control assembly is connected with the driving assembly to control the driving assembly to drive the blocking assembly. The problems that in the prior art, in the magnetron sputtering coating process of a part to be coated, due to the fact that a stop block is manually adjusted, errors are large, consumed time is long, and the production progress is seriously hard are solved.

Description

TECHNICAL FIELD

[0001] The present disclosure relates to the technical field of magnetron sputtering coating, and in particular to an adjusting device, a magnetron sputtering coating device and a coating production line. BACKGROUND

[0002] In the surface treatment process of some materials, conventional magnetron sputtering coating technology is widely used, which can form a specific functional film on the surface of a part to improve the performance of the part. Because it can accurately control the composition and structure of the film layer, it plays a key role in the electronic and optical industries.

[0003] At present, in order to solve the problem of uneven film thickness in magnetron sputtering coating, a blocking strip is longitudinally arranged between the target material and the part, and the blocking strip is manually adjusted to block the target material area, so as to control the sputtering area and affect the thickness of the film layer at the corresponding position, thereby realizing the uniformity of the film thickness.

[0004] However, this manual adjustment method highly depends on the experience and operation accuracy of employees, which is easy to cause film thickness difference; the adjustment of the blocking strip needs to be operated in the chamber after breaking the vacuum, which takes a long time to restart the machine; opening the chamber to adjust the blocking strip during product process adjustment affects the progress and productivity; the film thickness control during target material use is also restricted by the adjustment experience of employees. CONTENT OF THE INVENTION

[0005] One of the technical problems to be solved by the present disclosure is that, in the process of magnetron sputtering coating of the parts to be coated, the manual adjustment of the blocking block has large error and takes a long time, which seriously affects the production progress.

[0006] To solve the above technical problems, the first aspect of the present disclosure provides an adjusting device comprising:

[0007] A bearing assembly, the bearing assembly is provided with a mounting structure, the mounting structure is used for connecting the body of the magnetron sputtering coating device;

[0008] A blocking assembly, the blocking assembly is provided with a plurality of blocking ends arranged along a first direction;

[0009] A driving assembly, the driving assembly is connected with the bearing assembly and the driving assembly, the driving assembly can drive the blocking ends of each blocking assembly to move along a second direction, so that the blocking ends are at least partially outside the bearing assembly along a third direction, the first direction, the second direction and the third direction are perpendicular to each other;

[0010] A control assembly, the control assembly is connected with the driving assembly to control the driving assembly to drive the blocking assembly.

[0011] In some embodiments, the blocking assembly comprises:

[0012] A plurality of blocking blocks are arranged on the bearing assembly along a first direction, and two ends of each blocking block along a second direction are a blocking end and a driving end, respectively.

[0013] In some embodiments, the driving assembly comprises

[0014] A first driving structure is arranged on the bearing assembly, and the first driving structure has a first driving part capable of moving along the first direction, and the first driving part is capable of moving to a corresponding position of each blocking block.

[0015] A second driving structure is arranged on the first driving part, and the second driving structure has a second driving part capable of moving along the second direction, and the second driving part is capable of being connected with each driving end to enable the driving end of each blocking block to move along the second direction.

[0016] In some embodiments, the driving assembly further comprises:

[0017] A third driving structure is arranged on the bearing assembly, and the third driving structure is provided with a third driving part, and the third driving part is located on a side of the plurality of blocking blocks away from the bearing assembly, and the third driving part is capable of moving along a third direction to enable the third driving part to clamp and limit the plurality of blocking blocks relative to the bearing assembly or release the clamping and limiting.

[0018] In some embodiments, the driving assembly further comprises:

[0019] A fourth driving structure is arranged on the second driving part, and the fourth driving structure has a fourth driving part capable of rotating, and the fourth driving part is provided with a first threaded structure.

[0020] The upper part of the blocking block is provided with a second threaded structure, and the fourth driving part is rotated to enable the second threaded structure to be connected or disconnected with the first threaded structure.

[0021] In some embodiments, the bearing assembly further comprises:

[0022] A bearing plate;

[0023] A plurality of sliding groove structures are arranged on the bearing plate along the first direction, and the plurality of sliding groove structures correspond in number to the plurality of blocking blocks, and the sliding groove structure gradually decreases in size along the third direction and away from the bearing plate.

[0024] The blocking assembly comprises:

[0025] A plurality of connecting blocks correspond one-to-one to the sliding groove structures, and each connecting block is arranged in the corresponding sliding groove structure, and each blocking block is slidably connected with the corresponding sliding groove structure through one connecting block.

[0026] In some embodiments, the bearing assembly further comprises:

[0027] The protective shell is connected with the bearing plate, and the protective shell and the bearing plate enclose a containing space. The blocking assembly and the driving assembly are arranged inside the containing space.

[0028] In some embodiments, a cross section of the blocking block perpendicular to the second direction is a parallelogram.

[0029] The second aspect of the present disclosure provides a magnetron sputtering coating device, which comprises:

[0030] A magnetron sputtering coating device body;

[0031] The adjusting device provided by the first aspect of the present disclosure is connected with the magnetron sputtering coating device body through the mounting structure of the bearing assembly.

[0032] The magnetron sputtering coating device provided by the second aspect of the present disclosure can directly use the adjusting device provided by the first aspect, and the specific implementation structure can refer to the related content described in the first aspect, which will not be described here again.

[0033] The second aspect of the present disclosure provides a coating production line, which comprises the magnetron sputtering coating device provided by the second aspect of the present disclosure.

[0034] The coating production line provided by the third aspect of the present disclosure can directly use the magnetron sputtering coating device provided by the first aspect, and the specific implementation structure can refer to the related content described in the second aspect, which will not be described here again.

[0035] The adjusting device provided by the first aspect of the present disclosure comprises a bearing assembly, a blocking assembly and a driving assembly. The bearing assembly is provided with a connecting structure for connecting the magnetron sputtering coating device body. The blocking assembly is provided with a plurality of blocking ends arranged along a first direction. The driving assembly is connected with the bearing assembly and the driving assembly. The driving assembly is driven by the control assembly to drive the blocking ends of the blocking assembly to move along a second direction, so that the blocking ends are at least partially outside the bearing assembly along a third direction. It can be understood that the blocking ends are at least partially located between the target material and the component to be coated, so as to realize the area of the blocking ends that can shield the target material, control the sputtering area, and make the thickness of the magnetron sputtering coating more uniform. Since the control assembly is used to control the driving assembly to drive the blocking assembly, errors caused by manual operation are avoided. In the adjustment process, the chamber does not need to be entered for operation under vacuum, time consumption caused by re-commissioning is effectively avoided, and production efficiency is effectively improved. BRIEF DESCRIPTION OF DRAWINGS

[0036] In order to more clearly illustrate the technical solutions in the embodiments of the present disclosure or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or prior art description. Obviously, the drawings in the following description are only some embodiments of the present disclosure, and for those skilled in the art, other drawings can also be obtained from these drawings without creative effort.

[0037] Figure 1 is a first structural schematic diagram of an adjusting device disclosed by the embodiments of the present disclosure;

[0038] Figure 2 is a structural schematic diagram of part D of the adjusting device disclosed by the embodiments of the present disclosure;

[0039] Figure 3 is a schematic diagram of a bearing plate and a sliding groove structure disclosed by the embodiments of the present disclosure;

[0040] Figure 4 is a structural schematic diagram of a blocking assembly of the adjusting device disclosed by the embodiments of the present disclosure;

[0041] Figure 5 is a second structural schematic diagram of the adjusting device disclosed by the embodiments of the present disclosure.

[0042] Explanation of reference signs:

[0043] 1, bearing assembly; 101, bearing plate; 102, sliding groove structure; 103, protective shell;

[0044] 2, blocking assembly; 201, blocking block; 202, connecting block; 203, second threaded structure;

[0045] 3, driving assembly; 301, first driving structure; 3011, first driving part; 302, second driving structure; 3021, second driving part; 303, third driving structure; 3031, third driving part; 304, fourth driving structure; 3041, fourth driving part; 3042, first threaded structure;

[0046] 4, control assembly;

[0047] A, first direction; B, second direction; C, third direction. DETAILED DESCRIPTION

[0048] The embodiments of the present disclosure will be further described in detail below in combination with the drawings and embodiments. The detailed description of the following embodiments and the drawings are used to exemplarily illustrate the principles of the present disclosure, but cannot be used to limit the scope of the present disclosure, and the present disclosure can be implemented in many different forms, and is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

[0049] The present disclosure provides these examples to make the present disclosure thorough and complete, and to fully convey the scope of the present disclosure to those skilled in the art. It should be noted that: unless otherwise specified, the relative arrangement of components and steps, the components of materials, numerical expressions and numerical values set forth in these examples should be interpreted as merely exemplary, not as a limitation.

[0050] It should be noted that, in the description of the present disclosure, unless otherwise specified, the meaning of "a plurality of" is greater than or equal to two; The orientation or positional relationship indicated by the terms "upper", "lower", "left", "right", "inner", "outer" and the like is only for the purpose of facilitating the description of the present disclosure and simplifying the description, and does not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, therefore it cannot be understood as a limitation to the present disclosure. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0051] In addition, "first", "second", and similar words used in the present disclosure do not indicate any order, number or importance, but are only used to distinguish different parts. "Vertical" is not strictly vertical, but within the allowable range of error. "Parallel" is not strictly parallel, but within the allowable range of error. "Include" or "contain" and similar words mean that the elements before the word cover the elements listed after the word, and do not exclude the possibility of also covering other elements.

[0052] It should also be noted that, in the description of the present disclosure, unless otherwise specifically specified and limited, the terms "mounting", "connecting", "connection" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; It can be directly connected, or indirectly connected through an intermediate medium. For those skilled in the art, the specific meaning of the above terms in the present disclosure can be understood according to the specific circumstances. When it is described that a specific device is located between the first device and the second device, there can be an intermediate device between the specific device and the first device or the second device, or there can be no intermediate device.

[0053] All terms used in the present disclosure have the same meaning as understood by those skilled in the art to which the present disclosure belongs, unless otherwise specifically defined. It should also be understood that terms defined in general dictionaries should be interpreted to have meanings consistent with their meanings in the context of the relevant art, and should not be interpreted in an idealized or excessively formalized sense, unless specifically defined here.

[0054] Techniques, methods and equipment known to those skilled in the relevant art may not be discussed in detail, but where appropriate, the techniques, methods and equipment should be considered as part of the specification.

[0055] Embodiment one

[0056] As shown in Figure 1 、 2 The first aspect of the present disclosure provides a regulating device, which comprises a bearing assembly 1, a blocking assembly 2, a control assembly 4 and a driving assembly 3. The bearing assembly 1 is provided with a mounting structure for connecting the body of the magnetron sputtering coating device. The blocking assembly 2 is provided with a plurality of blocking ends arranged along a first direction A. The driving assembly 3 is connected with the bearing assembly 1 and the driving assembly 3, and the driving assembly 3 can drive the blocking ends of each blocking assembly 2 to move along a second direction B, so that the blocking ends are at least partially outside the bearing assembly 1 along a third direction C. The first direction A, the second direction B and the third direction C are perpendicular to each other. The control assembly 4 is connected with the driving assembly 3 to control the driving assembly 3 to drive the blocking assembly 2.

[0057] Specifically, the bearing assembly 1 can be a plate or a bearing frame, which is not specifically limited. The mounting structure can be a thread, and a corresponding thread is arranged on the body of the magnetron sputtering coating device to realize the connection of the two. The connecting structure can also be a clamping groove, which is not specifically limited and can be selected according to the connecting structure arranged on the body of the magnetron sputtering coating device, and the connection stability between the bearing assembly 1 and the magnetron sputtering coating device needs to be ensured.

[0058] The blocking assembly 2 can be a plurality of blocking plates or a plurality of blocking blocks 201 of special shape, and the specific shape is not limited. The first direction A can be the width direction of the body of the magnetron sputtering coating device, or the length direction, which is not specifically limited. In the present embodiment, the first direction A can be selected according to the arrangement direction of the standard magnetron sputtering coating device. The connection mode between the blocking assembly 2 and the bearing assembly 1 can be a slide connection or a clearance fit, which needs to enable the blocking end to move along the second direction B relative to the bearing assembly 1. The second direction B is perpendicular to the first direction A, and the second direction B is not specifically limited, which needs to ensure that the blocking end can move from the position not between the target material and the component to be coated to the position between the target material and the component to be coated. In the present embodiment, the second direction B can be selected according to the movement direction of the standard magnetron sputtering coating device.

[0059] The drive assembly 3 can be multiple ball screws, with the moving ends of these ball screws connected to the blocking end of the blocking assembly 2. The connection can be welding, threaded connection, etc., to drive the blocking end to move along the second direction B. The drive assembly can also be multiple linear motors; no specific limitation is imposed. The blocking end being at least partially outside the support assembly 1 along the third direction C can be understood as the blocking end extending beyond the support assembly 1. The drive assembly 3 drives multiple blocking ends to extend beyond the support plate 101 and move between the target material and the part to be coated, forming a blocking area between the target material and the part to be coated. In this embodiment, the blocking assembly 2 can be understood as being mounted on a plane on the support assembly 1. The first direction A and the second direction B can both be parallel to this plane, while the third direction C can be perpendicular to this direction. The control assembly 4 can be a computer, a microcontroller, etc.; no specific limitation is imposed. The connection between the control assembly 4 and the drive assembly 3 can be a data connection via a data cable.

[0060] The first aspect of this disclosure provides an adjustment device, comprising: a carrier component 1, a blocking component 2, and a driving component 3; the carrier component 1 is provided with a connection structure for connecting to the body of a magnetron sputtering coating apparatus; the blocking component 2 is provided with a plurality of blocking ends arranged along a first direction A; the driving component 3 is connected to the carrier component 1 and the driving component 3, and is controlled by a control component 4, which drives the blocking ends of the blocking component 2 to move along a second direction B, so that at least part of the blocking ends along a third direction C is outside the carrier component 1, which can be understood as the blocking ends being at least partially located between the target material and the part to be coated, so that the blocking ends can block the area of ​​the target material, control the sputtering area, and make the thickness of the magnetron sputtering coating more uniform. Since this disclosure uses the control component 4 to control the driving component 3 to drive the blocking component 2, errors caused by manual operation are avoided. At the same time, there is no need to break the vacuum to enter the chamber for operation during the adjustment process, effectively avoiding the time consumption caused by rework and effectively improving production efficiency.

[0061] like Figure 1 As shown, in some embodiments, the blocking component 2 includes: a plurality of blocking blocks 201, which are arranged on the bearing component 1 along a first direction A. The two ends of the blocking block 201 along the second direction B are a blocking end and a driving end, respectively, and the driving end is connected to the driving component 3.

[0062] Specifically, the blocking block 201 can be a rectangular block or an arc-shaped block, and its shape is not specifically limited. Two adjacent blocking blocks 201 need to be arranged closely to avoid gaps between them. In the embodiment, the blocking block 201 can be in a long strip shape, and the length direction thereof is parallel to the second direction B. The blocking end can extend out of the bearing assembly 1 and be located between the target material and the component to be coated. The connection between the driving assembly 3 and the blocking block 201 can be detachable connection through threads or can be achieved by magnetic components, which is not specifically limited.

[0063] As shown in Figure 1 、 2 In some embodiments, the driving assembly 3 includes a first driving structure 301 and a second driving structure 302. The first driving structure 301 is arranged on the bearing assembly 1, and has a first driving part 3011 capable of moving along the first direction A, which can move to the corresponding position of each blocking block 201. The second driving structure 302 is arranged on the first driving part 3011, and has a second driving part 3021 capable of moving along the second direction B, which can be connected with each driving end to enable the driving end of each blocking block 201 to move along the second direction B.

[0064] Specifically, the first driving structure 301 can be composed of an electric guide rail and a sliding block. In the embodiment, the first driving structure 301 can be a ball screw structure, and the screw of the ball screw structure extends along the first direction A, and its moving end serves as the first driving part 3011. The first driving structure 301 is arranged on the side of the blocking block 201 close to the driving end. The connection between the first driving structure 301 and the bearing assembly 1 can be through bolt connection, rivet connection or the like, which is not specifically limited. The first driving part 3011 capable of moving to the corresponding position of each blocking block 201 can be understood as that the projection of the first driving part 3011 along the second direction B is at least partially located on the blocking block 201, and can be located at the center of the blocking block 201. The first driving part 3011 moving to the corresponding position of each blocking block 201 can be achieved through conventional computer programming, which is not specifically limited.

[0065] The second driving structure 302 can be a linear motor. In the embodiment, the second driving structure 302 can be an electric telescopic rod, one end of which is connected with the first driving part 3011 of the first driving structure 301, and the connection therebetween can be welding or bolt connection, which is not specifically limited. The length direction of the electric telescopic rod can be parallel to the second direction B, so that the second driving structure 302 can be telescopic along the second direction B, and the other end of the electric telescopic rod serves as the second driving part 3021.

[0066] During operation, the control component 4 first controls the first drive structure 301 to move the first drive unit 3011 to the position corresponding to the block 201 to be adjusted, according to the requirements. Then, the second drive structure 302 drives the second drive unit 3021 along the second direction B, moving towards the block 201 to be adjusted, connecting with the block 201. The second drive unit 3021 continues to be driven, moving the block 201 to be adjusted to a preset position. This configuration is simple and stable, requiring no manual intervention in the movement of the block 201, thus avoiding errors caused by manual operation. Furthermore, the adjustment process does not require breaking the vacuum to enter the chamber, effectively avoiding time consumption caused by rework and significantly improving production efficiency.

[0067] like Figure 1 , 2 As shown, in some embodiments, the drive assembly 3 further includes: a fourth drive structure 304, which is disposed on the second drive part 3021. The fourth drive structure 304 has a rotatable fourth drive part 3041, and a first threaded structure 3042 is provided on the fourth drive part 3041; a second threaded structure 203 is provided on the blocking block 201, and the fourth drive part 3041 rotates to connect or disconnect the second threaded structure 203 from the first threaded structure 3042.

[0068] Specifically, the fourth drive structure 304 can be a small rotary motor, and its specific structure is not limited. Its rotating end can serve as the fourth drive unit 3041, and the outer surface of the fourth drive unit 3041 can be machined with threads to serve as the first thread structure 3042. At the same time, threaded holes can be formed on the blocking block 201. In this embodiment, the connection between the fourth drive structure 304 and the second drive unit 3021 can be welding or threaded connection, and the connection method is not specifically limited.

[0069] During operation, the second drive unit 3021 moves along the second direction B, closer to the direction of the adjusting stop block 201, so that the fourth drive unit 3041 is partially inserted into the threaded hole of the adjusting stop block 201. Then, the fourth drive assembly 3 drives the fourth drive unit 3041 to rotate, connecting the fourth drive unit 3041 with the adjusting stop block 201. The second drive unit 3021 is driven to move, adjusting the position of the stop block 201 in the second direction B. After adjustment, the fourth drive unit 3041 is driven to rotate in the opposite direction, separating the fourth drive unit 3041 from the adjusting stop block 201.

[0070] like Figure 3 , 4As shown, in some embodiments, the supporting component 1 further includes: a supporting plate 101 and a sliding groove structure 102; the blocking component 2 includes: a connecting block 202; a plurality of sliding groove structures 102 are disposed on the supporting plate 101 along a first direction A, the plurality of sliding groove structures 102 correspond to the plurality of blocking blocks 201 in number, the size of the sliding groove structure 102 gradually decreases along a third direction C and away from the supporting plate 101; a plurality of connecting blocks 202 correspond one-to-one with the sliding groove structure 102, each connecting block 202 is disposed in its corresponding sliding groove structure 102, and each blocking block 201 is slidably connected to the corresponding sliding groove structure 102 through a connecting block 202.

[0071] Specifically, the support plate 101 can be a rectangular plate or a circular plate, without specific limitation. Multiple sliding groove structures 102 can be disposed on the surface of the support plate 101 along the first direction A; they can be welded or integrally formed, without specific limitation. The length direction of the sliding groove structure 102 is parallel to the second direction B. The gradual reduction in size of the sliding groove structure 102 along the third direction C, away from the support plate 101, can be understood as the cross-section of the sliding groove structure 102 perpendicular to the second direction B being trapezoidal, without specific limitation. In this embodiment, the cross-section of the sliding groove structure 102 perpendicular to the second direction B can be an isosceles trapezoid.

[0072] The number and shape of the connecting blocks 202 correspond to those of the slide structure 102, and the connecting blocks 202 are disposed inside the slide structure 102. The cross-section of the connecting block 202 perpendicular to the second direction B is the same as the cross-section of the slide structure 102 perpendicular to the second direction B. The connection method between the connecting block 202 and the blocking block 201 can be welding or integral molding, without specific limitation. Since the dimensions of the slide structure 102 gradually decrease along the third direction C and away from the bearing plate 101, and the cross-section of the connecting block 202 perpendicular to the second direction B is the same as the cross-section of the slide structure 102 perpendicular to the second direction B, the connecting block 202 and the slide structure 102 can only move relative to each other in the second direction B, thus restricting other degrees of freedom of the connecting block 202, thereby limiting the blocking block 201 and increasing the stability of the adjustment device.

[0073] like Figure 5 As shown, in some embodiments, the carrier component 1 further includes: a protective shell 103 body, the protective shell 103 body is connected to the carrier plate 101, the protective shell 103 body and the carrier plate 101 enclose a receiving space, and the blocking component 2 and the driving component 3 are both disposed inside the receiving space.

[0074] Specifically, the shape of the protective shell 103 can be selected based on the shape of the support plate 101, and its specific shape is not limited. The connection method between the protective shell 103 and the support plate 101 can be a slot connection or a bolt connection, and is not specifically limited. It should be noted that the accommodating space enclosed by the protective shell 103 and the support plate 101 needs to have an opening in the second direction B, near the blocking end, to allow the blocking end to extend out of the support component 1 from the opening. The protective shell 103 can prevent damage to the driving component 3 and part of the blocking component 2 caused by long-term exposure to the influence of molecules or atoms in the magnetron sputtering coating environment.

[0075] like Figure 5 As shown, in some embodiments, the drive assembly 3 further includes a third drive structure 303, which is disposed on the support assembly 1. The third drive structure 303 is provided with a third drive part 3031, which is located on the side of the plurality of blocking blocks 201 away from the support assembly 1. The third drive part 3031 can move along a third direction C so that the third drive part 3031 and the support assembly 1 can clamp and limit the plurality of blocking blocks 201, or release the clamping and limiting.

[0076] Specifically, the third drive structure 303 can be a combination of a linear drive motor and a stop block, and its specific structure is not limited. In this embodiment, the third drive structure 303 can be composed of an electric telescopic rod and a stop plate. One end of at least two electric telescopic rods is connected to the surface of the protective shell 103 and the bearing plate 101 opposite to each other, and the other end of the electric telescopic rods is connected to the stop plate, and the projection of multiple sliding groove structures 102 along the third direction C is located within the stop plate. In this embodiment, the stop plate can serve as the third drive unit 3031.

[0077] When adjustment of at least one blocking block 201 is required, the abutment plate can be moved away from the blocking block 201 to release the clamping of the third drive unit 3031 and the support plate 101 on the multiple blocking blocks 201, thereby releasing the limitation on the blocking blocks 201. After the adjustment of all blocking blocks 201 is completed, the electric telescopic rod can be driven to extend, driving the third drive unit 3031 to move closer to the blocking block 201, so that the third drive unit 3031 and the support plate 101 clamp the blocking block 201, thereby achieving the limitation on the blocking block 201.

[0078] like Figure 4 As shown, in some embodiments, the cross section of the blocking block 201 perpendicular to the second direction B is a parallelogram.

[0079] With this configuration, the two adjacent surfaces of two adjacent blocking blocks 201 are attached, and the two adjacent blocking blocks 201 are staggered, which can effectively reduce the number of plasmas passing through the gap between the two adjacent blocking blocks 201 during the magnetron sputtering coating process, and increase the blocking effect of the blocking component 2.

[0080] Example 2

[0081] The second aspect of this disclosure provides a magnetron sputtering coating apparatus, which includes: a magnetron sputtering coating apparatus body and an adjustment device provided in the first aspect of this disclosure; the mounting structure of the adjustment device support component 1 is connected to the magnetron sputtering coating apparatus body.

[0082] Specifically, the magnetron sputtering coating apparatus body can be a conventional magnetron sputtering coating equipment, without specific limitations. The mounting structure can be a threaded hole, which can be connected to the magnetron sputtering coating apparatus body by bolts; the mounting structure can also be a slot structure, without specific limitations. The adjustment device described in this embodiment two can directly use the adjustment device provided in embodiment one above. The specific implementation structure can be found in the relevant content described in embodiment one above, and will not be repeated here.

[0083] The magnetron sputtering coating apparatus provided in the second aspect of this disclosure adopts the adjustment device provided in the first embodiment of the first aspect of this disclosure. Since the adjustment device uses the control component 4 to control the drive component 3 to drive the blocking component 2, it avoids the error caused by manual operation. At the same time, it does not need to break the vacuum to enter the chamber for operation during the adjustment process, effectively avoiding the time consumption caused by re-running, thereby increasing the overall working efficiency of the magnetron sputtering coating apparatus.

[0084] Example 3

[0085] This disclosure provides a coating production line in the third aspect of the present disclosure, which includes the magnetron sputtering coating apparatus provided in the second aspect of the present disclosure.

[0086] Specifically, the coating production line described in this embodiment three can directly use the magnetron sputtering coating device provided in embodiment two above. For the specific implementation structure, please refer to the relevant content described in embodiment two above, which will not be repeated here.

[0087] The coating production line provided in Embodiment 3 of the third aspect of this disclosure uses the magnetron sputtering coating apparatus provided in Embodiment 2 of the second aspect of this disclosure, which can increase the efficiency of magnetron sputtering coating, thereby increasing the overall efficiency of the coating production line.

[0088] The embodiments of this disclosure have now been described in detail. To avoid obscuring the concept of this disclosure, some details known in the art have not been described. Those skilled in the art can fully understand how to implement the technical solutions disclosed herein based on the above description.

[0089] While specific embodiments of this disclosure have been described in detail by way of examples, those skilled in the art should understand that the examples are for illustrative purposes only and not intended to limit the scope of this disclosure. Those skilled in the art should understand that modifications can be made to the above embodiments or equivalent substitutions can be made to some technical features without departing from the scope and spirit of this disclosure. In particular, as long as there is no structural conflict, the technical features mentioned in the various embodiments can be combined in any manner.

Claims

1. An adjusting device, characterized in that, include: The carrier component (1) is provided with an installation structure, which is used to connect to the body of the magnetron sputtering coating device; The blocking component (2) is provided with a plurality of blocking ends arranged along the first direction (A); A drive assembly (3) is connected to the support assembly (1) and the drive assembly (3). The drive assembly (3) can drive the blocking ends of each blocking assembly (2) to move along the second direction (B) so that the blocking ends are at least partially outside the support assembly (1) along the third direction (C). The first direction (A), the second direction (B) and the third direction (C) are perpendicular to each other. A control component (4) is connected to the drive component (3) to control the drive component (3) to drive the blocking component (2).

2. The adjusting device according to claim 1, characterized in that, The blocking component (2) includes: Multiple blocking blocks (201) are arranged on the bearing component (1) along a first direction (A). The two ends of the blocking block (201) along the second direction (B) are the blocking end and the driving end, respectively. The driving end is connected to the driving component (3).

3. The adjusting device according to claim 2, characterized in that, The driving component (3) includes A first drive structure (301) is disposed on the bearing component (1). The first drive structure (301) has a first drive part (3011) that can move along the first direction (A). The first drive part (3011) can move to the corresponding position of each of the blocking blocks (201). The second drive structure (302) is disposed on the first drive part (3011). The second drive structure (302) has a second drive part (3021) that can move along the second direction (B). The second drive part (3021) can be connected to each of the drive ends so that the drive ends of each of the blocking blocks (201) can move along the second direction (B).

4. The adjusting device according to claim 2, characterized in that, The driving component (3) also includes: A third driving structure (303) is disposed on the bearing component (1). The third driving structure (303) is provided with a third driving part (3031). The third driving part (3031) is located on the side of the plurality of blocking blocks (201) away from the bearing component (1). The third driving part (3031) can move along the third direction (C) so that the third driving part (3031) and the bearing component (1) clamp and limit the plurality of blocking blocks (201), or release the clamping and limiting.

5. The adjusting device according to claim 3, characterized in that, The driving component (3) also includes: A fourth drive structure (304) is disposed on the second drive part (3021). The fourth drive structure (304) has a rotatable fourth drive part (3041) and a first thread structure (3042) is provided on the fourth drive part (3041). The blocking block (201) has a second threaded structure (203), and the fourth driving part (3041) rotates to connect or disconnect the second threaded structure (203) from the first threaded structure (3042).

6. The adjusting device according to claim 2, characterized in that, The carrier component (1) further includes: Support plate (101); A chute structure (102) is provided on the support plate (101) along a first direction (A). The number of the chute structures (102) corresponds to the number of the blocking blocks (201). The size of the chute structure (102) gradually decreases along the third direction (C) and away from the support plate (101). The blocking component (2) includes: Connecting blocks (202), a plurality of connecting blocks (202) correspond one-to-one with the sliding groove structure (102), each connecting block (202) is disposed in its corresponding sliding groove structure (102), and each blocking block (201) is slidably connected to the corresponding sliding groove structure (102) through a connecting block (202).

7. The adjusting device according to claim 6, characterized in that, The carrier component (1) further includes: The protective shell (103) is connected to the support plate (101). The protective shell (103) and the support plate (101) enclose a receiving space. The blocking component (2) and the driving component (3) are both disposed inside the receiving space.

8. The adjusting device according to claim 2, characterized in that, The blocking block (201) has a parallelogram-shaped cross section perpendicular to the second direction (B).

9. A magnetron sputtering coating apparatus, characterized in that, include: The main body of the magnetron sputtering coating apparatus; The adjusting device according to any one of claims 1-8, wherein the mounting structure of the adjusting device support component (1) is connected to the body of the magnetron sputtering coating device.

10. A coating production line, characterized in that, The coating production line includes the magnetron sputtering coating apparatus as described in claim 9.

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