Device for preparing electron transport layer in trans-perovskite solar cell structure

Abstract

The utility model relates to the technical field of electron transport layer preparation, and discloses an electron transport layer preparation device in a trans-perovskite solar cell structure, which comprises a box body and a plurality of vacuum chambers, the vacuum chambers are arranged in the box body, magnetron sputtering assemblies are arranged at the lower parts in the plurality of vacuum chambers, and the magnetron sputtering assemblies are arranged in the box body. A raw material supply channel horizontally penetrating through the multiple vacuum chambers is arranged above the magnetron sputtering assembly, the raw material supply channel communicates with the magnetron sputtering assembly through the vacuum chambers, and transmission assemblies are arranged in the vacuum chambers and used for transmitting raw materials entering the vacuum chambers; according to the device, through the transmission assembly, when the electron transport layer is prepared, multiple times of preparation can be carried out, the organic perovskite layer is prevented from being damaged due to the fact that the temperature is too high during one-time preparation forming, and the problems that in the prior art, heat cannot be effectively reduced, and the organic perovskite layer is damaged are solved.

Description

Technical Field

[0001] This utility model relates to the field of electron transport layer preparation technology, and in particular to an apparatus for preparing an electron transport layer in an inverted perovskite solar cell structure. Background Technology

[0002] The electron transport layer (ETL) in a solar cell is a key component of photovoltaic devices, especially in perovskite solar cells and other types of thin-film solar cells. The electron transport layer is usually composed of titanium dioxide (TiO2), zinc oxide or other metal oxides, and its main function is to transport photogenerated electrons and block holes.

[0003] In the prior art, the annealing temperature of most organic perovskites is below 150°C. However, when preparing the electron transport layer using magnetron sputtering, high temperatures are generated, which can damage the organic perovskite layer. Utility Model Content

[0004] The purpose of this invention is to solve the problems existing in the prior art by proposing an electron transport layer preparation device in an inverted perovskite solar cell structure.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] An apparatus for fabricating an electron transport layer in an inverted perovskite solar cell structure includes a housing and several vacuum chambers. The vacuum chambers are disposed within the housing. Magnetron sputtering components are disposed below each of the vacuum chambers. A material supply channel is disposed above the magnetron sputtering components, horizontally penetrating the several vacuum chambers. The material supply channel is connected to the magnetron sputtering components through the vacuum chambers. A transmission component is disposed within each vacuum chamber for transmitting the material entering the vacuum chamber.

[0007] Preferably, the magnetron sputtering assembly includes a cathode flange, a magnetic shoe is provided on the inner side of the cathode flange, a cooling plate is provided on the top of the magnetic shoe, a target is installed on the cooling plate by a limiting component, a target baffle is provided on the top of the cathode flange, a first water-cooling channel is provided inside the target baffle, and the cathode flange and the first water-cooling channel inside the target baffle are connected.

[0008] Preferably, the transmission assembly includes several rollers rotatably disposed on both sides inside the raw material supply channel, and the rollers are driven to rotate by a rotary drive mechanism.

[0009] Preferably, there are two vacuum chambers, and a cooling mechanism is provided on one side of the magnetron sputtering assembly in each of the two vacuum chambers. The cooling mechanism includes two cooling plates, which are respectively arranged on the upper and lower sides of the transmission assembly. Each cooling plate has an inlet pipe and an outlet pipe on one side, and the inlet pipe and outlet pipe are connected to the interior of the cooling plate. The transmission assembly is arranged between the two cooling plates.

[0010] Preferably, a vacuum pump is provided below each of the two vacuum chambers, and the input end of the vacuum pump is connected to the vacuum chamber.

[0011] Compared with the prior art, the beneficial effects of this utility model are:

[0012] This invention, through a transmission component, allows the product to be inserted from one side of the raw material supply channel and exit from the other side. During this process, an electron transport layer is deposited on the perovskite light-absorbing layer of the product by magnetron sputtering through a magnetron sputtering component located at the bottom of the vacuum chamber. The thickness of the coating is controlled, and this process is achieved through multiple magnetron sputtering operations. This effectively prevents the perovskite light-absorbing layer on the product from being damaged by excessively high product temperatures. Compared with the prior art, this device, through the transmission component, can perform multiple preparations when preparing the electron transport layer, preventing damage to the organic perovskite layer caused by excessively high temperatures during a single preparation. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the electron transport layer fabrication device in the inverted perovskite solar cell structure proposed in this utility model.

[0014] Figure 2 This is a schematic diagram of a magnetron sputtering assembly;

[0015] Figure 3 This is a schematic diagram of the product to be processed.

[0016] In the diagram: 1. Housing; 2. Belt conveyor; 3. Cathode flange; 4. Magnetic shoe; 5. Cooling plate; 6. Target material; 7. Target material baffle; 8. First water cooling channel; 10. Roller; 12. Water inlet pipe; 13. Cooling plate; 14. Water outlet pipe; 15. Vacuum pump; 16. Vacuum chamber; 17. Magnetron sputtering assembly; 18. Transmission assembly; 19. Second water cooling channel; 20. Sealing assembly; 21. Feed inlet; 22. Discharge outlet; 23. Product to be processed. Detailed Implementation

[0017] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0018] Reference Figures 1 to 3 An apparatus for fabricating an electron transport layer in an inverted perovskite solar cell structure includes a housing 1 and several vacuum chambers 16. The vacuum chambers 16 are disposed within the housing 1. Magnetron sputtering components 17 are disposed below each of the vacuum chambers 16. A material supply channel, horizontally penetrating the vacuum chambers 16, is disposed above the magnetron sputtering components 17 and is connected to the magnetron sputtering components 17 via the vacuum chambers 16. A transmission component 18 is disposed within each vacuum chamber 16 for conveying the product to be processed 23 (e.g., the product to be processed is...) into the vacuum chamber 16. Figure 3 As shown, its two ends have a certain extension, forming protruding edge parts. The two sides of the box 1 are respectively provided with a feed port 21 and a discharge port 22. A sealing plate can be installed on one side of the feed port 21 and the discharge port 22 in a detachable manner. In this way, feeding and discharging can be carried out through the feed port 21 and the discharge port 22. The sealing plate can keep the vacuum chamber 16 in a vacuum state after the product to be processed 23 enters the vacuum chamber 16.

[0019] In use, the device delivers product 23 into the raw material supply channel. Then, through the magnetron sputtering assembly 17 located at the bottom of the vacuum chamber 16, an electron transport layer is deposited on the perovskite light absorption layer of the product by magnetron sputtering. The thickness of the coating is controlled to prevent the perovskite light absorption layer from being damaged by excessively high product temperature. The device then moves product 23 to the next magnetron sputtering assembly 17 via the transmission assembly 18, where the electron transport layer is deposited again by magnetron sputtering, thus completing the coating of product 23. Compared with the prior art, this device, through the transmission assembly 18, can perform multiple preparations when preparing the electron transport layer, preventing damage to the organic perovskite layer caused by excessively high temperature during a single preparation.

[0020] In this embodiment, the magnetron sputtering assembly 17 can be a general-purpose magnetron sputterer in the art;

[0021] In another embodiment, the magnetron sputtering assembly 17 includes a cathode flange 3, a magnetic shoe 4 disposed on the inner side of the cathode flange 3, a cooling plate 5 disposed on the top of the magnetic shoe 4, a target material 6 mounted on the cooling plate 5 via a limiting component, a target baffle 6 disposed on the top of the cathode flange 3, a first water-cooling channel 8 disposed inside the target baffle 6, and the cathode flange 3 and the first water-cooling channel 8 inside the target baffle 6 are connected, a sealing component 20 disposed on one side of the cathode flange 3, and the cathode flange 3 is bolted into the vacuum chamber 16. First, the cathode flange 3 is connected to the vacuum chamber assembly, and a high negative voltage is applied to initiate the ionization of the inert gas. The target material 6 collides with the target material 6. Each collision causes the atoms of the target material 6 to be ejected into the vacuum environment and pushed onto the substrate surface. The magnetic shoe 4 can confine them to the vicinity of the target material 6. The target baffle 6 can block the target material 6 sputtered from all sides of the magnetron sputtering, reducing contamination of the vacuum coating chamber. The first water cooling channel 8 and the second water cooling channel 19 can cool the bottom of the target material 6 and effectively reduce the heat radiation during the sputtering process of the target material 6, achieving low-temperature coating. It should be noted that the first water cooling channel 8 and the second water cooling channel 19 are connected to the water source through external pipelines, which extend outside the chamber and are connected to the water source (not shown in the figure).

[0022] In this embodiment, the transmission assembly 18 includes a plurality of rollers 10 rotatably disposed on both sides inside the raw material supply channel, and the plurality of rollers are driven to rotate by a rotary drive mechanism, such as... Figure 3 The product to be processed 23 has protrusions on both sides, and the rollers 10 are in contact with the bottom of the protrusions. Thus, after the product to be processed 23 is placed on the two sets of rollers 10, the rollers 10 can be driven to rotate below the protruding edges on both sides of the product to be processed 23 by an external rotation drive mechanism, thereby realizing the transmission of the product to be processed 23.

[0023] The rotary drive mechanism can be a rotary motor installed outside the housing 1, which passes through the housing and is directly connected to the corresponding roller 10 to drive the roller 10 to rotate. Alternatively, it can be a rotary motor installed outside the housing 1, which drives all the rollers to rotate by belt drive.

[0024] In this embodiment, there are two vacuum chambers 16. Each magnetron sputtering assembly 17 in the two vacuum chambers 16 is provided with a cooling mechanism on one side. The cooling mechanism includes two cooling plates 13, which are respectively arranged on the upper and lower sides of the transmission assembly 18. Each side of the two cooling plates 13 is provided with a water inlet pipe 12 and a water outlet pipe 14, and the water inlet pipe 12 and the water outlet pipe 14 are connected to the interior of the cooling plate 13. The transmission assembly 18 is arranged between the two cooling plates 13. Through the water inlet pipe 12 and the water outlet pipe 14, the material can be cooled by the cooling mechanism after each coating process. Water enters through the water inlet pipe 12 and drains through the water outlet pipe 14 to achieve a water cooling process, which can effectively reduce the temperature and heat, and prepare a high-quality electron transport layer.

[0025] In this embodiment, a vacuum pump 15 is provided below each of the two vacuum chambers 16. The input end of the vacuum pump 15 is fixedly extended through the housing 1 into the housing. The vacuum pump 15 can generate a higher vacuum level inside the housing 1 to facilitate magnetron sputtering of the product.

[0026] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. An apparatus for fabricating an electron transport layer in an inverted perovskite solar cell structure, comprising a housing (1) and a plurality of vacuum chambers (16), wherein the vacuum chambers (16) are disposed within the housing (1), characterized in that: A magnetron sputtering assembly (17) is provided below each of the vacuum chambers (16). A material supply channel is provided above the magnetron sputtering assembly (17) and runs horizontally through the vacuum chambers (16). The material supply channel is connected to the magnetron sputtering assembly (17) through the vacuum chambers (16). A transmission assembly (18) is provided inside the vacuum chambers (16) and is used to transmit the material entering the vacuum chambers (16).

2. The apparatus for fabricating the electron transport layer in an inverted perovskite solar cell structure according to claim 1, characterized in that: The magnetron sputtering assembly (17) includes a cathode flange (3), a magnetic shoe (4) is provided on the inner side of the cathode flange (3), a cooling plate (5) is provided on the top of the magnetic shoe (4), a target material (6) is installed on the cooling plate (5) by a limiting component, a target material baffle (7) is provided on the top of the cathode flange (3), a first water cooling channel (8) is provided inside the target material baffle (7), and the cathode flange (3) and the first water cooling channel (8) inside the target material baffle (7) are connected.

3. The apparatus for fabricating the electron transport layer in an inverted perovskite solar cell structure according to claim 1, characterized in that: The transmission assembly (18) includes several rollers (10) rotatably disposed on both sides inside the raw material supply channel, and the rollers are driven to rotate by a rotary drive mechanism.

4. The apparatus for fabricating the electron transport layer in an inverted perovskite solar cell structure according to claim 1, characterized in that: Two vacuum chambers (16) are provided. A cooling mechanism is provided on one side of the magnetron sputtering assembly (17) in each of the two vacuum chambers (16). The cooling mechanism includes two cooling plates (13). The two cooling plates (13) are respectively provided on the upper and lower sides of the vacuum chamber (16). A water inlet pipe (12) and a water outlet pipe (14) are provided on one side of each cooling plate (13). The water inlet pipe (12) and the water outlet pipe (14) are connected to the interior of the cooling plate (13). The transmission assembly (18) is provided between the two cooling plates (13).

5. The apparatus for fabricating the electron transport layer in an inverted perovskite solar cell structure according to claim 1, characterized in that: A vacuum pump (15) is provided below each of the two vacuum chambers (16), and the input end of the vacuum pump (15) is connected to the vacuum chamber (16).

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