Advanced silane reactor capable of reducing generation of silicon powder

By placing silicon seed rods inside the advanced silane reactor, the problem of excessive silicon powder production was solved, achieving the effects of reducing silicon powder accumulation and improving safety.

CN223875056UActive Publication Date: 2026-02-06FUJIAN HIGHSUN ELECTRONIC MATERIAL TECH CO LTD
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Patent Information

Application Number
CN202520045691.0
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-01-09
Publication Date
2026-02-06
Estimated Expiration
2035-01-09

AI Technical Summary

Technical Problem

In existing advanced silane production processes, a large amount of silicon powder is generated in the reactor, leading to reactor wear and safety hazards. Traditional filters have limited processing capacity and are prone to clogging, making it difficult to effectively reduce silicon powder generation.

Method used

Silicon seed rods are placed inside the advanced silane reactor to deposit silicon free radicals on their surface, reducing the generation of free silicon powder. Silicon powder accumulation is also reduced by regularly replacing the silicon rods.

Benefits of technology

It effectively reduces the amount of silicon powder in the reactor, lowers the risk of wear, avoids filter clogging, and improves safety and processing efficiency.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to a high-grade silane reactor capable of reducing silicon powder generation, which comprises a high-grade silane reactor body, and a plurality of silicon seed crystal rods are arranged in an internal space between a material inlet and a material outlet of the high-grade silane reactor body. The silicon seed crystal rod is additionally arranged in the internal space of the high-grade silane reactor body. In the reaction process, the silicon seed crystal is arranged, so that silane or high-grade silane can be deposited on the silicon seed crystal during decomposition, free silicon powder is avoided, the silicon powder content of the whole reaction system is reduced, and meanwhile, the treatment capacity of the filter can be reduced.
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Description

TECHNICAL FIELD

[0001] The utility model relates to a senior silane reactor that can reduce the production of silicon powder, and relates to the technical field of chemical equipment. BACKGROUND

[0002] In the production process of senior silane, such as ethylsilane, propylsilane or other senior silane, a large amount of byproduct silicon powder is produced in the reaction tower during the production process. In the traditional method, a filter is added at the discharge of the reaction tower to filter the silicon powder. However, in the operation process, the filter needs to be regularly disassembled and cleaned or back-flushed. Since the processing capacity of the filter is limited, the filter needs to be cleaned frequently to avoid blockage. Since senior silane is a flammable and explosive medium, incomplete replacement can easily cause safety accidents.

[0003] The filter can only prevent the silicon powder from entering the subsequent purification system, but cannot reduce the amount of silicon powder in the reactor. The Mohs hardness of silicon powder is about 7, while the Mohs hardness of the reactor, which is usually made of 316L material, is about 3-5. The silicon powder produced in the reactor is easily worn out under the influence of pressure and flow, causing the reactor or valve to leak. SUMMARY

[0004] In view of the deficiencies of the prior art, the technical problem to be solved by the utility model is to provide a senior silane reactor that can reduce the production of silicon powder, with the aim of reducing the amount of silicon powder produced by the reactor.

[0005] To solve the above technical problems, the technical scheme of the utility model is as follows: a senior silane reactor that can reduce the production of silicon powder, comprising a senior silane reactor body, a plurality of silicon seed rods are arranged in the internal space between the material inlet and the material outlet of the senior silane reactor body.

[0006] Preferably, the silicon seed rods are silicon rods.

[0007] Preferably, the top ends of the silicon seed rods are close to the material inlet, and the bottom ends are close to the material outlet.

[0008] Preferably, the silicon seed rods are vertically extended.

[0009] Preferably, the silicon seed rods are hung in the senior silane reactor body.

[0010] Preferably, the hanging points of the silicon seed rods are located on the inner tower wall of the senior silane reactor body.

[0011] Preferably, the top ends of the silicon seed rods are connected with suspension brackets, and the two ends of the suspension brackets are supported on the top of the support frame fixed on the inner tower wall of the senior silane reactor body.

[0012] Preferably, the suspension bracket and the support frame are locked by bolts.

[0013] Preferably, the top end of the silicon seed rod is provided with a flange base, the flange base and the top end of the silicon seed rod are locked by bolts, wherein the suspension bracket is provided with a positioning hole for the silicon seed rod to pass through downwards, the inner diameter of the positioning hole is greater than the outer diameter of the silicon seed rod but less than the outer diameter of the flange base, so that the flange base is supported on the top surface of the suspension bracket and the silicon seed rod extends downwards through the positioning hole.

[0014] Preferably, the adjacent suspension brackets are arranged in parallel and have a gap therebetween.

[0015] Compared with the prior art, the utility model has the following beneficial effects:

[0016] By additionally arranging the silicon seed rod in the internal space of the advanced silane reactor body, when the silane or the advanced silane is decomposed, the silane or the advanced silane can be deposited on the silicon seed rod, so that the free silicon powder is avoided, the content of the silicon powder in the whole reaction system is reduced, and the processing capacity of the filter is reduced.

[0017] The utility model will be further explained in detail in combination with the drawings and specific embodiments. BRIEF DESCRIPTION OF DRAWINGS

[0018] Fig. 1 It is a structure schematic view of the embodiment of the utility model.

[0019] Fig. 2 It is a top view of the suspension structure of the silicon seed rod.

[0020] Fig. 3 It is a front view of the suspension structure of the silicon seed rod.

[0021] In the drawing: advanced silane reactor body 1, material inlet 2, material outlet 3, silicon seed rod 4, suspension bracket 5, support frame 6, flange base 7. DETAILED DESCRIPTION

[0022] The utility model will be further explained in combination with the drawings and specific embodiments.

[0023] It should be pointed out that the following detailed description is exemplary and is intended to provide further explanation of the present application. Unless otherwise specified, all technical and scientific terms used herein have the same meaning as understood by those skilled in the art to which the present application belongs.

[0024] It is to be understood that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments in accordance with the present application. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and / or "comprising," when used in this specification, specify the presence of stated features, steps, operations, elements, components, and / or groups thereof, but do not preclude the presence or addition of one or more other features, steps, operations, elements, components, and / or groups thereof.

[0025] As Figs. 1-3 The embodiment provides a high-grade silane reactor capable of reducing silicon powder generation, which comprises a high-grade silane reactor body 1, and a plurality of silicon seed rods 4 are arranged on the internal space between a material inlet 2 and a material outlet 3 of the high-grade silane reactor body.

[0026] In the embodiment of the utility model, the silicon seed rod is a silicon rod.

[0027] In the embodiment of the utility model, the top end of the silicon seed rod is close to the material inlet, and the bottom end is close to the material outlet.

[0028] In the embodiment of the utility model, the silicon seed rod is vertically extended.

[0029] In the embodiment of the utility model, the silicon seed rod is hung in the high-grade silane reactor body.

[0030] In the embodiment of the utility model, the hanging point of the silicon seed rod is located on the inner tower wall of the high-grade silane reactor body.

[0031] In the embodiment of the utility model, the top end of the silicon seed rod is connected with a hanging support 5, and the two ends of the hanging support are supported on the top of a support frame 6 fixed on the inner tower wall of the high-grade silane reactor body.

[0032] In the embodiment of the utility model, the hanging support and the support frame are locked through bolts.

[0033] In the embodiment of the utility model, the top end of the silicon seed rod is provided with a flange base 7, and the top end of the silicon seed rod and the flange base are locked through bolts, wherein a positioning hole for the silicon seed rod to pass downward is formed on the hanging support, the inner diameter of the positioning hole is greater than the outer diameter of the silicon seed rod but less than the outer diameter of the flange base, so that the flange base is supported on the top surface of the hanging support, and the silicon seed rod extends downward through the positioning hole.

[0034] In the embodiment of the utility model, the adjacent hanging supports are arranged in parallel and have gaps between each other.

[0035] In the embodiment of the utility model, the working principle of the high-grade silane reactor capable of reducing silicon powder generation is that:

[0036] When the silane or high silane is subjected to high-temperature recombination polymerization in the reactor, most of the free silicon powder is generated, and the silicon radicals generated during the reaction process are adhered to the surface of the silicon seed rod to aggregate and polymerize, thereby avoiding the free silicon radicals from self-polymerization to generate silicon powder; after a period of operation, the bolts connecting the suspension bracket and the support bracket are removed, the suspension bracket is lifted out by using the sling, the silicon rod formed by adhering to the silicon seed is knocked off, and the remaining part of the silicon rod is used as the silicon seed; if the silicon seed cannot be used, a new silicon seed is used.

[0037] The above is only a preferred embodiment of the present application, and is not intended to limit the present application in other forms. Any skilled person in the art can modify or change the above disclosed technical content to obtain equivalent embodiments. However, any simple modification, equivalent change and modification made to the above embodiments without departing from the technical solution of the present application and according to the technical essence of the present application still falls within the protection scope of the technical solution of the present application.

Claims

1. A high grade silane reactor that reduces silicon dust production comprising a high grade silane reactor body, characterized by: The high-grade silane reactor body is provided with a plurality of silicon seed rods in the internal space between the material inlet and the material outlet.

2. The reduced silicon dust producing advanced silane reactor of claim 1, wherein: The silicon seed rods are silicon rods.

3. The reduced silicon dust producing advanced silane reactor of claim 1, wherein: The top ends of the silicon seed rods are close to the material inlet, and the bottom ends are close to the material outlet.

4. The reduced silicon powder production advanced silane reactor of claim 1, wherein: The silicon seed rods are vertically arranged.

5. The reduced silicon powder production advanced silane reactor of claim 1, wherein: The silicon seed rods are hung inside the high-grade silane reactor body.

6. The reduced silicon powder production advanced silane reactor of claim 5, wherein: The hanging points of the silicon seed rods are located on the inner tower wall of the high-grade silane reactor body.

7. The reduced silicon dust producing advanced silane reactor of claim 6, wherein: The top ends of the silicon seed rods are connected with hanging supports, and the two ends of the hanging supports are supported on the top of the support frame fixed on the inner tower wall of the high-grade silane reactor body.

8. The reduced silicon dust producing advanced silane reactor of claim 7, wherein: The hanging supports and the support frame are locked by bolts.

9. The reduced silicon powder production advanced silane reactor of claim 7, wherein: The top ends of the silicon seed rods are provided with flange bases, and the top ends of the silicon seed rods and the flange bases are locked by bolts.

10. The reduced silicon powder production advanced silane reactor of claim 7, wherein: A positioning hole is formed in the hanging support for the silicon seed rod to pass through downward, the inner diameter of the positioning hole is greater than the outer diameter of the silicon seed rod but less than the outer diameter of the flange base, so that the flange base is supported on the top surface of the hanging support, and the silicon seed rod extends downward through the positioning hole. The adjacent hanging supports are arranged in parallel and have gaps between them.